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    • 31. 发明授权
    • High frequency ceramic multi-layer substrate
    • 高频陶瓷多层基板
    • US5387888A
    • 1995-02-07
    • US41183
    • 1993-04-01
    • Kazuo EdaYutaka TaguchiKatsuyuki Miyauchi
    • Kazuo EdaYutaka TaguchiKatsuyuki Miyauchi
    • H01L23/66H01P1/15
    • H01L23/66H01L2223/665H01L2924/0002H01L2924/3011
    • A high frequency ceramic multi-layer substrate includes a stripline embedded between two dielectric layers having ground electrodes at the top surface and at the bottom surface thereof and an electric circuit formed on another dielectric layer applied to one of the ground electrodes. The stripline is connected to the electric circuit through via holes provided through the dielectric layers. The equivalent length from the stripline to the electric circuit is a fourth of the wavelength of an input high frequency signal, to result in a high frequency attenuation circuit. Another high frequency ceramic multi-layer substrate further includes another electrode provided via another dielectric layer of larger dielectric constant to form a capacitor with one of the ground electrodes, and another dielectric layer for forming an electric circuit thereon is applied to the electrode. The stripline is connected to the electric circuit through via holes provided through dielectric layers. The electric circuit may be an impedance matching circuit of the stripline or a direct current bias circuit. This multi-layer structure makes the high frequency substrate compact and improves high frequency characteristics.
    • 高频陶瓷多层基板包括嵌入在其顶表面和底表面处具有接地电极的两个电介质层之间的带状线,以及形成在施加到一个接地电极的另一电介质层上的电路。 带状线通过通过介电层提供的通孔连接到电路。 从带状线到电路的等效长度是输入高频信号的波长的四分之一,以产生高频衰减电路。 另一高频陶瓷多层基片还包括另一电极,该电极通过介电常数较大的介电层提供,以形成与其中一个接地电极的电容器,并在其上形成用于形成电路的另一电介质层。 带状线通过通过电介质层提供的通孔连接到电路。 电路可以是带状线或直流偏置电路的阻抗匹配电路。 该多层结构使高频基板紧凑化并提高了高频特性。
    • 35. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US5037769A
    • 1991-08-06
    • US330956
    • 1989-03-28
    • Masanori InadaKazuo EdaYorito Ota
    • Masanori InadaKazuo EdaYorito Ota
    • H01L29/36H01L29/737
    • H01L29/36H01L29/7371Y10S148/01Y10S148/072
    • A semiconductor device of a multilayer structure comprising semiconductor materials of different properties manufactured by using at least a step of epitaxially forming a semiconductor material layer on a substrate and a passivation film layer thereover, a step of introducing impurities into specific portions of the epitaxially formed semiconductor material layer and a step of removing the passivation film layer formed directly above the epitaxially formed semiconductor material layer within an epitaxial device and then applying epitaxial growing. Impurities introduced additionally to specific portions of the layer inside are substantially eliminated at the boundary adjacent the layer above the region introduced with impurities and the properties of the thus-produced semiconductors vary abruptly at the boundary between the layer in which the impurities are introduced and the layer thereabove. The material used for the passivation film layer comprises one that can be epitaxially formed and easily removed at a temperature and in a atmosphere under which the epitaxially formed layer below the passivation film are not decomposed or evaporized.
    • 一种多层结构的半导体器件,包括通过至少在衬底上外延形成半导体材料层的步骤和其上的钝化膜层而制造的具有不同性质的半导体材料,将杂质引入外延形成的半导体的特定部分 材料层和去除在外延装置内的外延形成的半导体材料层正上方形成的钝化膜层,然后施加外延生长的步骤。 在与内部区域相邻的边界处附近引入的层的特定部分的杂质基本上消除,并且由此产生的半导体的性质在其中引入杂质的层与其之间的边界处突然变化 层以上。 用于钝化膜层的材料包括可以在外部形成的并且在钝化膜下面的外延形成层不分解或蒸发的温度和气氛中容易除去的材料。
    • 36. 发明授权
    • Semiconductor laser apparatus
    • 半导体激光装置
    • US5007066A
    • 1991-04-09
    • US464001
    • 1990-01-12
    • Kazuo Eda
    • Kazuo Eda
    • H01S3/10H01S5/00H01S5/14
    • H01S3/10076H01S5/14H01S5/145
    • A semiconductor laser apparatus includes a semiconductor laser for emitting a light beam. The semiconductor laser has, as an external cavity, a quadruple light wave mixing optical phase conjugate element for inverting a spatial phase of an incident light beam. The apparatus further includes a pair of pump light sources which are arranged such that a superimposed portion of spectra of wavelengths of three light beams including two pump light beams emitted from the pair of pump light sources and entering into the optical phase conjugate element and another light beam emitted from the semiconductor laser is narrower than the spectral width of wavelengths of each of the three light beams. This enables the laser apparatus to generate an oscillating output wavelength of extremely narrow spectral width.
    • 半导体激光装置包括用于发射光束的半导体激光器。 半导体激光器具有用于反射入射光束的空间相位的四重光波混合光学相位共轭元件作为外部空腔。 该装置还包括一对泵浦光源,其被布置成使得包括从该对泵浦光源发射并进入光学相位共轭元件的两个泵浦光束的三个光束的波长的光谱的重叠部分和另一个光 从半导体激光器发射的光束比三个光束中的每个光束的波长的光谱宽度窄。 这使得激光装置能够产生非常窄的光谱宽度的振荡输出波长。
    • 40. 发明授权
    • Piezoelectric device and method of manufacturing the same
    • 压电元件及其制造方法
    • US5982010A
    • 1999-11-09
    • US976452
    • 1997-11-25
    • Akihiko NambaTetsuyoshi OguraYoshihiro TomitaKazuo Eda
    • Akihiko NambaTetsuyoshi OguraYoshihiro TomitaKazuo Eda
    • H01L41/22H01L41/312H01L41/338H03H3/02H01L29/84
    • H03H3/02H01L41/312H01L41/338
    • A piezoelectric device is manufactured by: (1) mirror finishing surfaces of a first substrate and a second substrate made of a piezoelectric element; (2) forming grooves on at least one of the two surfaces of the first and second substrates; (3) joining the mirror-finished surfaces of the first substrate and the second substrate; (4) applying heat to the joined substrates and bonding them; (5) forming an opening on the first substrate so that a part of the exposed areas of the second substrate is exposed through the opening; (6) forming piezoelectric devices by forming electrodes on at least one of the second substrate through the opening and a corresponding area to the exposed area on the rear side of the second substrate; and (7) dividing the bonded substrates into portions each having one of the piezoelectric devices. Through this manufacturing method, piezoelectric devices with high yield ratios and high reliability can be obtained.
    • 压电器件通过以下制造:(1)第一衬底和由压电元件制成的第二衬底的镜面精加工表面; (2)在第一和第二基板的两个表面中的至少一个上形成凹槽; (3)连接第一基板和第二基板的镜面抛光面; (4)向接合的基片施加热量并将其粘合; (5)在所述第一基板上形成开口,使得所述第二基板的所述暴露区域的一部分通过所述开口露出; (6)通过在所述第二基板中的至少一个上通过所述开口形成电极并形成与所述第二基板的后侧上的暴露区域相对应的区域来形成压电装置; 和(7)将接合的衬底分成各自具有一个压电器件的部分。 通过该制造方法,可以获得高屈服比和高可靠性的压电装置。