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    • 36. 发明授权
    • Etalon, a wavelength monitor/locker using the etalon and associated methods
    • Etalon,使用标准具和相关方法的波长监视器/储物柜
    • US06661818B1
    • 2003-12-09
    • US09543760
    • 2000-04-05
    • Michael R. FeldmanHongtao HanJohn Barnett Hammond
    • Michael R. FeldmanHongtao HanJohn Barnett Hammond
    • H01S310
    • G01J9/0246G01J3/26H01S5/02248H01S5/0687
    • An etalon used in analyzing a wavelength of a light source includes ant etalon only in a portion of a substrate in which the etalon is integrated. Use of such an etalon in monitoring or controlling the wavelength allows the etalon to be placed in an application beam. A portion of the application beam is split into at least two beams, a first beam being directed to the etalon to monitor the wavelength, and the other beam either serving purely as a reference beam or passing through another etalon having a different optical path length than the etalon for the first beam, thereby also monitoring the wavelength. The monitor itself would include at least two photodetector, one for each of the beam split off of the input beam. Any or all substrates containing the elements for the monitor may be created on a wafer level and diced and/or bonded to other wafers containing other elements and diced.
    • 在分析光源的波长中使用的标准具仅在标准具集成的衬底的一部分中包括蚂蚁标准具。 使用这种标准具来监测或控制波长允许标准具放置在应用光束中。 应用光束的一部分被分成至少两个光束,第一光束被引导到标准具以监视波长,而另一个光束纯粹作为参考光束或者通过具有不同于光路长度的另一标准具 第一束的标准具,从而也监测波长。 监视器本身将包括至少两个光电检测器,一个用于从输入光束分离的每个光束。 含有用于监视器的元件的任何或所有基板可以在晶片级上产生并切割和/或结合到包含其它元件的其他晶片并切割。