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31. 发明申请

US20090049909A1 Hydraulic Controller 审中-公开
标题翻译：液压控制器
公开(公告)号：US20090049909A1
公开(公告)日：2009-02-26
申请号：US12191600
申请日：2008-08-14
申请人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe , Heewon Jeong
发明人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe , Heewon Jeong
IPC分类号： G01C19/00
CPC分类号： B60T8/3675 , G01C19/5719
摘要： A hydraulic controller including a cabinet, a hydraulic pipe block having a passage, a linearly driving actuator having a piston to open and close the passage in the hydraulic pipe block, a printed wiring board having a circuit for driving the linearly driving actuator, and a vibrating angular velocity sensor having two vibrators which can move in a Coriolis force detection direction orthogonal to vibration directions, wherein the vibrating angular velocity sensor is disposed on the printed wiring board in order that the vibration directions of the vibrators may be substantially parallel to a driving direction of the piston, and that the Coriolis force detection direction may be substantially orthogonal to the driving direction of the piston.
摘要翻译：一种液压控制器，包括机壳，具有通道的液压管块，具有用于打开和关闭液压管块中的通道的活塞的线性驱动致动器，具有用于驱动线性驱动致动器的电路的印刷线路板，以及具有两个振动器的振动角速度传感器，所述两个振动器能够以与振动方向正交的科里奥利力检测方向移动，其中振动角速度传感器设置在印刷线路板上，以使得振动器的振动方向可基本上平行于驱动活塞的方向，科里奥利力检测方向可以与活塞的驱动方向基本正交。

32. 发明授权

US08250916B2 Inertial sensor 有权
标题翻译：惯性传感器
公开(公告)号：US08250916B2
公开(公告)日：2012-08-28
申请号：US12189920
申请日：2008-08-12
申请人： Heewon Jeong , Hiroshi Fukuda
发明人： Heewon Jeong , Hiroshi Fukuda
IPC分类号： G01P15/00
CPC分类号： G01P15/097 , G01C19/5719 , G01P15/125
摘要： One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.
摘要翻译：一个惯性传感器同时检测驱动方向上的加速度以及围绕一个轴的角速度和检测方向上的加速度。驱动方向加速度检测单元经由弹性体向左右的质量构件振动的构件设置。以这种方式，当在驱动方向上施加加速度时，左右的质量构件以相同的振幅和相反的相位正常地振动，具有相同相位的位移量，并且驱动方向加速度检测单元检测位移量与电容变化相同，从而检测驱动方向上的加速度。

33. 发明申请

US20100269589A1 ANGULAR VELOCITY DETECTING DEVICE 有权
标题翻译：角速度检测装置
公开(公告)号：US20100269589A1
公开(公告)日：2010-10-28
申请号：US12832965
申请日：2010-07-08
申请人： Heewon Jeong , Yasushi Goto
发明人： Heewon Jeong , Yasushi Goto
IPC分类号： G01C19/56
CPC分类号： G01P3/22 , G01C19/5747 , G01C19/5762
摘要： A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is leviated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.
摘要翻译：提供了一种高性能角速率检测装置。包括驱动框架和科里奥利框架的驱动部分由共享固定端并且沿与驱动方向正交的方向延伸的至少两个固定梁而缓冲，从而使驱动部分振动。即使当通过安装或热波动使基板变形时，产生到固定梁和支撑梁的内应力也小，从而保持振动状态，例如共振频率和振动幅度恒定。因此，可以获得对安装环境变化坚固的高性能角速度检测装置。

34. 发明申请

US20100037691A1 INERTIAL SENSOR 有权
标题翻译：惯性传感器
公开(公告)号：US20100037691A1
公开(公告)日：2010-02-18
申请号：US12189920
申请日：2008-08-12
申请人： Heewon Jeong , Hiroshi Fukuda
发明人： Heewon Jeong , Hiroshi Fukuda
IPC分类号： G01C19/56 , G01P15/125
CPC分类号： G01P15/097 , G01C19/5719 , G01P15/125
摘要： One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.
摘要翻译：一个惯性传感器同时检测驱动方向上的加速度以及围绕一个轴的角速度和检测方向上的加速度。驱动方向加速度检测单元经由弹性体向左右的质量构件振动的构件设置。以这种方式，当在驱动方向上施加加速度时，左右的质量构件以相同的振幅和相反的相位正常地振动，具有相同相位的位移量，并且驱动方向加速度检测单元检测位移量与电容变化相同，从而检测驱动方向上的加速度。

