专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06768627B1 Electrostatic chuck and processing apparatus for insulative substrate 有权
标题翻译：用于绝缘衬底的静电吸盘和加工设备
公开(公告)号：US06768627B1
公开(公告)日：2004-07-27
申请号：US09979627
申请日：2002-02-11
申请人： Tetsuo Kitabayashi , Hiroaki Hori , Takeshi Uchimura , Noriaki Tateno , Koh Fuwa , Ken Maehira
发明人： Tetsuo Kitabayashi , Hiroaki Hori , Takeshi Uchimura , Noriaki Tateno , Koh Fuwa , Ken Maehira
IPC分类号： H01T2300
CPC分类号： B23Q3/15 , B23Q3/154 , H01L21/6833 , H02N13/00
摘要： According to the present invention, there is provided an electrostatic chuck for electrostatically attracting an insulative substrate, an apparatus for heating/cooling an insulative substrate using the electrostatic chuck, and a method for controlling the temperature of an insulative substrate. The shape and the properties of the dielectric, and the shape of the electrodes, which form the electrostatic chuck, are disclosed. Also the apparatus for heating/cooling an insulative substrate comprising a plate, a gas supply conduit and a temperature controlling system, and the apparatus for processing an insulative substrate in which the apparatus for heating/cooling an insulative substrate is installed are disclosed.
摘要翻译：一种用于吸引在真空气氛下使用的绝缘衬底的静电吸盘包括：具有吸引绝缘衬底的第一表面的介电层和在其上设有多个电极的第二表面; 绝缘支撑基板，其上固定所述电介质层; 设置在所述绝缘支撑基板上的多个导电端子; 以及电极和导电端子之间的电连接。

2. 发明授权

US06760213B2 Electrostatic chuck and method of treating substrate using electrostatic chuck 失效
标题翻译：静电吸盘和使用静电吸盘处理衬底的方法
公开(公告)号：US06760213B2
公开(公告)日：2004-07-06
申请号：US10216777
申请日：2002-08-13
申请人： Kouichi Yamamoto
发明人： Kouichi Yamamoto
IPC分类号： H01T2300
CPC分类号： H01L21/6833 , H02N13/00
摘要： An electrostatic chuck comprises a sample stage 9 provided with electrodes 1, 2 and 3 for applying n-phase alternating voltage wherein n is equal to or greater than 2, and a circuit for applying the n-phase alternating voltage. The present electrostatic chuck realizes smooth and speedy attraction/separation of the substrate without the need for a charge elimination process, and the present chuck solves the problem of substrate vibration.
摘要翻译：静电卡盘包括：具有用于施加n等于或大于2的n相交流电压的电极1,2和3的样品台9和用于施加n相交流电压的电路。本静电卡盘实现了基板的平滑快速的吸引/分离，而不需要电荷消除过程，并且本卡盘解决了基板振动的问题。

3. 发明授权

US06690565B2 Method and apparatus for neutralizing stray current impulses 有权
标题翻译：用于中和杂散电流脉冲的方法和装置
公开(公告)号：US06690565B2
公开(公告)日：2004-02-10
申请号：US10118016
申请日：2002-04-09
申请人： Michel Montreuil
发明人： Michel Montreuil
IPC分类号： H01T2300
CPC分类号： H02H9/005
摘要： The attenuation of the stray current impulse limits the capacitive leakage. The value of the inductance, coupled to the parasitic capacitance of the charge, creates a reactive filter effect. Since the effect is reactive, the impulse energy is not absorbed. The energy is therefore redistributed in time, but since the intensity of the tension is greatly diminished, the coupling through the capacitances is diminished. The apparatus comprises a core which includes 1, 2, 3 or 4 coils. The apparatus is typically a high quality reactance which includes a low reactive value in opposition of the line current (residual mode) and a high reactive value for the circulation of the parallel current (common mode).
摘要翻译：杂散电流脉冲的衰减限制了电容泄漏。与电荷的寄生电容耦合的电感值产生反应滤波器效应。由于效应是反应性的，脉冲能量不被吸收。因此能量在时间上重新分布，但是由于张力的强度大大降低，所以通过电容的耦合被减弱。该装置包括一个包括1,2,3或4个线圈的芯。该装置通常是高质量电抗，其包括与线电流（残余模式）相对的低无功值和用于并联电流（共模）的循环的高无功值。

