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31. 发明授权

US09618610B2 Time of flight system capable of increasing measurement accuracy, saving power and/or increasing motion detection rate and method thereof 有权
公开(公告)号：US09618610B2
公开(公告)日：2017-04-11
申请号：US13044563
申请日：2011-03-10
申请人： Ming-Tsan Kao , En-Feng Hsu , Chuan-Wei Wang
发明人： Ming-Tsan Kao , En-Feng Hsu , Chuan-Wei Wang
IPC分类号： G01S17/89 , G01S7/491
CPC分类号： G01S7/4918 , G01S17/89
摘要： A light source is used for emitting an invisible light toward an object. The object reflects the invisible light and reflected light is formed, and a sensor is used for receiving the reflected light. A processor is coupled to the sensor for recording a time interval of the invisible light traveling from the light source to the object and reflected from the object to the sensor. Then, the processor estimates a measurement distance of the object according to the time interval, and adjusts an emission period of the light source, an exposure period of the sensor, intensity of the invisible light, and/or main sensing range of the sensor according to the measurement distance.

32. 发明授权

US09258652B2 Microphone structure 有权
标题翻译：麦克风结构
公开(公告)号：US09258652B2
公开(公告)日：2016-02-09
申请号：US14245558
申请日：2014-04-04
申请人： Chuan-Wei Wang
发明人： Chuan-Wei Wang
IPC分类号： H04R19/00 , H04R19/04 , H04R31/00
CPC分类号： H04R19/005 , H04R19/04 , H04R31/00
摘要： A microphone structure is disclosed. The microphone structure comprises a substrate penetrated with at least one opening chamber and having an insulation surface. A conduction layer is arranged on the insulation surface and arranged over the opening chamber. An insulation layer is arranged on the conduction layer and having a opening to expose a part of the conduction layer as a vibration block arranged over the opening chamber. At least two first patterned electrodes are arranged on the insulation layer and arranged over the vibration block. At least two second patterned electrodes are arranged over the opening chamber, arranged on the vibration block and separated from the first patterned electrodes by at least two first gaps. When the vibration block vibrates, the vibration block moves the second patterned electrodes whereby the second patterned electrodes and the first patterned electrodes perform differential sensing.
摘要翻译：公开了麦克风结构。麦克风结构包括穿透至少一个开口腔并具有绝缘表面的基底。导电层布置在绝缘表面上并且布置在开口室之上。绝缘层布置在导电层上，并具有用于将导电层的一部分暴露为布置在开口室上方的振动块的开口。至少两个第一图案化电极布置在绝缘层上并且布置在振动块上。至少两个第二图案化电极布置在开口室上方，布置在振动块上，并与第一图案化电极分开至少两个第一间隙。当振动块振动时，振动块移动第二图案化电极，由此第二图案化电极和第一图案化电极执行差分感测。

33. 发明申请

US20130334623A1 MEMS Sensing Device and Method for the Same 有权
标题翻译： MEMS感应装置及其方法
公开(公告)号：US20130334623A1
公开(公告)日：2013-12-19
申请号：US13948128
申请日：2013-07-22
申请人： Chuan-Wei Wang , Ming-Han Tsai
发明人： Chuan-Wei Wang , Ming-Han Tsai
IPC分类号： B81B3/00
CPC分类号： B81B3/0021 , B81C1/00333 , B81C2203/0118 , B81C2203/0735 , G01L9/0073
摘要： The present invention discloses a MEMS sensing device which comprises a substrate, a MEMS device region, a film, an adhesive layer, a cover, at least one opening, and a plurality of leads. The substrate has a first surface and a second surface opposite the first surface. The MEMS device region is on the first surface, and includes a chamber. The film is overlaid on the MEMS device region to seal the chamber as a sealed space. The cover is mounted on the MEMS device region and adhered by the adhesive layer. The opening is on the cover or the adhesive layer, allowing the pressure of the air outside the device to pressure the film. The leads are electrically connected to the MEMS device region, and extend to the second surface.
摘要翻译：本发明公开了一种MEMS感测装置，其包括衬底，MEMS器件区域，膜，粘合剂层，盖，至少一个开口和多个引线。衬底具有与第一表面相对的第一表面和第二表面。 MEMS器件区域在第一表面上，并且包括腔室。膜被覆盖在MEMS器件区域上，以密封腔室作为密封空间。盖安装在MEMS器件区域上，并通过粘合剂层粘合。开口在盖子或粘合剂层上，允许装置外的空气的压力对膜施加压力。引线电连接到MEMS器件区域，并延伸到第二表面。

