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    • 31. 发明授权
    • Removal of field and embedded metal by spin spray etching
    • 通过旋转喷涂蚀刻去除场和嵌入金属
    • US5486234A
    • 1996-01-23
    • US375054
    • 1995-01-19
    • Robert J. ContoliniSteven T. MayerLisa A. Tarte
    • Robert J. ContoliniSteven T. MayerLisa A. Tarte
    • H01L21/3213H01L21/768H01L21/00
    • H01L21/76838H01L21/32134
    • A process of removing both the field metal, such as copper, and a metal, such as copper, embedded into a dielectric or substrate at substantially the same rate by dripping or spraying a suitable metal etchant onto a spinning wafer to etch the metal evenly on the entire surface of the wafer. By this process the field metal is etched away completely while etching of the metal inside patterned features in the dielectric at the same or a lesser rate. This process is dependent on the type of chemical etchant used, the concentration and the temperature of the solution, and also the rate of spin speed of the wafer during the etching. The process substantially reduces the metal removal time compared to mechanical polishing, for example, and can be carried out using significantly less expensive equipment.
    • 通过将合适的金属蚀刻剂滴落或喷涂到旋转的晶片上以均匀地蚀刻金属,以基本上相同的速率将现场金属(例如铜)和金属(例如铜)两者嵌入电介质或基底中的步骤 晶片的整个表面。 通过该处理,在以相同或较小的速率蚀刻电介质中的图案化特征内的金属的同时蚀刻完全场地金属。 该过程取决于所使用的化学蚀刻剂的类型,溶液的浓度和温度,以及蚀刻期间晶片的旋转速度。 例如,与机械抛光相比,该方法显着降低了金属去除时间,并且可以使用显着更便宜的设备进行。
    • 36. 发明授权
    • Method and apparatus for generating moving objects on a video display
screen
    • 用于在视频显示屏上产生移动物体的方法和装置
    • US4112422A
    • 1978-09-05
    • US749725
    • 1976-12-13
    • Steven T. MayerRonald E. Milner
    • Steven T. MayerRonald E. Milner
    • H04N7/18A63F13/00G06F19/00G06T13/00G09G5/00G09G5/36G06F3/14
    • A63F13/55A63F13/00G06T13/00A63F2300/203
    • A method and apparatus for generating moving objects for a video game display. Common apparatus including a microprocessor with RAM provides vertical motion for all objects and separate horizontal position counting hardware horizontal motion for each object. The microprocessor operating on a horizontal line pair basis drives a parallel to serial converter which stores one eight bit line portion of the object to be displayed which in turn is connected to a shift register. When the converted data is read out to the video display by action of the appropriate horizontal position hardware, it is recirculated to provide a repeat on the next horizontal line of the identical data. An effective one line moving resolution is obtained by utilizing another shift register for a one line delay by means of a switch which is set by a latch driven by the microprocessor.
    • 一种用于产生用于视频游戏显示的移动物体的方法和装置。 包括具有RAM的微处理器的通用设备为所有物体提供垂直运动,并且为每个物体分开水平位置计数硬件水平运动。 以水平线对为单位的微处理器驱动一个并行到串行转换器,该串行转换器存储待显示对象的一个​​八位线部分,后者又连接到移位寄存器。 当通过适当的水平位置硬件的动作将转换的数据读出到视频显示器时,它被再循环以在相同数据的下一个水平行上提供重复。 通过利用由微处理器驱动的锁存器设置的开关来利用用于一行延迟的另一移位寄存器来获得有效的一行移动分辨率。