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    • 22. 发明授权
    • Optical disk apparatus for recording and reproducing ultra-high density
signals
    • 用于记录和再现超高密度信号的光盘设备
    • US5159650A
    • 1992-10-27
    • US655356
    • 1991-02-21
    • Seiji NishiwakiShinji UchidaJunichi Asada
    • Seiji NishiwakiShinji UchidaJunichi Asada
    • G11B7/09G11B7/12G11B7/13G11B7/135
    • G11B7/1381G11B7/0917G11B7/124G11B7/13G11B7/1365G11B7/1384
    • An optical disc apparatus includes an optical disk which satisfies the relationship of ##EQU1## where A.sub.s, .phi..sub.s are the amplitude reflectivity ratio and the phase difference between the regions within and out of a signal mark (27, 28) on a signal surface (16) of the optical disc, D.sub.s is the area of the signal mark (27, 28) and .lambda. is the wavelength of a light source (8), and the light reflected from signal surface (16) is input-coupled by a grating coupler (4A, 4B) into a waveguide layer to propagate as wave-guided light (18A, 18B), radiated at the end of the wave-guiding layer (3A, 3B) and received by a light detector (6A, 6B) so that a control signal and a reproduced signal can be obtained from the detector.
    • PCT No.PCT / JP90 / 00843 Sec。 371日期1991年2月21日 102(e)日期1991年2月21日PCT Filed 1990年6月28日PCT公布。 出版物WO91 / 00596 日期:1991年10月1日。一种光盘装置包括满足(Ascos phi s-1)> / = -Ds(As2-2Ascos phi s + 1)2/4λ2或Ascos phi的关系的光盘 = 1其中As,phi是光盘的信号表面(16)上的信号标记(27,28)内和之外的区域之间的振幅反射率和相位差,Ds是信号的面积 标记(27,28),λ是光源(8)的波长,并且从信号表面(16)反射的光被光栅耦合器(4A,4B)输入耦合到波导层中以作为波 (18A,18B)的端部辐射并由光检测器(6A,6B)接收的导光(18A,18B),从而可以从检测器获得控制信号和再现信号 。
    • 24. 发明授权
    • Exposure equipment
    • 曝光设备
    • US5745221A
    • 1998-04-28
    • US816831
    • 1997-03-18
    • Seiji NishiwakiJunichi AsadaKeiichi Matsuzaki
    • Seiji NishiwakiJunichi AsadaKeiichi Matsuzaki
    • G03F7/20G03B27/42G03B27/52
    • G03F7/7035G03F7/70408
    • An exposure equipment which is simply configured and can expose fine cyclic patterns whose pitch is smaller than the wavelength of light source has the laser beam 2 (wavelength .lambda.) outgoing from the light source 1 reflected on the mirror 3a, 3b, guided to the beam expander optical system 4, and converged by a focusing lens 4a, passing through a pinhole 4c located on the focal plane of the focusing lens 4a, and converted into parallel beam 5 with the beam diameter expanded by a collimator lens 4b, wherein this parallel beam 5 vertically impinges on and penetrates a phase shifter 6 with recessed portion and protruded portion repeatedly formed on the outgoing surface side of the parallel flat plate configured with transparent material of refraction index n, and as a result, .+-. first order diffracted light is generated, and the .+-. first order diffracted lights interfere with one another on the sensitized film facing the phase shifter via a spacer 7 to form fine fringes, thereby exposing the sensitized film.
    • 简单地配置并能够露出间距小于光源波长的精细循环图案的曝光设备具有从反射镜3a,3b上反射的光源1射出的激光束2(波长λ),被引导到光束 扩展器光学系统4,并且由聚焦透镜4a会聚,穿过位于聚焦透镜4a的焦平面上的针孔4c,并被转换成具有由准直透镜4b扩展的光束直径的平行光束5,其中该平行光束 5垂直地照射并穿过具有凹部的移相器6,并且突出部分重复地形成在构成有折射率n的透明材料的平行平板的出射面侧,结果是+/-一级衍射光 并且+/-一级衍射光通过间隔物7在面向移相器的敏化膜上彼此干涉,以形成细条纹,从而展现出 唱敏感胶卷。
    • 29. 发明授权
    • Package having very thin semiconductor chip, multichip module assembled by the package, and method for manufacturing the same
    • US06413798B1
    • 2002-07-02
    • US09828131
    • 2001-04-09
    • Junichi Asada
    • Junichi Asada
    • H01L2144
    • A semiconductor package of this invention has an insulating substrates, wiring layers disposed on the surface of the insulating substrate, a semiconductor chip disposed in a device hole provided in the insulating substrate, inner-joint-conductors for connecting at least part of the bonding pads on the surface of the semiconductor chip to the corresponding inner-joint-conductors and connection lands connected to the wiring layers. The device hole is provided so that it goes through the center of the insulating substrate. The semiconductor chip is thinner than the insulating substrate. Then, this semiconductor chip is disposed in the device hole such that a bottom thereof is flush with a bottom plane of the insulating substrate. Further, this invention provides a MCM in which plural pieces of the thin semiconductor packages are laminated. In the MCM, the semiconductor packages are laminated such that top and bottom faces of the thin silicon chip are inverted. Predetermined connection lands are electrically connected to each other through a connecting conductor. This MCM has a high mechanical strength in its stacked structure and there is a low possibility that crack may occur in the package due to stress in the bending direction.