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    • 35. 发明申请
    • Methods and systems for processing a microelectronic topography
    • 用于处理微电子拓扑的方法和系统
    • US20050181135A1
    • 2005-08-18
    • US11108589
    • 2005-04-18
    • Igor IvanovWeiguo Zhang
    • Igor IvanovWeiguo Zhang
    • H01L21/00H01L21/687B05D3/04
    • H01L21/68728H01L21/67051H01L21/6708Y02P80/30
    • Methods and systems are provided which are adapted to process a microelectronic topography, particularly in association with an electroless deposition process. In general, the methods may include loading the topography into a chamber, closing the chamber to form an enclosed area, and supplying fluids to the enclosed area. In some embodiments, the fluids may fill the enclosed area. In addition or alternatively, a second enclosed area may be formed about the topography. As such, the provided system may be adapted to form different enclosed areas about a substrate holder. In some cases, the method may include agitating a solution to minimize the accumulation of bubbles upon a wafer during an electroless deposition process. As such, the system provided herein may include a means for agitating a solution in some embodiments. Such a means for agitation may be distinct from the inlet/s used to supply the solution to the chamber.
    • 提供了适于处理微电子拓扑的方法和系统,特别是与无电沉积工艺相关联。 通常,方法可以包括将形貌加载到腔室中,关闭腔室以形成封闭区域,并将流体供应到封闭区域。 在一些实施例中,流体可以填充封闭区域。 另外或替代地,围绕地形可以形成第二封闭区域。 因此,所提供的系统可以适于在基板保持器周围形成不同的封闭区域。 在一些情况下,该方法可以包括搅拌溶液以在无电沉积工艺期间使气泡在晶片上的累积最小化。 因此,本文提供的系统可以包括在一些实施例中用于搅拌溶液的装置。 用于搅拌的这种手段可能不同于用于将溶液供应到室的入口。
    • 36. 发明授权
    • Methods and system for processing a microelectronic topography
    • 用于处理微电子拓扑的方法和系统
    • US06881437B2
    • 2005-04-19
    • US10462167
    • 2003-06-16
    • Igor C. IvanovWeiguo Zhang
    • Igor C. IvanovWeiguo Zhang
    • H01L21/00H01L21/687B05D5/12B05D1/18B05D3/12
    • H01L21/68728H01L21/67051H01L21/6708Y02P80/30
    • Methods and systems are provided which are adapted to process a microelectronic topography, particularly in association with an electroless deposition process. In general, the methods may include loading the topography into a chamber, closing the chamber to form an enclosed area, and supplying fluids to the enclosed area. In some embodiments, the fluids may fill the enclosed area. In addition or alternatively, a second enclosed area may be formed about the topography. As such, the provided system may be adapted to form different enclosed areas about a substrate holder. In some cases, the method may include agitating a solution to minimize the accumulation of bubbles upon a wafer during an electroless deposition process. As such, the system provided herein may include a means for agitating a solution in some embodiments. Such a means for agitation may be distinct from the inlet/s used to supply the solution to the chamber.
