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    • 24. 发明授权
    • Inspection apparatus and inspection method
    • 检验仪器和检验方法
    • US08563958B2
    • 2013-10-22
    • US13328768
    • 2011-12-16
    • Kazuo TakahashiTakahiro Jingu
    • Kazuo TakahashiTakahiro Jingu
    • G01N21/88
    • G01N21/9501G01N2021/8896G01N2021/8928
    • Reflected light caused by the state of the surface of a wafer, a foreign material, or a defect is superimposed on a haze frequency component caused by the type and thickness of a film or a surface irregularity. In order to detect a haze frequency component caused by a haze present on the surface of an object to be inspected, light propagating from the object to be inspected is detected and converted into an electric signal. The electric signal is sampled at a predetermined sampling time interval and converted into digital data. A frequency component caused by a foreign material, a defect or the like is separated from the digital data to ensure that a haze frequency component is selected. The haze frequency component is caused by a stain attached to the surface of the wafer, hazy tarnish, a surface irregularity or the like.
    • 由晶片的表面状态,异物或缺陷引​​起的反射光叠加在由膜的类型和厚度或表面不规则性引起的雾度频率分量上。 为了检测由待检查物体的表面上存在的雾度引起的雾度频率分量,检测从被检查物体传播的光,并将其转换为电信号。 以预定的采样时间间隔采样电信号并将其转换为数字数据。 由异物引起的频率分量,缺陷等与数字数据分离,以确保选择雾度频率分量。 雾度频率分量由附着在晶片表面的污迹,模糊晦暗,表面不规则等引起。
    • 25. 发明授权
    • Apparatus and method for measuring haze of sheet materials or other materials
    • 用于测量片材或其他材料的雾度的装置和方法
    • US08184294B2
    • 2012-05-22
    • US12400641
    • 2009-03-09
    • Tarja T. ShakespeareJohn F. Shakespeare
    • Tarja T. ShakespeareJohn F. Shakespeare
    • G01N21/00
    • G01N21/47G01N21/59G01N21/896G01N21/958G01N2021/8928
    • A method includes illuminating a material with first light and capturing an image of second light transmitted through the material. The method also includes analyzing multiple regions of the image and determining one or more haze measurements associated with the material based on the analyzing. The method further includes storing and/or outputting the one or more haze measurements. Analyzing the multiple regions of the image may include summing pixel values in each region to produce a total pixel value for that region. The multiple regions of the image may include (i) a first region forming a first disc, (ii) a second region forming either a first annular region around the first region or a second disc larger than and including the first disc, and (iii) a third region forming either a second annular region around the second region or a third disc larger than and including the first and second discs.
    • 一种方法包括用第一光照射材料并捕获通过材料透射的第二光的图像。 该方法还包括基于分析来分析图像的多个区域并确定与材料相关联的一个或多个雾度测量。 该方法还包括存储和/或输出一个或多个雾度测量。 分析图像的多个区域可以包括对每个区域中的像素值求和以产生该区域的总像素值。 图像的多个区域可以包括(i)形成第一盘的第一区域,(ii)形成围绕第一区域的第一环形区域或大于并包括第一盘的第二盘的第二区域,以及(iii) )形成围绕第二区域的第二环形区域或大于并包括第一和第二盘的第三盘的第三区域。
    • 26. 发明授权
    • Inspection apparatus and inspection method
    • 检验仪器和检验方法
    • US08101935B2
    • 2012-01-24
    • US12272211
    • 2008-11-17
    • Kazuo TakahashiTakahiro Jingu
    • Kazuo TakahashiTakahiro Jingu
    • G01N21/88
    • G01N21/9501G01N2021/8896G01N2021/8928
    • Reflected light caused by the state of the surface of a wafer, a foreign material or a defect is superimposed on a haze frequency component caused by the type and thickness of a film or a surface irregularity. It has therefore been difficult to accurately measure the haze frequency component by use of a fixed threshold value. In order to detect a haze frequency component caused by a haze present on the surface of an object to be inspected, light propagating from the object to be inspected is detected and converted into an electric signal. The electric signal is sampled at a predetermined sampling time interval and converted into digital data. A frequency component caused by a foreign material, a defect or the like is separated from the digital data to ensure that a haze frequency component is selected. The haze frequency component is caused by a stain attached to the surface of the wafer, hazy tarnish, a surface irregularity or the like.
