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    • 33. 发明授权
    • Scanning optical microscope
    • 扫描光学显微镜
    • US4893008A
    • 1990-01-09
    • US204277
    • 1988-06-09
    • Yoshiaki Horikawa
    • Yoshiaki Horikawa
    • G01N21/88G01N21/64G02B21/00
    • G01N21/6458G02B21/0048G02B21/0076G01N2201/1087
    • A scanning optical microscope comprises a light source, an objective lens for focusing light emitted from the light source upon an object to be observed, a light deflecting optical system provided between the light source and the objective lens and including a light deflector formed by an acousto-optic light deflector (AOD), photoelectric transducing means for detecting light from the object, and light shielding means having an elongated aperture provided between the object and the photoelectric transducing means. Light from the light source is deflected by the AOD to scan the object at a high speed, and light from the object is led to the photoelectric transducing means through the aperture of the light shielding means, without passing through the AOD, to realize confocal microscopy.
    • 扫描光学显微镜包括光源,用于将从光源发射的光聚焦在待观察物体上的物镜,设置在光源和物镜之间的光偏转光学系统,并且包括由声音形成的光偏转器 - 光学偏光器(AOD),用于检测来自物体的光的光电转换装置,以及在物体和光电转换装置之间具有细长孔的遮光装置。 来自光源的光由AOD偏转以高速扫描物体,并且来自物体的光通过遮光装置的孔通过光电转换装置,而不通过AOD,以实现共聚焦显微镜 。
    • 34. 发明授权
    • Scanning type optical microscope
    • 扫描型光学显微镜
    • US4800269A
    • 1989-01-24
    • US065034
    • 1987-06-19
    • Yoshiaki Horikawa
    • Yoshiaki Horikawa
    • G02B21/00G02B26/10G01N21/00
    • G02B21/002
    • In order to make it feasible to obtain a differential phase image having a uniform brightness and good quality, a scanning type optical microscope comprises: a laser light source; an objective lens for collecting, onto an object under observation, a light beam emitting from the laser light source; a scanning light deflector disposed between the laser light source and the objective lens; a light detector comprised of a plurality of photoelectric converters receiving a light from the object and being separated into two sections; a signal processing circuit for calculating the difference between the signals coming from the two sections of the light detector to thereby obtain a differential phase signal; and adjusting means for adjusting the differential phase signal with a signal varying with an image height and being synchronous with the scanning of the light beam.
    • 为了使得获得具有均匀亮度和良好质量的差分相位图像变得可行,扫描型光学显微镜包括:激光源; 用于在观察对象上收集从激光光源发射的光束的物镜; 设置在激光光源和物镜之间的扫描光偏转器; 光检测器,由多个光电转换器构成,所述多个光电转换器从所述物体接收光并将其分成两部分; 信号处理电路,用于计算来自光检测器的两个部分的信号之间的差,从而获得差分相位信号; 以及调整装置,用于利用以图像高度变化并与光束的扫描同步的信号来调整差分相位信号。
    • 38. 发明授权
    • Soft X-ray microscope
    • 软X射线显微镜
    • US5311565A
    • 1994-05-10
    • US890150
    • 1992-05-29
    • Yoshiaki Horikawa
    • Yoshiaki Horikawa
    • G02B21/00G21K1/06G21K7/00
    • G21K7/00
    • A soft X-ray microscope comprising a soft X-ray radiation source which is substantially a spot radiation source, a condenser for leading soft X-rays from the radiation source to a sample, a reflecting mirror for grazing incidence which is disposed between the radiation source and the condenser, and has a rough reflecting surface, an objective optical system for forming a magnified image of the sample, and a soft X-ray detector for receiving the soft X-rays from the objective optical system. This microscope exhibits excellent imaging characteristic even when it uses a spot radiation source.
