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    • 32. 发明专利
    • INK JET HEAD, SUBSTRATE THEREFOR, INK JET APPARATUS AND PREPARATION OF SUBSTRATE FOR INK JET HEAD
    • JPH04211958A
    • 1992-08-03
    • JP3102791
    • 1991-02-26
    • CANON KK
    • WATABE IKUTOMO
    • B41J2/05B41J2/14B41J2/16B41J2/345
    • PURPOSE:To reduce the disconnection or the like due to the fault generated in an electrothermal converter by providing a pair of first wiring electrode layers on the substrate of a head through a first electrode adhesion layer and further providing a pair of second wiring electrode layers thereon through a second electrode adhesion layer to constitute a laminated structure. CONSTITUTION:A heating part forming part 51 is formed by removing a part of a second electrode adhesion layer 44 and a second wiring electrode layer 45 and the second wiring electrode layer 43 in said part 51 is etched to expose the first electrode adhesion layer 42 under the layer 43 to form a heating part 50. For example, an SiO2 layer is formed on the membrane laminated structure formed on a substrate as a protective layer as mentioned above to form a substrate for a head. At this time, since the second electrode adhesion layer 44 is not etched by the etching solution of the second wiring electrode layer 45, even when a fault is generated in the second wiring electrode layer 45 by the fault of a photoresist, the fault does not reach lower layers. In this way, the disconnection or the like due to the fault generated in an electrothermal converter can be prevented.