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31. 发明申请

US20130343840A1 TRANSPORT APPARATUS AND VACUUM SYSTEM 有权
标题翻译：运输设备和真空系统
公开(公告)号：US20130343840A1
公开(公告)日：2013-12-26
申请号：US13982925
申请日：2012-03-16
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： B65G49/00
CPC分类号： B65G49/00 , H01L21/67259 , H01L21/67742 , H01L21/681
摘要： A transport apparatus that supports and moves a substrate by using a robot hand between a plurality of chambers includes a first detection unit that detects the substrate, in a first stop position of the robot hand, using a first detection position set on one surface of the substrate supported by the robot hand, and a second detection unit that detects the substrate, in a second stop position of the robot hand, using a second detection position set on the one surface of the substrate supported by the robot hand.
摘要翻译：通过使用机器人手在多个室之间支撑和移动基板的输送装置包括：第一检测单元，其利用设置在所述机器人手的一个表面上的第一检测位置，在所述机器人手的第一停止位置中检测所述基板; 由机器人手支撑的基板和第二检测单元，其使用设置在由机器人手支撑的基板的一个表面上的第二检测位置来检测机器人手的第二停止位置中的基板。

32. 发明申请

US20100256811A1 DIAGNOSIS SYSTEM FOR TRANSPORT ROBOT 审中-公开
标题翻译：运输机器人诊断系统
公开(公告)号：US20100256811A1
公开(公告)日：2010-10-07
申请号：US12745823
申请日：2008-12-26
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： H01L21/677 , G05B19/04
CPC分类号： H01L21/67259 , H01L21/67288
摘要： There is provided a low-cost diagnosis system for a transport robot which is capable of improving the apparatus operating rate without incurring an increase in the number of parts. In case a robot arm is detected by any of detection means when a substrate (S) is transported by the robot arm among processing chambers (C), operation data of the robot arm to be detected by the detection means is obtained and reference value is prepared. Then, every time the robot arm is detected by the detection means, the operation data is obtained and compared with the reference value. In case a change exceeds a predetermined range, the transport robot is judged to be abnormal.
摘要翻译：提供了一种用于运输机器人的低成本诊断系统，其能够在不引起部件数量增加的情况下提高设备运行速度。在通过机器人臂在处理室（C）中输送基板（S）时，通过检测机构检测到机器人臂的情况下，获得由检测单元检测的机器人手臂的操作数据，基准值为准备然后，每当检测装置检测到机器人臂时，获取操作数据并将其与参考值进行比较。如果变化超过预定范围，则传送机器人被判定为异常。

33. 发明授权

US06673012B2 Control device for an endoscope 失效
标题翻译：内窥镜用控制装置
公开(公告)号：US06673012B2
公开(公告)日：2004-01-06
申请号：US09836505
申请日：2001-04-18
申请人： Yoshinori Fujii , Akira Sugiyama
发明人： Yoshinori Fujii , Akira Sugiyama
IPC分类号： A61B100
CPC分类号： G02B23/2476 , A61B1/0051 , A61B1/0052 , A61B1/018
摘要： An endoscope having an elongated insertion portion provided at a distal end thereof with a steerable bendable portion, includes at least one steering member which is rotated to bend the steerable bendable portion; at least one locking member which is rotated to lock the steering member, the steering member and the locking member being rotated about a common axis; and at least one axially-movable lock member which moves relative to the steering member along the common axis without rotating about the common axis to lock and unlock the steering member when the locking member is turned in a first rotational direction and a second rotational direction, respectively.
摘要翻译：一种具有细长插入部分的内窥镜，其具有可转向弯曲部分的远端，所述内窥镜包括至少一个转向部件，所述至少一个转动部件旋转以弯曲所述可转向弯曲部分; 至少一个锁定构件，其旋转以锁定所述转向构件，所述转向构件和所述锁定构件围绕公共轴线旋转; 以及至少一个轴向可移动的锁定构件，当所述锁定构件沿第一旋转方向和第二旋转方向转动时，所述至少一个轴向可移动的锁定构件相对于所述转向构件沿着所述公共轴线移动而不围绕所述公共轴线旋转，分别。

