专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明申请

US20120019798A1 POSITIONING UNIT AND ALIGNMENT DEVICE FOR AN OPTICAL ELEMENT 有权
标题翻译：光学元件的定位单元和对准装置
公开(公告)号：US20120019798A1
公开(公告)日：2012-01-26
申请号：US13230398
申请日：2011-09-12
申请人： Ulrich Weber , Jens Kugler
发明人： Ulrich Weber , Jens Kugler
IPC分类号： G03B27/54 , G02B7/02
CPC分类号： G02B7/005 , G02B7/003 , G02B7/004 , G02B7/02 , G02B7/023 , G02B7/1822 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： The disclosure provides a positioning unit for an optical element in a microlithographic projection exposure installation having a first connecting area for connection to the optical element, and having a second connecting area for connection to an object in the vicinity of the optical element.
摘要翻译：本公开提供了一种用于在微光刻投影曝光装置中的光学元件的定位单元，其具有用于连接到光学元件的第一连接区域，并且具有用于连接到光学元件附近的物体的第二连接区域。

32. 发明申请

US20100245847A1 POSITIONING UNIT AND ALIGNMENT DEVICE FOR AN OPTICAL ELEMENT 有权
标题翻译：光学元件的定位单元和对准装置
公开(公告)号：US20100245847A1
公开(公告)日：2010-09-30
申请号：US12768286
申请日：2010-04-27
申请人： Ulrich Weber , Jens Kugler
发明人： Ulrich Weber , Jens Kugler
IPC分类号： G01B11/14
CPC分类号： G02B7/005 , G02B7/003 , G02B7/004 , G02B7/02 , G02B7/023 , G02B7/1822 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： The invention relates to a positioning unit for an optical element in a microlithographic projection exposure installation. Said unit comprises a first connection region (A, 22) for connecting to the optical elements, and a second connection region (B, 20) for connecting to an object in the vicinity of the optical elements. At least two levers are connected to the second connection region by means of the respective lever bearing thereof, and the respective load arm thereof is connected to the first connection region by an articulation by means of an intermediate element (31, 33, 36) applied to said articulations. Regulating devices (28, 29) or actuators are arranged on the respective power arms of the levers. In a first position, the first connection region and the second connection region are arranged in relation to each other in such a way that the lever bearings of at least two levers and the articulations associated with said levers have approximately parallel rotational axes that are located approximately in a plane in the first position.
摘要翻译：本发明涉及一种用于微光刻投影曝光装置中的光学元件的定位单元。所述单元包括用于连接到光学元件的第一连接区域（A，22）和用于连接到光学元件附近的物体的第二连接区域（B，20）。至少两个杠杆通过其相应的杠杆轴承连接到第二连接区域，并且其相应的负载臂通过借助于施加的中间元件（31,33,36）的铰接而连接到第一连接区域到所说的关节。调节装置（28,29）或致动器布置在杠杆的相应动力臂上。在第一位置，第一连接区域和第二连接区域彼此相对布置，使得至少两个杠杆的杠杆轴承和与所述杠杆相关联的铰接件具有近似平行的旋转轴线，其大致位于在一架飞机中处于第一位。

