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31. 发明申请

US20090212680A1 Microchannel Plate Devices With Multiple Emissive Layers 有权
标题翻译：具有多个发射层的微通道板装置
公开(公告)号：US20090212680A1
公开(公告)日：2009-08-27
申请号：US12038254
申请日：2008-02-27
申请人： Anton Tremsin , Philippe de Rouffignac , Neal T. Sullivan , David Beaulieu , Michael D. Potter
发明人： Anton Tremsin , Philippe de Rouffignac , Neal T. Sullivan , David Beaulieu , Michael D. Potter
IPC分类号： H01J43/06
CPC分类号： H01J43/246
摘要： A microchannel plate includes a substrate defining a plurality of pores extending from a top surface of the substrate to a bottom surface of the substrate. The plurality of pores includes a resistive material on an outer surface that forms a first emissive layer. A second emissive layer is formed over the first emissive layer. The second emissive layer is chosen to achieve at least one of an increase in secondary electron emission efficiency and a decrease in gain degradation as a function of time. A top electrode is positioned on the top surface of the substrate and a bottom electrode is positioned on the bottom surface of the substrate.
摘要翻译：微通道板包括限定从衬底的顶表面延伸到衬底的底表面的多个孔的衬底。多个孔包括形成第一发射层的外表面上的电阻材料。在第一发射层上形成第二发射层。选择第二发射层以实现二次电子发射效率的增加和随着时间的函数的增益降低的降低中的至少一个。顶部电极位于衬底的顶表面上，底部电极位于衬底的底表面上。

32. 发明申请

US20100044577A1 MICROCHANNEL PLATE DEVICES WITH TUNABLE RESISTIVE FILMS 有权
标题翻译：具有可调电阻膜的微通道板器件
公开(公告)号：US20100044577A1
公开(公告)日：2010-02-25
申请号：US12392064
申请日：2009-02-24
申请人： Neal T. Sullivan , Anton Tremsin , Phiippe De Rouffignac , David Beaulieu , Kourosh Saadatmand , Steve Bachman , Ken Stenton
发明人： Neal T. Sullivan , Anton Tremsin , Phiippe De Rouffignac , David Beaulieu , Kourosh Saadatmand , Steve Bachman , Ken Stenton
IPC分类号： G01T3/00
CPC分类号： H01J43/246 , G01T3/08
摘要： A microchannel plate for detecting neutrons includes a hydrogen-rich polymer substrate that defines a plurality of channels extending from a top surface of the substrate to a bottom surface of the substrate, where neutrons interact with the plurality of channels to generate at least one secondary electron. A top electrode is positioned on the top surface of the substrate and a bottom electrode is positioned on the bottom surface of the substrate. A resistive layer is formed over an outer surface of the plurality of channels that provides ohmic conduction with a resistivity that is substantially constant. An emissive layer is formed over the resistive layer. Neutron interaction products interact with the plurality of channels defined by the substrate and the emissive films to generate secondary electrons that cascade within the plurality of channels to provide an amplified signal related to the detection of neutrons.
摘要翻译：用于检测中子的微通道板包括富氢聚合物基底，其限定从基底的顶表面延伸到基底的底表面的多个通道，其中中子与多个通道相互作用以产生至少一个二次电子。顶部电极位于衬底的顶表面上，底部电极位于衬底的底表面上。电阻层形成在多个通道的外表面上，其提供基本恒定的电阻率的欧姆导电。在电阻层上形成发光层。中子相互作用产物与由衬底和发射膜限定的多个通道相互作用以产生在多个通道内级联的二次电子，以提供与中子检测有关的放大信号。

33. 发明授权

US07425713B2 Synchronous raster scanning lithographic system 有权
标题翻译：同步光栅扫描光刻系统
公开(公告)号：US07425713B2
公开(公告)日：2008-09-16
申请号：US11331545
申请日：2006-01-13
申请人： David Beaulieu
发明人： David Beaulieu
IPC分类号： G03F9/00 , G21K5/10
CPC分类号： H01J37/3177 , B82Y10/00 , B82Y40/00 , G03F7/70383 , G03F7/70391 , G03F7/704 , H01J2237/31774
摘要： A multi-beam synchronous raster scanning lithography system includes a processor that generates electrical signals representing a desired exposure pattern at an output. A multi-beam source of exposing radiation generates a plurality of exposure beam. A beam modulator receives the electrical signals generated by the processor and modulates the plurality of exposing beams according to the desired exposure pattern. A beam deflector deflects the plurality of exposure beams by a predetermined distance along a first axis, thereby exposing a plurality of pixels along the first axis with the desired exposure pattern. A translation stage moves the substrate a predetermined distance along a second axis to position the substrate for a subsequent exposure of pixels along the first axis that results in a desired overlapping exposure dose profile.
摘要翻译：多光束同步光栅扫描光刻系统包括在输出处产生表示期望曝光图案的电信号的处理器。曝光辐射的多光束源产生多个曝光光束。光束调制器接收由处理器产生的电信号，并根据期望的曝光图案调制多个曝光光束。光束偏转器沿着第一轴将多个曝光光束偏转预定距离，从而以期望的曝光图案沿着第一轴露出多个像素。平移台沿着第二轴移动衬底预定距离以定位衬底，以便随后沿着第一轴曝光像素，导致期望的重叠曝光剂量分布。

