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31. 发明专利

JPH0933260A ANGULAR VELOCITY SENSOR 失效
公开(公告)号：JPH0933260A
公开(公告)日：1997-02-07
申请号：JP20538595
申请日：1995-07-18
申请人： DENSO CORP
发明人： WATARAI TAKEHIRO , HAYASHI TETSUSHI , KAWASE TOMOO , TAKEUCHI SACHIOSA
IPC分类号： G01C19/56 , G01C19/5614 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity sensor, which does not generate a false yaw rate. SOLUTION: Detecting piezoelectric elements 2, which detect the displacement by Coriolis force, are stuck to the tip parts of upper surfaces 1b of a prism- tuning-fork type piezoelectric transducer 1. Dummy elements 21, which control the vibrations of the piezoelectric transducers 1, are stuck to the side of supporting parts 1a of the upper surfaces 1b. A reference piezoelectric element 3, which monitors the driving state of the piezoelectric transducer 1, is stuck to an outer surface 1c. A driving piezoelectric element 4, which drives the piezoelectric transducer 1 in the constant direction at a constant period, is stuck to the side of the supporting part 1a of the outer surface 1c. The piezoelectric transducer 1 is fixed to a base stage 8 approximately in parallel in the floating pattern with a clamp 9. At the central part of the base stage 8, a hermetic terminal 5, on which lead pins 6 are arranged, is provided. The lead pins 6 and the piezoelectric elements 2, 3 and 4 are electrically connected with thin wires 7.

32. 发明专利

JPH11351874A ANGULAR VELOCITY SENSOR AND ITS ADJUSTMENT METHOD 失效
公开(公告)号：JPH11351874A
公开(公告)日：1999-12-24
申请号：JP12474598
申请日：1998-05-07
申请人： DENSO CORP
发明人： WATARAI TAKEHIRO
IPC分类号： G01C19/56 , G01C19/5628 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To reduce the offset of a detection signal being generated due to the unneeded vibration of a vibrator and its temperature drift in an angular velocity sensor for detecting an angular velocity using the vibrator consisting of a piezoelectric body in the shape of a tuning fork or in a shape where a plurality of tuning forks are combined. SOLUTION: In an angular velocity sensor with a vibrator 2 in the shape of a tuning fork consisting of a piezoelectric body, the vibrator 2 is excited and vibrated in the direction of a drive axis via a self-excitated oscillation circuit 40 and a ridge near the root of the vibrator 2 for greatly affecting the vibration characteristics of the vibrator 2 is trimmed so that a detection signal (offset) obtained via a detection circuit 50 at that time (when no angular velocity is inputted) can be reduced. Also, the ridge to be trimmed is determined by inputting a reference signal Vr for indicating the actual vibration state of the vibrator 2 and a detection signal to a locking amplifier 60 and detecting the phase relationship for the reference signal Vr of the detection signal, thus achieving an angular velocity sensor for efficiently adjusting the vibration characteristics of the vibrator 2 and for accurately detecting an angular velocity.

33. 发明专利

JPH11271065A ANGULAR VELOCITY SENSOR 失效
公开(公告)号：JPH11271065A
公开(公告)日：1999-10-05
申请号：JP34728798
申请日：1998-12-07
申请人： DENSO CORP
发明人： WATARAI TAKEHIRO
IPC分类号： G01C19/56 , G01C19/5614 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To efficiently convert the Coriolis force into a sensitivity to enable the S/N improvement in an angular velocity sensor having an oscillator having four beams. SOLUTION: An oscillator 1 has a comb type tuning fork having four parallel beams 2-5 whose ends at one side are commonly supported by a coupling 6, the inner pair of beams 3, 4 are driving beams, and outer pair of beams 2, 5 are detecting beams. The oscillator 1 is supported by a torsion beam 8 which is located on the center line of the oscillator 1, say, z-axis and has a narrower width in the y-axis direction than the remove of the inner pair of beams 3, 4. Upon the input of an angular velocity around the z-axis, the adjacent beams 2-5 oscillate mutually reverse in the x-axis direction and the sizes of the oscillator 1 and torsion beam 8 are selected so that the ratio of the amplitude XU of the inner pair of beams 3, 4 to that XS of the outer pair of beams 2, 5 is 10 or less.

