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    • 35. 发明授权
    • Abrasive cloth dresser
    • 研磨布梳妆台
    • US5421768A
    • 1995-06-06
    • US266593
    • 1994-06-28
    • Yukio FujiwaraKeiichi ShiraiFumio Inoue
    • Yukio FujiwaraKeiichi ShiraiFumio Inoue
    • B24B53/007B24B53/017B24B53/10G11B7/26B24B5/00B24B29/00
    • B24B53/017G11B7/26
    • An abrasive cloth dresser which can efficiently remove reaction products soaked into abrasive cloths for polishing semiconductor wafers etc. without scattering the reaction products. The abrasive cloth dresser includes a rotating hollow arm shaft 7, a high-pressure pure water jetting head 8 provided at a distal end of the hollow arm shaft, and a brush hood 11 provided at a distal end of the high-pressure pure water jetting head 8 and having a brush 16 planted thereto. The high-pressure pure water jetting head 8 includes a jet nozzle 83 through which high-pressure pure water is jetted for impacting reaction products soaked into a piece of abrasive cloth 3 to come out for removal. The brush 16 is elliptical in shape, and has a planted bristle density which is lower in a brush left-hand portion 161 near the high-pressure pure water injection center IC, but higher in a brush central portion 162 and a brush right-hand portion 163. Accordingly, the spent pure water and the reaction products are caused to reside in a pure water pool area WP, following which the pure water having lost energy and the reaction products are discharged through the brush left-hand portion 161 without scattering to the surroundings.
    • 一种研磨布修整器,其可以有效地去除浸入研磨布中的反应产物,以抛光半导体晶片等而不散射反应产物。 研磨布修整器包括旋转的中空臂轴7,设置在中空臂轴的远端处的高压纯水喷射头8和设置在高压纯水喷射器的远端处的刷罩11 头部8并具有种植在其上的刷子16。 高压纯水喷射头8包括喷射喷嘴83,通过喷射喷嘴83喷射高压纯水以冲击浸入一块研磨布3中的反应产物,以便排出以除去。 刷子16的形状为椭圆形,并且在高压纯水注入中心IC附近的刷子左侧部分161中具有较低的种植刷毛密度,但是在刷子中心部分162和刷子右侧更高 部分163.因此,将废水和反应产物置于纯水池区域WP中,随后将失去能量的纯水和反应产物通过刷子左手部分161排出,而不会分散到 周围环境。
    • 37. 发明申请
    • ANALYZER AND METHOD OF ANALYZING
    • 分析仪和分析方法
    • US20120074214A1
    • 2012-03-29
    • US13247298
    • 2011-09-28
    • Toru MizumotoFumio Inoue
    • Toru MizumotoFumio Inoue
    • G06F17/00
    • G01N35/00732G01N35/00663
    • An analyzer which analyzes an analyte by using the analyte and consumables, the analyzer comprising: an automatic reading device which reads a first product information related to a consumable via an identifier given to the consumable or a container containing the consumable; and a controller which permits an analysis operation when the first product information is suitable information read by the automatic reading device via the identifier, and prompts an operator to manually enter a second product information comprising information specifying the manufacturer or seller of the consumable when the automatic reading device cannot read the identifier or the information read via the identifier is not suitable as the first product information and permits the analysis operation and storage of the input second product information when the operator has entered the second product information.
    • 一种分析器,其通过使用分析物和消耗品来分析分析物,所述分析仪包括:自动读取装置,其经由给予所述消耗品的标识符或含有所述消耗品的容器读取与消耗品相关的第一产品信息; 以及控制器,当所述第一产品信息是由所述自动读取装置经由所述标识符读取的适合信息时,允许分析操作,并且提示操作者手动输入第二产品信息,所述第二产品信息包括指定所述消耗品的制造商或卖方的信息, 读取装置不能读取标识符或通过标识符读取的信息不适合作为第一产品信息,并且当操作者已经进入第二产品信息时允许输入的第二产品信息的分析操作和存储。