4. 发明授权

US06643114B2 Personal defense device 失效
标题翻译：个人防御装置
公开(公告)号：US06643114B2
公开(公告)日：2003-11-04
申请号：US10084972
申请日：2002-03-01
申请人： Kenneth J. Stethem
发明人： Kenneth J. Stethem
IPC分类号： H01T2300
CPC分类号： F41H13/0018 , A01K15/029 , F21V33/0076 , F41B15/04 , H05C1/06
摘要： A personal defense device includes an electrical stun circuit and electrodes with a structure adapted for use as an impact weapon as well, and further includes a radially disposed flashlight or signal light therewith. The electrical circuitry for the stun apparatus is formed of flexible circuit material with dual circuit paths between each component, for reliability and resistance to damage due to impact forces incurred when the device is used as an impact weapon. A second, normally closed interrupter switch is provided for the stun circuit, with the user of the present device being required to hold the interrupter switch in order to keep the stun circuitry from operating when the master switch is turned on. The end opposite the handle includes a series of impact ribs with cutting blades removably installable thereon, to produce shallow (non-life threatening) cuts in an assailant during an attack.
摘要翻译：个人防护装置还包括电眩光电路和具有适于用作冲击武器的结构的电极，并且还包括径向设置的手电筒或信号灯。用于眩光装置的电路由柔性电路材料形成，在每个部件之间具有双电路路径，用于可靠性并且由于当该装置用作冲击武器时产生的冲击力而导致的损坏。为眩光电路提供了第二个常闭断路器开关，本装置的用户需要保持断路器开关，以便在主开关接通时保持眩晕电路不工作。与手柄相对的端部包括一系列具有可拆卸地安装在其上的切割刀片的冲击肋，以在攻击期间在攻击者中产生浅的（非危及生命的）切割。

5. 发明授权

US06483690B1 Ceramic electrostatic chuck assembly and method of making 有权
标题翻译：陶瓷静电吸盘组装及其制造方法
公开(公告)号：US06483690B1
公开(公告)日：2002-11-19
申请号：US09892634
申请日：2001-06-28
申请人： Shu Nakajima , Neil Benjamin
发明人： Shu Nakajima , Neil Benjamin
IPC分类号： H01T2300
CPC分类号： H01L21/6833
摘要： A sintered ceramic electrostatic chucking device (ESC) which includes a patterned electrostatic clamping electrode embedded in a ceramic body wherein the clamping electrode includes at least one strip of a sintered electrically conductive material arranged in a fine pattern. Due to the fineness of the electrode pattern employed, stresses induced during manufacture of the ESC are reduced such that the clamping electrode remains substantially planar after the sintering operation. The resulting ESC allows for improved clamping uniformity. Another ESC includes an insulating or semi-conducting body and a clamping electrode having a high resistivity and or a high lateral impedance. The electrostatic chucking device provides improved RF coupling uniformity when RF energy is coupled thorough the clamping electrode from an underlying RF electrode. The RF electrode can be a separate baseplate or it can be a part of the chuck. The ESC's may be used to support semiconductor substrates such as semiconductor wafers in plasma processing equipment.
摘要翻译：一种烧结陶瓷静电夹持装置（ESC），其包括嵌入在陶瓷体中的图案化静电夹持电极，其中所述夹持电极包括布置成精细图案的至少一个烧结导电材料条。由于所使用的电极图案的细度，ESC制造期间引起的应力减小，使得夹紧电极在烧结操作之后保持基本平坦。所得的ESC允许改进的夹紧均匀性。另一个ESC包括绝缘或半导电体和具有高电阻率或高横向阻抗的夹持电极。当RF能量通过来自底层RF电极的钳位电极耦合时，静电夹持装置提供改进的RF耦合均匀性。 RF电极可以是单独的基板，也可以是卡盘的一部分。 ESC可用于支持诸如等离子体处理设备中的半导体晶片的半导体衬底。

