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31. 发明专利

JP2014130671A Method of manufacturing plasmon generator 有权
标题翻译：制造等离子发生器的方法
公开(公告)号：JP2014130671A
公开(公告)日：2014-07-10
申请号：JP2013190677
申请日：2013-09-13
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： ARAKI HIRONORI , SASAKI YOSHITAKA , ITO HIROYUKI , IKEGAWA YUKINORI , TOMITA SEIICHIRO , TANEMURA SHIGEKI
IPC分类号： G11B5/31 , G11B5/02
CPC分类号： G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To manufacture a plasmon generator with a small width of a front end face including a near-field light generating part.SOLUTION: A method of manufacturing a plasmon generator comprises the steps of: forming an etching mask on a dielectric layer 33; forming an accommodation part by etching the dielectric layer 33 using the etching mask; and forming the plasmon generator in the accommodation part. The step of forming the etching mask comprises the steps of: forming a patterned layer 71 on an etching mask material layer 61P, the patterned layer having a first opening 71a that has a sidewall; forming a structure 70 by forming an adhesion film 72 on the sidewall, the structure having a second opening 70a smaller than the first opening 71a; and etching a portion of the etching mask material layer 61P exposed from the second opening 70a.
摘要翻译：要解决的问题：制造具有包括近场光产生部件的前端面的宽度小的等离子体发生器。解决方案：一种制造等离子体发生器的方法包括以下步骤：在电介质层上形成蚀刻掩模 33; 通过使用蚀刻掩模蚀刻电介质层33来形成容纳部分; 以及在所述容纳部中形成所述等离子体发生器。形成蚀刻掩模的步骤包括以下步骤：在蚀刻掩模材料层61P上形成图案层71，该图案层具有具有侧壁的第一开口71a; 通过在侧壁上形成粘合膜72来形成结构70，该结构具有比第一开口71a小的第二开口70a; 并蚀刻从第二开口70a露出的蚀刻掩模材料层61P的一部分。

32. 发明专利

JP2014086126A Near-field light generator and heat-assisted magnetic recording head 审中-公开
标题翻译：近场光发电机和热辅助磁记录头
公开(公告)号：JP2014086126A
公开(公告)日：2014-05-12
申请号：JP2013219755
申请日：2013-10-23
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド , Sae Magnetics(H K )Ltd , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , SATO KAZUKI , ARAKI HIRONORI , FUJII TAKASHI
IPC分类号： G11B5/31 , G11B5/02
CPC分类号： G11B5/314 , B82Y20/00 , G02B6/1226 , G11B5/6088 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To excite a lot of surface plasmon in a plasmon generator.SOLUTION: The near-field light generator has a waveguide and a plasmon generator 40. The waveguide has a core 25 and a clad. The core 25 has a first and a second evanescent light generation surfaces 25Ab1, 25Bc1 disposed so as to sandwich the plasmon generator 40. The plasmon generator 40 has an exterior surface, which includes: a front end face 40a; a first plasmon excitation unit 40b1 opposing the first evanescent light generation surface 25Ab1 at a prescribed interval; and a second plasmon excitation unit 40c1 opposing the second evanescent light generation surface 25Bc1 at a prescribed interval.
摘要翻译：要解决的问题：激发等离子体发生器中的大量表面等离子体。解决方案：近场光发生器具有波导和等离子体发生器40.波导具有芯25和包层。芯25具有设置成夹着等离子体发生器40的第一和第二渐逝光产生表面25Ab1,25Bc1。等离子体发生器40具有外表面，其包括：前端面40a; 以规定间隔与第一渐逝光产生面25Ab1相对的第一等离子体激发单元40b1; 以及与规定间隔相对的第二渐逝光产生面25Bc1的第二等离子体激发单元40c1。