    • 一种软X射线显微镜,包括基本上是点辐射源的软X射线辐射源,用于将来自辐射源的软X射线引导到样品的冷凝器,用于放射入射的反射镜,其设置在辐射 源极和冷凝器,并且具有粗糙的反射面,用于形成样品的放大图像的物镜光学系统和用于从物镜光学系统接收软X射线的软X射线检测器。 即使使用点辐射源,该显微镜也具有优异的成像特性。
    • 39. 发明授权
    • Surface structure measuring apparatus
    • 表面结构测量装置
    • US4930896A
    • 1990-06-05
    • US320850
    • 1989-03-02
    • Yoshiaki Horikawa
    • Yoshiaki Horikawa
    • G02B7/28G01B11/24G01C3/06
    • G01B11/24
    • In order to make possible a high-speed measurement of the surface structure of a sample of any shape or any weight and also to make feasible a direct observation of the surface portion requiring measurement, the surface structure measuring apparatus comprises: a laser light beam source; an objective lens collecting the laser light beam emitting from the light source onto the surface of the sample; a pair of light deflectors disposed at positions conjugate with the pupil of the objective lens, respectively, to perform two-dimensional scanning of the surface of the sample by altering the incidence angle of the laser light beam impinging onto the objective lens; an observation optical system incorporated between the objective lens and the light deflectors for the observation of the surface of the sample; focus detecting device receiving the light reflected at the surface of the sample for detecting a displacement of the surface portion of the sample requiring measurement from a predetermined focal position; and image processing and indicating device for indicating the structure of the measured surface of the sample based on the output delivered from the focus detecting device.
    • 为了能够高速测量任何形状或任何重量的样品的表面结构,并且还可以直接观察需要测量的表面部分,表面结构测量装置包括:激光束源 ; 将从光源发射的激光束收集到样品的表面上的物镜; 一对光偏转器,分别设置在与物镜的光瞳共轭的位置处,以通过改变入射到物镜上的激光束的入射角来对样品的表面进行二维扫描; 一个结合在物镜和光偏转器之间用于观察样品表面的观察光学系统; 接收在样品表面反射的光的聚焦检测装置,用于检测需要测量的样品的表面部分从预定焦点位置的位移; 以及图像处理和指示装置,用于基于从焦点检测装置输出的输出来指示样本的测量表面的结构。
    • 40. 发明授权
    • Lens system having aberrations corrected at near distance focusing
    • 透镜系统具有近距离聚焦校正的像差
    • US4747677A
    • 1988-05-31
    • US333698
    • 1981-12-23
    • Yoshiaki HorikawaToshihiro ImaiYasuzi Ogata
    • Yoshiaki HorikawaToshihiro ImaiYasuzi Ogata
    • G02B9/60G02B9/62G02B13/02
    • G02B9/62G02B13/02
    • A lens system comprising a front lens group consisting of a first, second and third lens components respectively of positive meniscus lenses with the convex surfaces on the object side and a fourth lens component of a negative meniscus lens and a rear lens group consisting of a fifth lens component of a positive or negative cemented meniscus lens with the convex surfaces on the image side and a sixth lens component of a positive lens. In this lens system, the entire lens system is moved along an optical axis to focus and an airspace between the fourth and fifth lens component and an airspace between the fifth and sixth lens components are respectively varied non-linearly to correct the collapse of aberrations. The front lens group may consist of a first lens component of a positive lens, a second lens component of a negative lens and a third lens component of a positive lens and the rear lens group may consist of a fourth lens component of a negative lens and a fifth lens component of a positive lens. In this case, an airspace between the third and fourth lens components and an airspace between the fourth and fifth lens components are respectively varied non-linearly to correct the collapse of aberrations.
    • 一种透镜系统,包括前透镜组,其由分别具有物体侧的凸面的正弯月形透镜的第一,第二和第三透镜部件以及负弯月形透镜的第四透镜部件和由第五透镜组 具有图像侧的凸面的正或负结合的弯月形透镜的透镜部件和正透镜的第六透镜部件。 在该透镜系统中,整个透镜系统沿着光轴移动以进行聚焦,并且分别在第四和第五透镜部件之间的空间与第五和第六透镜部件之间的空间间隔非线性地改变以校正像差的崩溃。 前透镜组可以由正透镜的第一透镜部件,负透镜的第二透镜部件和正透镜的第三透镜部件组成,并且后透镜组可以由负透镜的第四透镜部件和 正透镜的第五透镜部件。 在这种情况下,在第三和第四透镜部件之间的空间和第四和第五透镜部件之间的空间分别被非线性地改变以校正像差的崩溃。