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21. 发明专利

JP5679058B2 電子デバイスとその製造方法、及び電子デバイスの駆動方法有权
标题翻译：电子装置和制造方法，的方法和电子设备的驱动方法
公开(公告)号：JP5679058B2
公开(公告)日：2015-03-04
申请号：JP2013522627
申请日：2011-07-04
申请人：富士通株式会社
发明人：中谷　忠司 , 忠司中谷 , 奥田　久雄 , 久雄奥田 , 勝木　隆史 , 隆史勝木 , 上田　知史 , 知史上田
IPC分类号： H01H59/00 , B81B3/00 , B81C1/00 , H01H49/00 , H01H57/00
CPC分类号： H01H59/0009 , B81B2201/014 , B81C1/00976 , H01H2001/0084 , H01H2059/0072

23. 发明授权

US11846649B2 Physical quantity sensor and inertial measurement unit 有权
公开(公告)号：US11846649B2
公开(公告)日：2023-12-19
申请号：US17511993
申请日：2021-10-27
申请人： SEIKO EPSON CORPORATION
发明人： Yoshinao Yanagisawa
IPC分类号： G01P15/08 , G01P1/02 , B81C1/00 , G01P21/00
CPC分类号： G01P15/0802 , G01P1/023 , B81C1/00976 , G01P21/00
摘要： A physical quantity sensor includes a physical quantity detection circuit having a determination circuit that determines whether a value of a physical quantity signal continuously remains within a predetermined range in a predetermined period, determines that a physical quantity detection element is in a first state of normal operation when the value does not continuously remain, and determines that the physical quantity detection element is in a second state of abnormal operation when the value continuously remains, a control circuit that stores first information based on a determination result of the determination circuit is stored in a control circuit as a setting information and a communication section that outputs the setting information stored in from the control circuit to the outside when the determination result of the determination circuit indicates the second state.

24. 发明申请

US20170313573A1 ROUGH MEMS SURFACE 有权
公开(公告)号：US20170313573A1
公开(公告)日：2017-11-02
申请号：US15142381
申请日：2016-04-29
申请人： FREESCALE SEMICONDUCTOR, INC.
发明人： RUBEN B. MONTEZ , ARVIND S. SALIAN , ROBERT F. STEIMLE
IPC分类号： B81B3/00 , B81C1/00
CPC分类号： B81B3/001 , B81B2201/0235 , B81B2203/0315 , B81C1/00976 , B81C2201/0132 , B81C2201/115 , B81C2203/0118
摘要： A surface of a cavity of a MEMS device that is rough to reduce stiction. In some embodiments, the average roughness (Ra) of the surface is 5 nm or greater. In some embodiments, the rough surface is formed by forming one or more layers of a rough oxidizable material, then oxidizing the material to form an oxide layer with a rough surface. Another layer is formed over the oxide layer with the rough surface, wherein the roughness of the oxide layer is transferred to the another layer.

25. 发明授权

US09190937B2 Stiction resistant mems device and method of operation 有权
标题翻译：防静电装置及操作方法
公开(公告)号：US09190937B2
公开(公告)日：2015-11-17
申请号：US13760465
申请日：2013-02-06
申请人： FREESCALE SEMICONDUCTOR, INC.
发明人： Yizhen Lin , Andrew C. McNeil , Mark E. Schlarmann
IPC分类号： G01P15/125 , H02N1/00 , B81C1/00
CPC分类号： H02N1/006 , B81B2201/0235 , B81B2203/058 , B81C1/00976
摘要： A MEMS device (20) includes a movable element (20) suspended above a substrate (22) by a spring member (34) having a spring constant (104). A spring softening voltage (58) is applied to electrodes (24, 26) facing the movable element (20) during a powered mode (100) to decrease the stiffness of the spring member (34) and thereby increase the sensitivity of the movable element (32) to an input stimulus (46). Upon detection of a stiction condition (112), the spring softening voltage (58) is effectively removed to enable recovery of the movable element (32) from the stiction condition (112). A higher mechanical spring constant (104) yields a stiffer spring (34) having a larger restoring force (122) in the unpowered mode (96) in order to enable recovery from the stiction condition (112). A feedback voltage (56) can be applied to feedback electrodes (28, 30) facing the movable element (32) to provide electrical damping.
摘要翻译： MEMS器件（20）包括通过具有弹簧常数（104）的弹簧构件（34）悬挂在衬底（22）上方的可移动元件（20）。在动力模式（100）期间，弹簧软化电压（58）施加到面向可移动元件（20）的电极（24,26），以降低弹簧构件（34）的刚度，从而增加可动元件（32）到输入激励（46）。在检测到静态条件（112）时，有效地去除弹簧软化电压（58），以使可移动元件（32）能够从静止状态（112）恢复。更高的机械弹簧常数（104）产生在无动力模式（96）中具有较大恢复力（122）的更硬的弹簧（34），以便能够从静止状态（112）恢复。可以将反馈电压（56）施加到面向可移动元件（32）的反馈电极（28,30）以提供电阻尼。

