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31. 发明授权

KR102012237B1 마이크로 소자 어레이 전사방법 有权
公开(公告)号：KR102012237B1
公开(公告)日：2019-08-21
申请号：KR1020170158348
申请日：2017-11-24
申请人： 한국기계연구원
发明人： 김광섭 , 이재학 , 김재현 , 황보윤 , 윤성욱 , 김경식 , 장봉균 , 이승모 , 최병익
IPC分类号： B41F16/00 , B41J2/22

32. 发明授权

KR101827380B1 고분자 불순물이 없는 자유지지 나노박막 제조 방법 有权
标题翻译：自由支撑无聚合物杂质的纳米薄膜的制备方法
公开(公告)号：KR101827380B1
公开(公告)日：2018-02-09
申请号：KR1020160002395
申请日：2016-01-08
申请人： 한국기계연구원
发明人： 이충광 , 황보윤 , 김재현 , 이학주
IPC分类号： C01B31/04
摘要： 본발명은제1관통홀이형성된폴리머필름을나노박막에밀착시켜, 너비방향으로상기제1관통홀이나노박막의내측부분에배치되도록폴리머필름에나노박막을부착시키는단계(S10); 및상기나노박막이부착된폴리머필름을관통공이형성된타겟기판에밀착시키되나노박막이타겟기판에밀착되도록하며, 너비방향으로상기관통공이제1관통홀의내측부분에배치되도록하여, 상기관통공이형성된타겟기판에나노박막이자유지지되도록전사하는단계(S20); 를포함하여이루어져, 나노박막이관통공에의해자유지지된부분이폴리머나다른물질들에접촉되지않도록전사하여제조될수 있어, 자유지지된나노박막의표면에고분자불순물이없도록할 수있는고분자불순물이없는자유지지나노박막제조방법에관한것이다.
摘要翻译：本发明包括所述通孔的第一步骤中，与形成在所述纳米薄膜的聚合物膜，在宽度方向紧密接触所述第一通孔安装在聚合物膜上的纳米薄膜被设置在所述纳米薄膜（S10）的内部部分; 和被放置在所述通孔的内侧部分现在之一是通过聚合物膜的孔，其中通孔形成粘附sikidoe与目标基底紧密接触的纳米薄膜，并且使得所述纳米薄膜粘附到所述目标基板，宽度方向，所述通孔的所述目标被形成（S20）将纳米薄膜转移以自由支撑在基板上; 包括由纳米薄膜有由贯通孔通过转录从与聚合物或其它材料接触来制备的支撑自由部分的，是自由支承纳米薄膜的表面，能够防止高分子杂质聚合物杂质免费的纳米薄膜。

33. 发明授权

KR101168259B1 롤투롤 기반의 그래핀 연속 합성 장치 有权
标题翻译：使用滚筒至滚筒工艺连续成像的装置
公开(公告)号：KR101168259B1
公开(公告)日：2012-07-30
申请号：KR1020120022102
申请日：2012-03-05
申请人： 한국기계연구원
发明人： 김상민 , 이학주 , 김재현 , 김경식 , 이승모 , 장봉균 , 황보윤 , 김광섭 , 최현주 , 오충석
IPC分类号： C01B31/02 , B41M5/03 , B41M5/10 , B01J19/18
CPC分类号： C01B32/184 , B01J3/03 , B01J19/1818 , B41M5/03 , B41M5/10
摘要： PURPOSE: An apparatus for continuously synthesizing graphene based on a roll-to-roll process is provided to improve the productivity of graphene synthesis by rapidly applying and eliminating thermal energy required for the graphene synthesis. CONSTITUTION: An apparatus for continuously synthesizing graphene includes a chamber(100), a supplying roll(200), a collecting roll(300), a heating part(400), a gas supplying part(500), and a gas discharging part(600). The chamber is sealed from outside. The supplying roll and the collecting roll are arranged in the chamber. Both end parts of a substrate is in connection with the supplying roll and the collecting roll and wound around the rolls. The heating part is arranged in the chamber and heats the substrate. The gas supplying part supplies carbon-containing gas into the chamber. The gas discharging part discharges gas from the chamber. Cooling units are formed at the supplying roll and the collecting roll.
摘要翻译：目的：提供一种基于卷对卷方法连续合成石墨烯的设备，通过快速应用和消除石墨烯合成所需的热能来提高石墨烯合成的生产率。构成：用于连续合成石墨烯的设备包括室（100），供应辊（200），收集辊（300），加热部分（400），气体供应部分（500）和气体排出部分 600）。该室从外部密封。供应辊和收集辊布置在室中。基片的两个端部与供给辊和收集辊连接并卷绕在辊上。加热部件设置在室内并加热基板。气体供给部将含有气体的气体供给到室内。气体排出部从室排出气体。在供给辊和收集辊上形成冷却单元。