    • 由晶片表面的状态,异物或缺陷引​​起的反射光叠加在由膜的类型和厚度或表面不规则性引起的雾度频率分量上。 因此,难以通过使用固定的阈值来精确地测量雾度频率分量。 为了检测由待检查物体的表面上存在的雾度引起的雾度频率分量,检测从被检查物体传播的光,并将其转换为电信号。 以预定的采样时间间隔采样电信号并将其转换为数字数据。 由异物引起的频率分量,缺陷等与数字数据分离,以确保选择雾度频率分量。 雾度频率分量由附着在晶片表面的污迹,模糊晦暗,表面不规则等引起。
    • 27. 发明申请
    • INSPECTION APPARATUS AND INSPECTION METHOD
    • 检查装置和检查方法
    • US20090140180A1
    • 2009-06-04
    • US12272211
    • 2008-11-17
    • Kazuo TakahashiTakahiro Jingu
    • Kazuo TakahashiTakahiro Jingu
    • G01N21/88
    • G01N21/9501G01N2021/8896G01N2021/8928
    • Reflected light caused by the state of the surface of a wafer, a foreign material or a defect is superimposed on a haze frequency component caused by the type and thickness of a film or a surface irregularity. It has therefore been difficult to accurately measure the haze frequency component by use of a fixed threshold value. In order to detect a haze frequency component caused by a haze present on the surface of an object to be inspected, light propagating from the object to be inspected is detected and converted into an electric signal. The electric signal is sampled at a predetermined sampling time interval and converted into digital data. A frequency component caused by a foreign material, a defect or the like is separated from the digital data to ensure that a haze frequency component is selected. The haze frequency component is caused by a stain attached to the surface of the wafer, hazy tarnish, a surface irregularity or the like.
    • 由晶片表面的状态,异物或缺陷引​​起的反射光叠加在由膜的类型和厚度或表面不规则性引起的雾度频率分量上。 因此,难以通过使用固定的阈值来精确地测量雾度频率分量。 为了检测由待检查物体的表面上存在的雾度引起的雾度频率分量,检测从被检查物体传播的光,并将其转换为电信号。 以预定的采样时间间隔采样电信号并将其转换为数字数据。 由异物引起的频率分量,缺陷等与数字数据分离,以确保选择雾度频率分量。 雾度频率分量由附着在晶片表面的污迹,模糊晦暗,表面不规则等引起。
    • 30. 发明申请
    • APPARATUS AND METHOD FOR MEASURING HAZE OF SHEET MATERIALS OR OTHER MATERIALS
    • 用于测量材料或其他材料的HAZE的装置和方法
    • WO2010104699A2
    • 2010-09-16
    • PCT/US2010/025877
    • 2010-03-02
    • HONEYWELL INTERNATIONAL INC.SHAKESPEARE, Tarja T.SHAKESPEARE, John F.
    • SHAKESPEARE, Tarja T.SHAKESPEARE, John F.
    • G01N21/89G01N21/86B65H7/02B65H43/00
    • G01N21/47G01N21/59G01N21/896G01N21/958G01N2021/8928
    • A method includes illuminating (902) a material (102, 202, 302) with first light (108, 208, 308, 504, 604, 802) and capturing (904) an image (400, 700) of second light (114-116, 214-216, 314-316, 804, 808, 814, 816, 822) transmitted through the material. The method also includes analyzing (908) multiple regions (402-406, 702) of the image and determining (910) one or more haze measurements associated with the material based on the analyzing. The method further includes storing and/or outputting (910) the one or more haze measurements. Analyzing the multiple regions of the image may include summing pixel values in each region to produce a total pixel value for that region. The multiple regions of the image may include (i) a first region forming a first disc, (ii) a second region forming either a first annular region around the first region or a second disc larger than and including the first disc, and (iii) a third region forming either a second annular region around the second region or a third disc larger than and including the first and second discs.
    • 一种方法包括用第一光(108,208,308,504,602,802)照射(902)材料(102,202,302)并且捕获(904)第二光(114-)的图像(400,700) 116,214-216,314-316,804,808,814,816,822)。 该方法还包括分析(908)图像的多个区域(402-406,702),并且基于分析确定(910)与材料相关联的一个或多个雾度测量。 该方法还包括存储和/或输出(910)一个或多个雾度测量。 分析图像的多个区域可以包括对每个区域中的像素值求和以产生该区域的总像素值。 图像的多个区域可以包括(i)形成第一盘的第一区域,(ii)形成围绕第一区域的第一环形区域或大于并包括第一盘的第二盘的第二区域,以及(iii) )形成围绕第二区域的第二环形区域或大于并包括第一和第二盘的第三盘的第三区域。