34. 发明授权

US08543235B2 Method of controlling transfer robot 有权
标题翻译：控制传送机器人的方法
公开(公告)号：US08543235B2
公开(公告)日：2013-09-24
申请号：US13054818
申请日：2009-07-23
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： G06F19/00
CPC分类号： H01L21/67745 , B25J9/1682 , G05B2219/34348 , G05B2219/39109
摘要： A method of controlling a transfer robot is provided, in which method the communication time of the transfer robot can be reduced and the transfer time of a substrate can be shortened. A series of actions of the transfer robot when a substrate that is present in a processing chamber is transferred to a predetermined position in a processing chamber, are performed by a single command. The series of actions may include a swap action in which, after having taken out by a robot hand the substrate that is present in the processing chamber, a substrate that is different from the substrate is handed over by a robot hand to a predetermined position on the processing chamber.
摘要翻译：提供了一种控制传送机器人的方法，其中可以减少传送机器人的通信时间，并且可以缩短基板的传送时间。当存在于处理室中的基板被转移到处理室中的预定位置时，传送机器人的一系列动作通过单个命令执行。一系列动作可以包括互换动作，其中在机器人手中将存在于处理室中的衬底取出之后，与衬底不同的衬底被机器人手移交到预定位置上处理室。

35. 发明授权

US08390230B2 Method of detecting stop of transport apparatus 有权
标题翻译：检测运输装置停止的方法
公开(公告)号：US08390230B2
公开(公告)日：2013-03-05
申请号：US12671954
申请日：2008-09-19
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： H02P1/00
CPC分类号： H01L21/67265 , H01L21/67742 , H01L21/68707
摘要： There is provided a method of detecting a stop of a transport apparatus which can quickly and easily detect and improve the throughput and the ratio of utilization without incurring an increase the number of parts. The apparatus is used which is provided with a drive motor and a transport arm one side of which is mounted on a rotary shaft of the drive motor. As the drive motor there is used one in which an induced electromotive force is generated when a force in the direction of rotation is applied to the rotary shaft. Then, an article S to be transported is held on the other side of the transport arm. When the drive motor is operated to drive the rotary shaft by a predetermined angle of rotation and then stopped, the above-described induced electromotive force to be generated due to the vibrations of the transport arm is detected.
摘要翻译：提供了一种检测运输装置的停止的方法，其可以快速且容易地检测并提高吞吐量和利用率，而不会增加零件数量。使用的装置设置有驱动电动机和运送臂，其一侧安装在驱动电动机的旋转轴上。作为驱动电动机，使用当向旋转轴施加旋转方向的力时产生感应电动势的驱动电动机。然后，要运送的物品S被保持在运输臂的另一侧。当驱动马达被操作以将旋转轴驱动预定旋转角然后停止时，检测到由于运送臂的振动而产生的上述感应电动势。

36. 发明申请

US20120116586A1 TEACHING APPARATUS OF ROBOT AND TEACHING METHOD OF ROBOT 审中-公开
标题翻译：机器人教学设备与机器人教学方法
公开(公告)号：US20120116586A1
公开(公告)日：2012-05-10
申请号：US13380981
申请日：2010-06-30
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： B25J9/16
CPC分类号： G05B19/42 , G05B2219/36425 , G05B2219/45031 , H01L21/67742 , H01L21/68 , H01L21/68707
摘要： A teaching method of a robot which supports a transported matter with a hand and transports the transported matter between two or more reception spots, includes: a jig disposing process of disposing a positioning jig at the reception spot so as to have the same center axis as the transported matter when the transported matter is placed at the reception spot; and a teaching process of moving the hand to a position at which an abutting portion of the hand abuts the positioning jig at each of the reception spots and teaching the position of the hand to a controller.
摘要翻译：一种机器人的教学方法，其特征在于，用手将所述运送物质运送到两个以上的接收点之间，其特征在于，具备：在所述接收点配置定位夹具的夹具配置处理，运送物件在运送物品放置在接收处时; 以及将手移动到在每个接收点处与手抵靠定位夹具的位置移动的教导过程，并将手的位置教导到控制器。

37. 发明申请

US20120103793A1 VACUUM FILM-FORMING APPARATUS AND POSITION DETECTION METHOD FOR SHUTTER PLATE OF VACUUM FILM-FORMING APPARATUS 审中-公开
标题翻译：真空成膜装置的快门板真空成膜装置和位置检测方法
公开(公告)号：US20120103793A1
公开(公告)日：2012-05-03
申请号：US13379410
申请日：2010-06-23
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： C23C14/34
CPC分类号： H01J37/34 , H01J37/3447
摘要： At the time of detecting a position of a shutter plate, a laser light, for instance, is radiated from a detector (an optical sensor). The radiated laser light reaches the shutter plate through a window of a chamber. Then, the laser light is reflected by the surface of the shutter plate and re-enters the detector. The detector detects the time required from the emission of the laser light to the entry of the reflected light.
摘要翻译：在检测快门板的位置时，例如从检测器（光学传感器）照射激光。辐射的激光通过室的窗口到达快门板。然后，激光由快门板的表面反射并重新进入检测器。检测器检测从发射激光到反射光入射所需的时间。