34. 发明专利

JPH1164003A ANGULAR VELOCITY SENSOR 失效
公开(公告)号：JPH1164003A
公开(公告)日：1999-03-05
申请号：JP5818098
申请日：1998-03-10
申请人： DENSO CORP
发明人： YAMADA YUTAKA , WATARAI TAKEHIRO , KUROKI HISAO , MIZUTANI KEN
IPC分类号： G01C19/56 , G01C19/5628 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide a lead wire configuration for reducing the dispersion in temperature drift for each sensor, in a lead wire connection type angular velocity sensor wherein a lead wire is taken out from a drive and detection electrodes on a vibrator. SOLUTION: On an X1 surface of a vibrator 1, drive electrodes 101 and 102 for vibrating the vibrator 1 in y-axis direction, monitor electrodes 103 and 104 for self-oscillation control, take-out electrodes 105 and 106 electrically conducted to a common electrode 111 on an X2 surface, and detection electrodes 109 and 110 for detecting angular velocity are provided. Respective electrodes on the X1 surface and connection terminals P1-P8 on a substrate 2 are connected together with lead wires S1-S8, while lead wires S1-S8 has a resonance frequency higher than the frequency of drive vibration of the vibrator 1.

35. 发明专利

JPH10274532A ANGULAR VELOCITY SENSOR 失效
公开(公告)号：JPH10274532A
公开(公告)日：1998-10-13
申请号：JP21192697
申请日：1997-08-06
申请人： DENSO CORP
发明人： TAKEUCHI SACHIOSA , HAYASHI TETSUSHI , WATARAI TAKEHIRO
IPC分类号： G01C19/56 , G01C19/5628 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity sensor in which a vibrator can be positioned easily with accuracy. SOLUTION: A base 3 of plate shape to which a vibrator 4 formed in tuning fork shape is fitted through a support member 6 has a recessed part 3a formed in an opposed part to the vibrator 4. Since the mutually bonded faces 4a, 6a of the vibrator 4 and support member 6 are formed in the same shape and the same dimensions, the vibrator 4 and support member 6 can be assembled easily with high position accuracy by bonding them in the state of pressing the edge parts of the bonded faces to flat faces so that the edge parts coincide with each other. Since the recessed part 3a is formed at the base 3, the support member 6 (and furthermore the vibrator 4) can be assembled to the base 3 easily with high position accuracy by bringing a fixed face 6b of the support member 6 into close contact with the base 3 and aligning the upper edge of a fixed part 36 of the support member 6 and the lower edge of the recessed part 3a.

36. 发明专利

JP2002022447A ANGULAR SPEED SENSOR 失效
公开(公告)号：JP2002022447A
公开(公告)日：2002-01-23
申请号：JP2000205428
申请日：2000-07-06
申请人： DENSO CORP
发明人： HIROSE YOSHIMASA , HAYASHI TETSUSHI , WATARAI TAKEHIRO
IPC分类号： G01C19/56 , G01C19/5628 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide an angular speed sensor in which the temperature characteristics, for example, are enhanced sufficiently. SOLUTION: A sensor part 20 comprising an oscillator 21 for detecting the angular speed about a specified axis and a base 22 secured with the oscillator 21 is provided with a vibration isolating member 50 having a resonance frequency separated by 3% from that of the oscillator 21. Consequently, resonance of the oscillator 21 and the vibration isolating member 50 can be suppressed and the temperature characteristics can be enhanced.

37. 发明专利

JP2000146590A ANGULAR VELOCITY SENSOR 失效
公开(公告)号：JP2000146590A
公开(公告)日：2000-05-26
申请号：JP32374998
申请日：1998-11-13
申请人： DENSO CORP
发明人： WATARAI TAKEHIRO , KATO KENJI , MIURA KAZUHIKO , AKIMOTO KATSUHIDE
IPC分类号： G01C19/56 , G01C19/5614 , G01P21/00 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide a vibration type angular velocity sensor capable of detecting the wire disconnection of a driving system and a detecting system. SOLUTION: A driving system A1 of a control circuit of an angular velocity sensor makes self-excited vibration of a vibrator 1 by using a feedback signal (FB signal) at a specified frequency fd. An angular velocity detecting system A2 detects the state of vibration in the direction perpendicular to the exciting direction of the vibrator 1, performs synchronous detection with a signal of a frequency equal to the FB signal, and outputs an angular velocity detecting signal S1. A signal input system A31 inputs a signal for failure diagnosis having a frequency 2fd different from the FB signal from electrodes 17, 18 for diagnosis. A failure detecting system 32 detects a signal based on the signal for failure diagnosis from angular velocity detecting electrodes 21, 22, performs synchronous detection with a signal having the same frequency as the signal for failure diagnosis, and outputs a failure detection signal R1.

