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    • 23. 发明公开
    • Circuit arrangements
    • Schaltungsanordnungen。
    • EP0338737A2
    • 1989-10-25
    • EP89303736.6
    • 1989-04-14
    • EEV LIMITED
    • Nicholls, Nigel S.
    • H03K3/53H03K3/55
    • H03K3/55
    • A circuit arrangement for applying a current pulse to a load 9, such as a magnetron or klystron, includes a main switch 14 and an auxiliary switch 15. Prior to transmission of the pulse, charging current is applied via an inductor 10 to a pulse forming network 12. Once charging is complete, the main switch 14 is triggered and the pulse is applied to the load 9 via a pulse transformer 13. After transmission of the pulse, energy is transferred from the core of the transformer 13 to the pulse forming network 12. When maximum energy transfer has almost occurred, the auxiliary switch 15 is triggered, causing an inverse voltage to be applied across the main switch 14. This ensures that the main switch 14 can undergo recovery, even under adverse operating conditions.
    • 用于将电流脉冲施加到诸如磁控管或速调管的负载9的电路装置包括主开关14和辅助开关15.在传输脉冲之前,通过电感器10将充电电流施加到脉冲形成 一旦充电完成,主开关14被触发,并且脉冲经由脉冲变压器13被施加到负载9.在传输脉冲之后,能量从变压器13的铁心传递到脉冲形成网络 当几乎发生最大能量转移时,辅助开关15被触发,从而在主开关14两端施加反向电压。这确保主开关14即使在不利的操作条件下也能经历恢复。
    • 26. 发明申请
    • ACCELERATOR HAVING PULSE MODULATOR WITH FAST OUTPUT REGULATION
    • 具有快速输出调节脉冲调制器的加速器
    • WO01008456A1
    • 2001-02-01
    • PCT/US2000/019733
    • 2000-07-19
    • H03K3/55H05H7/02H05H9/00H03K3/64
    • H03K3/55H05H7/02
    • An electron accelerator control circuit having a power supply (10) to a charging circuit (30) which is coupled to an RF circuit (38) which in turn is coupled to an electron accelerator (39) for providing pulses of accelerated electrons. Devices (54, 52, 44) are connected to the charging circuit (30) for selectively limiting charging thereof and thereby selectively limiting the RF energy pulses as well as the energy of the electron pulses. The charging of the charging circuit is selectively limited by interrupting and preventing further charging during the charging cycle after a preselected time period after initial charging when the circuit reaches a preselected level. The resultant circuit provides for pulses having differing quantum energies.
    • 一种电子加速器控制电路,具有到充电电路(30)的电源(10),该充电电路(30)耦合到RF电路(38),RF电路又连接到用于提供加速电子脉冲的电子加速器(39)。 设备(54,52,44)连接到充电电路(30),用于选择性地限制其充电,从而选择性地限制RF能量脉冲以及电子脉冲的能量。 充电电路的充电通过在电路达到预选电平的初始充电之后的预选时间段之后的充电周期期间中断和防止进一步的充电来选择性地受限制。 所得到的电路提供具有不同量子能量的脉冲。
    • 27. 发明申请
    • DEVICE AND PROCESS FOR GENERATING HIGH-OUTPUT, HIGH-VOLTAGE PULSES, IN PARTICULAR FOR PARTIAL-DISCHARGE GAS LASERS
    • 用于产生高输出,高电压脉冲,特别是部分放电气体激光器的装置和方法
    • WO1989010657A1
    • 1989-11-02
    • PCT/DE1989000244
    • 1989-04-20
    • SIEMENS AKTIENGESELLSCHAFTFRIEDE, DirkBETTE, Willi
    • SIEMENS AKTIENGESELLSCHAFT
    • H03K03/55
    • H01S3/0971H03K3/55
    • The device disclosed generates high-voltage pulses for the laser in a pulse-generating network comprising a first, larger charging capacitor (C1) connected in series with a magnetic switch (M1 = saturable inductor) and a second, smaller changing capacitor (C2) connected in parallel with the series circuit (C1-M1) and with the laser electrode section. A series circuit comprising a high-voltage switch (Thy) and a choke (LS1) is connected in parallel with the laser electrode section. The high-voltage switch (Thy) acts as a trigger which initiates the charge reversal process in the first and second charging capacitors (C1, C2), which are charged by a battery charger (LG) to approximately twice the conducting voltage of the laser (LK). The invention also concerns a process for generating high-voltage pulses with said device. Excimer lasers are the preferred field of application.
