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31. 发明授权

US6072665A Suspension arm for a head of a disk storage device 失效
标题翻译：悬挂臂用于磁盘存储设备的磁头
公开(公告)号：US6072665A
公开(公告)日：2000-06-06
申请号：US104744
申请日：1998-06-25
申请人： Paolo Ferrari , Bruno Murari , Benedetto Vigna
发明人： Paolo Ferrari , Bruno Murari , Benedetto Vigna
IPC分类号： G11B21/21 , G11B5/55 , G11B21/10 , G11B21/12 , G11B21/24 , G11B5/48
CPC分类号： G11B21/12 , G11B21/24 , G11B5/5552 , G11B5/5582
摘要： A suspension arm (125) for a head (120) of a disk storage device comprises at least one wall (225, 230) substantially perpendicular to the disk (105) and having a portion (238, 239) which is deformable parallel to a plane extending through a longitudinal axis (235) of the suspension arm (125) and perpendicular to the at least one wall (225, 230), and piezoelectric member (240, 255) which can deform the portion (238, 239) in order correspondingly to move the head (120), the piezoelectric member (240-255) being fixed to the portion (238, 239) of the at least one wall (225, 230).
摘要翻译：用于磁盘存储装置的磁头（120）的悬架臂（125）包括至少一个基本上垂直于磁盘（105）的壁（225,230），并且具有可平行于磁盘的可变形的部分（238,239）延伸穿过悬挂臂（125）的纵向轴线（235）并且垂直于至少一个壁（225,230）的平面以及可以按顺序使部分（238,239）变形的压电构件（240,255）相应地移动头部（120），压电元件（240-255）固定在至少一个壁（225,230）的部分（238,239）上。

32. 发明授权

US6051854A Integrated semiconductor device comprising a chemoresistive gas microsensor and manufacturing process thereof 失效
标题翻译：一种集成半导体器件，包括化学耐化学气体微传感器及其制造方法
公开(公告)号：US6051854A
公开(公告)日：2000-04-18
申请号：US89816
申请日：1998-06-03
申请人： Benedetto Vigna , Paolo Ferrari , Ubaldo Mastromatteo
发明人： Benedetto Vigna , Paolo Ferrari , Ubaldo Mastromatteo
IPC分类号： G01N27/12 , H01L23/58
CPC分类号： G01N27/12
摘要： An integrated semiconductor device comprises, reciprocally superimposed, a thermally insulating region; a thermal conduction region of a high thermal conductivity material; a passivation oxide layer; and a gas sensitive element. The thermal conduction region defines a preferential path towards the gas sensitive element for the heat generated by the heater element, thereby the heat dispersed towards the substrate is negligible during the operation of the device.
摘要翻译：集成半导体器件包括相互叠加的绝热区域; 高导热性材料的导热区域; 钝化氧化物层; 和气体敏感元件。热传导区域限定朝向气体敏感元件的优先路径，用于由加热器元件产生的热量，从而在器件的操作期间向基板分散的热量可忽略。

33. 发明授权

US5883009A Method of fabricating integrated semiconductor devices comprising a chemoresistive gas microsensor 失效
标题翻译：制造包含化学耐药性微量传感器的集成半导体器件的方法
公开(公告)号：US5883009A
公开(公告)日：1999-03-16
申请号：US903531
申请日：1997-07-30
申请人： Flavio Villa , Paolo Ferrari , Benedetto Vigna
发明人： Flavio Villa , Paolo Ferrari , Benedetto Vigna
IPC分类号： B81B1/00 , B81C1/00 , G01N27/12 , H01L21/764 , H01L21/00
CPC分类号： G01N27/12 , H01L21/764
摘要： The chemoresistive gas sensor comprises a heating element integrated in a dedicated SOI substrate having an air gap in the intermediate oxide layer between two wafers of monocrystalline silicon. A sensitive element of tin oxide is formed over the heating element and separated from it by a dielectric insulating and protective layer. A trench formed at the end of the fabrication of the device, extends from the surface of the wafer in which the heating element is integrated, up to the air gap to mechanically separate and insulate the sensitive element from the rest of the chip, thereby improving the mechanical characteristics sensitivity and response of the sensor.
摘要翻译：化学耐药性气体传感器包括集成在专用SOI衬底中的加热元件，其在中间氧化物层中具有在两晶片之间的单晶硅的气隙。氧化锡的敏感元件形成在加热元件之上，并通过介电绝缘和保护层与其分离。在器件制造结束时形成的沟槽从加热元件集成的晶片的表面延伸到气隙，以将敏感元件与芯片的其余部分机械地分离并绝缘，从而改善传感器的机械特性灵敏度和响应。