34. 发明授权

KR102108105B1 선택적 전사가 가능한 마이크로 소자 전사장치 有权
公开(公告)号：KR102108105B1
公开(公告)日：2020-05-07
申请号：KR1020180096596
申请日：2018-08-20
申请人： 한국기계연구원
发明人： 황보윤 , 김상민 , 김재현 , 김경식 , 박현성 , 김창현 , 윤성욱
IPC分类号： H05K3/34 , H05K3/12

35. 发明授权

KR101579935B1 임프린트 기법을 이용한 나노박막 패턴 형성·전사 방법 및 장치 有权
标题翻译：使用印记形成和转移纳米膜图案的方法和装置
公开(公告)号：KR101579935B1
公开(公告)日：2015-12-28
申请号：KR1020130130742
申请日：2013-10-31
申请人： 한국기계연구원
发明人： 김상민 , 전성재 , 김재현 , 김광섭 , 조경민 , 김창현 , 최병익 , 김경식 , 황보윤 , 이승모 , 이학주
IPC分类号： B29C59/02 , B29C33/42
摘要： 본발명은임프린트기법을이용한나노박막패턴형성·전사방법및 장치에관한것으로서, 보다상세하게는금속기판에형성된나노박막에임프린트기법을이용해나노박막에패턴을형성하되스탬프에형성된패턴에의해눌린부분의나노박막상면이금속기판의상면보다하측으로들어가도록임프린트하고, 패턴이형성된나노박막을원하는타겟기판에전사할수 있는임프린트기법을이용한나노박막패턴형성·전사방법및 장치에관한것이다.

36. 发明授权

KR101300014B1 자유지지형 나노박막 제조 방법 및 제조 장치 有权
标题翻译：自制纳米纤维的制造方法和装置
公开(公告)号：KR101300014B1
公开(公告)日：2013-08-26
申请号：KR1020120104253
申请日：2012-09-19
申请人： 한국기계연구원
发明人： 황보윤 , 이충광 , 김상민 , 김재현 , 이학주
IPC分类号： B82B3/00 , C01B31/04
CPC分类号： B82B3/0038 , B82B3/0061 , C01B32/182 , C01B32/186
摘要： PURPOSE: A manufacturing method of freestanding nano-films configured to prevent damage to a freestanding graphene formed on a through hole on a substrate is provided to easily produce a freestanding graphene with large area. CONSTITUTION: A manufacturing method of freestanding nano-films comprises the steps of: a first step in which one side of a polymer layer (300) is transcribed for a nano thin-film to be attached on the upper side of a substrate (100) with a through hole passing through the top and the bottom of a laminate having nano thin-film on one side of the laminate, a second step in which nano thin-film is formed on the upper side of the substrate, has a polymer layer on the upper side and the substrate is turned for the polymer layer to on the lower part, and a third step in which a solvent (600) contacts the polymer layer to remove the polymer layer for the solvent not to be inserted into the through hole of the substrate. The nano thin-film promotes drying of the transcribed substrate. The nano thin-film is a graphene layer (200) which is synthesized through the chemical vapor deposition (CVD).
摘要翻译：目的：提供独立式纳米膜的制造方法，其被配置为防止对形成在基板上的通孔上的独立石墨烯的损坏，以容易地产生具有大面积的独立石墨烯。构成：独立式纳米膜的制造方法包括以下步骤：第一步骤是将聚合物层（300）的一侧转印以将纳米薄膜附着在基板（100）的上侧，在层叠体一侧通过具有纳米薄膜的层叠体的顶部和底部的通孔，在基板的上侧形成有纳米薄膜的第二工序，在基板的上侧形成有聚合物层将上侧和基板转动用于聚合物层到下部，以及第三步骤，其中溶剂（600）与聚合物层接触以除去不插入通孔的溶剂的聚合物层底物。纳米薄膜促进转录底物的干燥。纳米薄膜是通过化学气相沉积（CVD）合成的石墨烯层（200）。