34. 发明授权

US07408142B2 Microchannel amplifier with tailored pore resistance 有权
标题翻译：微通道放大器具有定制的孔隙电阻
公开(公告)号：US07408142B2
公开(公告)日：2008-08-05
申请号：US11532008
申请日：2006-09-14
申请人： David R. Beaulieu , Harry F. Lockwood , Anton S. Tremsin
发明人： David R. Beaulieu , Harry F. Lockwood , Anton S. Tremsin
IPC分类号： H01J40/14
CPC分类号： H01J29/023 , H01J43/246
摘要： A microchannel amplifier includes an insulating substrate that defines at least one microchannel pore through the substrate from an input surface to an output surface. A conductive layer is formed on an outer surface of the at least one microchannel pore that has a non-uniform resistance as a function of distance through the at least one microchannel pore. The non-uniform resistance is selected to simulate saturation by reducing gain as a function of input current and bias voltage compared with uniform resistance. A first and second electrode is deposited on a respective one of the input and the output surfaces of the insulating substrate. The microchannel amplifier amplifying emissions propagating through the at least one microchannel pore when the first and second electrodes are biased.
摘要翻译：微通道放大器包括绝缘基板，其从输入表面到输出表面限定穿过基板的至少一个微通道孔。在所述至少一个微通道孔的外表面上形成导电层，所述微通道孔具有通过所述至少一个微通道孔的距离的函数的不均匀电阻。选择非均匀电阻来模拟饱和，通过减小作为输入电流和偏置电压的函数的增益与均匀电阻相比。第一和第二电极沉积在绝缘基板的输入和输出表面中的相应一个上。当第一和第二电极偏置时，微通道放大器放大通过至少一个微通道孔传播的发射。

35. 发明公开

EP2260500A4 METHOD OF FABRICATING MICROCHANNEL PLATE DEVICES WITH MULTIPLE EMISSIVE LAYERS 审中-公开
标题翻译：工艺生产具有多层EMITTING微通道板
公开(公告)号：EP2260500A4
公开(公告)日：2015-03-04
申请号：EP09715496
申请日：2009-02-24
申请人： ARRADIANCE INC
发明人： SULLIVAN NEAL T , BEAULIEU DAVID , TREMSIN ANTON , DE ROUFFIGNAC PHILIPPE , POTTER MICHAEL D
IPC分类号： H01J43/24 , H01J9/12 , H01J37/147
CPC分类号： H01J43/246 , H01J9/125

36. 发明公开

EP2257962A4 MICROCHANNEL PLATE DEVICES WITH MULTIPLE EMISSIVE LAYERS 有权转让
标题翻译：与发射多层微通道板DEVICES
公开(公告)号：EP2257962A4
公开(公告)日：2015-03-04
申请号：EP09758806
申请日：2009-02-24
申请人： ARRADIANCE INC
发明人： SULLIVAN NEAL T , BEAULIEU DAVID , TREMSIN ANTON , DE ROUFFIGNAC PHILIPPE , POTTER MICHAEL D
IPC分类号： H01J37/147 , H01J43/06 , H01J43/24
CPC分类号： H01J43/246
摘要： A microchannel plate includes a substrate defining a plurality of pores extending from a top surface of the substrate to a bottom surface of the substrate. The plurality of pores includes a resistive material on an outer surface that forms a first emissive layer. A second emissive layer is formed over the first emissive layer. The second emissive layer is chosen to achieve at least one of an increase in secondary electron emission efficiency and a decrease in gain degradation as a function of time. A top electrode is positioned on the top surface of the substrate and a bottom electrode is positioned on the bottom surface of the substrate.