33. 发明专利

JP2014059941A Thermally assisted magnetic recording head having plasmon generator 有权
标题翻译：具有等离子发生器的热辅助磁记录头
公开(公告)号：JP2014059941A
公开(公告)日：2014-04-03
申请号：JP2013095267
申请日：2013-04-30
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , SATO KAZUKI , ARAKI HIRONORI
IPC分类号： G11B5/31 , G11B5/02
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To increase a linear recording density in a thermally assisted magnetic recording head including a main pole, a Plasmon generator, a waveguide, and a shield.SOLUTION: A near-field light generating part 40g of a Plasmon generator 40 is arranged between an end surface 19a of a main magnetic pole 19 arranged on a medium-opposing surface and an end surface 16a of a shield 16 arranged on the medium-opposing surface. A core 13 of a waveguide has a front end surface 13a directed toward the medium-opposing surface. The front end surface 13a has first and second end parts E1, E2 which are positioned at both ends in a travelling direction of the recording medium. The first end part E1 is at a position nearer to the near-field light generating part 40 than the second end part E2. One of the main magnetic pole 19 and the shield 16 is overlapped only in the area from a middle position C between the first end part E1 and the second end part E2 up to the first end part E1 among the front end surface 13a of the core 13.
摘要翻译：要解决的问题：提高包括主极，等离子体发生器，波导和屏蔽的热辅助磁记录头中的线性记录密度。解决方案：等离子体发生器40的近场光产生部分40g是布置在布置在介质相对表面上的主磁极19的端表面19a和布置在介质相对表面上的屏蔽16的端表面16a之间。波导芯13具有朝向介质相对表面的前端表面13a。前端面13a具有位于记录介质的行进方向两端的第一和第二端部E1，E2。第一端部E1位于比第二端部E2更靠近近场光产生部40的位置。主磁极19和屏蔽体16中的一个仅在从第一端部E1和第二端部E2之间的中间位置C到核心的前端表面13a之间的第一端部E1的区域中重叠 13。

34. 发明专利

JP2013239226A Magnetic head for vertical magnetic recording provided with main magnetic pole and shield 有权
标题翻译：用于垂直磁记录的磁头用主磁场和屏蔽
公开(公告)号：JP2013239226A
公开(公告)日：2013-11-28
申请号：JP2013030857
申请日：2013-02-20
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド , Sae Magnetics(H K )Ltd , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , SATO KAZUKI , TANEMURA SHIGEKI , ARAKI HIRONORI , SHIMIZU TATSUYA
IPC分类号： G11B5/31
CPC分类号： G11B5/3123 , G11B5/1278 , G11B5/3116
摘要： PROBLEM TO BE SOLVED: To prevent problems caused by skew from occurring, to improve recording characteristics and to shorten the length of a magnetic path that passes through a recording shield, a return magnetic path part and a main magnetic pole.SOLUTION: A magnetic head includes a coil, a main magnetic pole 15, a recording shield 16, a gap part 17 and a return magnetic path part 40. The return magnetic path part 40 is arranged at the front side of the traveling direction of a recording medium with respect to the main magnetic pole 15. The coil includes a specified coil element 21A. An upper face 15T of the main magnetic pole 15 includes an inclined part 15T1 and a flat part 15T2. The recording shield 16 has an inclined face 16Ab. The inclined face 16Ab includes a first part 16Ab1 which is opposed to the inclined part 15T1 via the gap part 17 and a second part 16Ab2 which is located at a position farther from a medium opposing face 80 than the first part 16Ab1. The specified coil element 21A includes a part 21A1 which is located between the flat part 15T2 and the second part 16Ab2.
摘要翻译：要解决的问题：为了防止由于发生偏斜而引起的问题，改善记录特性并缩短通过记录屏蔽，返回磁路部分和主磁极的磁路的长度。解决方案：磁头包括线圈，主磁极15，记录屏蔽16，间隙部17和返回磁路部40.返回磁路部40配置在记录介质的行进方向的前侧，相对于主磁极15.线圈包括特定的线圈元件21A。主磁极15的上表面15T包括倾斜部分15T1和平坦部分15T2。记录屏蔽16具有倾斜面16Ab。倾斜面16Ab包括经由间隙部17与倾斜部15T1相对的第一部分16Ab1和位于比第一部分16Ab1更靠近介质相对面80的位置的第二部分16Ab2。指定的线圈元件21A包括位于平坦部15T2和第二部分16Ab2之间的部分21A1。