37. 发明授权

KR101282983B1 대면적 연속 면저항 측정장치 有权
标题翻译：坚定耐用，连续测量表面电阻
公开(公告)号：KR101282983B1
公开(公告)日：2013-07-08
申请号：KR1020120021866
申请日：2012-03-02
申请人： 한국기계연구원
发明人： 장봉균 , 황보윤 , 김재현 , 김광섭 , 이승모 , 김경식 , 이학주 , 최병익
IPC分类号： G01R27/08
摘要： PURPOSE: A large area continuous sheet resistance measurement apparatus is provided to measure sheet resistance of a whole thin film continuously, and to reduce sheet resistance measurement time as enabling to perform accurate sheet resistance measurement. CONSTITUTION: A large area continuous sheet resistance measurement apparatus includes a rotation part (10), a contact part (20) and a sheet resistance measurement part (30). The rotation part includes more than one rotator (11). The contact part includes an electrode part (21). The electrode part is formed on the surface of the rotator and contacts with a thin film (40). The sheet resistance measurement part is electrically connected to the contact part, and receives sheet resistance of a part where the contact part contacts with the thin film. The rotator is a cylinder whose length is equal to or longer than the thin film. The electrode part includes more than a pair of electrodes, and the electrodes are formed in the circumference in a constant interval. The electrode part is electrically connected to the sheet resistance measurement part through a connection apparatus installed in the cylinder, and the connection apparatus is a slip ring.
摘要翻译：目的：提供大面积的连续薄片电阻测量装置，用于连续测量整个薄膜的薄层电阻，并且能够降低薄层电阻测量时间，从而能够进行精确的薄层电阻测量。构成：大面积连续薄片电阻测量装置包括旋转部分（10），接触部分（20）和薄层电阻测量部分（30）。旋转部分包括多于一个的旋转器（11）。接触部分包括电极部分（21）。电极部分形成在旋转体的表面上并与薄膜（40）接触。薄片电阻测量部分电连接到接触部分，并且接收接触部分与薄膜接触的部分的薄层电阻。旋转体是长度等于或长于薄膜的圆柱体。电极部分包括多于一对电极，并且电极以恒定的间隔形成在圆周中。电极部通过安装在气缸中的连接装置与薄片电阻测量部电连接，连接装置是滑环。

