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21. 发明授权

US06590760B1 Joint structure of ceramics and metal and intermediate insertion member used in this joint structure 有权
标题翻译：在这种接头结构中使用的陶瓷和金属和中间插入件的接头结构
公开(公告)号：US06590760B1
公开(公告)日：2003-07-08
申请号：US09580073
申请日：2000-05-30
申请人： Tomoyuki Fujii
发明人： Tomoyuki Fujii
IPC分类号： H01T2300
CPC分类号： H01L21/6833 , B32B9/005 , B32B9/041 , B32B2250/42 , B32B2307/202 , B32B2457/14 , C04B37/026 , C04B2235/9607 , C04B2237/12 , C04B2237/121 , C04B2237/123 , C04B2237/124 , C04B2237/125 , C04B2237/343 , C04B2237/366 , C04B2237/368 , C04B2237/401 , C04B2237/405 , C04B2237/68 , C04B2237/708 , C04B2237/72 , C04B2237/765 , C04B2237/84
摘要： A joint structure of a first member includes a substrate made of ceramics and a metal embedded member embedded in the substrate, in which a part of the metal embedded member is exposed to a joint surface of the first member, and a second member made of metal. The joint structure includes: an intermediate insertion member interposed between the joint surface of the first member and the second member; a first joint layer which joins the joint surface of the first member and the intermediate insertion member; and a second joint layer which joins the second member and the intermediate insertion member. In the joint structure, the intermediate insertion member is made of a laminated member of a plurality of ceramics layers and at least one metal layer interposed between respective ceramics layers.
摘要翻译：第一构件的接合结构包括由陶瓷制成的基板和嵌入到基板中的金属嵌入构件，其中金属嵌入构件的一部分暴露于第一构件的接合表面，以及由金属制成的第二构件。接头结构包括：中间插入构件，其插入在第一构件的接合面和第二构件之间; 第一接合层，其接合第一构件和中间插入构件的接合表面; 以及连接第二构件和中间插入构件的第二接合层。在接合结构中，中间插入部件由多个陶瓷层的层压部件和介于各陶瓷层之间的至少一个金属层构成。

22. 发明授权

US06535372B2 Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same 有权
标题翻译：用于保持半导体晶片的受控电阻率氮化硼静电卡盘装置及其制造方法
公开(公告)号：US06535372B2
公开(公告)日：2003-03-18
申请号：US09885646
申请日：2001-06-20
申请人： Vijay D. Parkhe , Chandra V. Deshpandey
发明人： Vijay D. Parkhe , Chandra V. Deshpandey
IPC分类号： H01T2300
CPC分类号： H02N13/00 , Y10T279/23
摘要： Apparatus for retaining a workpiece in a semiconductor processing chamber and method for fabricating the same. In one embodiment, a method for fabricating the apparatus includes providing a controlled resistivity boron nitride (CRBN) plate. A conductive layer is disposed on a portion of a lower surface of the CRBN plate to form at least one chucking electrode. A layer of boron nitride powder is disposed on the conductive layer and the lower surface of the CRBN plate. The CRBN plate, the conductive layer, and the boron nitride powder are hot pressed together to form the apparatus. In a second embodiment, a conductive electrode layer is deposited on a portion of a lower surface of the CRBN plate. A layer of pyrolytic boron nitride is deposited on the conductive layer and the lower surface of the CRBN plate to form the apparatus.
摘要翻译：用于在半导体处理室中保持工件的装置及其制造方法。在一个实施例中，制造该装置的方法包括提供受控电阻率的氮化硼（CRBN）板。导电层设置在CRBN板的下表面的一部分上以形成至少一个夹紧电极。在导电层和CRBN板的下表面上设置一层氮化硼粉末。将CRBN板，导电层和氮化硼粉末热压在一起以形成该装置。在第二实施例中，导电电极层沉积在CRBN板的下表面的一部分上。在导电层和CRBN板的下表面上沉积一层热解氮化硼以形成该装置。

23. 发明授权

US06532142B1 Electrification preventing implement and electrification preventing method 有权
标题翻译：防止电气化工具和防电气化方法
公开(公告)号：US06532142B1
公开(公告)日：2003-03-11
申请号：US09549860
申请日：2000-04-14
申请人： Kuniaki Takamatsu , Toyoko Ohara , Hideaki Kikuchi
发明人： Kuniaki Takamatsu , Toyoko Ohara , Hideaki Kikuchi
IPC分类号： H01T2300
CPC分类号： H05F7/00
摘要： An electrification preventing is disclosed in which granular and/or powdered Si or SiOx (0
摘要翻译：公开了防电气化，其中带有负静电（负电离）的粒状和/或粉末化的Si或SiO x（0