    • 提供了适于处理微电子拓扑的方法和系统,特别是与无电沉积工艺相关联。 通常,方法可以包括将形貌加载到腔室中,关闭腔室以形成封闭区域,并将流体供应到封闭区域。 在一些实施例中,流体可以填充封闭区域。 另外或替代地,围绕地形可以形成第二封闭区域。 因此,所提供的系统可以适于在基板保持器周围形成不同的封闭区域。 在一些情况下,该方法可以包括搅拌溶液以在无电沉积工艺期间使气泡在晶片上的累积最小化。 因此,本文提供的系统可以包括在一些实施例中用于搅拌溶液的装置。 用于搅拌的这种手段可能不同于用于将溶液供应到室的入口。
    • 37. 发明申请
    • Multi-staged heating system for fabricating microelectronic devices
    • 用于制造微电子器件的多级加热系统
    • US20050016201A1
    • 2005-01-27
    • US10624397
    • 2003-07-22
    • Igor IvanovWeiguo Zhang
    • Igor IvanovWeiguo Zhang
    • C23C18/16H01L21/00F25D13/04F25D17/02
    • H01L21/67248C23C18/1619C23C18/1676H01L21/67023H01L21/6715
    • A system is provided which is adapted to transport a fluid from a plurality of serially coupled tanks to a chamber configured to process microelectronic wafers. The system further includes a plurality of temperature controllers positioned such that the chamber and the tanks are characterized into at least three zones based upon the adaptations of the controllers to maintain the fluid within each zone within a distinct temperature range. A method is also provided which includes storing a fluid within a preliminary temperature range, transporting the fluid to an intermediate tank and controlling the fluid temperature within the intermediate tank to be within a transitional temperature range distinct from the preliminary temperature range. The method further includes delivering the fluid to a process chamber and controlling the fluid temperature within the process chamber to be within a process temperature range distinct from the preliminary and transitional temperature ranges.
    • 提供了一种系统,其适于将流体从多个串联耦合的罐输送到被配置为处理微电子晶片的室。 该系统还包括多个温度控制器,其定位成使得基于控制器的适应性使得室和罐的特征在于至少三个区域,以将每个区域内的流体保持在不同的温度范围内。 还提供了一种方法,其包括将流体存储在初步温度范围内,将流体输送到中间罐并将中间罐内的流体温度控制在与初步温度范围不同的过渡温度范围内。 该方法还包括将流体输送到处理室并将处理室内的流体温度控制在与预备温度和过渡温度范围不同的过程温度范围内。
    • 39. 发明授权
    • Quantitative MR imaging of water and fat using a quadruple-echo sequence
    • 使用四重回波序列对水和脂肪进行定量MR成像
    • US6147492A
    • 2000-11-14
    • US179955
    • 1998-10-28
    • Weiguo ZhangJoseph W. Carlson
    • Weiguo ZhangJoseph W. Carlson
    • A61B5/055G01R33/48G01R33/54G01V3/00
    • G01R33/4828
    • A magnetic resonance imaging (MRI) method and apparatus is disclosed for quantitating water and fat content of tissues using nuclear magnetic resonance (NMR) image data of the tissues and for producing an images indicative of the fat and water fractions of the total water and fat content of the tissues. To reduce the overall scanning time, a quadruple field-echo imaging scan sequence is used to acquire the image data. Each imaging sequence comprises an initial slice-selective RF excitation pulse followed by four magnetic field read-out gradient pulses and the acquisition of four separate field-echoes. Each field-echo is generated through the controlled timing and polarity of an applied read gradient. The period of time between field-echoes (T) is selected according to the chemical-shift difference between water and fat signals so that the two signals develop between them an angular phase difference of .pi. radians (180.degree.) during the inter-echo time. Resulting field-echo signals acquired from two scans, one scan preferably having a sequence repetition period (TR) twice that of the other, are analyzed to determine the tissue fat and water fractions for each pixel and produce corresponding fraction images.
    • 公开了使用组织的核磁共振(NMR)图像数据定量组织的水分和脂肪含量的磁共振成像(MRI)方法和装置,并且用于产生指示总水分和脂肪的脂肪和水分数的图像 组织的含量。 为了减少整体扫描时间,使用四倍场回波成像扫描序列来获取图像数据。 每个成像序列包括初始切片选择性RF激发脉冲,随后是四个磁场读出梯度脉冲,并且获取四个单独的场回波。 通过受控的应用读取梯度的定时和极性产生每个场回波。 根据水和脂肪信号之间的化学位移差选择场回波(T)之间的时间段,使得两个信号在它们之间产生在回波间时间内的π弧度(180度)的角度相位差 。 分析从两次扫描获得的所得到的场回波信号,优选地具有两倍的序列重复周期(TR)的一次扫描,以确定每个像素的组织脂肪和水分数并产生相应的分数图像。