34. 发明申请

US20130313662A1 MEMS MICROPHONE DEVICE AND METHOD FOR MAKING SAME 审中-公开
标题翻译： MEMS麦克风装置及其制造方法
公开(公告)号：US20130313662A1
公开(公告)日：2013-11-28
申请号：US13959279
申请日：2013-08-05
申请人： Chuan-Wei Wang , Chih-Ming Sun
发明人： Chuan-Wei Wang , Chih-Ming Sun
IPC分类号： B81B7/00
CPC分类号： B81B7/0051 , H04R19/005 , H04R19/04
摘要： The present invention discloses a MEMS microphone device and its manufacturing method. The MEMS microphone device includes: a substrate including a first cavity; a MEMS device region above the substrate, wherein the MEMS device region includes a metal layer, a via layer, an insulating material region and a second cavity; a mask layer above the MEMS device region; a first lid having at least one opening communicating with the second cavity, the first lid being fixed above the mask layer; and a second lid fixed under the substrate.
摘要翻译：本发明公开了一种MEMS麦克风装置及其制造方法。 MEMS麦克风装置包括：基板，包括第一腔; 在所述衬底上方的MEMS器件区域，其中所述MEMS器件区域包括金属层，通孔层，绝缘材料区域和第二腔体; 在MEMS器件区域上方的掩模层; 第一盖，其具有与所述第二腔连通的至少一个开口，所述第一盖固定在所述掩模层的上方; 以及固定在基板下方的第二盖。

35. 发明授权

US08479576B2 MEMS device and deformation protection structure therefor and method for making same 有权
标题翻译： MEMS器件及其变形保护结构及其制作方法
公开(公告)号：US08479576B2
公开(公告)日：2013-07-09
申请号：US12932869
申请日：2011-03-08
申请人： Chuan-Wei Wang
发明人： Chuan-Wei Wang
IPC分类号： G01P15/125 , G01R3/00 , H01S4/00
CPC分类号： G01P15/125 , G01P15/0802 , Y10T29/49002 , Y10T29/49007 , Y10T29/49155
摘要： The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) device with a deformation protection structure. The MEMS device is located on a substrate, and it includes: a movable part; and a deformation protection structure, which has: a fixed plug, which is fixed on the substrate; multiple metal layers, including a top metal layer; and multiple plugs connecting the multiple metal layers. From top view, the top metal layer overlaps a portion of the movable part, and from cross section view, the bottom surface of the top metal layer is higher than the top surface of the movable part by a predetermined distance.
摘要翻译：本发明公开了一种具有变形保护结构的MEMS（微机电系统，MEMS）装置。 MEMS器件位于衬底上，它包括：可动部分; 以及变形保护结构，其具有：固定在所述基板上的固定塞; 多个金属层，包括顶部金属层; 以及连接多个金属层的多个插头。从顶视图看，顶部金属层与可移动部分的一部分重叠，并且从横截面图，顶部金属层的底表面高于可移动部分的顶表面预定距离。

36. 发明申请

US20120261775A1 MEMS microphone device and method for making same 有权
标题翻译： MEMS麦克风装置及其制作方法
公开(公告)号：US20120261775A1
公开(公告)日：2012-10-18
申请号：US13135417
申请日：2011-07-06
申请人： Chuan-Wei Wang , Chih-Ming Sun
发明人： Chuan-Wei Wang , Chih-Ming Sun
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： B81B7/0051 , H04R19/005 , H04R19/04
摘要： The present invention discloses a MEMS microphone device and its manufacturing method. The MEMS microphone device includes: a substrate including a first cavity; a MEMS device region above the substrate, wherein the MEMS device region includes a metal layer, a via layer, an insulating material region and a second cavity; a mask layer above the MEMS device region; a first lid having at least one opening communicating with the second cavity, the first lid being fixed above the mask layer; and a second lid fixed under the substrate.
摘要翻译：本发明公开了一种MEMS麦克风装置及其制造方法。 MEMS麦克风装置包括：基板，包括第一腔; 在所述衬底上方的MEMS器件区域，其中所述MEMS器件区域包括金属层，通孔层，绝缘材料区域和第二腔体; 在MEMS器件区域上方的掩模层; 第一盖，其具有与所述第二腔连通的至少一个开口，所述第一盖固定在所述掩模层的上方; 以及固定在基板下方的第二盖。

37. 发明申请

US20120248555A1 MEMS sensing device and method for making same 失效
标题翻译： MEMS感测装置及其制造方法
公开(公告)号：US20120248555A1
公开(公告)日：2012-10-04
申请号：US13134262
申请日：2011-06-03
申请人： Chuan-Wei Wang , Ming-Han Tsai
发明人： Chuan-Wei Wang , Ming-Han Tsai
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： B81B3/0021 , B81C1/00333 , B81C2203/0118 , B81C2203/0735 , G01L9/0073
摘要： The present invention discloses a MEMS sensing device which comprises a substrate, a MEMS device region, a film, an adhesive layer, a cover, at least one opening, and a plurality of leads. The substrate has a first surface and a second surface opposite the first surface. The MEMS device region is on the first surface, and includes a chamber. The film is overlaid on the MEMS device region to seal the chamber as a sealed space. The cover is mounted on the MEMS device region and adhered by the adhesive layer. The opening is on the cover or the adhesive layer, allowing the pressure of the air outside the device to pressure the film. The leads are electrically connected to the MEMS device region, and extend to the second surface.
摘要翻译：本发明公开了一种MEMS感测装置，其包括衬底，MEMS器件区域，膜，粘合剂层，盖，至少一个开口和多个引线。衬底具有与第一表面相对的第一表面和第二表面。 MEMS器件区域在第一表面上，并且包括腔室。膜被覆盖在MEMS器件区域上，以密封腔室作为密封空间。盖安装在MEMS器件区域上，并通过粘合剂层粘合。开口在盖子或粘合剂层上，允许装置外的空气的压力对膜施加压力。引线电连接到MEMS器件区域，并延伸到第二表面。