34. 发明申请

US20100327864A1 MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF 有权
标题翻译：磁传感器及其制造方法
公开(公告)号：US20100327864A1
公开(公告)日：2010-12-30
申请号：US12826330
申请日：2010-06-29
申请人： Benedetto Vigna , Simone Sassolini , Lorenzo Baldo , Francesco Procopio
发明人： Benedetto Vigna , Simone Sassolini , Lorenzo Baldo , Francesco Procopio
IPC分类号： G01R33/02
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译：一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。横向部分形成在挖掘的横向壁上。通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。

35. 发明申请

US20100154790A1 PROCESS FOR MANUFACTURING AN INTEGRATED MEMBRANE OF NOZZLES IN MEMS TECHNOLOGY FOR A SPRAY DEVICE AND SPRAY DEVICE USING SUCH MEMBRANE 审中-公开
标题翻译：在使用这种膜的喷雾装置和喷射装置的MEMS技术中制造喷嘴的集成膜的方法
公开(公告)号：US20100154790A1
公开(公告)日：2010-06-24
申请号：US12645380
申请日：2009-12-22
申请人： Angelo Antonio Merassi , Angelo Pesci , Benedetto Vigna , Ernestino Galeazzi , Marco Mantovani
发明人： Angelo Antonio Merassi , Angelo Pesci , Benedetto Vigna , Ernestino Galeazzi , Marco Mantovani
IPC分类号： A61M11/08 , B23P17/00 , A61M15/00 , B05B17/00
CPC分类号： A61M15/009 , B05B1/14 , B05B17/0638 , B05D7/00 , B81B2201/058 , B81B2203/0127 , B81C1/00087 , Y10T29/49401
摘要： A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.
摘要翻译：一种喷雾装置的喷嘴膜的制造方法，其特征在于，包括以下步骤：在所述基材上形成膜层，在所述膜层上形成膜层，在所述膜层中形成多个喷嘴，在所述基材中形成多个供给流路，供应通道在垂直方向上基本上对准多个喷嘴中的相应喷嘴并与相应喷嘴直接连通。

36. 发明授权

US07022542B2 Manufacturing method of a microelectromechanical switch 有权
标题翻译：微机电开关的制造方法
公开(公告)号：US07022542B2
公开(公告)日：2006-04-04
申请号：US10746868
申请日：2003-12-24
申请人： Chantal Combi , Benedetto Vigna
发明人： Chantal Combi , Benedetto Vigna
IPC分类号： H01L21/00
CPC分类号： H01H59/0009
摘要： The method for manufacturing a micromechanical switch includes manufacturing a hanging bar, on a first semiconductor substrate, equipped at an end thereof with a contact electrode, and a frame projecting from the first semiconductor substrate. A second semiconductor substrate with conductive tracks includes a second input/output electrode and a third starting electrode, and first and second spacers electrically connected to the conductive tracks. The frame is abutted with the first spacers so that the fourth contact electrode abuts on the second input/output electrode in response to an electrical signal provided to the hanging bar by the third starting electrode.
摘要翻译：微机电开关的制造方法包括在第一半导体基板上制造悬挂杆，第一半导体基板的一端配备有接触电极，以及从第一半导体基板突出的框架。具有导电轨道的第二半导体衬底包括第二输入/输出电极和第三起始电极，以及电连接到导电轨道的第一和第二间隔件。框架与第一间隔件邻接，使得第四接触电极响应于通过第三起动电极提供给吊杆的电信号而抵靠第二输入/输出电极。

37. 发明授权

US06969637B2 Electronic semiconductor device having a thermal spreader 有权
标题翻译：具有散热器的电子半导体器件
公开(公告)号：US06969637B2
公开(公告)日：2005-11-29
申请号：US10893021
申请日：2004-07-16
申请人： Bruno Murari , Ubaldo Mastromatteo , Benedetto Vigna
发明人： Bruno Murari , Ubaldo Mastromatteo , Benedetto Vigna
IPC分类号： H01L23/31 , H01L23/36 , H01L23/373 , H01L23/482 , H01L21/44 , H01L21/301 , H01L21/46 , H01L21/48 , H01L21/50
CPC分类号： H01L24/01 , H01L23/3157 , H01L23/36 , H01L23/3735 , H01L23/4827 , H01L2224/274 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/01079 , H01L2924/01082
摘要： The electronic device is formed in a die including a body of semiconductor material having a first face covered by a covering structure and a second face. An integral thermal spreader of metal is grown galvanically on the second face during the manufacture of a wafer, prior to cutting into dice. The covering structure comprises a passivation region and a protective region of opaque polyimide; the protective region and the passivation region are opened above the contact pads for the passage of leads.
摘要翻译：电子器件形成在包括半导体材料体的模具中，该半导体材料体具有被覆盖结构覆盖的第一面和第二面。在切割成骰子之前，在制造晶片期间，金属的整体散热器在第二面上电镀生长。覆盖结构包括钝化区域和不透明聚酰亚胺的保护区域; 保护区域和钝化区域在接触焊盘上方打开以引导引线通过。

