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31. 发明申请

US20100065551A1 INDUCTION COOKING DEVICE 审中-公开
标题翻译：电感烹饪器具
公开(公告)号：US20100065551A1
公开(公告)日：2010-03-18
申请号：US12529261
申请日：2008-03-11
申请人： Hiroshi Tominaga , Kenji Watanabe , Izuo Hirota , Sadatoshi Tabuchi , Keiko Isoda
发明人： Hiroshi Tominaga , Kenji Watanabe , Izuo Hirota , Sadatoshi Tabuchi , Keiko Isoda
IPC分类号： H05B6/12
CPC分类号： H05B6/062 , H05B2213/07
摘要： An infrared sensor 26 is provided on a lower side of a top plate 2 to detect an amount of infrared light radiated from a heated object 20. The infrared sensor 26 outputs an detection signal having a substantially constant magnitude with respect to the temperature of the heated object 20 when the temperature of the heated object 20 is lower than a detection lower limit temperature, and outputs a detection signal having magnitude and rate of increase which become larger as the temperature of the heated object 20 becomes higher when the temperature of the heated object 20 is not lower than the detection lower limit temperature. The control unit 29 includes a storage unit 29a operable to store the output value of the infrared sensor 26 immediately after start of heating as an initial detection value, and reduces the output of the induction heating coils or stops the heating when an increased amount with respect to the initial detection value becomes greater than or equal to a predetermined value.
摘要翻译：红外传感器26设置在顶板2的下侧，以检测从受热物体20辐射的红外线的量。红外传感器26输出相对于被加热物体20的温度具有基本上恒定幅度的检测信号。当被加热物体20的温度低于检测下限温度时，当被加热物体20的温度变高时，输出具有随着受热物体20的温度变大的大小和增加率的检测信号 20不低于检测下限温度。控制单元29包括存储单元29a，其可操作以将加热后立即将红外传感器26的输出值存储为初始检测值，并且减小感应加热线圈的输出或者当相对于初始检测值变得大于或等于预定值。

32. 发明申请

US20100062094A1 GAS HYDRATE COMPRESSION MOLDING MACHINE 有权
标题翻译：气体压缩成型机
公开(公告)号：US20100062094A1
公开(公告)日：2010-03-11
申请号：US12450448
申请日：2008-03-28
申请人： Kenji Watanabe , Kiyoaki Suganoya , Takahiro Yoshida , Kenji Ogawa , Shigeru Nanbara , Shinji Imai
发明人： Kenji Watanabe , Kiyoaki Suganoya , Takahiro Yoshida , Kenji Ogawa , Shigeru Nanbara , Shinji Imai
IPC分类号： B29C43/56
CPC分类号： C10L3/10 , B01J2/22 , C10L3/108 , C10L5/363
摘要： A molding machine for production of gas hydrate pellets under a high pressure in gas hydrate forming conditions, which is inexpensive through minimizing of the use of expensive mechanical seal. The molding machine comprises two forming rolls each fitted to a rotary shaft whose both ends are supported by bearings; a drive unit for rotating the forming rolls; a screw transfer unit for supplying powder to the forming rolls; and a high-pressure vessel, wherein the bearings, the rotary shaft and the forming rolls are all disposed in the high-pressure vessel.
摘要翻译：一种用于在气体水合物形成条件下在高压下生产天然气水合物丸粒的成型机，其通过最小化昂贵的机械密封的使用是便宜的。成型机包括两个成形辊，每个成形辊安装在旋转轴上，其两端由轴承支撑; 用于旋转成形辊的驱动单元; 用于向成形辊供给粉末的螺旋转印单元; 和高压容器，其中轴承，旋转轴和成形辊都设置在高压容器中。