35. 发明专利

JP2013149339A Method for manufacturing plasmon generator 有权
标题翻译：制造等离子发生器的方法
公开(公告)号：JP2013149339A
公开(公告)日：2013-08-01
申请号：JP2012222705
申请日：2012-10-05
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： ARAKI HIRONORI , SASAKI YOSHITAKA , ITO HIROYUKI , SATO KAZUKI , TANEMURA SHIGEKI , IKEGAWA YUKINORI
IPC分类号： G11B5/31 , G11B5/02 , G11B7/135 , G11B7/22
CPC分类号： G11B5/3163 , B82Y20/00 , G02B6/1226 , G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To stably manufacturing a plasmon generator in which the width of a front end surface including a near-field light generation part is small.SOLUTION: The method for manufacturing a plasmon generator includes a step for forming a storage part and a step for forming a plasmon generator so as to be stored in the storage part. The step for forming the storage part includes a step for forming a dielectric layer 33 having a top surface, a step for etching the dielectric layer 33 by using an etching mask to form a groove 33b on the dielectric layer 33, and a step for forming a dielectric layer 24 in the groove 33b. The groove 33b has first and second side walls and a bottom surface. Angles made by the respective first and second side walls with respect to a direction perpendicular to the top surface of the dielectric layer are within the range of 0 to 15°.
摘要翻译：要解决的问题：用于稳定地制造其中包括近场光产生部分的前端表面的宽度小的等离子体激元发生器。解决方案：等离子体激元发生器的制造方法包括形成存储部分和用于形成等离子体激元发生器以便存储在存储部分中的步骤。用于形成存储部件的步骤包括用于形成具有顶表面的电介质层33的步骤，通过使用蚀刻掩模蚀刻介电层33以在电介质层33上形成凹槽33b的步骤，以及用于形成凹槽33b中的介电层24。槽33b具有第一和第二侧壁和底面。由相应的第一和第二侧壁相对于与电介质层的顶表面垂直的方向制成的角度在0至15°的范围内。

36. 发明专利

JP2013097855A Plasmon generator including two parts made of different metals 审中-公开
标题翻译：等离子发生器，包括不同金属的两个部件
公开(公告)号：JP2013097855A
公开(公告)日：2013-05-20
申请号：JP2012109573
申请日：2012-05-11
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI , SATO KAZUKI , IKEGAWA YUKINORI
IPC分类号： G11B5/31 , G11B5/02 , G11B5/60
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To provide performance that cannot be achieved by a plasmon generator made of a single material while efficiently propagating a surface plasmon by a plasmon generator.SOLUTION: A plasmon generator 50 for exciting a surface plasmon by being combined with evanescent light generated by a core of a waveguide includes a first part 51 made of a first metal material and a second part 52 made of a second metal material different from the first metal material. The plasmon generator 50 has a front end face 50a, and the front end face 50a includes a near-field light generation part 50g for generating near-field light on the basis of the surface plasmon. The second part 52 includes an end face 52a arranged at the front end face 50a. The second metal material satisfies at least one requirement among the following requirements having smaller ionization tendency, smaller electric conductivity and larger Vickers hardness than the first metal material does.
摘要翻译：要解决的问题：提供由单一材料制成的等离子体发生器不能实现的性能，同时通过等离子体发生器有效地传播表面等离子体激元。解决方案：用于通过与波导芯产生的ev逝光组合来激发表面等离子体激元的等离子体激元器件50包括由第一金属材料制成的第一部分51和由不同于第二金属材料的第二金属材料制成的第二部分52 从第一种金属材料。等离子体发生器50具有前端面50a，前端面50a包括用于基于表面等离子体激元产生近场光的近场光产生部分50g。第二部分52包括布置在前端面50a处的端面52a。第二金属材料满足以下要求中的至少一个要求，其具有比第一金属材料更小的电离倾向，更小的导电性和更大的维氏硬度。版权所有（C）2013，JPO＆INPIT

