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31. 发明申请

US20060222233A1 Pattern defect inspection method and apparatus using image correction technique 审中-公开
标题翻译：图案缺陷检查方法和使用图像校正技术的装置
公开(公告)号：US20060222233A1
公开(公告)日：2006-10-05
申请号：US11386744
申请日：2006-03-23
申请人： Shinji Sugihara , Junji Oaki
发明人： Shinji Sugihara , Junji Oaki
IPC分类号： G06K9/00
CPC分类号： G03F1/84 , G06T7/001 , G06T7/70 , G06T2207/30148
摘要： An image correction method employable in a pattern inspection method for emitting light falling onto a workpiece with a pattern formed thereon and for inspecting a pattern image resulting from the pickup of an optical image of the workpiece by comparing it to a corresponding fiducial pattern image is disclosed. The method includes the step of generating a system of equations describing therein an input/output relation using a 2D linear prediction model(s) with respect to the pattern image being tested and the fiducial pattern image. Then, estimate the equation system by least-squares methods to thereby obtain a parameter of the equation system. Next obtain a centroid of the parameter. Then perform interpolation using the value of the centroid, thereby to generate a corrected image. A pattern defect inspection method using the image correction method is also disclosed.
摘要翻译：公开了一种图像校正方法，该图案校正方法可用于发射落在工件上的光，图案形成在其上，并且用于通过将其与对应的基准图案图像进行比较来检测由工件的光学图像拾取产生的图案图像。该方法包括以下步骤：使用关于被测试的图案图像和基准图案图像的2D线性预测模型来生成其中描述的输入/输出关系的方程式。然后，通过最小二乘法估计方程组，从而获得方程式的参数。接下来获得参数的质心。然后使用质心的值进行插值，从而生成校正图像。还公开了使用图像校正方法的图案缺陷检查方法。

32. 发明授权

US08694159B2 Robot control apparatus, disturbance determination method, and actuator control method 有权
标题翻译：机器人控制装置，扰动判定方法及执行机构控制方法
公开(公告)号：US08694159B2
公开(公告)日：2014-04-08
申请号：US13418475
申请日：2012-03-13
申请人： Junji Oaki , Junichiro Ooga , Hideki Ogawa
发明人： Junji Oaki , Junichiro Ooga , Hideki Ogawa
IPC分类号： G05B19/18
CPC分类号： B25J9/1633 , B25J9/1676
摘要： A robot control apparatus includes an actuator; a generator unit; a first detection unit; a first computation unit to compute current positional data of the arm; a second computation unit to compute an input value; a third computation unit to compute an estimation value of a driving torque for driving the actuator; a fourth computation unit to compute a difference between the estimation value of the driving torque and a true value of the driving torque; and a second detection unit to detect a disturbance applied to the arm, wherein the second detection unit includes an update unit to estimate a parameter of a time-series model and updating the time-series model of the first sampling period by applying the parameter, and a determination unit to determine whether a disturbance occurs, by comparing the time-series model of the first sampling period with a time-series model of a second sampling period.
摘要翻译：机器人控制装置包括致动器; 发电机组; 第一检测单元; 计算所述臂的当前位置数据的第一计算单元; 第二计算单元，用于计算输入值; 第三计算单元，计算用于驱动所述致动器的驱动转矩的估计值; 第四计算单元，计算驱动转矩的推定值与驱动转矩的真值之差; 以及第二检测单元，用于检测施加到所述臂的干扰，其中所述第二检测单元包括更新单元，用于估计时间序列模型的参数并通过应用所述参数来更新所述第一采样周期的时间序列模型，以及确定单元，通过将第一采样周期的时间序列模型与第二采样周期的时间序列模型进行比较来确定是否发生干扰。

33. 发明授权

US08634955B2 Mobile robot and method for controlling mobile robot 有权
标题翻译：移动机器人及其控制方法
公开(公告)号：US08634955B2
公开(公告)日：2014-01-21
申请号：US12219319
申请日：2008-07-18
申请人： Junji Oaki , Fumio Ozaki , Nobuto Matsuhira
发明人： Junji Oaki , Fumio Ozaki , Nobuto Matsuhira
IPC分类号： G06F19/00
CPC分类号： G05D1/0227
摘要： A mobile robot includes: a main body; a drive unit that moves the main body; a contact force detecting unit that detects a contact force acting against an obstacle; and a controller that controls the drive unit to move the main body toward a target object under a condition that the contact force detected by the contact force detecting unit is in a predetermined range.
摘要翻译：移动机器人包括：主体; 驱动单元，其移动主体; 接触力检测单元，其检测作用在障碍物上的接触力; 以及控制器，其在由所述接触力检测单元检测到的接触力处于预定范围内的状态下，控制所述驱动单元将所述主体朝向目标物体移动。

