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    • 23. 发明专利
    • Exposure apparatus
    • 曝光装置
    • JP2009111430A
    • 2009-05-21
    • JP2009032467
    • 2009-02-16
    • Fujifilm Corp富士フイルム株式会社
    • FUKUDA TSUYOSHI
    • H01L21/027G01B11/00G01B11/26G02B26/00G03B21/13G03B27/72G03F7/20
    • G03B27/72G03B21/13G03F7/70275G03F7/70291G03F7/70358
    • PROBLEM TO BE SOLVED: To provide a multi-beam exposure apparatus which performs highly precise drawing by compensating the quantity of distortion of drawing, when exposure processing is carried out with each beam emitted from means of selectively modulating a plurality of pixels. SOLUTION: From a plurality of measured pixels Z set up so as to averagely disperse and scattered in an exposure area of the means of selectively modulating the plurality of pixels, the exposure apparatus detects exposure point position information of a light beam irradiated on an exposure surface with beam position detection means 72, 74. From the position information of each measured pixel Z in the means of selectively modulating the plurality of pixels, and each exposure point position information of the light beam projected on the exposure surface from each measured pixel detected using the beam position detection means, respectively, the exposure apparatus determines the quantity of distortion of the drawing by calculating these relative position deviation with a distortion quantity calculating means and performs the compensation corresponding to this results to enable highly precise drawing. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种多光束曝光装置,当通过选择性调制多个像素而发射的每个光束进行曝光处理时,通过补偿绘制的失真量来执行高精度绘图。 解决方案:曝光装置从多个被测量的像素Z设置成在选择性地调制多个像素的装置的曝光区域中平均分散散射,检测照射到光束上的光束的曝光点位置信息 具有光束位置检测装置72,74的曝光表面。从选择性地调制多个像素的装置中的每个测量像素Z的位置信息和从每个被测量的投影在曝光表面上的光束的每个曝光点位置信息 通过使用光束位置检测装置检测的像素,曝光装置通过使用失真量计算装置计算这些相对位置偏差来确定绘图的失真量,并执行与该结果相对应的补偿以实现高精度绘图。 版权所有(C)2009,JPO&INPIT
    • 25. 发明专利
    • VIDEO PROJECTOR DEVICE
    • JPH02228180A
    • 1990-09-11
    • JP4652389
    • 1989-03-01
    • HITACHI ELECTRONICS
    • SHIBUYA YASUTAKA
    • G03B21/00G03B21/13H04N5/74
    • PURPOSE:To prevent the discontinuous rise of luminance by applying luminance correction to the overlap part between adjacent images projected by plural video projectors. CONSTITUTION:Images projected to a screen 4 from video projectors 31 and 32 overlap in the connection part, and the luminance in this part is discontinuously higher. An extent of luminance correction for each picture element on one horizontal scanning line is stored in a memory by luminance correcting circuits 21 and 22. A counter 201 is counted up by a clock, whose period is the picture element period or is (n) times as long as this period, and is set by a horizontal blanking signal. The value of the counter 201 is used as the address to read the memory 202, and read contents are converted into an analog signal by a D/A converter 203. The video signal is modulated with the level of this signal by a multiplier 204 to correct the luminance of the video signal.