37. 发明专利

JP2013004163A Taper-etching method and method for manufacturing near-field light generator 有权
标题翻译：用于制造近场光发生器的刻痕蚀刻方法和方法
公开(公告)号：JP2013004163A
公开(公告)日：2013-01-07
申请号：JP2012045139
申请日：2012-03-01
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： ARAKI HIRONORI , SASAKI YOSHITAKA , ITO HIROYUKI , SATO KAZUKI , TANEMURA SHIGEKI , IKEGAWA YUKINORI
IPC分类号： G11B5/31
CPC分类号： G11B5/314 , G11B5/3163 , G11B2005/0021 , H01L21/31116
摘要： PROBLEM TO BE SOLVED: To form a groove having two wall faces that intersect at a predetermined angle with respect to a layer to be etched made of SiOor SiON.SOLUTION: There is provided a method for taper-etching a layer to be etched that is made of SiOor SiON and has a top surface. The method includes the steps of: forming an etching mask 52 with an opening 52a on the top surface of the layer to be etched; and taper-etching a portion of the layer to be etched, the portion being exposed from the opening 52a, by reactive ion etching so that a groove having two wall faces that intersect at a predetermined angle is formed in the layer to be etched. The etching mask 52 is formed of a material containing Al element. The step of taper-etching employs an etching gas that contains a main component gas, which contributes to the etching of the layer to be etched, and N.
摘要翻译：要解决的问题：形成具有相对于由SiO 2 或SiON制成的被蚀刻层以预定角度相交的两个壁面的凹槽。解决方案：提供了一种用于对由SiO 2 或SiON制成的待蚀刻层进行锥蚀刻并具有顶表面的方法。该方法包括以下步骤：在待蚀刻层的顶表面上形成具有开口52a的蚀刻掩模52; 并且通过反应离子蚀刻使待蚀刻的层的一部分从开口52a暴露出来，使得在待蚀刻的层中形成具有以预定角度相交的两个壁面的凹槽。蚀刻掩模52由含有Al元素的材料形成。锥蚀刻的步骤使用含有主成分气体的蚀刻气体，其有助于蚀刻被蚀刻层，N 2 。版权所有（C）2013，JPO＆INPIT

38. 发明专利

JP2011159374A Heat-assisted magnetic recording head with convergent lens 有权
标题翻译：带辅助镜头的热辅助磁记录头
公开(公告)号：JP2011159374A
公开(公告)日：2011-08-18
申请号：JP2010183549
申请日：2010-08-19
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI , ISHIZAKI KAZUO
IPC分类号： G11B5/60 , G11B5/31
CPC分类号： G11B11/00 , H01L33/00 , H01L2924/0002 , Y10T29/49032 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To achieve easy alignment of incident light with a waveguide, and eliminate the problem that is ascribable to an increased distance from a light source to the waveguide. SOLUTION: A heat-assisted magnetic recording head includes a magnetic pole 20, a waveguide 26 that allows light to propagate therethrough, a near-field light generating element 23 that generates near-field light based on the light propagating through the waveguide 26, a convergent lens 30, and a laser diode disposed over the waveguide 26. The convergent lens 30 transmits light emitted from the laser diode so that the light transmitted through the convergent lens 30 is incident on the waveguide 26. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了实现入射光与波导的容易对准，并且消除了归因于从光源到波导的增加的距离的问题。解决方案：热辅助磁记录头包括磁极20，允许光传播通过的波导26，基于通过波导传播的光产生近场光的近场光产生元件23 26，收敛透镜30和设置在波导26上的激光二极管。会聚透镜30透射从激光二极管发出的光，使得透过会聚透镜30的光入射到波导26上。版权所有：（C）2011，JPO＆INPIT

