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    • 40. 发明申请
    • MICROELECTROMECHANICAL SYSTEM DIAPHRAGM AND FABRICATING METHOD THEREOF
    • 微电子系统膜及其制造方法
    • US20100044147A1
    • 2010-02-25
    • US12196016
    • 2008-08-21
    • Ming-I Wang
    • Ming-I Wang
    • H04R7/14B81C1/00B81B7/02
    • H04R19/005B81B3/0072B81B2201/0257B81B2203/04
    • A microelectromechanical system diaphragm is provided. The microelectromechanical system diaphragm includes a substrate, a first conductive layer, a second conductive layer, a first dielectric layer, and a second dielectric layer. The first conductive layer is disposed on the substrate. The first conductive layer has a flexible portion in which a plurality of trenches is formed. The second conductive layer is disposed between the first conductive layer and the substrate, in which the flexible portion is located above the second conductive layer. The first dielectric layer is disposed between the second conductive layer and the substrate. The second dielectric layer is disposed between the substrate and a portion of the first conductive layer so as to suspend the flexible portion. Furthermore, at least one first opening is formed in the first conductive layer.
    • 提供微机电系统隔膜。 微机电系统隔膜包括基板,第一导电层,第二导电层,第一介电层和第二介电层。 第一导电层设置在基板上。 第一导电层具有形成多个沟槽的柔性部分。 第二导电层设置在第一导电层和基板之间,柔性部分位于第二导电层之上。 第一介电层设置在第二导电层和基板之间。 第二电介质层设置在基板和第一导电层的一部分之间,以使弹性部分悬挂。 此外,在第一导电层中形成至少一个第一开口。