24. 发明授权

US06807044B1 Corona discharge apparatus and method of manufacture 有权
标题翻译：电晕放电装置及其制造方法
公开(公告)号：US06807044B1
公开(公告)日：2004-10-19
申请号：US10428363
申请日：2003-05-01
申请人： Gregory Vernitsky , Scott Gehlke , Peter Gefter , Dennis A. Leri
发明人： Gregory Vernitsky , Scott Gehlke , Peter Gefter , Dennis A. Leri
IPC分类号： H01T2300
CPC分类号： H01T23/00
摘要： An ionizer bar includes upper and lower housings having aerodynamically-shaped exterior surfaces to support laminar air flow over the structure. The upper housing forms an upper interior chamber for electrical circuitry isolated from a lower chamber within the lower housing that confines fluid under pressure therein. Outlets spaced along the length of the structure include ionizing electrodes that are disposed within fluid conduits and that are connected to a source of ionizing voltage mounted in the upper chamber. Fluid passages at the outlets release fluid under pressure within the lower chamber around associated ionizing electrodes mounted at the outlets.
摘要翻译：电离杆包括具有空气动力学形状的外表面的上部和下部壳体，以支撑结构上的层流气流。上壳体形成用于与下壳体内的下室隔离的电路的上部内部室，其将流体压力限制在其中。沿着结构长度间隔开的出口包括设置在流体管道内并且连接到安装在上部室中的电离电压源的电离电极。出口处的流体通道在安装在出口处的相关电离电极周围的下腔室内的压力下释放流体。

25. 发明授权

US06791816B2 Personal defense device 失效
标题翻译：个人防御装置
公开(公告)号：US06791816B2
公开(公告)日：2004-09-14
申请号：US10375075
申请日：2003-02-28
申请人： Kenneth J. Stethem
发明人： Kenneth J. Stethem
IPC分类号： H01T2300
CPC分类号： F41H13/0018 , A01K15/029 , F21V33/0076 , F41B15/04 , H05C1/06
摘要： Multiple embodiments of a personal defense device each include an electrical stun circuit and electrodes with a structure adapted for use as an impact weapon as well, and further include a radially disposed flashlight or signal light therewith. The electrical circuitry for the stun apparatus may be formed of flexible circuit material with dual circuit paths between each component, for reliability and resistance to damage due to impact forces incurred when the device is used as an impact weapon. A second, normally closed interrupter switch may be provided for the stun circuit, with the user of the present device being required to hold the interrupter switch in order to keep the stun circuitry from operating when the master switch is turned on. The end opposite the handle may include a series of impact ribs with cutting blades removably installable thereon, to produce non-lethal cuts in an assailant during an attack.
摘要翻译：个人防御装置的多个实施例各自包括电眩光电路和具有适于用作冲击武器的结构的电极，并且还包括径向设置的手电筒或信号灯。用于眩光装置的电路可以由柔性电路材料形成，在每个部件之间具有双电路路径，用于可靠性并且由于当该装置用作冲击武器时产生的冲击力而导致的损坏。可以为眩光电路提供第二个常闭断路器开关，本装置的用户需要保持断路器开关，以便在主开关接通时保持眩晕电路不工作。与手柄相对的端部可以包括一系列具有可拆卸地安装在其上的切割刀片的冲击肋，以在攻击期间在攻击者中产生非致命的切割。

26. 发明授权

US06778377B2 Electrostatic chucking system, and apparatus and method of manufacturing a semiconductor device using the electrostatic chucking system 失效
标题翻译：静电夹持系统以及使用静电吸盘系统制造半导体器件的装置和方法
公开(公告)号：US06778377B2
公开(公告)日：2004-08-17
申请号：US09732891
申请日：2000-12-11
申请人： Kimio Hagi
发明人： Kimio Hagi
IPC分类号： H01T2300
CPC分类号： H01L21/67248 , B23Q3/154 , H01L21/6833 , H02N13/00
摘要： A voltage is applied to an electrode of an electrostatic chuck for chucking a semiconductor substrate, and the application voltage is controlled stepwise by means of a voltage control section. In the electrostatic chucking system, a temperature sensor may be provided for detecting the temperature of the semiconductor substrate held by the electrostatic chuck, wherein a signal output from the temperature sensor is input to the voltage control section to thereby control the applied voltage.
摘要翻译：电压被施加到用于夹持半导体衬底的静电吸盘的电极，并且施加电压通过电压控制部分逐步控制。在静电吸盘系统中，可以设置温度传感器，用于检测由静电卡盘保持的半导体衬底的温度，其中从温度传感器输出的信号被输入到电压控制部分，从而控制施加的电压。