6. 发明授权

US06781812B2 Chuck equipment 有权
标题翻译：卡盘设备
公开(公告)号：US06781812B2
公开(公告)日：2004-08-24
申请号：US09768173
申请日：2001-01-24
申请人： Koh Fuwa , Ken Maehira
发明人： Koh Fuwa , Ken Maehira
IPC分类号： H01T2300
CPC分类号： H01L21/6833 , C23C14/50
摘要： A chuck equipment which can hold insulating substrates is provided. First and second electrodes are provided to be exposed on the base the surface of which is insulated. The insulating substrate is placed in contact with or in close proximity to the surfaces of the first and second electrodes. Since an electric field having a high rate of spatial change is established between the first and second electrodes, the substrate is held against the surface of the chuck equipment by the gradient force. Since the magnitude of the gradient force depends on that of the rate of change of the electric field, a voltage may be applied between the first and second electrodes to establish an electric field of 1.0×106V/m or greater.
摘要翻译：提供了可以容纳绝缘基板的卡盘设备。提供第一和第二电极以暴露在其表面绝缘的基底上。绝缘基板被放置成与第一和第二电极的表面接触或紧邻第一和第二电极的表面。由于在第一和第二电极之间建立具有高空间变化率的电场，所以基板通过倾斜力抵靠在卡盘设备的表面上。由于梯度力的大小取决于电场的变化率，所以可以在第一和第二电极之间施加电压以建立1.0×10 6 V / m以上的电场。

7. 发明授权

US06735830B1 Ion generating device 失效
标题翻译：离子发生装置
公开(公告)号：US06735830B1
公开(公告)日：2004-05-18
申请号：US09926654
申请日：2002-01-10
申请人： Joël Merciel
发明人： Joël Merciel
IPC分类号： H01T2300
CPC分类号： H01T23/00
摘要： The invention relates to apparatus for generating ions in a gaseous medium, the apparatus comprising one or more needles (40) each presenting a shank (40.1) and an emitter end (40.2), a sheath (42) of composite material comprising glass fiber reinforced unsaturated polyester surrounding the shank (40.1) of each needle, and means (44, 46, 80) for applying a voltage between two portions of the shank of each needle.
摘要翻译：本发明涉及用于在气体介质中产生离子的装置，该装置包括一个或多个针（40），每个针呈现柄（40.1）和发射端（40.2），复合材料的护套（42）包括玻璃纤维增强围绕每个针的柄（40.1）的不饱和聚酯和用于在每个针的柄的两个部分之间施加电压的装置（44,46,80）。

8. 发明授权

US06611418B2 Compliant collet chuck 有权
公开(公告)号：US06611418B2
公开(公告)日：2003-08-26
申请号：US10008396
申请日：2001-12-06
申请人： Lazhar Mazlout , Peter M. Mueller , Anthony D. Parker
发明人： Lazhar Mazlout , Peter M. Mueller , Anthony D. Parker
IPC分类号： H01T2300
CPC分类号： C03B37/01884 , C03B23/045 , F16B21/04 , H01L21/687
摘要： A compliant collet chuck for firmly clamping a workpiece has a base member attachable to the faceplate or spindle of a lathe. The base member has a central bore having a tapered portion and which is surrounding by a channel. A bayonet cylinder occupies the channel and has circumferential bayonet slots which receive eccentric locking pins therein. An adjustable collet chuck has a tapered portion at one end that bears against the tapered bore in the base member and a second tapered portion at the other end. An axial free play nut having a tapered bore, which is adapted to bear against the second taper, is threaded into the bayonet cylinder, and rotation thereof produces through the tapers, a radial force to compress the central bore of the chuck to grip the workpiece. Rotation of the actuating pins flexes the bayonet beam to lock the workpiece in place within the chuck.