33. 发明授权

US07661333B2 Rotation transmission member and manufacturing method therefor 失效
标题翻译：旋转传动部件及其制造方法
公开(公告)号：US07661333B2
公开(公告)日：2010-02-16
申请号：US11772265
申请日：2007-07-02
申请人： Kenji Watanabe
发明人： Kenji Watanabe
IPC分类号： F16H55/12
CPC分类号： F16H55/17 , F16H55/06 , F16H2055/065 , Y10T29/49467 , Y10T74/19888 , Y10T74/19907 , Y10T74/19912
摘要： A rotation transmission member is composed of a shaft-like metal insert member having a first gear section on the external surface thereof and a resin gear resin-molded on the external surface of one end of the metal insert member and having a second gear section on the external surface thereof. The first gear section is formed almost over the entire length of the metal insert member and provides one end thereof as an insert portion on which the resin gear is to be resin-molded. Thus, it becomes unnecessary to provide a joint portion (the insert portion) between the metal insert member and the resin gear with the machining of any particular shape for preventing the coming-off therebetween.
摘要翻译：旋转传递部件由在其外表面上具有第一齿轮部分的轴状金属插入件和在金属插入件的一端的外表面上成型的树脂齿轮树脂构成，并且具有第二齿轮部分其外表面。第一齿轮部分几乎在金属插入件的整个长度上形成，并且将其一端作为树脂齿轮被树脂模制的插入部分。因此，不需要在金属插入构件和树脂齿轮之间设置用于防止其间的脱落的任何特定形状的加工的接合部分（插入部分）。

34. 发明申请

US20090141264A1 Method and Apparatus for Observing and Inspecting Defects 审中-公开
标题翻译：观察和检查缺陷的方法和装置
公开(公告)号：US20090141264A1
公开(公告)日：2009-06-04
申请号：US12363856
申请日：2009-02-02
申请人： Yukihiro Shibata , Shunji Maeda , Kazuo Yamaguchi , Minoru Yoshida , Atsushi Yoshida , Kenji Oka , Kenji Watanabe
发明人： Yukihiro Shibata , Shunji Maeda , Kazuo Yamaguchi , Minoru Yoshida , Atsushi Yoshida , Kenji Oka , Kenji Watanabe
IPC分类号： G01N21/21 , G01J4/00
CPC分类号： G01N21/21 , G01N21/9501 , G01N21/956 , G01N21/95607 , G02B21/0016
摘要： A defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
摘要翻译：缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置，用于照亮安装在安装件上的图案样品，并检测由其获得的反射光的光学图像。还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置，用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置，用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。

35. 发明申请

US20090101816A1 Testing apparatus using charged particles and device manufacturing method using the testing apparatus 有权
标题翻译：使用带电粒子的测试装置和使用该测试装置的装置制造方法
公开(公告)号：US20090101816A1
公开(公告)日：2009-04-23
申请号：US12073892
申请日：2008-03-11
申请人： Nobuharu Noji , Tohru Satake , Hirosi Sobukawa , Toshifumi Kimba , Masahiro Hatakeyama , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Kenichi Suematsu , Yutaka Tabe , Ryo Tajima , Keiichi Tohyama
发明人： Nobuharu Noji , Tohru Satake , Hirosi Sobukawa , Toshifumi Kimba , Masahiro Hatakeyama , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Kenichi Suematsu , Yutaka Tabe , Ryo Tajima , Keiichi Tohyama
IPC分类号： G01N23/00 , A61N5/00
CPC分类号： H01J37/20 , G01N23/2204 , G01N23/225 , H01J37/05 , H01J37/28 , H01J2237/202 , H01J2237/2441 , H01J2237/2446 , H01J2237/2801 , H01J2237/2817 , H01L21/6833 , H01L2223/54466
摘要： A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25•1, then forms an image under a desired magnification in the direction of a sample W to produce a crossover. When the crossover is passed, electrons as noises are removed from the crossover with an aperture, an adjustment is made so that the crossover becomes a parallel electron beam to irradiate the substrate in a desired sectional form. The electron beam is produced such that the unevenness of illuminance is 10% or less. Electrons emitted from the sample W are detected by a detector 25•11.
摘要翻译：提供了一种用于进一步提高速度的系统，即提高SEM型检查装置中的生产量。用于检查基板的表面的检查装置产生从电子束源25.1发射的电子的交叉，然后在样品W的方向上以期望的倍率形成图像以产生交叉。当交叉通过时，作为噪声的电子从具有孔的交叉点移除，进行调整，使得交叉成为平行电子束以以期望的分段形式照射基板。产生电子束，使照度不均匀为10％以下。由检测器25.11检测从样品W发射的电子。