38. 发明申请

US20110229299A1 METHOD OF DETECTING STOP OF TRANSPORT APPARATUS 有权
标题翻译：检测运输装置停止的方法
公开(公告)号：US20110229299A1
公开(公告)日：2011-09-22
申请号：US12671954
申请日：2008-09-19
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： H01L21/677
CPC分类号： H01L21/67265 , H01L21/67742 , H01L21/68707
摘要： There is provided a method of detecting a stop of a transport means in which the stop of the transport means after operation can be quickly and easily detected and in which the throughput and the ratio of utilization can be improved without incurring an increase in the number of parts. An apparatus is used which is provided with a drive motor and a transport arm one side of which is mounted on a rotary shaft of the drive motor. As the drive motor there is used one in which an induced electromotive force is generated when a force in the direction of rotation is applied to the rotary shaft. Then, an article S to be transported is held on the other side of the transport arm. When the above-described drive motor is operated to drive the rotary shaft by a predetermined angle of rotation and then stopped, the above-described induced electromotive force to be generated due to the vibrations of the transport arm is detected. When the detected induced electromotive force becomes smaller than a predetermined value, a judgment is made that the transport arm has stopped.
摘要翻译：提供了一种检测运输装置的停止的方法，其中可以快速且容易地检测运输装置的停止，并且其中可以提高生产量和利用率，而不会增加数量的增加部分。使用的装置设置有驱动电动机和运送臂，其一侧安装在驱动电动机的旋转轴上。作为驱动电动机，使用当向旋转轴施加旋转方向的力时产生感应电动势的驱动电动机。然后，要运送的物品S被保持在运输臂的另一侧。当操作上述驱动马达以将旋转轴驱动预定旋转角然后停止时，检测到由于运送臂的振动而产生的上述感应电动势。当检测到的感应电动势变得小于预定值时，判断输送臂已停止。

39. 发明授权

US07918640B2 Position correcting apparatus, vacuum processing equipment and position correcting method 有权
标题翻译：位置校正装置，真空处理设备和位置校正方法
公开(公告)号：US07918640B2
公开(公告)日：2011-04-05
申请号：US12003318
申请日：2007-12-21
申请人： Yoshinori Fujii
发明人： Yoshinori Fujii
IPC分类号： B65G47/24
CPC分类号： H01L21/67184 , H01L21/681 , Y10S414/136
摘要： A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.
摘要翻译：一种在不使用运输机器人的情况下解决位置偏差的技术。旋转放置在保持架上的被输送物体，使误差角α成为零; 之后，使临时放置部分倾斜移动以移动水平分量中的误差距离，从而将要传送的物体的中心定位在保持台的中心轴线上; 将被运送物体放置在支架上。在凹口的取向确定的情况下，保持架进一步旋转所需量。不使用运输机器人，可以解决错误角度和误差距离。

40. 发明申请

US20110049921A1 ROBOT HAND FOR SUBSTRATE TRANSFER 有权
标题翻译：机架手柄用于基板传送
公开(公告)号：US20110049921A1
公开(公告)日：2011-03-03
申请号：US12863331
申请日：2009-02-04
申请人： Yoshinori Fujii , Shinya Nakamura
发明人： Yoshinori Fujii , Shinya Nakamura
IPC分类号： B25J15/00 , H01L21/683
CPC分类号： H01L21/67742 , H01L21/68707 , Y10S414/141
摘要： There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On an upper surface of the robot hand there is formed a first seating surface on which is seated a lower-surface peripheral portion of the substrate (S) and, on a periphery thereof, there is formed an upwardly extended step. The step is provided with a plurality of stair-shaped stages. On an upper surface of the robot hand inwardly away from the first seating surface there is provided a second seating surface which is inclined downward toward the center of the substrate (S) such that a lower surface of the substrate (S) is seated on the second seating surface when the substrate (S) is warped downward into a concave shape.
摘要翻译：提供了一种用于基板转印的机器人手，其中机器人手布置成使得即使在基板（S）引起翘曲的情况下，也可以稳定地支撑基板（S）。在机器人手的上表面上形成有第一就座表面，其上安置有基底（S）的下表面周边部分，并且在其周边上形成向上延伸的步骤。台阶设置有多个楼梯阶段。在机器人手的上表面向内离开第一座面，设置有第二座面，其朝向衬底（S）的中心向下倾斜，使得衬底（S）的下表面位于当基板（S）向下弯曲成凹形时，第二座面。

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