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    • 31. 发明专利
    • METHOD AND DEVICE FOR MEASURING CONFIGURATION OF SAMPLE
    • JPH09147783A
    • 1997-06-06
    • JP30255395
    • 1995-11-21
    • KAWASAKI STEEL CO
    • SAKAI MINORUJINNO GIICHISHIMOMURA JUNICHI
    • G01B15/00G01B15/08H01J37/256
    • PROBLEM TO BE SOLVED: To quantitatively measure the configuration of a sample by irradiating a sample with electrons, and detecting within a predetermined solid angle backscattered electrons produced from the sample surface for quantitative measurements of the sample configuration and for analysis of its composition. SOLUTION: When a sample is irradiated with S an electron beam EB from an electron gun 10, backscattered electrons BSE, secondary electrons SE, and characteristic X rays XR, emitted from the surface of the sample S, are detected respectively by a backscattered electron detector 1, a secondary electron detector 4, and a characteristic X-ray detector 5. The detector 1 is arranged immediately above the sample S in axial symmetry with respect to the electron beam EB in order to detect the electrons BSE within a predetermined solid angle, and has its detecting part divided into numerous parts. The electrons BSE detected by the detector 1 are amplified by a backscattered electron amplifier 6, are synchronized by an observation-CRT signal synchronizing device 7 with the scanning of the electron beam EB, and displayed on an observation CRT 8 simultaneously with images of the secondary electrons SE and the characteristic X-rays XR.