37. 发明公开

EP2274762A4 IMAGE INTENSIFYING DEVICE 有权转让
标题翻译： BILDVERSTÄRKERVORRICHTUNG
公开(公告)号：EP2274762A4
公开(公告)日：2011-07-27
申请号：EP09731342
申请日：2009-04-09
申请人： ARRADIANCE INC
发明人： SULLIVAN NEAL T , TREMSIN ANTON , STENTON KEN , DE ROUFFIGNAC PHILIPPE
IPC分类号： H01J31/50
CPC分类号： H01J31/507 , H01J43/246 , H01J2231/5016
摘要： An image intensifying device includes a lens that is positioned at a light input that forms an image of a scene. The image intensifying device also includes an image intensifier tube that includes a photocathode that is positioned to receive the image formed by the lens. The photocathode generates photoelectrons in response to the light image of the scene. The image intensifier tube also includes a microchannel plate having an input surface comprising the photocathode. The microchannel plate receives the photoelectrons generated by the photocathode and generating secondary electrons. An electron detector receives the secondary electrons generated by the microchannel plate and generates an intensified image of the scene.
摘要翻译：图像增强装置包括位于形成场景图像的光输入处的透镜。图像增强装置还包括图像增强管，其包括被定位成接收由透镜形成的图像的光电阴极。光电阴极响应于场景的光图像而产生光电子。图像增强管还包括具有包括光电阴极的输入表面的微通道板。微通道板接收由光电阴极产生的光电子并产生二次电子。电子检测器接收由微通道板产生的二次电子并产生场景的增强图像。

38. 发明公开

EP2308073A2 MICROCHANNEL PLATE DEVICES WITH TUNABLE RESISTIVE FILMS 审中-公开
标题翻译：具有可调抗性薄膜微通道板DEVICES
公开(公告)号：EP2308073A2
公开(公告)日：2011-04-13
申请号：EP09818140.7
申请日：2009-06-19
申请人： Arradiance, Inc.
发明人： SULLIVAN, Neal, T. , TREMSIN, Anton , DE ROUFFIGNAC, Philippe , BEAULIEU, David , SAADATMAND, Kourosh , BACHMAN, Steve , STENTON, Ken
IPC分类号： H01J37/147 , H01J43/10 , G01T3/00
CPC分类号： H01J43/246 , G01T3/08
摘要： A microchannel plate for detecting neutrons includes a hydrogen-rich polymer substrate that defines a plurality of channels extending from a top surface of the substrate to a bottom surface of the substrate, where neutrons interact with the plurality of channels to generate at least one secondary electron. A top electrode is positioned on the top surface of the substrate and a bottom electrode is positioned on the bottom surface of the substrate. A resistive layer is formed over an outer surface of the plurality of channels that provides ohmic conduction with a resistivity that is substantially constant. An emissive layer is formed over the resistive layer. Neutron interaction products interact with the plurality of channels defined by the substrate and the emissive films to generate secondary electrons that cascade within the plurality of channels to provide an amplified signal related to the detection of neutrons.

39. 发明公开

EP2308072A2 MICROCHANNEL PLATE DEVICES WITH TUNABLE RESISTIVE FILMS 有权转让
标题翻译：具有可调抗性薄膜微通道板DEVICES
公开(公告)号：EP2308072A2
公开(公告)日：2011-04-13
申请号：EP09816644.0
申请日：2009-06-19
申请人： Arradiance, Inc.
发明人： SULLIVAN, Neal, T. , BACHMAN, Steve , DE ROUFFIGNAC, Philippe , TREMSIN, Anton , BEAULIEU, David
IPC分类号： H01J37/147 , G01T3/00
CPC分类号： H01J43/04 , H01J43/246
摘要： A microchannel plate includes a substrate defining a plurality of channels extending from a top surface of the substrate to a bottom surface of the substrate. A resistive layer is formed over an outer surface of the plurality of channels that provides ohmic conduction with a predetermined resistivity that is substantially constant. An emissive layer is formed over the resistive layer. A top electrode is positioned on the top surface of the substrate. A bottom electrode positioned on the bottom surface of the substrate.

40. 发明公开

EP2308073A4 MICROCHANNEL PLATE DEVICES WITH TUNABLE RESISTIVE FILMS 审中-公开
标题翻译：具有可调抗性薄膜微通道板DEVICES
公开(公告)号：EP2308073A4
公开(公告)日：2014-07-09
申请号：EP09818140
申请日：2009-06-19
申请人： ARRADIANCE INC
发明人： SULLIVAN NEAL T , TREMSIN ANTON , DE ROUFFIGNAC PHILIPPE , BEAULIEU DAVID , SAADATMAND KOUROSH , BACHMAN STEVE , STENTON KEN
IPC分类号： H01J43/24 , G01T3/00
CPC分类号： H01J43/246 , G01T3/08

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