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31. 发明授权

US08874258B2 Method for transporting a substrate with a substrate support 有权
标题翻译：用衬底支撑体输送衬底的方法
公开(公告)号：US08874258B2
公开(公告)日：2014-10-28
申请号：US13614007
申请日：2012-09-13
申请人： Martin Hosek
发明人： Martin Hosek
IPC分类号： B65G61/00 , B65G49/00
CPC分类号： H01L21/67288 , H01L21/67742
摘要： A method of transporting a substrate with a substrate support, the method includes defining a frictional breakaway force between the substrate and the substrate support in a horizontal plane, moving the substrate in the horizontal plane along a horizontal trajectory, moving the substrate in a vertical direction along a vertical trajectory simultaneously while moving the substrate in the horizontal plane, and wherein the horizontal trajectory is determined based on the acceleration profile of the vertical trajectory and wherein the horizontal trajectory prevents the moving of the substrate from overcoming the coefficient of friction in the horizontal plane.
摘要翻译：一种用衬底支撑件传送衬底的方法，所述方法包括在水平面中限定衬底和衬底支撑件之间的摩擦分离力，沿着水平轨迹移动衬底在水平面中，沿垂直方向移动衬底沿着垂直轨迹同时移动基板在水平面中，并且其中基于垂直轨迹的加速度分布来确定水平轨迹，并且其中水平轨迹防止基板的移动克服水平面中的摩擦系数飞机

32. 发明授权

US08651796B2 Substrate transport apparatus with multiple independently movable articulated arms 有权
标题翻译：具有多个可独立移动的铰接臂的基板输送装置
公开(公告)号：US08651796B2
公开(公告)日：2014-02-18
申请号：US13113476
申请日：2011-05-23
申请人： Martin Hosek , Ulysses Gilchrist
发明人： Martin Hosek , Ulysses Gilchrist
IPC分类号： B25J9/10
CPC分类号： B25J9/042 , H01L21/67742 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms.
摘要翻译：一种基板输送装置，包括具有至少一个驱动轴的驱动部分和至少两个可操作地联接到所述至少一个驱动轴的切割臂，所述至少一个驱动轴是用于所述至少两个扫帚臂的共同驱动轴，以及所述至少两个sc臂的收回，其中所述至少两个sc臂彼此联接，使得在所述至少一个驱动轴联接到所述至少两个sc臂的情况下，所述驱动轴的旋转实现延伸和缩回所述至少两个sc臂中的一个基本上独立于所述至少两个sc臂中另一个的运动。

33. 发明授权

US08222892B2 Sensor for simultaneous position and gap measurement 有权
标题翻译：传感器同时进行位置和间隙测量
公开(公告)号：US08222892B2
公开(公告)日：2012-07-17
申请号：US12163802
申请日：2008-06-27
申请人： Martin Hosek , Christopher Hofmeister
发明人： Martin Hosek , Christopher Hofmeister
IPC分类号： G01B7/14
CPC分类号： G01D5/2086
摘要： An apparatus including a controller, a transport in communication with the controller having a movable portion and a transport path and a multi-dimensional position measurement device in communication with the controller, the multi-dimensional position measurement device including a plurality of transformers and at least one element attached to the movable portion, wherein the multi-dimensional position measurement device is configured so that a circuit is completed in at least one plurality of transformers as the at least one element passes proximate to the at least one of the plurality of transformers and the controller is configured to calculate a multi-dimensional position of the movable object based on an output of the at least one of the plurality of transformers, wherein the multi-dimensional position includes at least a gap between the movable portion and the plurality of transformers.
摘要翻译：一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的传输和与控制器通信的多维位置测量装置，所述多维位置测量装置包括多个变压器，并且至少一个元件附接到可移动部分，其中所述多维位置测量装置被配置为使得当所述至少一个元件通过所述多个变压器中的至少一个变压器时，在至少一个多个变压器中完成电路，以及控制器被配置为基于多个变压器中的至少一个的输出来计算可移动物体的多维位置，其中多维位置至少包括可移动部分和多个变压器之间的间隙。