26. 发明授权

US09136165B2 Methods for stiction reduction in MEMS sensors 有权
标题翻译： MEMS传感器静摩擦方法
公开(公告)号：US09136165B2
公开(公告)日：2015-09-15
申请号：US13909842
申请日：2013-06-04
申请人： Invensense, Inc.
发明人： Cerina Zhang , Nim Tea
IPC分类号： H01L21/768 , H01L23/48
CPC分类号： B81C1/00984 , B81B3/0008 , B81B2207/015 , B81C1/00976 , B81C2201/115 , H01L21/76838 , H01L23/48 , H01L2924/0002 , H01L2924/00
摘要： A method of the invention includes reducing stiction of a MEMS device by providing a conductive path for electric charge collected on a bump stop formed on a substrate. The bump stop is formed by depositing and patterning a dielectric material on the substrate, and the conductive path is provided by a conductive layer deposited on the bump stop. The conductive layer can also be roughened to reduce stiction.
摘要翻译：本发明的一种方法包括通过为形成在衬底上的凸点块上收集的电荷提供导电路径来减少MEMS器件的静电。通过在衬底上沉积和图案化介电材料形成凹凸块，并且通过沉积在凸块上的导电层提供导电路径。导电层也可以被粗糙化以减少粘性。

27. 发明授权

US06597048B1 Electrostatically charged microstructures 失效
标题翻译：静电荷微结构
公开(公告)号：US06597048B1
公开(公告)日：2003-07-22
申请号：US09828991
申请日：2001-04-10
申请人： Edwin C. Kan
发明人： Edwin C. Kan
IPC分类号： H01L2984
CPC分类号： B81B3/0008 , B81C1/00976 , B81C2201/112 , G11C23/00
摘要： A process and apparatus for injecting electrostatic charges into opposing elements of MEMS structures to produce repulsing forces between the elements. These forces tend to produce controlled spacing between components to prevent sticking and to provide friction-free relative movement.
摘要翻译：一种用于将静电电荷注入到MEMS结构的相对元件中以在元件之间产生排斥力的工艺和装置。这些力倾向于在部件之间产生受控的间隔，以防止粘附并提供无摩擦的相对运动。

28. 发明授权

US06548321B1 Method of anodically bonding a multilayer device with a free mass 有权
标题翻译：将多层器件与自由质量阳极接合的方法
公开(公告)号：US06548321B1
公开(公告)日：2003-04-15
申请号：US10004145
申请日：2001-10-23
申请人： William David Sawyer
发明人： William David Sawyer
IPC分类号： H01L2100
CPC分类号： H01L21/6835 , B81C1/0092 , B81C1/00976 , B81C3/001 , B81C2203/031 , G01C19/5719
摘要： A method of anodically bonding a multilayer device with a free mass includes positioning a support layer on either side of a free mass structure including a free mass with an electrode on each layer proximate the free mass; connecting both electrodes and the free mass to a node at a floating potential and applying a voltage across the layers and free mass structure to bond at least one of the layers to the free mass structure.
摘要翻译：将多层器件与自由质量阳极结合的方法包括在包含游离质量的自由质量结构的任一侧上定位支撑层，每个层上的电极靠近游离质量; 将两个电极和自由质量连接到浮动电位的节点，并且跨越层施加电压和自由质量结构以将至少一个层结合到自由质量结构。

