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    • 33. 发明申请
    • ELECTROSTATIC ACTUATOR DEVICE AND METHOD OF MAKING THE DEVICE
    • 静电致动器装置及其制造方法
    • US20080048520A1
    • 2008-02-28
    • US11467660
    • 2006-08-28
    • Peter M. GulvinPeter J. Nystrom
    • Peter M. GulvinPeter J. Nystrom
    • H01G9/00H01H57/00
    • H01H59/0009H01G5/18
    • The present application is directed to novel electrostatic actuators and methods of making the electrostatic actuators. In one embodiment, the electrostatic actuator comprises a substrate, an electrode formed on the substrate and a deflectable member positioned in proximity to the electrode so as to provide a gap between the electrode and the deflectable member. The deflectable member is anchored on the substrate via one or more anchors. The gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region. The first gap height is smaller than the second gap height.
    • 本申请涉及新颖的静电致动器和制造静电致动器的方法。 在一个实施例中,静电致动器包括衬底,形成在衬底上的电极和位于电极附近的可偏转构件,以便在电极和可偏转构件之间提供间隙。 可偏转构件经由一个或多个锚固件锚定在基底上。 所述间隙包括至少一个第一区域,其具有位于所述一个或多个锚固件附近的第一间隙高度和至少一个第二区域,所述第二区域具有比所述第一区域更远离所述锚定件的第二间隙高度。 第一间隙高度小于第二间隙高度。
    • 34. 发明授权
    • Fluid coupler and a device arranged with the same
    • 流体耦合器和与之配套的装置
    • US07331655B2
    • 2008-02-19
    • US11132470
    • 2005-05-19
    • Peter J. NystromJohn R. Andrews
    • Peter J. NystromJohn R. Andrews
    • B41J2/05
    • B41J2/1433B41J2/162B41J2/1623B41J2/1632B41J2/1634Y10T428/24322
    • Plural film layers are disposed on a substrate. Each film layer has regions devoid of film material, thus forming film layer cavity openings. Each film layer has its cavities arranged to provide fluid coupling with its adjacent film layer or layers. The film layer cavities form a traverse channel coupling the top and bottom film layers and also one or more lateral channels coupling cavity openings in the top film layer. The film layer traverse channel couples with a substrate channel that extends from the substrate top surface to one or more of its other surfaces. A device such as a fluid dispenser, fluid ejector, sensor or bioprocessing device is disposed on the top film layer and fluidly coupled to the plural film layers traverse and lateral channels. The traverse channel and the one or more lateral channels are arranged to transport or flow one or more fluids.
    • 多个膜层设置在基板上。 每个膜层具有没有膜材料的区域,从而形成膜层空腔开口。 每个膜层具有其空腔,其设置成与其相邻的膜层或多个层提供流体耦合。 膜层空腔形成连接顶部和底部膜层的横向通道以及耦合顶部膜层中的空腔开口的一个或多个侧向通道。 薄膜层与从衬底顶表面延伸到其另一表面的一个或多个的衬底通道横穿通道耦合。 诸如流体分配器,流体喷射器,传感器或生物处理装置的装置设置在顶部薄膜层上并且流体耦合到多个薄膜层横穿和横向通道。 横向通道和一个或多个横向通道被布置成输送或流动一种或多种流体。