38. 发明专利

JPH11271066A ANGULAR VELOCITY SENSOR 失效
公开(公告)号：JPH11271066A
公开(公告)日：1999-10-05
申请号：JP36302598
申请日：1998-12-21
申请人： DENSO CORP
发明人： WATARAI TAKEHIRO
IPC分类号： G01C19/56 , G01C19/5614 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To suppress the oscillation leak from a driving beam to a detecting beam, and efficiently transmit the oscillation energy by the Coriolis force from the driving beam to the detecting beam to obtain a high-S/N sensor. SOLUTION: An oscillation member G comprises an approximately U-shaped driving oscillator having a pair of beams 2, 3 and coupling and an approximately U-shaped driving oscillator 5 which has a pair of beams 6, 7 and coupling 8 and is disposed analogously around the driving oscillator 1 having a driving electrode 20 for driving the beams 2, 3 in opposite phase in an x-axis direction, while the driving oscillator 1 has detecting electrodes 22-23 for detecting the oscillation of the beams 6, 7 in opposite phase in the x-axis direction upon input of an angular velocity around the x-axis. Both oscillators 1, 5 are coupled by a torsion beam 9 having a shape of a narrower width in the x-axis direction than that of the inner driving oscillator 1.

39. 发明专利

JPH1194560A ANGULAR SPEED SENSOR 失效
公开(公告)号：JPH1194560A
公开(公告)日：1999-04-09
申请号：JP3523998
申请日：1998-02-17
申请人： DENSO CORP
发明人： SUZUKI HIROBUMI , YAMAMOTO TAKASHI , NAGAYA TOSHIATSU , WATARAI TAKEHIRO
IPC分类号： G01C19/56 , G01C19/5607 , H01L41/08 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To obtain an angular speed sensor having high sensitivity and stabilized against temperature variation by setting the minimum value of the product d31 ×Q of the piezoelectric constant d31 and the resonance sharpness Q of a piezoelectric forming an oscillator at a specified value or above, and setting the ratio between the maximum and minimum values of d31 ×Q at a specified value or below thereby attaining monotone increase/decrease temperature characteristics. SOLUTION: The d31 and Q of a piezoelectric forming the oscillator of an angular speed sensor having a tuning fork piece piezoelectric oscillator are set such that the product of d31 ×Q has a minimum value of about 2.5×10 m /V or above in the working temperature range of the sensor (about -40-85 deg.C). Consequently, the oscillator drives oscillation efficiently and can detect oscillation with high sensitivity. Temperature fluctuation of sensitivity is suppressed by setting the temperature fluctuation rate, i.e., the ratio between the maximum and minimum values of d31 ×Q, at about 4 or below. Furthermore, temperature correction of sensitivity can be facilitated through simple circuitry by attaining monotone increase/decrease temperature characteristics of d31 ×Q. Consequently, a high sensitivity stabilized against temperature fluctuation in the range of about -40-85 deg.C an be attained.

40. 发明专利

JPH1183499A ANGULAR VELOCITY SENSOR AND ITS MANUFACTURE 失效
公开(公告)号：JPH1183499A
公开(公告)日：1999-03-26
申请号：JP3523698
申请日：1998-02-17
申请人： DENSO CORP
发明人： YAMAMOTO TAKASHI , SUZUKI HIROBUMI , NAGAYA TOSHIATSU , WATARAI TAKEHIRO
IPC分类号： G01C19/56 , G01C19/5628 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide a connecting structure of excellent reliability whereby the electrodes on the both surfaces are connected electrically striding over corner part stretching in the longitudinal direction of the vibrating part, in an angular velocity sensor equipped with vibrator in which electrodes are respectively formed on the both perpendicularly intersecting surfaces extending in the longitudinal direction of the vibrating part of a quadrangular prism. SOLUTION: The vibrator 1 consisting of a piezoelectric body has arms 4 and 5 in the form of a quadrangular prism, and electrodes 10-17 for driving, reference, takeout are formed on the X1 plane as one of the side faces of the arms, while sensing electrodes 19... are formed on the Y1 and Y2 planes perpendicularly intersecting the X1 plane, and a common electrode 20 is formed on the X2 plane opposing to the X1 plane. The sensing and common electrodes 20... are led to the takeout electrodes 14-17 by connecting electrodes 24... formed on the Y1 and Y2 planes. The electrodes 10-24 are made of conductive film, and the electrode connection structure of the angle part E is such that the electrode films extending from different planes constitute an overlapping part K striding the corner part E and overlapping joined with each other.

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