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    • 32. 发明授权
    • Fractional N frequency synthesizer
    • 分数N频率合成器
    • US06873213B2
    • 2005-03-29
    • US10261904
    • 2002-10-01
    • Kazutoshi TsudaYutaka Takahashi
    • Kazutoshi TsudaYutaka Takahashi
    • H03L7/197H03L7/08H03L7/18
    • H03L7/1976
    • A frequency synthesizer (100) that may have reduced spurious noise caused by a voltage controlled oscillator (VCO) (4) output sneaking into an input side of a phase comparison circuit (1) has been disclosed. A beat frequency component that may be generated by mixing of a portion of a VCO output sneaking into an input side of a phase comparison circuit (1) through a reference signal (REF) or a comparison signal (SIG) may be shifted to a high frequency region by providing a modulator circuit (7) on a reference signal side or a comparison signal side. Thus, a low pass filter circuit (3) may provide attenuation to the spurious noise. In this way, spurious noise in the VCO output may be reduced.
    • 已经公开了可以将输出潜入相位比较电路(1)的输入侧的压控振荡器(VCO)(4)引起的具有降低的杂散噪声的频率合成器(100)。 可以通过将参考信号(REF)或比较信号(SIG)混合到相位比较电路(1)的输入侧的VCO输出的一部分混合而产生的拍频分量可以移位到高 通过在参考信号侧或比较信号侧提供调制器电路(7)。 因此,低通滤波器电路(3)可以对伪噪声提供衰减。 以这种方式,可以减小VCO输出中的杂散噪声。
    • 34. 发明授权
    • Vertical processing unit
    • 垂直处理单元
    • US6110286A
    • 2000-08-29
    • US175433
    • 1998-10-20
    • Seungho OhKatsutoshi IshiiToshiharu NishimuraYutaka Takahashi
    • Seungho OhKatsutoshi IshiiToshiharu NishimuraYutaka Takahashi
    • H01L21/22C23C16/44C23C16/455C23C16/54C30B25/14H01L21/00H01L21/205H01L21/31C23C16/00
    • C23C16/45519C23C16/4401C23C16/54C30B25/14H01L21/67017
    • A vertical processing unit 10 for semiconductor wafers has; a cylindrical processing chamber 2 having an opening 18 in an inside of an annular bottom surface, and a disk-shaped cap 6 having an annular abutting-surface 32 abutting on the annular bottom surface of the chamber. A mounting-surface 6p formed on the inside of the annular abutting-surface 32. A wafer-boat 8 for holding a wafer W to be processed is mounted on the mounting-surface 6p of the cap 6. The abutting-surface 32 has an annular groove 34A formed therein. An inert gas supply passgeway 38 is provided in communication with the annular groove 34A for supplying an inert gas into the annular groove 34A through a header 16. An ejection opening 36 for ejecting an inert gas is provided on the inner side of the annular groove 34A for communicating the annular groove 34A and the interior of the processing chamber 2. Owing to the active leaking of the nitrogen (N.sub.2) gas into the interior of the processing chamber 2 through the ejection opening 36, the corrosive gas as a processing gas in the processing chamber 2 does not leak out, so that corrosion or rusting of the equipment around the processing chamber 2 is prevented.
    • 用于半导体晶片的垂直处理单元10具有: 在环形底面的内侧具有开口18的圆筒状的处理室2和与该室的环状底面邻接的环状的抵接面32的圆盘状的盖6。 安装表面6p,形成在环形邻接表面32的内侧。用于保持待处理晶片W的晶片舟8安装在盖6的安装表面6p上。邻接表面32具有 形成在其中的环形槽34A。 惰性气体供给接头38与环形槽34A连通,用于通过集管16将惰性气体供给到环形槽34A中。用于喷射惰性气体的喷射口36设置在环形槽34A的内侧 用于使环形槽34A和处理室2的内部连通。由于氮气(N 2)气体通过喷射开口36有效地泄漏到处理室2的内部,腐蚀性气体作为处理气体 处理室2不会泄漏,从而防止了处理室2周围的设备的腐蚀或生锈。
    • 38. 发明授权
    • Level convertor
    • 液位转换器
    • US5748024A
    • 1998-05-05
    • US530483
    • 1995-09-19
    • Yutaka TakahashiManabu NiiyamaYoshiki Goto
    • Yutaka TakahashiManabu NiiyamaYoshiki Goto
    • H03K19/003H03K19/0175H03K19/0185H03K19/02
    • H03K19/018521
    • A level convertor is provided between circuits, which act with different power supply voltages, respectively, and converts a first voltage level of an output of a circuit to a second voltage level, which corresponds to an operational voltage level of another circuit. The level convertor comprises a level shift circuit, which receives the first voltage level and outputs an output of the second voltage level, and a buffer circuit, which receives the output of the second level and a control signal, and fixes the output of the second voltage level to a low logic level, when the control signal is a low logic level. The control signal may be used to set a timing for registering the data to a register, avoiding data in an instable state when power is supplied, from being registered to the register.
    • 电路之间提供电平转换器,其分别作用于不同的电源电压,并且将电路的输出的第一电压电平转换成对应于另一个电路的工作电压电平的第二电压电平。 电平转换器包括电平移位电路,其接收第一电压电平并输出第二电压电平的输出;以及缓冲电路,其接收第二电平的输出和控制信号,并且固定第二电平的输出 当控制信号为低逻辑电平时,电压电平变为低逻辑电平。 控制信号可以用于设置将数据登记到寄存器的定时,避免在供电时处于不稳定状态的数据从注册到寄存器。