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    • 32. 发明授权
    • 박막 웨이퍼의 다이싱용 다이 본드 필름의 제조방법
    • 박막웨이퍼의다이싱용다이본드필름의제조방박막
    • KR100751182B1
    • 2007-08-22
    • KR1020060069730
    • 2006-07-25
    • 제일모직주식회사
    • 김완중정창범홍용우정기성하경진정철
    • H01L21/301H01L21/52
    • A method for manufacturing a die bond film of a thin wafer for dicing is provided to prevent a chip flying and to improve a pick-up success rate by using two or more adhesive layers. An upper adhesive layer(22) is laminated on a fixing adhesive layer(12) of a die bond film(10) to form a first film(40). The first film is half-cut to be removed to form a second film. A width R of the fixing adhesive layer satisfies a relationship of an outer diameter of a wafer R an inner diameter of a ring frame. A lower adhesive layer(32) is laminated on the second film to form a third film. The third film is half-cut to be suited to the size of the ring frame and then removed.
    • 提供一种用于制造用于切割的薄晶片的芯片接合膜的方法,以防止芯片飞行并且通过使用两个或更多个粘合剂层来提高拾取成功率。 在芯片接合薄膜(10)的固定粘接剂层(12)上层叠上部粘接层(22),形成第一薄膜(40)。 第一层薄膜是半切割的,以去除形成第二层薄膜。 固定粘合剂层的宽度R满足晶片R的外径与环形框架的内径之间的关系。 将下部粘合剂层(32)层压在第二膜上以形成第三膜。 第三部电影是半切割适合环形框架的大小,然后删除。