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    • 35. 发明授权
    • Exposure apparatus and aberration correction method
    • 曝光装置和像差校正方法
    • US06995828B2
    • 2006-02-07
    • US10791821
    • 2004-03-04
    • Yoshiyuki Okada
    • Yoshiyuki Okada
    • G03B27/52G03B27/42
    • G03F7/70883G03B27/52G03F7/70258G03F7/70516G03F7/70575
    • An exposure apparatus including a barometer for detecting air pressure, a lens driving unit for driving a lens of a projection optical system, a light-source-wavelength changing unit for changing a wavelength of an exposure light source, and a stage driving unit for driving a wafer stage in an optical-axis direction. The apparatus can correct an aberration caused by a change in air pressure by utilizing the lens driving unit, the light-source-wavelength changing unit, and the stage driving unit. During a shot of an exposure of the exposure apparatus, the lens driving unit and/or the stage driving unit are employed to correct the aberration. In the non-exposure state (shot interval), the light-source-wavelength changing unit and/or the lens driving unit as well as the stage driving unit are employed to correct the aberration.
    • 一种曝光装置,包括用于检测气压的气压计,用于驱动投影光学系统的透镜的透镜驱动单元,用于改变曝光光源的波长的光源波长改变单元,以及用于驱动的​​平台驱动单元 在光轴方向上的晶片台。 该装置可以通过利用透镜驱动单元,光源波长改变单元和平台驱动单元来校正由气压变化引起的像差。 在曝光装置的曝光的拍摄期间,使用透镜驱动单元和/或平台驱动单元来校正像差。 在非曝光状态(拍摄间隔)中,使用光源 - 波长变化单元和/或透镜驱动单元以及平台驱动单元来校正像差。
    • 37. 发明授权
    • Heat-sensitive stencil master making apparatus
    • 热敏模版制版机
    • US06357348B1
    • 2002-03-19
    • US09441780
    • 1999-11-17
    • Jun NakamuraHideyuki KinoshitaYukio IrieKunio NomuraAtsushi TakataShinichi TakizawaYoshiyuki OkadaHikaru Oike
    • Jun NakamuraHideyuki KinoshitaYukio IrieKunio NomuraAtsushi TakataShinichi TakizawaYoshiyuki OkadaHikaru Oike
    • B41J237
    • B41J2/3555B41J2/32B41J2/38B41J2202/32
    • A heat-sensitive stencil master making apparatus for making a stencil master by imagewise perforating thermoplastic film of heat-sensitive stencil master material according to an image on an original includes a thermal head which has an array of a plurality of heater elements and is brought into thermal contact with the thermoplastic film. Heater elements selected from the array of the heater elements according to the image on the original are applied with an electric voltage so that perforations are formed in the parts of the thermoplastic film of the heat-sensitive stencil master material in contact with the selected heater elements. A continuous electric voltage is applied to each of the selected heater elements to heat the heater element to a predetermined temperature in a predetermined temperature range adequate to thermally perforate the thermoplastic film and then an intermittent electric voltage is applied to the heater element so that the temperature of the heater element is held in the predetermined temperature range for a predetermined time interval adequate to thermally perforate the thermoplastic film.
    • 根据原稿上的图像,通过对热敏蜡纸母材的热塑性薄膜进行成像穿孔来制造模版母版的热敏模版母版制作装置包括具有多个加热器元件的阵列的热敏头, 与热塑性薄膜热接触。 根据原稿上的图像从加热器元件的阵列中选择的加热元件被施加电压,使得在热敏模版母材的热塑性膜的部分中形成穿孔,所述部分与所选择的加热器元件接触 。 对每个所选择的加热器元件施加连续的电压,以将加热器元件加热到预定的温度范围,该预定温度足以使热塑性膜热穿孔,然后将间歇电压施加到加热器元件,使得温度 的加热元件在预定温度范围内保持足以使热塑性薄膜热穿孔的预定时间间隔。
    • 38. 发明授权
    • Network archiver system and storage medium storing program to construct
network archiver system
    • 网络存档系统和存储介质存储程序构建网络存档系统
    • US5956733A
    • 1999-09-21
    • US812280
    • 1997-03-06
    • Yasuhiko NakanoYoshiyuki Okada
    • Yasuhiko NakanoYoshiyuki Okada
    • G06F17/30
    • G06F17/30073Y10S707/99952Y10S707/99953Y10S707/99955
    • In response to a forming request, an archiver forming module compresses a data file on a network and stores into an archiver. In response to a referring request, an archiver referring module reads out the compressed data file from the archiver, reconstructs on the network, and stores the reconstructed data file into the archiver. An archiver managing module concentratedly manages the archiver on the network. An archiver concentration type processing apparatus in a sharing group is set to a host and remaining archiver distribution type processing apparatuses are set to clients. The archiver, archiver forming module, and archiver referring module are arranged in each of the host and the clients. Concentration processes and distribution processes are allowed to mixedly exist on the network.
    • 响应于形成请求,存档器形成模块压缩网络上的数据文件并存储到存档器中。 响应于推荐请求,归档器引用模块从归档器读出压缩数据文件,在网络上重建,并将重建的数据文件存储到归档器中。 归档管理模块集中管理网络上的归档器。 将共享组中的归档集中型处理装置设置为主机,并将剩余的归档分配型处理装置设置为客户端。 存档器,归档器形成模块和归档引用模块都安排在主机和客户端的每一个中。 集中流程和分配流程允许混合存在于网络上。
    • 40. 发明授权
    • Data compressing apparatus, data restoring apparatus and data
compressing/restoring system
    • 数据压缩装置,数据恢复装置和数据压缩/恢复系统
    • US5796356A
    • 1998-08-18
    • US556772
    • 1995-11-02
    • Yoshiyuki OkadaNoriko Satoh
    • Yoshiyuki OkadaNoriko Satoh
    • H03M7/42H03M7/40
    • H03M7/42
    • In a data compressing apparatus, when a data input unit inputs unit data, a coding unit obtains an order corresponding to the input unit data and outputs a code corresponding to this order with reference to a compression table. When completing this coding process, a compression table updating unit changes the order of the unit data in the compression table in a self-organizing manner based on only that order. In a data restoring apparatus, when a code input unit inputs the code as a result of the compression, a data restoring unit obtains another corresponding to the inputted code and outputs the unit data corresponding to this order with reference to a restoration table. When completing this coding process, a restoration table updating unit changes the order of the unit data in the restoration table in the self-organizing manner based on only that order.
    • 在数据压缩装置中,当数据输入单元输入单元数据时,编码单元获得与输入单元数据相对应的顺序,并且参考压缩表输出与该顺序相对应的代码。 当完成该编码处理时,压缩表更新单元仅基于该顺序以自组织的方式改变压缩表中的单元数据的顺序。 在数据恢复装置中,当代码输入单元输入作为压缩的结果的代码时,数据恢复单元获得与输入的代码相对应的代码,并且参考恢复表输出与该顺序对应的单元数据。 当完成该编码处理时,恢复表更新单元仅基于该顺序以自组织方式改变恢复表中的单元数据的顺序。