36. 发明授权

US07521692B2 TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus 有权
标题翻译： TDI检测装置，馈通装置，使用这些装置和设备的电子束装置，以及使用该电子束装置的半导体装置的制造方法
公开(公告)号：US07521692B2
公开(公告)日：2009-04-21
申请号：US11896519
申请日：2007-09-04
申请人： Masahiro Hatakeyama , Tohru Satake , Takeshi Murakami , Kenji Watanabe , Nobuharu Noji
发明人： Masahiro Hatakeyama , Tohru Satake , Takeshi Murakami , Kenji Watanabe , Nobuharu Noji
IPC分类号： G01K1/08 , H01J3/14 , H01J3/26
CPC分类号： H01J37/222 , G01N21/956 , H01J37/224 , H01J37/244 , H01J2237/2445 , H01J2237/2447 , H01R13/2421 , H04N5/2253 , Y10S439/935
摘要： An electron beam apparatus comprises a TDI sensor 64 and a feed-through device 50. The feed-through device has a socket contact 54 for interconnecting a pin 52 attached to a flanged 51 for separating different environments and the other pin 53 making a pair with the pin 52, in which the pin 52, the other pin 53 and the socket contact 54 together construct a connecting block, and the socket contact 54 has an elastic member 61. Accordingly, even if a large number of connecting blocks are provided, the connecting force may be kept to such a low level as to prevent the breakage in the sensor. The pin 53 is connected with the TDI sensor 64, in which a pixel array has been adaptively configured based on the optical characteristic of an image projecting optical system. That sensor has a number of integration stages that can reduce the field of view of the image projecting optical system to as small as possible so that a maximal acceptable distortion within the field of view may be set larger. Further, the number of integration stage may be determined such that the data rate of the TDI sensor would not be reduced but the number of pins would not be increased as much as possible. Preferably, the number of line count may be almost equal to the number of integration stages.
摘要翻译：电子束装置包括TDI传感器64和馈通装置50.馈通装置具有插座触点54，用于互连连接到凸缘51的引脚52，用于分离不同的环境，而另一个引脚53与销52，销52，另一销53和插座接触54一起构成连接块，插座触头54具有弹性构件61.因此，即使设置了大量的连接块，连接力可以保持在如此低的水平，以防止传感器中的破损。引脚53与TDI传感器64连接，其中像素阵列已经基于图像投影光学系统的光学特性被自适应地配置。该传感器具有可以将图像投影光学系统的视野尽可能地减小的多个积分级，使得视野内的最大可接受失真可以被设定得更大。此外，可以确定积分级的数量，使得TDI传感器的数据速率不会降低，但是引脚的数量不会尽可能多地增加。优选地，行计数的数量可以几乎等于积分级数。

37. 发明授权

US07499162B2 Method and apparatus for observing and inspecting defects 有权
标题翻译：观察和检查缺陷的方法和装置
公开(公告)号：US07499162B2
公开(公告)日：2009-03-03
申请号：US11475667
申请日：2006-06-26
申请人： Yukihiro Shibata , Shunji Maeda , Kazuo Yamaguchi , Minoru Yoshida , Atsushi Yoshida , Kenji Oka , Kenji Watanabe
发明人： Yukihiro Shibata , Shunji Maeda , Kazuo Yamaguchi , Minoru Yoshida , Atsushi Yoshida , Kenji Oka , Kenji Watanabe
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01N21/9501 , G01N21/956 , G01N21/95607 , G02B21/0016
摘要： A defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
摘要翻译：缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置，用于照亮安装在安装件上的图案样品，并检测由其获得的反射光的光学图像。还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置，用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置，用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。