    • 所公开的装置在包括与磁性开关(M1 =饱和电感器)串联连接的第一较大充电电容器(C1)和第二较小变化电容器(C2))的脉冲发生网络中产生用于激光器的高电压脉冲, 与串联电路(C1-M1)和激光电极部分并联连接。 包括高压开关(Thy)和扼流圈(LS1)的串联电路与激光电极部分并联连接。 高电压开关(Thy)用作触发器,其在第一和第二充电电容器(C1,C2)中启动电荷反向处理,其由电池充电器(LG)充电至激光器的导通电压的大约两倍 (LK)。 本发明还涉及用所述装置产生高电压脉冲的过程。 准分子激光器是首选的应用领域。
    • 28. 发明申请
    • ELECTRICAL EXCITATION CIRCUIT FOR GAS LASERS
    • 气体激光电气激励电路
    • WO1987002517A1
    • 1987-04-23
    • PCT/US1985002019
    • 1985-10-18
    • AMOCO CORPORATION
    • AMOCO CORPORATIONFAHLEN, Theodore, S.MASS, Barton
    • H01S03/00
    • H03K3/55H01S3/097
    • An electrical excitation circuit (10) for a gas laser. The electrical excitation circuit includes a charging circuit (16), connected in series with a pulse forming network (18) between a power source (12) and the laser load (14). The charging circuit (10) includes a capacitor charged by the power source (12) and a thyratron (S1) for transferring voltage to the pulse forming network (18). Alternatively, the charging circuit (10) includes a capacitor charged upon the firing of a silicon controlled rectifier (SCR1) through a saturable step-up transformer (XFMR1) which saturates for transferring voltage to the pulse forming network (18). The pulse forming network (18) includes a saturable inductor switch (S2) positioned with respect to a capacitor so that, when the voltage on the capacitor reaches a predetermined level, saturation on the saturable inductor switch (S2) releases electrical energy stored in the capacitor to the laser load (14). The saturable inductor switch (S2) is biaised by means of an electrical bias current which can be adjusted so that the saturable inductor switch (S2) saturates after the capacitor is fully charged, thereby controlling the time of application of the high voltage pulse to the laser load (14). The pulse forming network (18) preferably includes an additional capacitor and a magnetic diode charging inductor (L3) which is also biased by means of an electrical bias current. The capacitor is charged through the magnetic diode charging inductor (L3) and discharges in series with the other capacitor when the saturable inductor switch (S2) saturates, thereby doubling the voltage across the laser load (14) at the time of discharge. The magnetic diode charging inductor (L3) also minimizes prepulse across the laser load (14) during charging of the additional capacitor. Neither the saturable inductor switch (S2) nor the magnetic diode charging inductor (L3) are in the discharge loop (LD) with the laser load (14) thereby minimizing the inductance of the discharge loop (LD).
    • 一种用于气体激光器的电激励电路(10)。 电激励电路包括与电源(12)和激光器负载(14)之间的脉冲形成网络(18)串联连接的充电电路(16)。 充电电路(10)包括由电源(12)充电的电容器和用于将电压传送到脉冲形成网络(18)的闸流管(S1)。 或者,充电电路(10)包括通过可饱和的升压变压器(XFMR1)烧制可控硅整流器(SCR1)时充电的电容器,其饱和以将电压传送到脉冲形成网络(18)。 脉冲形成网络(18)包括相对于电容器定位的可饱和电感器开关(S2),使得当电容器上的电压达到预定电平时,可饱和电感器开关(S2)上的饱和度释放存储在电容器 电容器到激光器负载(14)。 可饱和电感开关(S2)通过电流偏置电流进行调整,该偏置电流可以被调节,使饱和电感开关(S2)在电容器充满电后饱和,从而控制高电压脉冲施加到 激光负载(14)。 脉冲形成网络(18)优选地包括附加电容器和磁二极管充电电感器(L3),其也借助于电偏置电流而偏置。 当可饱和电感开关(S2)饱和时,电容器通过磁二极管充电电感器(L3)充电并与另一个电容器串联放电,从而在放电时使激光负载(14)上的电压加倍。 磁极二极管充电电感器(L3)还可以在额外的电容器充电期间最小化穿过激光器负载(14)的预脉冲。 饱和电感开关(S2)和磁二极管充电电感(L3)都不在激光负载(14)的放电环路(LD)中,从而使放电环路(LD)的电感最小化。
    • 29. 发明公开
    • System and methods of bimodal automatic power and frequency tuning of RF generators
    • RF发生器的系统和双峰自动功率和频率的方法精细调节
    • EP2642661A2
    • 2013-09-25
    • EP13160258.3
    • 2013-03-20
    • MKS Instruments, Inc.
    • Fisk II, LarryRughoonundon, Amish
    • H03F3/20H01J37/32
    • H03B5/1237H01J37/32082H01J37/32174H03F3/20H03K3/55
    • A radio frequency generator (30, 32) includes a power control module (74, 76), a frequency control module (78, 80) and a pulse generating module (86, 88). The power control module (74, 76) is configured to generate a power signal indicating power levels for target states of a power amplifier (40, 42). The frequency control module (78, 80) is configured to generate a frequency signal indicating frequencies for the target states of the power amplifier (40, 42). The pulse generating module (86, 88) is configured to (i) supply an output signal to the power amplifier (40, 42), (ii) recall at least one of a latest power level or a latest frequency for one of the target states of the power amplifier, and (iii) adjust a current power level and a current frequency of the output signal from a first state to a second state based on the power signal, the frequency signal, and at least one of the latest power level and the latest frequency of the power amplifier (40, 42).
    • 射频发生器(30,32)包括功率控制模块(74,76),一个频率控制模块(78,80)和一个脉冲产生模块(86,88)。 功率控制模块(74,76)被配置为生成表示用于功率放大器(40,42)的目标状态的功率电平的功率信号。 频率控制模块(78,80)被配置为生成频率信号指示用于所述功率放大器(40,42)的目标状态的频率。 脉冲生成模块(86,88)被配置为输出信号的(I)供给到所述功率放大器(40,42),(ⅱ)一个最新的功率电平的召回至少一个或多个用于该目标中的一个的最新频率 功率放大器的状态,和(iii)调节当前功率电平与从第一状态到基于所述功率信号,所述频率信号的第二状态下的输出信号的电流频率,以及最新的功率电平中的至少一个 和功率放大器的最新频率(40,42)。