27. 发明授权

US06754062B2 Hybrid ceramic electrostatic clamp 有权
标题翻译：混合陶瓷静电夹
公开(公告)号：US06754062B2
公开(公告)日：2004-06-22
申请号：US10085571
申请日：2002-02-27
申请人： Joseph Logan , John R. Miller , Mahmood Naim , Robert E. Tompkins
发明人： Joseph Logan , John R. Miller , Mahmood Naim , Robert E. Tompkins
IPC分类号： H01T2300
CPC分类号： H02N13/00
摘要： The invention is a hybrid chuck for securing workpieces with an electrostatic charge. The hybrid chuck includes a dielectric base for supporting the hybrid chuck. The dielectric base has a top surface and a conductive layer covers at least a portion of the top surface of the dielectric base. The conductive layer is conductive for receiving a current that creates an electrostatic charge and is non-metallic for maintaining the electrostatic charge without significant eddy current losses in the presence of dynamic electromagnetic fields. The top working surface covers the conductive layer and is flat for holding workpieces upon the receiving of the current to create the electrostatic charge in the conductive layer.
摘要翻译：本发明是用于用静电荷固定工件的混合卡盘。混合卡盘包括用于支撑混合卡盘的电介质基座。电介质基底具有顶表面，并且导电层覆盖电介质基底的顶表面的至少一部分。导电层是导电的，用于接收产生静电电荷的电流，并且是非金属的，用于在存在动态电磁场的情况下保持静电电荷而没有显着的涡流损耗。顶部工作表面覆盖导电层，并且在接收电流时保持工件是平坦的，以在导电层中产生静电电荷。

28. 发明授权

US06636413B2 Electrostatic chucks and process for producing the same 有权
公开(公告)号：US06636413B2
公开(公告)日：2003-10-21
申请号：US10004736
申请日：2001-12-04
申请人： Hideyoshi Tsuruta
发明人： Hideyoshi Tsuruta
IPC分类号： H01T2300
CPC分类号： G03F7/70708 , B23Q3/154 , C23C16/4581 , G03F7/707 , H01L21/6831 , H01L21/6833 , H02N13/00 , Y10T29/49 , Y10T279/23
摘要： An electrostatic chuck including a dielectric layer made of aluminum nitride, an inner electrode buried in the dielectric layer, and a surface layer covering a surface of the dielectric layer. The surface layer is made of a material harder than the aluminum nitride constituting the dielectric layer and having a thickness of not less than 200 nm, and the surface of the dielectric layer has a center-line average surface roughness of not more than 25 nm. The electrostatic chuck is adapted to adsorb a wafer onto the dielectric layer through the surface layer.

29. 发明授权

US06597559B2 Lightning rocket 失效
公开(公告)号：US06597559B2
公开(公告)日：2003-07-22
申请号：US09772766
申请日：2001-01-31
申请人： Robert E. Betts
发明人： Robert E. Betts
IPC分类号： H01T2300
CPC分类号： H02G13/00 , H02G13/20
摘要： The lightning rocket system of this invention comprises a rocket launcher that is in communication with a detection device that measures the presence of electrostatic and ionic change in close proximity to the rocket launcher that also fires the rocket launcher. This system is designed to control the time and the location of a lightning strike. The lightning rocket can be comprised of solid propellant that has cesium salts added which produces a conductive path when the exhaust gases are discharged from the rocket that is expelled to the static layer of a thundercloud. A conducting lightning rod which is grounded and positioned along side the launch tube for the solid propellant is in communication with the conductive path to thereby control the time and location of a lightning strike from the thundercloud. In a liquid expelled rocket a solution of calcium chloride is used to form a conductive path from a thundercloud. As the rocket flies to the thundercloud this liquid is expelled aft forming a column in the air of particles that are more electrically conductive than the surrounding air. In a similar fashion to the system employing a solid propellant as the conductive producer this conductive path conducts a lightning strike to ground to thereby control the time and location of a lightning strike from the thundercloud.

30. 发明授权

US06567257B2 Method and apparatus for conditioning an electrostatic chuck 失效
公开(公告)号：US06567257B2
公开(公告)日：2003-05-20
申请号：US09836883
申请日：2001-04-17
申请人： Karl Brown
发明人： Karl Brown
IPC分类号： H01T2300
CPC分类号： H01L21/67115 , H01L21/6831 , H01L21/6833
摘要： A method and apparatus for discharging a residual charge from an electrostatic chuck having one or more electrodes. The discharge process involves exposing a surface of the electrostatic chuck to non-ionized radiation such as photons or microwaves. The discharge apparatus includes a radiation source as part of a semiconductor wafer processing system controlled by a computer. The source of radiation may be lamps such as “bakeout” lamps that are generally located within the process chamber. Radiation from the lamps excite certain dopant atoms within the chuck material causing the material to exhibit the photoconductive effect. Such a photoconductive state allows any residual charge on the surface of the chuck to be conducted away through the chuck electrodes even as the chuck cools to temperatures that do not promote such charge migration.

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