33. 发明申请

US20100214675A1 OPTICAL ELEMENT MODULE WITH MINIMIZED PARASITIC LOADS 有权
标题翻译：具有最小化PARASIIC负载的光学元件模块
公开(公告)号：US20100214675A1
公开(公告)日：2010-08-26
申请号：US12708034
申请日：2010-02-18
申请人： Jens Kugler , Ulrich Weber , Dirk Schaffer
发明人： Jens Kugler , Ulrich Weber , Dirk Schaffer
IPC分类号： G02B7/00
CPC分类号： G02B7/02 , G02B7/021 , G03F7/70825
摘要： An optical element module is provided. The optical module includes an optical element unit that includes an optical element and a support structure that supports the optical element unit. The support structure includes a support device and a contact device mounted to the support device. The contact device exerts a force on the optical element unit in a first direction via a first contact surface of the contact device. The first contact surface contacts a second contact surface of the optical element unit. The contact device includes a first linking section and a second linking section extending along a second direction running transverse to the first direction and arranged kinematically in series between the first contact surface and the support device. The first linking section and the second linking section are elastically deformed in response to a bending moment resulting from the force. The first linking section and the second linking section are arranged on opposite sides of a reference plane. The reference plane includes the force and runs transverse to the second direction.
摘要翻译：提供了一种光学元件模块。光学模块包括光学元件单元，其包括光学元件和支撑光学元件单元的支撑结构。支撑结构包括支撑装置和安装到支撑装置的接触装置。接触装置经由接触装置的第一接触面沿第一方向在光学元件单元上施加力。第一接触表面接触光学元件单元的第二接触表面。接触装置包括第一连接部分和第二连接部分，该第二连接部分沿着横向于第一方向的第二方向延伸并且在运动学上串联布置在第一接触表面和支撑装置之间。第一连接部分和第二连接部分响应于由力产生的弯矩而弹性变形。第一连接部分和第二连接部分布置在参考平面的相对侧上。参考平面包括力并横向于第二方向延伸。

34. 发明授权

US07738193B2 Positioning unit and alignment device for an optical element 有权
标题翻译：光学元件的定位单元和对准装置
公开(公告)号：US07738193B2
公开(公告)日：2010-06-15
申请号：US11631370
申请日：2005-06-18
申请人： Ulrich Weber , Jens Kugler
发明人： Ulrich Weber , Jens Kugler
IPC分类号： G02B7/02
CPC分类号： G02B7/005 , G02B7/003 , G02B7/004 , G02B7/02 , G02B7/023 , G02B7/1822 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： The invention relates to a positioning unit for an optical element in a microlithographic projection exposure installation. Said unit comprises a first connection region (A, 22) for connecting to the optical elements, and a second connection region (B, 20) for connecting to an object in the vicinity of the optical elements. At least two levers are connected to the second connection region by means of the respective lever bearing thereof, and the respective load arm thereof is connected to the first connection region by an articulation by means of an intermediate element (31, 33, 36) applied to said articulations. Regulating devices (28, 29) or actuators are arranged on the respective power arms of the levers. In a first position, the first connection region and the second connection region are arranged in relation to each other in such a way that the lever bearings of at least two levers and the articulations associated with said levers have approximately parallel rotational axes that are located approximately in a plane in the first position.
摘要翻译：本发明涉及一种用于微光刻投影曝光装置中的光学元件的定位单元。所述单元包括用于连接到光学元件的第一连接区域（A，22）和用于连接到光学元件附近的物体的第二连接区域（B，20）。至少两个杠杆通过其相应的杠杆轴承连接到第二连接区域，并且其相应的负载臂通过借助于施加的中间元件（31,33,36）的铰接而连接到第一连接区域到所说的关节。调节装置（28,29）或致动器布置在杠杆的相应动力臂上。在第一位置，第一连接区域和第二连接区域彼此相对布置，使得至少两个杠杆的杠杆轴承和与所述杠杆相关联的铰接件具有近似平行的旋转轴线，其大致位于在一架飞机中处于第一位。

35. 发明申请

US20110255181A1 REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT 有权
标题翻译：光学元件更换装置
公开(公告)号：US20110255181A1
公开(公告)日：2011-10-20
申请号：US13170951
申请日：2011-06-28
申请人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
发明人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译：安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。

36. 发明申请

US20090168207A1 Replacement Apparatus for an Optical Element 有权
标题翻译：光学元件替换装置
公开(公告)号：US20090168207A1
公开(公告)日：2009-07-02
申请号：US12400965
申请日：2009-03-10
申请人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
发明人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译：用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。