29. 发明申请

WO2014209951A1 APPARATUS AND METHOD FOR PREVENTING STICTION OF MEMS DEVICES ENCAPSULATED BY ACTIVE CIRCUITRY 审中-公开
标题翻译：用于防止主动电路封装的MEMS器件的装置和方法
公开(公告)号：WO2014209951A1
公开(公告)日：2014-12-31
申请号：PCT/US2014/043789
申请日：2014-06-24
申请人： ANALOG DEVICES, INC.
发明人： CHEN, Li , NUNAN, Thomas Kieran , YANG, Kuang L.
IPC分类号： B81B3/00
CPC分类号： B81B3/0051 , B81B3/0005 , B81B3/0059 , B81B2207/012 , B81C1/00976 , B81C2201/112 , B81C2203/0118
摘要： One or more stopper features (e.g., bump structures) are formed in a standard ASIC wafer top passivation layer for preventing MEMS device stiction vertically in integrated devices having a MEMS device capped directly by an ASIC wafer. A TiN coating may be used on the stopper feature(s) for anti-stiction. An electrical potential may be applied to the TiN anti-stiction coating of one or more stopper features.
摘要翻译：在标准ASIC晶片顶部钝化层中形成一个或多个塞子特征（例如，凸起结构），用于在具有由ASIC晶片直接覆盖的MEMS器件的集成器件中垂直地防止MEMS器件静电。 TiN涂层可用于阻塞特征以用于抗静电。可以将电势施加到一个或多个塞子特征的TiN抗静电涂层。

30. 发明申请

WO2014088878A1 STICTION REDUCTION FOR MEMS DEVICES 审中-公开
标题翻译：关于MEMS器件的减少
公开(公告)号：WO2014088878A1
公开(公告)日：2014-06-12
申请号：PCT/US2013/071813
申请日：2013-11-26
申请人： MOTOROLA MOBILITY LLC
发明人： NAPOLES, Adrian , ASRANI, Vijay, L. , BLACK, Gregory, R.
IPC分类号： H03H7/40 , B81C1/00 , H01H59/00
CPC分类号： H03K3/01 , B81C1/00976 , H01H2059/0018 , H01H2059/0063 , H03H7/40 , H03H2007/006 , H03H2007/008 , H03H2007/386
摘要： A capacitive micro-electromechanical, MEMS, switch integrated circuit, IC, (150) comprises a plurality of capacitors arranged in banks (205), each having a voltage terminal for applying an actuation voltage to the individual capacitor, wherein each capacitor is capable of being individually cycled. The MEMS IC further includes: a high voltage driver (215) having a voltage distribution mechanism (212) that couples to the voltage terminal of each of the plurality of capacitors to enable the high voltage driver to selectively provide a pre-determined voltage input required to actuate and charge a selected one or more of the plurality of capacitors; and control logic (210) communicatively coupled to the high voltage driver and which deterministically applies power cycle times, less than a stiction limit, for an actuation and de-actuation of at least a first capacitor of the plurality of capacitors to substantially reduce an occurrence of stiction within at least the first capacitor during operation of the MEMS device.
摘要翻译：电容微机电MEMS开关集成电路（150）包括布置在堤（205）中的多个电容器，每个电容器具有用于向各个电容器施加致动电压的电压端子，其中每个电容器能够被单独循环。 MEMS IC还包括：具有电压分配机构（212）的高压驱动器（215），其耦合到多个电容器中的每一个的电压端子，以使得高电压驱动器能够选择性地提供所需的预定电压输入对所选择的多个电容器中的一个或多个进行启动和充电; 以及控制逻辑（210），其通信地耦合到所述高电压驱动器，并且确定性地施加小于静态极限的功率周期时间以用于所述多个电容器中的至少第一电容器的致动和解除驱动，以基本上减少发生在MEMS器件的工作过程中，在至少第一电容器内的静电。

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