34. 发明申请

US20110025310A1 POSITION FEEDBACK FOR SELF BEARING MOTOR 审中-公开
标题翻译：自轴承电机的位置反馈
公开(公告)号：US20110025310A1
公开(公告)日：2011-02-03
申请号：US12901146
申请日：2010-10-08
申请人： Jairo Moura , Martin Hosek , Jay Krishnasamy , Jeff Paranay
发明人： Jairo Moura , Martin Hosek , Jay Krishnasamy , Jeff Paranay
IPC分类号： G01D5/12
CPC分类号： G01D5/147 , G01D5/2451
摘要： A sensing mechanism includes a magnetic source, a magnetic flux sensor, a sensor backing on which the magnetic source and flux sensor are mounted, and a ferromagnetic target, where the magnetic source, magnetic flux sensor, and ferromagnetic target are positioned to form a magnetic circuit from the magnetic source to the target, from the target to the sensor, and returning to the magnetic source through the sensor backing.
摘要翻译：感测机构包括磁源，磁通量传感器，安装有磁源和磁通传感器的传感器背衬和铁磁目标，其中磁源，磁通量传感器和铁磁性靶位于其上以形成磁性从磁源到目标的电路，从目标到传感器，并通过传感器背衬返回到磁源。

35. 发明申请

US20090001907A1 COMMUTATION OF AN ELECTROMAGNETIC PROPULSION AND GUIDANCE SYSTEM 有权
标题翻译：电磁推进和指导系统的传播
公开(公告)号：US20090001907A1
公开(公告)日：2009-01-01
申请号：US11769688
申请日：2007-06-27
申请人： Martin Hosek , Jairo Terra Moura , Christopher Hofmeister
发明人： Martin Hosek , Jairo Terra Moura , Christopher Hofmeister
IPC分类号： H02P31/00
CPC分类号： F16C41/008 , F16C32/0493 , F16C2380/26 , H02P6/15 , H02P2209/07
摘要： A method of commutating a motor includes calculating an adjustment electrical angle, and utilizing the adjustment electrical angle in a common set of commutation equations so that the common set of commutation equations is capable of producing both one and two dimensional forces in the motor.
摘要翻译：一种换向马达的方法包括计算调整电角度，并利用公共换向方程组中的调整电角度，使得公共换向方程组能够在马达中产生一维和二维力。

36. 发明授权

US5934424A Centrifugal delayed resonator pendulum absorber 失效
标题翻译：离心延迟谐振器摆动吸收器
公开(公告)号：US5934424A
公开(公告)日：1999-08-10
申请号：US742381
申请日：1996-11-01
申请人： Martin Hosek , Hakan Elmali , Nejat Olgac
发明人： Martin Hosek , Hakan Elmali , Nejat Olgac
IPC分类号： B64C27/00 , F16F15/14 , F16F15/31 , F16F7/00
CPC分类号： B64C27/001 , F16F15/145 , F16F15/31
摘要： Torsional vibrations in a rotating structure having a relatively large mass and subject to varying frequencies of torsional excitation are damped by determining the frequency of torsional excitation of the rotating structure and coupling to the rotating structure a damping pendulum of smaller mass to provide an absorber unit rotating therewith. The angular displacement of the damping pendulum relative to the rotating structure is continuously monitored, and the frequency of excitation is determined. The monitored displacement of the damping pendulum together with the mass damper characteristics of the absorber unit are processed to output a signal which produces a control torque on the damping pendulum proportional to the monitored displacement of the damping pendulum with a controlled time delay to produce control torque on the damping pendulum substantially equal to the torsional excitation of the rotating structure. This produces resonance of the damping pendulum substantially at the torsional excitation of the rotating structure which is effective to damp the vibrations of the rotating structure.
摘要翻译：通过确定旋转结构的扭转激励的频率和耦合到旋转结构的较小质量的阻尼摆来减小具有相对较大质量且经受变化的扭转激励频率的旋转结构中的扭转振动，以提供吸收体单元旋转随之而来。连续监测阻尼摆相对于旋转结构的角位移，确定激励频率。阻尼摆的监测位移与吸收器单元的质量阻尼器特性一起被处理以输出一个信号，该信号产生与阻尼摆的监控位移成比例的阻尼摆的控制扭矩，并以受控的时间延迟产生控制扭矩在阻尼摆上基本上等于旋转结构的扭转激励。这产生了基本上在旋转结构的扭转激励下的阻尼摆的共振，其有效地抑制了旋转结构的振动。