38. 发明授权

US06779247B1 Method of producing suspended elements for electrical connection between two portions of a micromechanism which can move relative to one another 有权
标题翻译：制造可以相对于彼此移动的微机构的两个部分之间的电连接的悬挂元件的方法
公开(公告)号：US06779247B1
公开(公告)日：2004-08-24
申请号：US09676017
申请日：2000-09-29
申请人： Bruno Murari , Benedetto Vigna , Ubaldo Mastromatteo
发明人： Bruno Murari , Benedetto Vigna , Ubaldo Mastromatteo
IPC分类号： G11B5127
CPC分类号： G11B7/22 , G11B5/53 , G11B7/122 , Y10T29/49021 , Y10T29/49041
摘要： A method of producing suspended elements for electrical connection between two portions of a micro-mechanism that can move relative to one another provides for the formation of a layer of sacrificial material, the formation of the electrical connection elements on the layer of sacrificial material, and the selective removal of the layer of sacrificial material beneath the electrical connecting elements, the layer of sacrificial material being a thin film with at least one adhesive side that can be applied dry to the surface of the micro-mechanism.
摘要翻译：一种用于在微机构的两部分之间进行电连接的悬挂元件的制造方法，该微机构可以相对于彼此移动，从而形成牺牲材料层，在牺牲材料层上形成电连接元件，以及选择性地去除电连接元件下面的牺牲材料层，牺牲材料层是具有至少一个可以干燥地施加到微机构表面的粘合剂侧的薄膜。

39. 发明授权

US06624981B1 Micrometric actuation, hard disk read/write unit with a flexure and microactuator formed in a monolithic body of semiconductor material 有权
标题翻译：微量致动，硬盘读/写单元，具有形成在半导体材料的整体中的挠曲和微型致动器
公开(公告)号：US06624981B1
公开(公告)日：2003-09-23
申请号：US09512148
申请日：2000-02-23
申请人： Benedetto Vigna
发明人： Benedetto Vigna
IPC分类号： G11B5596
CPC分类号： G11B5/484 , Y10S977/725
摘要： A hard disk read/write unit is formed in a monolithic body of semiconductor material, including a suspension structure, a coupling or flexure element integral with the suspension structure, and a microactuator, integral with the coupling. The monolithic body has a first portion accommodating integrated electronic components, and a second portion, accommodating the coupling and the microactuator. The coupling is formed from a central region, accommodating the microactuator; an annular region, separated from the central region by a first trench, and from the suspension by a second trench; a first pair of suspension arms, extending between the central region and the annular region, along a first axis; and a second pair of suspension arms, extending between the annular region and the suspension structure, along a second axis perpendicular to the first axis. The first and second pair of arms, with a reduced thickness, impart to the coupling yielding for rotations around the first and second axes of the central region.
摘要翻译：硬盘读/写单元形成在半导体材料的整体主体中，包括悬挂结构，与悬架结构一体的耦合或挠曲元件，以及与联接器成一体的微致动器。整体式主体具有容纳集成电子部件的第一部分和容纳联轴器和微型致动器的第二部分。联轴器由容纳微型致动器的中心区域形成; 通过第一沟槽与中心区域分离的环形区域，以及由第二沟槽从悬浮液分离的环形区域; 第一对悬臂，沿着第一轴线延伸在所述中心区域和所述环形区域之间; 以及第二对悬挂臂，沿着垂直于第一轴线的第二轴线在环形区域和悬架结构之间延伸。具有减小的厚度的第一和第二对臂赋予了围绕中心区域的第一和第二轴线的旋转的耦合屈服。

40. 发明授权

US06605873B1 Integrated electronic device comprising a mechanical stress protection structure 有权
公开(公告)号：US06605873B1
公开(公告)日：2003-08-12
申请号：US09205668
申请日：1998-12-04
申请人： Benedetto Vigna , Enrico Maria Alfonso Ravanelli
发明人： Benedetto Vigna , Enrico Maria Alfonso Ravanelli
IPC分类号： H01L2348
CPC分类号： H01L23/585 , H01L2924/0002 , H01L2924/00
摘要： The integrated electronic device comprises a protection structure of metal, extending vertically and laterally to and along a predominant part of the periphery of an electronic component integrated underneath the pad region. The protection structure comprises a substantially annular region formed from a second metal layer and absorbing the stresses exerted on the pad during wire bonding. The annular region may be floating or form part of the path connecting the pad to the electronic component.

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