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    • 22. 发明授权
    • Neutralizing apparatus for charged body
    • 充电体中和装置
    • US5621605A
    • 1997-04-15
    • US978678
    • 1993-02-24
    • Hitoshi InabaTadahiro Ohmi
    • Hitoshi InabaTadahiro Ohmi
    • H01L21/677H01L21/00H05F3/06
    • H01L21/67017H05F3/06
    • A neutralizing apparatus is provided to facilitate and efficiently implement electric charge removal from a charged body such as a wafer which is easily charged. When the easily charged body such as a wafer is transported in a housing, a neutralizing charge generator, typically light sources for projecting exciting ultraviolet rays into the housing, are operated. Accordingly, the housing is filled with ions and a gas such as non-reactive gas. The neutralizing charge generator can generate positive or negative ions and electrons. When the charged body is positively charged, the electrons or negative ions move toward the charged body to neutralize the charged body with positive charge. When the charged body is negatively charged, positive ions move toward the charged body to neutralize the negative charge.
    • PCT No.PCT / JP91 / 01104 Sec。 371日期:1993年2月24日 102(e)日期1993年2月24日PCT 1991年8月20日PCT PCT。 第WO92 / 04819号公报 日期:1992年3月19日提供了一种中和装置,以便于有效地实现从容易充电的晶片等带电体的电荷去除。 当诸如晶片的容易充电的体被输送到壳体中时,中和电荷产生器通常用于将兴奋的紫外线投射到壳体中的光源。 因此,壳体填充有离子和诸如非反应性气体的气体。 中和电荷发生器可以产生正或负离子和电子。 当带电体带正电时,电子或负离子向带电体移动,以正电荷中和带电体。 当带电体带负电时,正离子向带电体移动以中和负电荷。
    • 24. 发明授权
    • Data input apparatus having a microcomputer
    • 具有微型计算机的数据输入装置
    • US5057836A
    • 1991-10-15
    • US565889
    • 1990-08-10
    • Hitoshi Inaba
    • Hitoshi Inaba
    • G06F3/023H03M11/24
    • H03M11/24
    • A data input apparatus having a first group of lines extending parallel to one another, and a second group of lines extending parallel to one another and intersecting with the lines of the first group at right angles. The apparatus also has groups of key switches located at the intersections of the lines of the first group and the lines of the second group. The lines of the first group are connected to the output ports of a microcomputer. Low-Level pulses are periodically supplied to these lines at different times. The apparatus further comprises a serial circuit including a group of first resistors each connected between adjacent lines of the second group. A voltage source is connected at a connecting point to one end of this serial circuit through a second resistor. The connecting point of the serial circuit and the second resistor is coupled to the input port of the microcomputer. The microcomputer determines which key switch has been operated, in accordance with the voltage applied to the input port at the time a low-level pulse is supplied to the corresponding line of said first group.
    • 一种数据输入装置,具有彼此平行延伸的第一组线,以及彼此平行延伸且与第一组的线成直角相交的第二组线。 该装置还具有位于第一组的线和第二组的线的交点处的一组键开关。 第一组的线路连接到微型计算机的输出端口。 在不同时间周期性地向这些线路提供低电平脉冲。 该装置还包括串联电路,其包括一组第一电阻器,每组第一电阻器连接在第二组的相邻线路之间。 电压源通过第二个电阻器连接到该串行电路的一端。 串行电路和第二电阻的连接点与微型计算机的输入端口相连。 微型计算机根据在向所述第一组的相应线路提供低电平脉冲时施加到输入端口的电压来确定哪个键开关已被操作。