37. 发明授权

US10532402B2 System and method for making a structured magnetic material with integrated particle insulation 有权
公开(公告)号：US10532402B2
公开(公告)日：2020-01-14
申请号：US13507448
申请日：2012-06-29
申请人： Martin Hosek , Sripati Sah
发明人： Martin Hosek , Sripati Sah
IPC分类号： B22D23/00 , B32B15/02 , B22C9/08 , B22F3/115 , C23C4/18 , C23C6/00 , H01F1/24 , H01F3/08 , H01F41/02
摘要： A system for making a material having domains with insulated boundaries is provided. The system includes a droplet spray subsystem configured to create molten alloy droplets and direct the molten alloy droplets to a surface, a gas subsystem configured to introduce one or more reactive gases to an area proximate in-flight droplets. The one or more reactive gases creates an insulation layer on the droplets in flight such that the droplets form a material having domains with insulated boundaries.

38. 发明授权

US09364895B2 System and method for making a structured magnetic material via layered particle deposition 有权
公开(公告)号：US09364895B2
公开(公告)日：2016-06-14
申请号：US13507447
申请日：2012-06-29
申请人： Martin Hosek , Sripati Sah
发明人： Martin Hosek , Sripati Sah
IPC分类号： B22F3/115 , B22D23/00 , C23C4/18 , C23C6/00 , H01F1/24 , H01F3/08 , H01F41/02
CPC分类号： B22D23/003 , B22F3/115 , C23C4/18 , C23C6/00 , H01F1/24 , H01F3/08 , H01F41/0246 , Y10T428/24413
摘要： A system for making a material having domains with insulated boundaries is provided. The system includes a droplet spray subsystem configured to create molten alloy droplets and direct the molten alloy droplets to a surface, a spray subsystem configured to direct a spray of an agent at deposited droplets on the surface. The agent creates insulation layers on the deposited droplets such that the droplets form a material having domains with insulated boundaries on the surface.

39. 发明授权

US08960099B2 Substrate processing apparatus 有权
标题翻译：基板加工装置
公开(公告)号：US08960099B2
公开(公告)日：2015-02-24
申请号：US12330780
申请日：2008-12-09
申请人： Martin Hosek , Christopher Hofmeister , Alexander Krupyshev
发明人： Martin Hosek , Christopher Hofmeister , Alexander Krupyshev
IPC分类号： B60L13/04 , H01L21/67 , H01L21/677
CPC分类号： H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67727 , H01L21/67742 , H01L21/67766
摘要： A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.
摘要翻译：用于输送装置的驱动系统包括连接到输送装置的多个永磁体，暴露于多个永磁体中的至少一个的磁场的多个静止绕组，用于给固定绕组通电以提供磁性的控制系统输送装置上的力，以及靠近运输装置的至少一侧的铁磁部件的布置，用于提供传送装置的提升，俯仰和滚动的被动稳定。

40. 发明授权

US08459922B2 Manipulator auto-teach and position correction system 有权
标题翻译：机械手自动教学和位置校正系统
公开(公告)号：US08459922B2
公开(公告)日：2013-06-11
申请号：US12651160
申请日：2009-12-31
申请人： Martin Hosek
发明人： Martin Hosek
IPC分类号： G06F19/00
CPC分类号： G05B19/4189 , G05B19/402 , G05B19/421 , G05B2219/36414 , G05B2219/36461 , H01L21/67294 , H01L21/68 , Y02P90/28 , Y10S901/00
摘要： A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.
摘要翻译：一种基板处理系统，包括用于容纳处理装置的至少一部分的壳体，附着到处理装置的至少一个目标，所述处理装置具有与所述至少一个目标已知关系的第一处理装置参考点，至少一个发射机位于所述外壳内，并被配置为将识别所述至少一个发射机的识别信号发射到所述至少一个目标，以及可操作地连接到所述至少一个目标和所述至少一个发射机的控制器，所述控制器被配置为接收数据基于所述识别信号从所述至少一个目标和所述至少一个发射机之一发送信号，并基于所述数据信号来控制所述处理设备的操作特性。

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