37. 发明授权

US07265917B2 Replacement apparatus for an optical element 有权
标题翻译：用于光学元件的替换装置
公开(公告)号：US07265917B2
公开(公告)日：2007-09-04
申请号：US10966388
申请日：2004-10-15
申请人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
发明人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译：安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。

38. 发明授权

US08711331B2 Optical module for a microlithography objective including holding and supporting devices 有权
标题翻译：用于微光学目标的光学模块，包括保持和支撑装置
公开(公告)号：US08711331B2
公开(公告)日：2014-04-29
申请号：US11597297
申请日：2005-05-24
申请人： Jens Kugler , Franz Sorg , Yim-Bun Patrick Kwan
发明人： Jens Kugler , Franz Sorg , Yim-Bun Patrick Kwan
IPC分类号： G03B27/70
CPC分类号： G02B19/0023 , G02B7/00 , G02B7/021 , G02B7/023 , G02B7/026 , G02B7/182 , G02B17/0605 , G02B17/0615 , G03F7/70825
摘要： There is provided an optical module for an objective. The optical module includes (a) a first holding device with an inner circumference, which extends in a first circumferential direction, (b) at least one first supporting device for supporting a first optical element and being fixed at said inner circumference of said first holding device, (c) an annular circumferential first assembly space being defined by displacing said first supporting device once in a revolving manner along said first circumferential direction, (d) at least one second supporting device being provided for supporting a second optical element and being fixed at said inner circumference of said first holding device, and (e) an annular circumferential second assembly space being defined by displacing said second supporting device once in a revolving manner along said first circumferential direction. The first assembly space intersects the second assembly space.
摘要翻译：提供了一种用于物镜的光学模块。光学模块包括：（a）具有沿第一圆周方向延伸的内圆周的第一保持装置，（b）至少一个第一支撑装置，用于支撑第一光学元件并固定在所述第一保持件的所述内圆周装置，（c）通过沿着所述第一圆周方向以旋转方式移动所述第一支撑装置来限定环形圆周第一组合空间;（d）至少一个第二支撑装置，用于支撑第二光学元件并被固定在所述第一保持装置的所述内圆周处，以及（e）通过沿着所述第一圆周方向以旋转方式使所述第二支撑装置移动一次而限定的环形圆周第二组合空间。第一组装空间与第二组装空间相交。

39. 发明授权

US08553202B2 Projection objective for microlithography 有权
标题翻译：微光刻的投影目标
公开(公告)号：US08553202B2
公开(公告)日：2013-10-08
申请号：US12724496
申请日：2010-03-16
申请人： Jens Kugler , Tilman Schwertner
发明人： Jens Kugler , Tilman Schwertner
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/70825 , G02B7/023 , G02B7/1822 , G03F7/70816
摘要： An optical system includes an optical element having adjusting elements. The optical element is connected to a rotatable carrying ring via at least one connecting member arranged on the carrying ring directly or via one or a plurality of intermediate elements to the optical element. The rotatable carrying ring is borne in a manner freely rotatable about an axis relative to a fixed outer mount or the optical element via a rotating device. The outer mount, the rotatable carrying ring and the connecting members are constructed as rotatable kinematics in the form of parallel kinematics.
摘要翻译：光学系统包括具有调节元件的光学元件。光学元件通过直接或经由一个或多个中间元件布置在承载环上的至少一个连接构件连接到可转动的承载环到光学元件。可旋转承载环以相对于固定的外部安装件或光学元件经由旋转装置绕轴线自由旋转的方式承载。外部安装件，可旋转承载环和连接构件被构造为平行运动学形式的可旋转运动学。

40. 发明申请

US20070297074A1 Replacement apparatus for an optical element 有权
公开(公告)号：US20070297074A1
公开(公告)日：2007-12-27
申请号：US11895990
申请日：2007-08-28
申请人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
发明人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
IPC分类号： G02B7/14
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式