35. 发明授权

US07513155B2 Inertial sensor 有权
标题翻译：惯性传感器
公开(公告)号：US07513155B2
公开(公告)日：2009-04-07
申请号：US11566399
申请日：2006-12-04
申请人： Heewon Jeong , Hiroshi Fukuda
发明人： Heewon Jeong , Hiroshi Fukuda
IPC分类号： G01C19/00
CPC分类号： G01C19/5747
摘要： Four sensor units (SUA1 to SUA4) are disposed symmetrically about a point, on both top and bottom and left and right centering around one point of a support (15e). Furthermore, four sensor units (SUA1 to SUA4) are designed so that all the components are fully in tuning-fork structure. Drive frames (5, 5) of the sensor units (SUA1, SUA2) disposed adjacent to each other in a first direction (Y) are vibrated in mutually inverted phases, and drive frames of the other sensor units (SUA3, SUA4) disposed adjacent to each other in a second direction (X) are vibrated in mutually inverted phases as well. Moreover, the drive frames of the sensor units (SUA1, SUA2) and the drive frames of the other sensor units (SUA3, SUA4) are operated in synchronization in the state in which phases are shifted by 90 degrees. Whereby, it is possible to reduce or prevent vibration coupling in the driving direction and in the detection direction, and the leakage (loss) of excitation energy and Coriolis force. Thereby, performance of an inertial sensor is improved.
摘要翻译：四个传感器单元（SUA1至SUA4）围绕位于顶部和底部以及围绕支撑件（15e）的一个点的中心的左右对称地布置。此外，四个传感器单元（SUA1至SUA4）被设计成使得所有组件完全处于音叉结构中。在第一方向（Y）上彼此相邻设置的传感器单元（SUA1，SUA2）的驱动框架（5,5）以相互反相的方式振动，并且相邻设置的其它传感器单元（SUA3，SUA4）的驱动框架在第二方向（X）上彼此相反地相互振动。此外，传感器单元（SUA1，SUA2）的驱动框架和其他传感器单元（SUA3，SUA4）的驱动框架在相位偏移90度的状态下同步地操作。由此，可以减少或防止在驱动方向和检测方向上的振动耦合，以及激发能和科里奥利力的泄漏（损失）。由此，提高了惯性传感器的性能。

36. 发明申请

US20150036782A1 SENSOR DEVICE 审中-公开
标题翻译：传感器设备
公开(公告)号：US20150036782A1
公开(公告)日：2015-02-05
申请号：US14384169
申请日：2012-03-21
申请人： Heewon Jeong
发明人： Heewon Jeong
IPC分类号： G01D21/00
CPC分类号： G01D21/00
摘要： In order to provide a suitable sensor device for a sensor system in which a plurality of request sources request the acquisition of information for the same sensor, the sensor device is provided with a physical mass sensing unit (1) for measuring an external physical mass, an input-output unit (4) for receiving physical mass acquisition requests from the external plurality of request sources, and a first counter (3) for counting and storing the total number of times the input/output unit receives an acquisition request from the plurality of request sources. The input-output unit transmits the physical mass and a value stored by the first counter to the request source of the acquisition request.
摘要翻译：为了提供用于传感器系统的合适的传感器装置，其中多个请求源请求获取相同传感器的信息，传感器装置设置有用于测量外部物理质量的物理质量感测单元（1）用于从外部多个请求源接收物理质量获取请求的输入输出单元（4），以及用于对来自多个请求源的输入/输出单元接收到获取请求的总次数进行计数和存储的第一计数器（3）的请求来源。输入 - 输出单元将物理量和由第一计数器存储的值发送到获取请求的请求源。

37. 发明授权

US08683864B2 Micro electro mechanical system 有权
标题翻译：微机电系统
公开(公告)号：US08683864B2
公开(公告)日：2014-04-01
申请号：US13058862
申请日：2009-08-05
申请人： Munenori Degawa , Heewon Jeong
发明人： Munenori Degawa , Heewon Jeong
IPC分类号： G01P15/125 , G01C19/56
CPC分类号： G01C19/5733 , G01C19/5712 , G01P1/003 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P2015/0814
摘要： In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+σ1) occurs in the beam 4a and a compressive stress (−σ2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.
摘要翻译：为了提供一种能够通过抑制由应力引起的MEMS的固有频率的波动而由于MEMS的检测灵敏度的波动而抑制测量精度的劣化的技术，首先，固定部分3a至3d向外移位，通过半导体基板2的变形，半导体基板2的方向。由于可移动体5以半导体基板2上方浮置的状态设置，所以不会受到半导体基板2的变形的影响和位移。因此，在梁4a中发生拉伸应力（+＆sgr1），并且在梁4b中发生压缩应力（ - ＆sgr2）。此时，通过组合梁4a和梁4b制成的弹簧系统，由于作用在梁4a上的拉伸应力而增加弹簧常数，并且由于作用在梁4b上的压缩应力而减小弹簧常数彼此抵消。