38. 发明申请

US20070144258A1 Accelerometer 失效
标题翻译：加速度计
公开(公告)号：US20070144258A1
公开(公告)日：2007-06-28
申请号：US11591617
申请日：2006-11-02
申请人： Chia-Yi Chu , Heng-Chung Chang , Chuan-Wei Wang , Chih-Ming Sun , Wei-Leun Fang , Shiang-Cheng Lu , Hsieh-Shen Hsieh , Horng-Jou Wang , Tai-Kang Shing , Huang-Kun Chen
发明人： Chia-Yi Chu , Heng-Chung Chang , Chuan-Wei Wang , Chih-Ming Sun , Wei-Leun Fang , Shiang-Cheng Lu , Hsieh-Shen Hsieh , Horng-Jou Wang , Tai-Kang Shing , Huang-Kun Chen
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0814
摘要： An accelerometer includes a fixing unit and a movable unit. The fixing unit has a plurality of first electrode parts and a plurality of second electrode parts. The movable unit is connected with the fixing unit and includes a body having an opening, a plurality of third electrode parts and a plurality of fourth electrode parts. The third electrode parts are disposed at an outer side of the body with respect to the first electrode parts, respectively. The fourth electrode parts are disposed at the inner side of the body in the opening, and are disposed respectively with respect to the second electrode parts, respectively.
摘要翻译：加速度计包括固定单元和可移动单元。固定单元具有多个第一电极部分和多个第二电极部分。可移动单元与固定单元连接，并且包括具有开口的主体，多个第三电极部分和多个第四电极部分。第三电极部分分别相对于第一电极部分设置在主体的外侧。第四电极部分设置在开口内的主体的内侧，分别相对于第二电极部分设置。

39. 发明授权

US08772885B2 MEMS sensing device and method for the same 有权
标题翻译： MEMS感测装置及其方法相同
公开(公告)号：US08772885B2
公开(公告)日：2014-07-08
申请号：US13948128
申请日：2013-07-22
申请人： Chuan-Wei Wang , Ming-Han Tsai
发明人： Chuan-Wei Wang , Ming-Han Tsai
IPC分类号： H01L29/84
CPC分类号： B81B3/0021 , B81C1/00333 , B81C2203/0118 , B81C2203/0735 , G01L9/0073
摘要： The present invention discloses a MEMS sensing device which comprises a substrate, a MEMS device region, a film, an adhesive layer, a cover, at least one opening, and a plurality of leads. The substrate has a first surface and a second surface opposite the first surface. The MEMS device region is on the first surface, and includes a chamber. The film is overlaid on the MEMS device region to seal the chamber as a sealed space. The cover is mounted on the MEMS device region and adhered by the adhesive layer. The opening is on the cover or the adhesive layer, allowing the pressure of the air outside the device to pressure the film. The leads are electrically connected to the MEMS device region, and extend to the second surface.
摘要翻译：本发明公开了一种MEMS感测装置，其包括衬底，MEMS器件区域，膜，粘合剂层，盖，至少一个开口和多个引线。衬底具有与第一表面相对的第一表面和第二表面。 MEMS器件区域在第一表面上，并且包括腔室。膜被覆盖在MEMS器件区域上，以密封腔室作为密封空间。盖安装在MEMS器件区域上，并通过粘合剂层粘合。开口在盖子或粘合剂层上，允许装置外的空气的压力对膜施加压力。引线电连接到MEMS器件区域，并延伸到第二表面。

40. 发明授权

US08524519B2 MEMS microphone device and method for making same 有权
公开(公告)号：US08524519B2
公开(公告)日：2013-09-03
申请号：US13135417
申请日：2011-07-06
申请人： Chuan-Wei Wang , Chih-Ming Sun
发明人： Chuan-Wei Wang , Chih-Ming Sun
IPC分类号： H01L21/00
CPC分类号： B81B7/0051 , H04R19/005 , H04R19/04
摘要： The present invention discloses a MEMS microphone device and its manufacturing method. The MEMS microphone device includes: a substrate including a first cavity; a MEMS device region above the substrate, wherein the MEMS device region includes a metal layer, a via layer, an insulating material region and a second cavity; a mask layer above the MEMS device region; a first lid having at least one opening communicating with the second cavity, the first lid being fixed above the mask layer; and a second lid fixed under the substrate.

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