34. 发明授权

US08442685B2 Robot control apparatus 有权
标题翻译：机器人控制装置
公开(公告)号：US08442685B2
公开(公告)日：2013-05-14
申请号：US13050069
申请日：2011-03-17
申请人： Junichiro Ooga , Junji Oaki , Hideki Ogawa
发明人： Junichiro Ooga , Junji Oaki , Hideki Ogawa
IPC分类号： B25J9/18 , G05B19/19 , G05B19/04 , G05B19/408 , G05B15/00 , G05B19/00 , G05B19/18
CPC分类号： B25J9/1633
摘要： In an embodiment of the present invention, with the purpose of more accurately calculating a disturbance torque generated by an external force acting on a robot, friction parameters contained in algorithms, such as a friction coefficient and a dead-zone threshold value, are dynamically changed based on the mode of operation, the operation speed, and the like. In this manner, a drive torque is estimated with high accuracy.
摘要翻译：在本发明的一个实施例中，为了更精确地计算由作用在机器人上的外力产生的扰动转矩，动态地改变诸如摩擦系数和死区阈值之类的算法中包含的摩擦参数基于操作模式，操作速度等。以这种方式，以高精度估计驱动扭矩。

35. 发明授权

US08155790B2 Robot control apparatus 有权
标题翻译：机器人控制装置
公开(公告)号：US08155790B2
公开(公告)日：2012-04-10
申请号：US12597958
申请日：2009-09-28
申请人： Junichiro Oga , Junji Oaki , Hideki Ogawa
发明人： Junichiro Oga , Junji Oaki , Hideki Ogawa
IPC分类号： G06F19/00 , B25J13/08
CPC分类号： B25J9/1633 , G05B2219/39353 , G05B2219/39355 , G05B2219/41374 , G05B2219/41387
摘要： A robot control apparatus includes: a drive unit (101) driving an actuator (115) based on a torque command value; a drive torque estimation unit (107) estimating a drive torque from a joint shaft angle; an external torque calculation unit (108) calculating a difference between the estimated drive torque and the torque command value as an external torque; a Jacobian matrix calculation unit (105) calculating a Jacobian matrix based on the joint shaft angle; an external force calculation unit (109) calculating an external force from the Jacobian matrix and the external torque; and a correction amount calculation unit (110) calculating a correction amount from the external force.
摘要翻译：机器人控制装置包括：驱动单元，其基于转矩指令值驱动致动器; 驱动扭矩估计单元，从关节轴角度估计驱动扭矩; 外部扭矩计算单元，计算所述推定驱动转矩与所述转矩指令值之差作为外部转矩; 雅可比矩阵计算单元，基于所述关节轴角计算雅可比矩阵; 计算来自雅可比矩阵和外部扭矩的外力的外力计算单元（109）; 以及校正量计算单元，从外力计算校正量。

36. 发明授权

US07796803B2 Image correction method and apparatus for use in pattern inspection system 有权
标题翻译：用于图案检查系统的图像校正方法和装置
公开(公告)号：US07796803B2
公开(公告)日：2010-09-14
申请号：US11567550
申请日：2006-12-06
申请人： Junji Oaki
发明人： Junji Oaki
IPC分类号： G06K9/00 , G06K9/62
CPC分类号： G06T5/50 , G06T7/001 , G06T2207/20021 , G06T2207/30148
摘要： A technique for correcting an image by using frequency division images and decomposition images corresponding in number to reference points is disclosed. An image correction apparatus includes an image divider which divides an inspection reference image into frequency regions to form frequency division images, a decomposition image generator for defining reference points at several locations within at least one frequency division image and for applying weighting with each reference point as a reference to thereby generate decomposition images corresponding in number to the reference points, a model parameter identifier for identifying a model parameter by using 2D linear prediction models of an image being tested, the decomposition images and a frequency division image which is out of the generation of decomposition images, and a model image generator for using the model parameter to generate a model image. An image inspection apparatus using the correction apparatus and an image correction method are also disclosed.
摘要翻译：公开了一种通过使用频率分割图像和对应于参考点的分解图像来校正图像的技术。图像校正装置包括图像分割器，其将检查参考图像分割成频率区域以形成分频图像;分解图像生成器，用于在至少一个分频图像内的若干位置处定义参考点，并且用每个参考点应用加权作为从而生成与参考点相对应的分解图像的参考，用于通过使用被测图像的2D线性预测模型来识别模型参数的模型参数标识符，分解图像和不在生成中的分频图像的分解图像，以及用于使用模型参数来生成模型图像的模型图像生成器。还公开了一种使用该校正装置的图像检查装置和图像校正方法。