38. 发明申请

US20120038963A1 MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE 有权
标题翻译： MEMS器件及制造MEMS器件的方法
公开(公告)号：US20120038963A1
公开(公告)日：2012-02-16
申请号：US13178480
申请日：2011-07-07
申请人： Chisaki TAKUBO , Heewon Jeong
发明人： Chisaki TAKUBO , Heewon Jeong
IPC分类号： G02B26/10 , H01L21/02 , H01L29/84 , G01P15/125
CPC分类号： G01P15/125 , B81B3/001 , G01C19/5747 , G01P15/0802 , G01P2015/0814 , G01P2015/0837 , G01P2015/0874 , G01P2015/088 , G02B26/0841 , G02B26/105 , H01G5/18 , H01L21/76898 , H01L21/84 , H01L23/481 , H01L27/13 , H01L28/60 , H01L2924/0002 , H01L2924/00
摘要： A protrusion formation hole is provided so as to pierce a support substrate. A polysilicon film as an electrical conducting material is embedded in the protrusion formation hole through an oxide silicon film. The polysilicon film partially bulges out of the protrusion formation hole toward a movable section to form a protruding section. In other words, the polysilicon film bulges out of the protrusion formation hole toward the movable section to form the protruding section. Thereby, a movable section included in MEMS can be prevented from sticking to other members.
摘要翻译：提供突起形成孔以刺穿支撑基板。作为导电材料的多晶硅膜通过氧化物硅膜被包埋在突起形成孔中。多晶硅膜从突出形成孔朝向可移动部分部分地凸出以形成突出部分。换句话说，多晶硅膜从突起形成孔朝向可动部凸出，形成突出部。由此，能够防止包含在MEMS中的可动部附着在其他部件上。

39. 发明授权

US07972886B2 Method of manufacturing micro electro mechanical systems device 有权
标题翻译：微机电系统装置的制造方法
公开(公告)号：US07972886B2
公开(公告)日：2011-07-05
申请号：US12143372
申请日：2008-06-20
申请人： Heewon Jeong , Yasushi Goto , Yuko Hanaoka , Tsukasa Fujimori
发明人： Heewon Jeong , Yasushi Goto , Yuko Hanaoka , Tsukasa Fujimori
IPC分类号： H01L21/00
CPC分类号： B81C1/00952 , B81B2201/0235 , B81B2203/0307 , B81C1/00039 , B81C2201/019 , B81C2203/058 , G01C19/5733 , G01C19/5755 , G01P15/0802 , G01P15/125
摘要： Provided is a MEMS device which is robust to the misalignment and does not require the double-side wafer processing in the manufacture of a MEMS device such as an angular velocity sensor, an acceleration sensor, a combined sensor or a micromirror. After preparing a substrate having a space therein, holes are formed in a device layer at positions where fixed components such as a fixing portion, a terminal portion and a base that are fixed to a supporting substrate are to be formed, and the holes are filled with a fixing material so that the fixing material reaches the supporting substrate, thereby fixing the device layer around the holes to the supporting substrate.
摘要翻译：提供了一种MEMS装置，其对于未对准是坚固的，并且不需要在诸如角速度传感器，加速度传感器，组合传感器或微镜的MEMS装置的制造中的双面晶片处理。在制备其中具有空间的基板之后，在要形成固定到支撑基板上的诸如固定部分，端子部分和基座等固定部件的位置的器件层中形成孔，并且填充孔固定材料使得固定材料到达支撑基板，从而将装置层围绕孔固定到支撑基板。

40. 发明申请

US20110138912A1 MICRO ELECTRO MECHANICAL SYSTEM 有权
标题翻译：微电子机械系统
公开(公告)号：US20110138912A1
公开(公告)日：2011-06-16
申请号：US13058862
申请日：2009-08-05
申请人： Munenori Degawa , Heewon Jeong
发明人： Munenori Degawa , Heewon Jeong
IPC分类号： G01C19/56
CPC分类号： G01C19/5733 , G01C19/5712 , G01P1/003 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P2015/0814
摘要： In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+σ1) occurs in the beam 4a and a compressive stress (−σ2) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.
摘要翻译：为了提供一种能够通过抑制由应力引起的MEMS的固有频率的波动而由于MEMS的检测灵敏度的波动而抑制测量精度的劣化的技术，首先，固定部分3a至3d向外移位，通过半导体基板2的变形，半导体基板2的方向。由于可移动体5以半导体基板2上方浮置的状态设置，所以不会受到半导体基板2的变形的影响和位移。因此，在梁4a中发生拉伸应力（+＆sgr1），并且在梁4b中发生压缩应力（ - ＆sgr2）。此时，通过组合梁4a和梁4b制成的弹簧系统，由于作用在梁4a上的拉伸应力而增加弹簧常数，并且由于作用在梁4b上的压缩应力而减小弹簧常数彼此抵消。

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