专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明授权

US07798309B2 Stabilizing substrate carriers during overhead transport 有权
标题翻译：架空运输过程中稳定底物载体
公开(公告)号：US07798309B2
公开(公告)日：2010-09-21
申请号：US10988168
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G43/08
CPC分类号： B24B37/345 , H01L21/68707
摘要： In a first aspect, a first apparatus is provided for inter-station overhead transport of a substrate carrier. The first apparatus includes (1) an overhead transport mechanism; (2) a substrate carrier support suspended from the overhead transport mechanism and adapted to receive and support a substrate carrier; and (3) a stabilization apparatus adapted to limit rocking of the substrate carrier and substrate carrier support relative to the overhead transport mechanism. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种用于衬底载体的站间架空输送的第一装置。第一装置包括（1）架空运输机构; （2）悬架在架空运输机构上并适于接收和支撑衬底载体的衬底载体支撑件; 以及（3）稳定装置，其适于限制衬底载体和衬底载体支撑件相对于架空输送机构的摆动。提供了许多其他方面。

32. 发明授权

US07578647B2 Load port configurations for small lot size substrate carriers 失效
标题翻译：为小批量尺寸的基板载体装载端口配置
公开(公告)号：US07578647B2
公开(公告)日：2009-08-25
申请号：US11051504
申请日：2005-02-04
申请人： Martin R. Elliott , Michael R. Rice , Jeffrey C. Hudgens , Eric A. Englhardt , Victor Belitsky
发明人： Martin R. Elliott , Michael R. Rice , Jeffrey C. Hudgens , Eric A. Englhardt , Victor Belitsky
IPC分类号： B65G65/34
CPC分类号： H01L21/67772 , H01L21/67353 , H01L21/67363 , H01L21/67373 , H01L21/67379 , Y10S414/137
摘要： In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种用于打开衬底载体的衬底载体门的装置。该装置包括适于（1）在负载端口处支撑基板载体门的支撑构件; （2）允许从基板载体移除门; 和（3）将移除的门枢转在衬底载体的底表面下方。提供了许多其他方面。

33. 发明授权

US07506746B2 System for transporting substrate carriers 有权
标题翻译：用于运输衬底载体的系统
公开(公告)号：US07506746B2
公开(公告)日：2009-03-24
申请号：US11761363
申请日：2007-06-11
申请人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G29/00
CPC分类号： H01L21/67769 , H01L21/67724 , H01L21/6773 , H01L21/67733 , H01L21/67736
摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.
摘要翻译：在半导体制造设备中，输送机输送基板载体。基板载体从输送机卸载并装载到输送机上而不停止输送机。在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。没有载体的单个基底可以类似地从输送机装载和/或卸载。

34. 发明申请

US20080289932A1 SYSTEM FOR TRANSPORTING SUBSTRATE CARRIERS 有权
标题翻译：运输基板运输系统
公开(公告)号：US20080289932A1
公开(公告)日：2008-11-27
申请号：US11838306
申请日：2007-08-14
申请人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G49/07
CPC分类号： H01L21/67769 , H01L21/67724 , H01L21/6773 , H01L21/67733 , H01L21/67736
摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.
摘要翻译：在半导体制造设备中，输送机输送基板载体。基板载体从输送机卸载并装载到输送机上而不停止输送机。在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。没有载体的单个基底可以类似地从输送机装载和/或卸载。

35. 发明授权

US07455172B2 Break-away positioning conveyor mount for accommodating conveyor belt bends 失效
标题翻译：分离定位输送机支架，用于容纳输送带弯头
公开(公告)号：US07455172B2
公开(公告)日：2008-11-25
申请号：US11495052
申请日：2006-07-28
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G17/20
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
摘要翻译：公开了一种用于连续运动的高速位置传送器系统的分离安装系统。支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力皮带和支撑架。安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

36. 发明申请

US20080187419A1 CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM 审中-公开
标题翻译：高速装载机校准运输系统
公开(公告)号：US20080187419A1
公开(公告)日：2008-08-07
申请号：US12099780
申请日：2008-04-08
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： H01L21/67
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。提供了许多其他方面。

37. 发明授权

US07293642B2 Methods and apparatus for transporting substrate carriers 有权
标题翻译：用于运输衬底载体的方法和装置
公开(公告)号：US07293642B2
公开(公告)日：2007-11-13
申请号：US11476994
申请日：2006-06-27
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
摘要翻译：根据第一方面，提供了一种适于在半导体器件制造设备内传送衬底载体的第一传送系统。第一输送机系统包括沿半导体器件制造设备的至少一部分形成闭合回路的带状物。该带适于（1）在水平面上具有柔性并且在垂直平面中是刚性的; 和（2）在所述半导体器件制造设备的至少一部分内传输多个衬底载体。还提供了许多其他方面，以及根据这些和其它方面的系统，方法和计算机程序产品。

38. 发明授权

US07234584B2 System for transporting substrate carriers 有权
标题翻译：用于运输衬底载体的系统
公开(公告)号：US07234584B2
公开(公告)日：2007-06-26
申请号：US10650310
申请日：2003-08-28
申请人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G29/00
CPC分类号： H01L21/67276 , H01L21/67769 , H01L21/67778
摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.
摘要翻译：在半导体制造设备中，输送机输送基板载体。基板载体从输送机卸载并装载到输送机上而不停止输送机。在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。没有载体的单个基底可以类似地从输送机装载和/或卸载。

39. 发明授权

US07230702B2 Monitoring of smart pin transition timing 有权
标题翻译：监控智能针脚转换时序
公开(公告)号：US07230702B2
公开(公告)日：2007-06-12
申请号：US10987950
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amitabh Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amitabh Puri
IPC分类号： G01B11/00 , H01L21/677 , B65B21/02
CPC分类号： H01L21/67775 , H01L21/67769
摘要： A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals. A substrate carrier handler includes a movable portion, interface elements, sensors, and a controller for receiving signals and determining an alignment offset.
摘要翻译：衬底载体处理器的可移动部分延伸到传送路径中，衬底载体传输系统沿着传送路径传送衬底载体，在可移动部分的对应界面元件和衬底载体之间检测到相应的运动耦合事件，基于这些信号来确定衬底载体和衬底载体传输系统之间的对准偏移。可移动部分匹配沿着传送路径移动的衬底载体的高度，位置和/或速度/速度。用于检测运动耦合和响应于此产生信号的传感器设置在可动部分上。端部执行器包括具有接口元件的支撑件和用于检测运动耦合并产生相应信号的传感器。基板载体处理器包括可移动部分，接口元件，传感器和用于接收信号并确定对准偏移的控制器。

40. 发明授权

US07077264B2 Methods and apparatus for transporting substrate carriers 有权
公开(公告)号：US07077264B2
公开(公告)日：2006-07-18
申请号：US10764982
申请日：2004-01-26
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式