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    • 32. 发明授权
    • Method of forming a patterned in-situ high Tc superconductive film
    • 形成图案化原位高Tc超导膜的方法
    • US5212147A
    • 1993-05-18
    • US700671
    • 1991-05-15
    • James R. Sheats
    • James R. Sheats
    • C04B41/45C04B41/52C04B41/81C04B41/89H01L39/24
    • C04B41/009C04B41/4572C04B41/4594C04B41/52C04B41/81C04B41/89H01L39/2464Y10S505/728Y10S505/73Y10S505/732
    • A method of forming a patterned in-situ photoconductive film on a substrate including providing a patterned photoresist layer on upper and lower metallic layers formed on a substrate. The patterned photoresist layer is used to form an opening in the upper layer. The pattern in the upper layer thereby has an opening having a geometry substantially similar to a desired pattern of photoconductive material to be formed on the substrate. A portion of the lower layer is removed to form cantilevered regions of the upper layer adjacent to the opening. Superconductive material is then deposited on the substrate by directing the material through the opening at an angle generally perpendicular to the substrate. The superconductive film on the substrate within the lower layer is coated with a polymer. The upper and lower layers and all superconductive material on those layers are removed to leave the polymer-encapsulated superconductive material on the substrate. The polymer is removed by plasma etching that does not adversely affect the superconductive material. Thus, the superconductive material on the substrate is subjected only to post-deposition process steps of depositing the polymer and removing the polymer.
    • 在衬底上形成图案化的原位光电导膜的方法,包括在形成在衬底上的上金属层和下金属层上提供图案化的光致抗蚀剂层。 图案化的光致抗蚀剂层用于在上层中形成开口。 因此,上层中的图案具有开口,该开口的几何形状基本上类似于要在衬底上形成的光导材料的期望图案。 下层的一部分被去除以形成与开口相邻的上层的悬臂区域。 然后通过以大致垂直于衬底的角度引导材料穿过开口而将超导材料沉积在衬底上。 下层中的基底上的超导膜被聚合物涂覆。 去除上层和下层以及这些层上的所有超导材料,以使基板上的聚合物封装的超导材料留下。 通过不影响超导材料的等离子体蚀刻除去聚合物。 因此,基板上的超导材料仅经受沉积聚合物并除去聚合物的后沉积工艺步骤。
    • 33. 发明授权
    • Method for photochemically enhancing resolution in photolithography
processes
    • 在光刻工艺中光化学增强分辨率的方法
    • US4705729A
    • 1987-11-10
    • US673243
    • 1984-11-19
    • James R. Sheats
    • James R. Sheats
    • G03F7/26G03C1/00G03C5/00G03F7/09G03F7/095G03F9/00
    • G03F7/095
    • In the fabrication of integrated circuits, a polymethyl methacrylate film containing a selected dye and exhibiting a strong dependence on light intensity is photobleached to provide an optical mask to pattern an underlying photoresist layer. While the film is photobleached, the underlying photoresist layer is made to be substantially unaffected by the photobleaching process. When the optical mask is realized, it is used to mask the light-sensitive photoresist layer when the photoresist layer is exposed to light. However, the photobleached layer, which is also sensitive to light, is now in turn made to be substantially unaffected by the exposure process. In this manner, the integrity of the optical mask resolution is maintained at its optimum, and densely integrated circuits can be processed and fabricated.
    • 在集成电路的制造中,含有选择的染料并且对光强度具有强烈依赖性的聚甲基丙烯酸甲酯膜被光漂白以提供光掩模以对下面的光致抗蚀剂层进行图案化。 当膜被光漂白时,底层光致抗蚀剂层被制成基本上不受光漂白工艺的影响。 当实现光掩模时,当光致抗蚀剂层暴露于光时,其用于掩蔽光敏光致抗蚀剂层。 然而,也对光敏感的光漂白层现在又被基本上不受曝光过程的影响。 以这种方式,光掩模分辨率的完整性保持在其最佳状态,并且密集集成电路可以被加工和制造。
    • 34. 发明授权
    • High-throughput assembly of series interconnected solar cells
    • 串联式太阳能电池的高通量装配
    • US08927315B1
    • 2015-01-06
    • US13562712
    • 2012-07-31
    • James R. SheatsWerner Dumanski
    • James R. SheatsWerner Dumanski
    • H01L21/00
    • H01L31/042H01L31/0512H01L31/0516H01L31/1876Y02E10/50Y02P70/521
    • Methods and devices are provided for high-efficiency solar cells. In one embodiment, an assembly is provided comprising of a plurality of solar cells each having at least one transparent conductor, a photovoltaic layer, at least one bottom electrode, a plurality of emitter wrap through (EWT) vias containing a conductive material, and a plurality of series interconnect vias containing a conductive material. The assembly may also include a backside support coupled to the solar cells, wherein the backside support is patterned to have electrically conductive areas and electrically nonconductive areas that create a series interconnect between solar cells electrically coupled by the support and prevents parallel connections between the solar cells. The cells may have a via insulating layer in each via separating the conductive material in each via from any side walls of the bottom electrode.
    • 为高效太阳能电池提供了方法和装置。 在一个实施例中,提供一种组件,其包括多个太阳能电池,每个太阳能电池具有至少一个透明导体,光伏层,至少一个底部电极,包含导电材料的多个发射体包裹(EWT)通孔,以及 多个包含导电材料的串联互连通孔。 组件还可以包括耦合到太阳能电池的背侧支撑件,其中背面支撑件被图案化以具有导电区域和不导电的区域,其在由支撑件电耦合的太阳能电池组之间产生串联互连,并且防止太阳能电池之间的并联连接 。 在每个通孔中,电池可以具有通孔绝缘层,每个通孔中的每个通孔中的导电材料与底部电极的任何侧壁分开。