38. 发明授权

KR101173300B1 판상형 구조의 나노박막과 기판 사이의 신뢰성 향상 장치 및 방법 有权
标题翻译：提高纳米材料与平面结构与目标基板之间可靠性的装置和方法
公开(公告)号：KR101173300B1
公开(公告)日：2012-08-10
申请号：KR1020120015041
申请日：2012-02-14
申请人： 한국기계연구원
发明人： 김광섭 , 장봉균 , 최현주 , 황보윤 , 이승모 , 김상민 , 김재현 , 이학주 , 김경식
IPC分类号： B41M5/03 , B41M5/10 , B82B3/00
摘要： PURPOSE: A reliability improving device and a method between a sheet-type structure nano thin film and a substrate are provided to uniformly weld the nano thin film to a substrate by compressing the nano thin film with a roller or a slider. CONSTITUTION: A reliability improving device(1000) between a nano thin film and a substrate comprises a transfer tool, an upper roller and a lower roller. The transfer tool transfers a substrate(110) in which a nano thin film(120) is formed on the upper side to the X-axis. The upper roller and the lower roller are respectively isolated towards the upper and the lower sides having constant distance. The upper roller and the lower roller can move towards the Z-axis and enables load control. More than 2 layered coating layers are formed on the outer circumference of the upper roller. A reliability enhancing method between the nano thin film and the substrate comprises the following steps: providing a substrate in which the nano thin film is formed on the upper side; compressing the nano thin film by transferring the upper roller and the lower roller towards the Z-axis; and compressing the nano thin film on the substrate by relative motion of the substrate, the upper roller and the lower roller.
摘要翻译：目的：提供片状结构纳米薄膜和基板之间的可靠性提高装置和方法，通过用辊或滑块压缩纳米薄膜，将纳米薄膜均匀地焊接到基板上。构成：纳米薄膜和基板之间的可靠性改善装置（1000）包括转印工具，上辊和下辊。转印工具将其上面形成有纳米薄膜（120）的基板（110）传送到X轴。上辊和下辊分别隔着上下两侧隔开一段距离。上辊和下辊可以朝向Z轴移动，并实现负载控制。在上辊的外周上形成2层以上的涂层。纳米薄膜和基板之间的可靠性提高方法包括以下步骤：提供在上侧形成纳米薄膜的基板; 通过将上辊和下辊转向Z轴来压缩纳米薄膜; 以及通过基板，上辊和下辊的相对运动来压缩基板上的纳米薄膜。

39. 发明授权

KR101033032B1 변위 측정 장치 有权
标题翻译：位移测量装置
公开(公告)号：KR101033032B1
公开(公告)日：2011-05-09
申请号：KR1020100095321
申请日：2010-09-30
申请人： 한국기계연구원
发明人： 김재현 , 황보윤 , 장봉균 , 김경식 , 이학주 , 최병익
IPC分类号： G01B11/16 , G01N3/02
摘要： PURPOSE: A displacement measuring device is provided to control a displacement measurement range according to the tension and fatigue testing facilities of compliant electronic components. CONSTITUTION: A displacement measuring device comprises a half mirror(31), a first mirror(32), and a light source(34). The half mirror is located on a first grip(21) or a second grip(22). The first mirror is installed on first or second grip at a tilt toward the direction in which the tension of a compliant specimen applied. The light source is located outside the half mirror and emits light to the haft mirror The second mirror receives the light from the half mirror and reflects toward the half mirror again. The optical sensor is located on the outside of the first mirror according to the direction which meets the compliant specimen tension applied direction at right angle. The optical sensor senses the location of the light reflected from the first mirror through the half mirror.
摘要翻译：目的：提供一种位移测量装置，以根据兼容的电子元件的张力和疲劳测试设施来控制位移测量范围。构成：位移测量装置包括半反射镜（31），第一反射镜（32）和光源（34）。半反射镜位于第一把手（21）或第二把手（22）上。第一镜被安装在第一或第二把手上，朝着施加柔顺样本的张力的方向倾斜。光源位于半透明反射镜的外面，并向后视镜发光。第二镜接收半反射镜的光并再次反射到半透明反射镜。光学传感器根据顺应试样张力施加方向的直角方向位于第一反射镜的外侧。光学传感器感测从第一反射镜反射的光经半反射镜的位置。

40. 发明授权

KR102048747B1 마이크로 소자 전사방법 有权
公开(公告)号：KR102048747B1
公开(公告)日：2019-11-26
申请号：KR1020180044104
申请日：2018-04-16
申请人： 한국기계연구원
发明人： 최병익 , 황보윤 , 김재현 , 윤성욱 , 김창현 , 김정엽 , 김경식
IPC分类号： H01L21/52 , H01L21/67 , H01L27/15

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