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    • 34. 发明授权
    • Method for producing a semiconductor device
    • 半导体器件的制造方法
    • US06204199B1
    • 2001-03-20
    • US09393276
    • 1999-09-10
    • Masanori SakaiMasayuki TsunedaNaoko MatsuyamaHideharu ItataniMichihide Nakamure
    • Masanori SakaiMasayuki TsunedaNaoko MatsuyamaHideharu ItataniMichihide Nakamure
    • H01L2102
    • C23C16/45502C23C16/405C23C16/4408C23C16/4412C23C16/455H01L21/31604H01L21/67017
    • A method and apparatus for producing a semiconductor device can provide a uniform film on a substrate. A substrate is introduced into a reaction chamber or tube (51) which has gas feed ports (52, 53) and gas exhaust ports (54, 55). The substrate in the reaction tube (51) is heated to substantially a film forming temperature while supplying a prescribed gas to the reaction tube (51) through the gas feed ports (52, 53) and exhausting the prescribed gas from the reaction tube (51) through all the exhaust ports (54, 55). A film-forming gas is supplied to the reaction tube (51) to form a film on the substrate. The substrate with the film formed thereon is taken out of the reaction tube (51). Moreover, after the film formation on the substrate, a prescribed gas is supplied to the reaction tube (51) from the gas feed ports (52, 53) while being exhausted from the reaction tube (51) through all the exhaust ports (54, 55), thereby removing a residual gas in the reaction tube.
    • 用于制造半导体器件的方法和设备可以在衬底上提供均匀的膜。 将基板引入具有气体供给口(52,53)和排气口(54,55)的反应室或管(51)中。 反应管(51)中的基板通过气体供给口(52,53)向反应管(51)供给预定气体,并从反应管(51)排出规定的气体,将其加热至大致成膜温度 )通过所有排气口(54,55)。 向反应管(51)供给成膜气体,在基板上形成膜。 将其上形成有膜的基板从反应管(51)中取出。 此外,在基板上形成膜之后,通过所有排气口(54,54)从反应管(51)排出,从气体供给口(52,53)向反应管51供给预定的气体, 55),从而除去反应管中的残留气体。
    • 39. 发明授权
    • Image forming apparatus and method in which image of a plurality of
originals are formed at different positions of one recording sheet
    • 图像形成装置和方法,其中多个原稿的图像形成在一个记录纸张的不同位置
    • US5475475A
    • 1995-12-12
    • US835973
    • 1992-02-19
    • Hideto KohtaniMasanori SakaiMasao WatanabeHiroaki TakedaSatoru KutsuwadaMasafumi Kamei
    • Hideto KohtaniMasanori SakaiMasao WatanabeHiroaki TakedaSatoru KutsuwadaMasafumi Kamei
    • H04N1/387G03G15/04H04N1/23H04N1/393
    • H04N1/3875
    • An image forming apparatus for forming a plurality of images at different positions on a single recording sheet is disclosed. In order to form a plurality of original images on a single recording sheet with a simple operation, the image forming apparatus includes exposure device for exposing an original, magnification input device for inputting an image formation magnification of the original exposed by the exposure device, first size signal generation device for generating a first size signal indicating a size of the original exposed by the exposure device, image forming device for forming an image on the original exposed by the exposure device on the recording sheet at the magnification input by the magnification input device, and for forming a plurality of original images at different positions on the single surface of the single recording sheet, second size signal generation device for generating a second size signal indicating a size of the recording sheet, and control device for determining the number of originals whose images can be formed on the single recording sheet, on the basis of the magnification input by the magnification input device, the first size signal generated by the first size signal generation device, and the second size signal generated by the second size signal generation device.
    • PCT No.PCT / JP91 / 00832 Sec。 371日期:1992年2月19日 102(e)1991年9月12日PCT PCT 1991年6月20日PCT公布。 出版物WO92 / 00644 日本1992年1月9日。公开了一种用于在单个记录片材上的不同位置形成多个图像的图像形成装置。 为了以简单的操作在单个记录纸上形成多个原始图像,图像形成装置包括曝光装置,用于暴露用于输入由曝光装置曝光的原稿的图像形成倍率的原始放大输入装置,第一 尺寸信号产生装置,用于产生指示由曝光装置曝光的原稿的尺寸的第一尺寸信号;图像形成装置,用于在由放大输入装置输入的放大倍数下,由曝光装置在曝光装置上曝光的原稿上形成图像; 并且用于在单个记录纸的单个表面上的不同位置处形成多个原始图像,用于产生指示记录纸张的尺寸的第二尺寸信号的第二尺寸信号产生装置,以及用于确定原稿数量的控制装置 其图像可以形成在单个记录纸上,基于宏观 由第一尺寸信号产生装置产生的第一尺寸信号和由第二尺寸信号产生装置产生的第二尺寸信号由放大输入装置输入。