9. 发明授权

US06507474B1 Using localized ionizer to reduce electrostatic charge from wafer and mask 有权
标题翻译：使用局部电离器来减少晶片和掩模的静电电荷
公开(公告)号：US06507474B1
公开(公告)日：2003-01-14
申请号：US09597126
申请日：2000-06-19
申请人： Bhanwar Singh , Ramkumar Subramanian , Khoi A. Phan , Bryan K. Choo , Bharath Rangarajan
发明人： Bhanwar Singh , Ramkumar Subramanian , Khoi A. Phan , Bryan K. Choo , Bharath Rangarajan
IPC分类号： H01T2300
CPC分类号： G03F7/70616 , G03F7/70941
摘要： One aspect of the present invention elates to a method of reducing electrostatic charges on a patterned photoresist to improve evaluation of the developed photoresist, involving the steps of evaluating the patterned photoresist to determine if electrostatic charges exist thereon; positioning an ionizer near the patterned photoresist, the ionizer generating ions thereby reducing the electrostatic charges on the patterned photoresist; and evaluating the patterned photoresist with an electron beam. Another aspect of the present invention relates to a system for reducing electrostatic charges on a patterned photoresist, containing a charge sensor for determining if electrostatic charges exist on the patterned photoresist and measuring the electrostatic charges; an ionizer positioned near the patterned photoresist having electrostatic charges thereon for reducing the electrostatic charges on the patterned photoresist; a controller for setting at least one of time of ion generation and amount of ion generation by the ionizer, the controller coupled to the charge sensor and the ionizer; and a scanning electron microscope or an atomic force microscope for evaluating the patterned photoresist having reduced electrostatic charges thereon with an electron beam.
摘要翻译：本发明的一个方面是提供减少图案化光致抗蚀剂上的静电电荷以改进对显影光致抗蚀剂的评估的方法，包括评估图案化光致抗蚀剂以确定静电电荷是否存在于其中的步骤; 在图案化的光致抗蚀剂附近定位电离器，离子发生器产生离子，从而减少图案化光致抗蚀剂上的静电电荷; 并用电子束评估图案化的光致抗蚀剂。本发明的另一方面涉及一种用于减少图案化光致抗蚀剂上的静电电荷的系统，其包含用于确定图案化光致抗蚀剂上是否存在静电电荷并测量静电电荷的电荷传感器; 位于图案化的光致抗蚀剂附近的电离器，其上具有静电电荷，用于减少图案化光致抗蚀剂上的静电电荷; 用于设置离子发生时间和离子发生量中的至少一个的控制器，耦合到电荷传感器和离子发生器的控制器; 以及扫描电子显微镜或原子力显微镜，用于用电子束评估其上具有降低的静电电荷的图案化光致抗蚀剂。

10. 发明授权

US06493205B2 Process for polarizing a ferroelectric material in the shape of a cylinder 有权
公开(公告)号：US06493205B2
公开(公告)日：2002-12-10
申请号：US09777719
申请日：2001-04-25
申请人： Francois Bauer
发明人： Francois Bauer
IPC分类号： H01T2300
CPC分类号： H01L41/45 , H01L41/087 , H01L41/257
摘要： Process for polarizing at least a part of a ferroelectric material in a cylindrical shape having a longitudinal axis, and having an internal conductor inside the cylinder disposed along the longitudinal axis. At least part of said cylinder is placed in a conductive liquid with the cylinder being free from any stresses other than pressure exerted by the conductive liquid. A low frequency AC voltage is then applied between an electrode in contact with the conductive liquid and the internal conductor, and the amplitude of the voltage is increased progressively up to a value such that an electrical field is created having an amplitude greater than a coercive field of polarization Ec of the ferroelectric material.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式