37. 发明授权

US07764825B2 Pattern inspection apparatus and method with enhanced test image correctability using frequency division scheme 有权
标题翻译：使用分频方案提高测试图像可校正性的图案检查装置和方法
公开(公告)号：US07764825B2
公开(公告)日：2010-07-27
申请号：US11567520
申请日：2006-12-06
申请人： Junji Oaki
发明人： Junji Oaki
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06K9/6212 , G06T2207/30148
摘要： A pattern image inspection apparatus with enhanced image correctability due to consolidation of alignment and image correction by using an image as divided by frequency regions while reducing image degradation and setup parameters is disclosed. The apparatus includes an image divider for creating for the test image and the reference image a plurality of frequency division images divided into frequency regions, a model parameter identifier for using 2D linear prediction models of the test image and the reference image to identify model parameters for each frequency division image, a model image generator for creating a model image based on the model parameters, and a comparison processor for performing inspection by comparing the model image to either the test image or the reference image with respect to each frequency division image. An image inspection method is also disclosed.
摘要翻译：公开了一种图像图像检查装置，其通过使用通过频率区域划分的图像进行对准和图像校正的整合而具有增强的图像校正性，同时降低图像劣化和设置参数。该装置包括用于为测试图像和参考图像创建划分为频率区域的多个分频图像的图像分割器，用于使用测试图像的2D线性预测模型和参考图像的模型参数标识符，以识别用于每个分频图像，用于基于模型参数创建模型图像的模型图像生成器，以及用于通过将模型图像与测试图像或参考图像相对于每个分频图像进行比较来执行检查的比较处理器。还公开了一种图像检查方法。

38. 发明授权

US07627165B2 Pattern inspection method and apparatus using linear predictive model-based image correction technique 有权
标题翻译：使用基于线性预测模型的图像校正技术的图案检查方法和装置
公开(公告)号：US07627165B2
公开(公告)日：2009-12-01
申请号：US11360813
申请日：2006-02-24
申请人： Junji Oaki , Shinji Sugihara , Yuichi Nakatani
发明人： Junji Oaki , Shinji Sugihara , Yuichi Nakatani
IPC分类号： G06K9/00
CPC分类号： G03F7/7065 , G03F1/84 , G03F7/705 , G06T7/0004
摘要： An image correction device for use in pattern inspection apparatus is disclosed. This device includes a pattern extraction unit for extracting a pattern, as a cut-and-paste pattern, from a pattern existence region of an inspection reference pattern image and a pattern image of a workpiece being tested. The device also includes a pattern pasting unit for pasting the cut-and-paste pattern in blank regions of the reference and under-test pattern images to thereby create a pasted reference pattern image and a pasted test pattern image. The device further includes an equation generator for generating by linear predictive modeling a set of simultaneous equations relative to the pasted reference and test pattern images, a parameter generator for solving these equations to obtain a model parameter(s), and a unit for creating a corrected pattern image by the linear predictive modeling using the model parameter(s).
摘要翻译：公开了一种用于图案检查装置的图像校正装置。该装置包括：图案提取单元，用于从检查参考图案图像的图案存在区域和被测工件的图案图像中提取图案作为切割和粘贴图案。该装置还包括一个图案粘贴单元，用于将剪切和粘贴图案粘贴在参考和未测试图案图像的空白区域中，从而产生粘贴的参考图案图像和粘贴的测试图案图像。该装置还包括一个等式发生器，用于通过线性预测建模生成相对于粘贴的参考和测试图案图像的一组联立方程，用于求解这些方程以获得模型参数的参数发生器，以及用于创建通过使用模型参数的线性预测建模来校正图案图像。

39. 发明授权

US07487491B2 Pattern inspection system using image correction scheme with object-sensitive automatic mode switchability 有权
标题翻译：模式检测系统采用具有对象敏感自动模式切换功能的图像校正方案
公开(公告)号：US07487491B2
公开(公告)日：2009-02-03
申请号：US11360580
申请日：2006-02-24
申请人： Junji Oaki , Shinji Sugihara
发明人： Junji Oaki , Shinji Sugihara
IPC分类号： G06F17/50 , G06K9/00
CPC分类号： G06T7/001 , G06T2207/30164
摘要： An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model from the pattern image of interest and determine the amount of eccentricity of a centroid position of this model. This amount is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.
摘要翻译：公开了一种用于图案检查装置的图像校正装置，其具有对被测工件的图案图像的密度变化的自动适应性。该装置可操作以从感兴趣的图案图像中识别二维（2D）线性预测模型，并确定该模型的质心位置的偏心量。然后，该量用于在2D线性预测建模的校正图案图像与通过双三次插值技术进行内插的校正图像之间切换。还公开了使用图像校正技术的图案检查方法。

40. 发明申请

US20060215899A1 Image correcting method 有权
标题翻译：图像校正方法
公开(公告)号：US20060215899A1
公开(公告)日：2006-09-28
申请号：US11360581
申请日：2006-02-24
申请人： Junji Oaki
发明人： Junji Oaki
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T5/002 , G06T2207/30148
摘要： In a reticle inspecting apparatus or the like, there is provided an image correcting method which is effective when a rank of a matrix lacks due to continuous equal grayscale values when an image is handled as a matrix. In the image correcting method, a random noise image having fine grayscale is superposed on a pattern image to make a matrix full-rank.
摘要翻译：在掩模版检查装置等中，提供了一种图像校正方法，当图像被处理为矩阵时，当矩阵的秩由于连续相等灰度值而缺失时，该方法是有效的。在图像校正方法中，将具有精细灰度的随机噪声图像叠加在图案图像上以形成矩阵全等级。

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