39. 发明专利

JP2011060419A Magnetic head and method of manufacturing the same, and magnetic head substructure 有权
标题翻译：磁头及其制造方法及磁头基座
公开(公告)号：JP2011060419A
公开(公告)日：2011-03-24
申请号：JP2010256976
申请日：2010-11-17
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , ARAKI HIRONORI , ISHIZAKI KAZUO
IPC分类号： G11B5/31
CPC分类号： G11B5/3166 , G11B5/3163 , G11B5/3169 , G11B5/3173
摘要： PROBLEM TO BE SOLVED: To accurately form a medium facing surface at a desired position. SOLUTION: A method of manufacturing magnetic heads includes the steps of: manufacturing a magnetic head substructure by forming components of a plurality of magnetic heads on a single substrate so that a plurality of rows of pre-head parts that will be the respective magnetic heads later are arrayed in the substructure; and manufacturing the plurality of magnetic heads by separating the plurality of pre-head parts from one another through cutting the substructure. Indicator parts are formed in the magnetic head substructure. The indicator parts include a first indicator 121, a second indicator 122 and one or more pairs of third and fourth indicators (131, 132, 133, 134, 135, 136, 137, 138). Widths of the first and second indicators 121 and 122 are equal in a target location of the medium facing surfaces. The widths of the third and fourth indicators are equal in a position shifted from the target location of the medium facing surfaces. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了在期望的位置精确地形成面向介质的表面。解决方案：制造磁头的方法包括以下步骤：通过在单个基板上形成多个磁头的部件来制造磁头子结构，使得将成为相应的多行预磁头部件磁头稍后排列在子结构中; 以及通过切割所述子结构将所述多个前头部彼此分离来制造所述多个磁头。指示器部件形成在磁头子结构中。指示器部件包括第一指示器121，第二指示器122和一对或多对第三和第四指示器（131,132,133,134,135,136,137,138）。第一和第二指示器121和122的宽度在介质面对表面的目标位置相等。第三和第四指示器的宽度在与介质相对表面的目标位置偏移的位置相等。版权所有（C）2011，JPO＆INPIT

40. 发明专利

JP2010244670A Heat-assisted magnetic recording head with near-field light generating element 有权
标题翻译：具有近场光产生元件的热辅助磁记录头
公开(公告)号：JP2010244670A
公开(公告)日：2010-10-28
申请号：JP2009249727
申请日：2009-10-30
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI
IPC分类号： G11B5/31 , G11B5/02 , G11B5/60
CPC分类号： G11B5/314 , G11B5/3116 , G11B5/6088 , G11B7/122 , G11B7/1387 , G11B2005/0005 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To improve utilization efficiency of a light to be utilized for a generation of a near-field light. SOLUTION: A heat-assisted magnetic recording head includes a magnetic pole 20, a waveguide 26, a near-field light generating element 23, and a substrate 1 on which they are stacked. The near-field light generating element 23 and the waveguide 26 are disposed farther from the top surface of the substrate 1 with respect to the magnetic pole 20. The near-field light generating element 23 has an outer surface including: a first end face located in a medium facing surface 30; a second end face farther from the medium facing surface 30; and a coupling portion coupling the first and second end faces to each other. The first end face includes a near-field light generating part. The waveguide 26 has an outer surface including an opposed portion opposed to a part of the coupling portion. The head further includes a mirror 35 that reflects light emitted from a laser diode 202 disposed above the waveguide 26, so as to let the light travel through the waveguide 26 toward the medium facing surface 30. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提高用于产生近场光的光的利用效率。解决方案：热辅助磁记录头包括磁极20，波导26，近场光产生元件23和它们堆叠在其上的衬底1。近场光产生元件23和波导26相对于磁极20设置在离基板1的上表面更远的位置。近场光产生元件23具有外表面，该外表面包括：第一端面在面向介质的表面30中; 远离介质面向表面30的第二端面; 以及将第一和第二端面彼此连接的联接部分。第一端面包括近场光产生部。波导26具有包括与耦合部分的一部分相对的相对部分的外表面。头部还包括反射镜35，其反射从布置在波导26上方的激光二极管202发射的光，以使光线通过波导26朝着介质面向表面30行进。（C）2011年， JPO＆INPIT

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