38. 发明授权

US07490541B2 Compressor 有权
标题翻译：压缩机
公开(公告)号：US07490541B2
公开(公告)日：2009-02-17
申请号：US10482170
申请日：2002-07-03
申请人： Takeshi Kawata , Kenji Watanabe , Kenji Okuzono , Nobunao Tsuchida
发明人： Takeshi Kawata , Kenji Watanabe , Kenji Okuzono , Nobunao Tsuchida
IPC分类号： F01B31/10
CPC分类号： F04C29/026 , F01C21/10
摘要： A compressor comprises a compressing mechanism which compresses fluid including a lubricant, a separation chamber into which the fluid compressed by the compressing mechanism is introduced and in which at least a portion of the lubricant included in the fluid is separated from the fluid, and an oil-storage chamber in which the lubricant separated from the fluid in the separation chamber is stored. An oil-introducing passage is formed between the separation chamber and the oil-storage chamber to bring these chambers into communication with each other, the oil-introducing passage introduces the lubricant separated in the separation chamber into the oil-storage chamber, an opening of the oil-introducing passage on the side of the oil-storage chamber is lower than an oil level of the lubricant stored in the oil-storage chamber in the vertical direction.
摘要翻译：压缩机包括压缩机构，其压缩包括润滑剂的流体，分离室，由压缩机构压缩的流体被引入到该分离室中，其中包含在流体中的润滑剂的至少一部分与流体分离，其中存储有与分离室中的流体分离的润滑剂的储存室。在分离室和储油室之间形成有油引入通道，使这些室相互连通，导油通路将分离室中分离的润滑剂引入储油室，储油室一侧的导油通路低于储存在储油室中的润滑油在垂直方向上的油位。

39. 发明授权

US07483560B2 Method for measuring three dimensional shape of a fine pattern 有权
标题翻译：用于测量精细图案的三维形状的方法
公开(公告)号：US07483560B2
公开(公告)日：2009-01-27
申请号：US10679290
申请日：2003-10-07
申请人： Chle Shishido , Ryo Nakagaki , Maki Tanaka , Kenji Watanabe , Yuya Toyoshima
发明人： Chle Shishido , Ryo Nakagaki , Maki Tanaka , Kenji Watanabe , Yuya Toyoshima
IPC分类号： G06K9/00
CPC分类号： H01L22/34 , G01N21/956 , G06T7/0004 , G06T2207/30148 , H01L2924/0002 , H01L2924/00
摘要： In a method of measuring a three dimensional shape of an arbitrary fine pattern on a semiconductor device, an optical measurement system carries out a measurement to obtain cross-section information, and an electron microscope obtains an electron beam image of the arbitrary fine pattern. Plane information and cross-section information obtained from the electron beam image of the arbitrary fine pattern are combined to measure the three dimensional shape of the arbitrary fine pattern.
摘要翻译：在半导体装置中测定任意精细图案的三维形状的方法中，光学测量系统进行测量以获得横截面信息，并且电子显微镜获得任意精细图案的电子束图像。从任意精细图案的电子束图像获得的平面信息和横截面信息被组合以测量任意精细图案的三维形状。

40. 发明授权

US07423267B2 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus 失效
标题翻译：电子束装置及使用该装置制造半导体器件的方法
公开(公告)号：US07423267B2
公开(公告)日：2008-09-09
申请号：US11528673
申请日：2006-09-28
申请人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Masahiro Hatakeyama , Kenji Watanabe , Takao Kato , Hirosi Sobukawa , Tsutomu Karimata , Shoji Yoshikawa , Toshifumi Kimba , Shin Oowada , Mutsumi Saito , Muneki Hamashima
发明人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Masahiro Hatakeyama , Kenji Watanabe , Takao Kato , Hirosi Sobukawa , Tsutomu Karimata , Shoji Yoshikawa , Toshifumi Kimba , Shin Oowada , Mutsumi Saito , Muneki Hamashima
IPC分类号： G01N23/00
CPC分类号： B82Y10/00 , B82Y40/00 , G01N23/225 , H01J37/06 , H01J37/063 , H01J37/073 , H01J37/185 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/28 , H01J37/3174 , H01J2237/0435 , H01J2237/0635 , H01J2237/082 , H01J2237/202 , H01J2237/20228 , H01J2237/204 , H01J2237/22 , H01J2237/2446 , H01J2237/24485 , H01J2237/24564 , H01J2237/2806 , H01J2237/2816 , H01J2237/2817
摘要： The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.
摘要翻译：本发明提供了一种用于用一次电子束照射样品的电子束装置，以通过用于评估样品表面的照射来检测从样品表面产生的二次电子束。在电子束装置中，电子枪具有用于发射一次电子束的阴极。阴极包括用于发射一次电子束的多个发射器，其以在主电光系统的光轴为中心的圆周彼此分开布置。多个发射器被布置成使得当多个发射器投射到与一次电子束扫描的方向平行的直线上时，直线上的所得点以相等的间隔隔开。

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