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    • 35. 发明授权
    • Apparatus and method for uniformly depositing thin films over substrates
    • US06579420B2
    • 2003-06-17
    • US09780212
    • 2001-02-09
    • Zhimin WanJiong ChenPeiching LingJianmin Qiao
    • Zhimin WanJiong ChenPeiching LingJianmin Qiao
    • C23C1600
    • C23C14/505C23C14/044C23C14/46
    • A thin film deposition apparatus and method are disclosed in this invention. The apparatus includes a depositing thin-film particle source, a beam-defining aperture between the particle source and the deposited substrate(s), and a substrate holder to rotate the substrate(s) around its center and move the center along a lateral path so that the substrate(s) can scan across the particle beam from one substrate edge to the other edge. The method includes a step of providing a vacuum chamber for containing a thin-film particle source for generating thin-film particles to deposit a thin-film on the substrates. The method further includes a step of containing a substrate holder in the vacuum chamber for holding a plurality of substrates having a thin-film deposition surface of each substrate facing the beam of thin-film particles. The method further includes a step of providing a rotational means for rotating the substrate holder to rotate each of the substrates exposed to the thin-film particles for depositing a thin film thereon. And, the method further includes a step of providing a laterally reciprocal moving means for reciprocally moving said substrate holder for said beam traversing on said substrate holder from one side of the edge to the other side of the edge or at least passing through the central area of said substrate holder.
    • 37. 发明授权
    • Memory cell structure fabricated with improved fabrication process by
forming dielectric layer directly on an insulated surface of a substrate
    • 通过在衬底的绝缘表面上直接形成电介质层而通过改进的制造工艺制造的存储单元结构
    • US5811852A
    • 1998-09-22
    • US587952
    • 1996-01-17
    • Peiching Ling
    • Peiching Ling
    • H01L29/423H01L29/788
    • H01L29/42324H01L29/7881
    • This invention discloses a programmable read-only-memory (PROM). The PROM is formed and supported on a substrate. The PROM includes a transistor region in the substrate including a source region, a drain region and a floating gate region disposed between the drain region and the source region. The PROM further includes a floating gate formed on top of the floating gate region with a single poly layer on the substrate. The PROM further includes a floating gate extension region disposed near the transistor region, the floating gate extension region is connected with the floating gate region. The PROM further includes a control gate formed on the substrate near the floating gate extension region opposite the transistor region whereby a charge state of the floating gate extension region is controlled by the control gate.
    • 本发明公开了一种可编程只读存储器(PROM)。 PROM形成并支撑在基板上。 PROM包括在衬底中的晶体管区域,其包括设置在漏极区域和源极区域之间的源极区域,漏极区域和浮置栅极区域。 PROM还包括形成在浮动栅极区域的顶部上的浮置栅极,在衬底上具有单个多晶硅层。 PROM还包括设置在晶体管区域附近的浮置栅极延伸区域,浮动栅极延伸区域与浮动栅极区域连接。 PROM还包括形成在衬底附近的控制栅极,该栅极延伸区域与晶体管区域相对,由此浮栅延伸区域的电荷状态由控制栅极控制。
    • 39. 发明申请
    • PHOSPHOR LAYER DETECTION SYSTEM
    • 磷光体层检测系统
    • US20130327956A1
    • 2013-12-12
    • US13490642
    • 2012-06-07
    • Peiching LingDezhong Liu
    • Peiching LingDezhong Liu
    • G01N21/64
    • G01N21/64G01N2021/8416
    • A detection system for detecting a fluorescent layer formed in a fluorescent layer forming system is disclosed. The detection system of the present invention includes a light source module, a light detecting module and a light transmitting module, wherein the light source module emits a detecting light to a fluorescent layer, the detecting light is then converted by the fluorescent layer to a light to be detected, the light to be detected is received by the light detecting module, and detection data are formed. A control instruction is transmitted to the fluorescent layer forming system according to the control instruction to control the fluorescent layer forming system, such that a desired fluorescent layer is formed on an object, and optical property of fluorescent layers in each fabrication is consistent.
    • 公开了一种用于检测在荧光层形成系统中形成的荧光层的检测系统。 本发明的检测系统包括光源模块,光检测模块和光传输模块,其中光源模块向荧光层发射检测光,然后将检测光由荧光层转换成光 要被检测到,由光检测模块接收待检测的光,并且形成检测数据。 根据用于控制荧光层形成系统的控制指令将控制指令传输到荧光层形成系统,使得在物体上形成期望的荧光层,并且每个制造中的荧光层的光学特性是一致的。