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21. 发明授权

US5568015A Fluid-cooled dielectric window for a plasma system 失效
标题翻译：用于等离子体系统的流体冷却介质窗
公开(公告)号：US5568015A
公开(公告)日：1996-10-22
申请号：US389250
申请日：1995-02-16
申请人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
发明人： William M. Holber , Donald K. Smith , Matthew M. Besen , Matthew P. Fitzner , Eric J. Georgelis
IPC分类号： H05H1/28 , H05H1/46 , H01P1/08 , H05H1/34
CPC分类号： H05H1/46 , H05H1/28
摘要： A fluid-cooled dielectric window for a microwave plasma system which uses microwave absorbing fluids is described. The window includes a dielectric window and a cooling member in contact with an outer surface of the window which defines a channel and a medium adjacent to the channel. The channel transports a microwave absorbing cooling fluid over the outer surface of the window. The medium allows an electric field to enter through the window and sustain a plasma in a chamber while the fluid is flowing through the channel.
摘要翻译：描述了一种使用微波吸收液体的微波等离子体系统的流体冷却介质窗。窗口包括介电窗口和与窗口的外表面接触的冷却构件，其限定通道和邻近通道的介质。通道将微波吸收冷却流体传送到窗口的外表面上。介质允许电场通过窗口进入并且在流体流过通道时在腔室中维持等离子体。

22. 发明授权

US08309943B2 Laser-driven light source 有权
标题翻译：激光驱动光源
公开(公告)号：US08309943B2
公开(公告)日：2012-11-13
申请号：US13099823
申请日：2011-05-03
申请人： Donald K. Smith , William M. Holber , Jeffrey A. Casey
发明人： Donald K. Smith , William M. Holber , Jeffrey A. Casey
IPC分类号： H01J63/08 , H05H1/24 , H05B31/00
CPC分类号： H01J65/04 , B82Y10/00 , G03F7/70033 , H05B41/382 , H05G2/001 , H05G2/003 , H05G2/008 , Y02B20/204
摘要： An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
摘要翻译：一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。

23. 发明授权

US07238266B2 Method and apparatus for fluorine generation and recirculation 有权
标题翻译：用于氟发生和再循环的方法和装置
公开(公告)号：US07238266B2
公开(公告)日：2007-07-03
申请号：US10313516
申请日：2002-12-06
申请人： Donald K. Smith , Matthew M. Besen , William M. Holber , Stephen F. Horne
发明人： Donald K. Smith , Matthew M. Besen , William M. Holber , Stephen F. Horne
IPC分类号： C25B9/08 , B01D61/46 , C25B1/24 , B01D61/44
CPC分类号： B01J19/088 , B01J2219/00164 , B01J2219/0894 , C01B7/20
摘要： The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use for thin film processing. The fluorine separator can take the form of a condenser, a membrane separation device, a fluorine ion conductor comprising a solid electrolyte, or a combination of the foregoing. In some embodiments, reaction products comprising fluorine are passed to the fluorine separator. In other embodiments, separated fluorine is passed, either alone or in conjunction with additional feed stock comprising fluorine, to a plasma generator. The fluorine separator allows fluorine to be recycled and waste products to be eliminated from the system.
摘要翻译：本发明涉及氟的生成和再循环的设备和方法。申请人认识到，单独使用或与等离子体发生器组合使用的氟分离器可以在其用于薄膜处理的点处产生足够量的氟。氟分离器可以是冷凝器，膜分离装置，包含固体电解质的氟离子导体或其组合的形式。在一些实施方案中，包含氟的反应产物通过氟分离器。在其它实施方案中，分离的氟单独地或与另外的含氟原料结合使用到等离子体发生器。氟分离器允许氟被再循环并且废物从系统中消除。

24. 发明授权

US5688382A Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate 失效
标题翻译：微波等离子体沉积源和在衬底上填充高纵横比特征的方法
公开(公告)号：US5688382A
公开(公告)日：1997-11-18
申请号：US521958
申请日：1995-08-31
申请人： Matthew M. Besen , Lawrence Bourget , William M. Holber , Donald K. Smith , Richard S. Post
发明人： Matthew M. Besen , Lawrence Bourget , William M. Holber , Donald K. Smith , Richard S. Post
IPC分类号： H05H1/46 , C23C14/06 , C23C14/34 , C23C14/35 , C23C16/511 , C23F4/00 , H01J37/32
CPC分类号： H01J37/32229 , C23C14/34 , C23C14/357 , C23C16/511 , H01J37/32192 , H01J37/32678 , H01J37/34
摘要： A microwave plasma deposition source including a vacuum chamber for containing a substance to be energized in a plasma with microwave energy, a coaxial microwave feed ending in the chamber, a sputter target in the chamber and electrically isolated from the coaxial feed, and a second substrate spaced from the sputter target for defining a plasma volume between the substrates.
摘要翻译：一种微波等离子体沉积源，包括：用微波能量包含在等离子体中被通电的物质的真空室;在所述腔室中结束的同轴微波进料;所述腔室中的溅射靶，与所述同轴进料电隔离;以及第二基底与溅射靶间隔开以限定衬底之间的等离子体体积。

25. 发明授权

US08334505B2 Chemical ionization reaction or proton transfer reaction mass spectrometry 失效
标题翻译：化学电离反应或质子转移反应质谱
公开(公告)号：US08334505B2
公开(公告)日：2012-12-18
申请号：US12026799
申请日：2008-02-06
申请人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/26
CPC分类号： G01N27/62 , G01N33/497 , H01J49/105 , Y10T436/24
摘要： A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.
摘要翻译：描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。试剂离子进入诸如漂移室的室以与流体样品相互作用。电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。

26. 发明申请

US20090095902A1 CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A TIME-OF-FLIGHT MASS SPECTROMETER 失效
标题翻译：化学离子反应或原子转移反应与时间飞行质谱仪的质谱
公开(公告)号：US20090095902A1
公开(公告)日：2009-04-16
申请号：US11869980
申请日：2007-10-10
申请人： TIMOTHY ROGER ROBINSON , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： TIMOTHY ROGER ROBINSON , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/40 , H01J49/26 , H01J49/36
CPC分类号： H01J49/145
摘要： A system, components thereof, and methods are described for time-of-flight mass spectrometry. A microwave or high-frequency RF energy source is used to ionize a reagent vapor to form reagent ions. The reagent ions enter a chamber and interact with a fluid sample to form product ions. The reagent ions and product ions are directed to a time-of-flight mass spectrometer module for detection and determination of a mass value for the ions. The time-of-flight mass spectrometer module can include an optical system and an ion beam adjuster for focusing, interrupting, or altering a flow of reagent and product ions according to a specified pattern. The time-of-flight mass spectrometer module can include signal processing techniques to collect and analyze an acquired signal, for example, using statistical signal processing, such as maximum likelihood signal processing.
摘要翻译：描述了用于飞行时间质谱的系统及其组件和方法。微波或高频RF能量源用于电离试剂蒸气以形成试剂离子。试剂离子进入室并与流体样品相互作用以形成产物离子。试剂离子和产物离子被引导到飞行时间质谱仪模块，用于检测和确定离子的质量值。飞行时间质谱模块可以包括用于根据指定图案聚焦，中断或改变试剂和产物离子流的光学系统和离子束调节器。飞行时间质谱仪模块可以包括用于收集和分析所获取的信号的信号处理技术，例如使用诸如最大似然信号处理的统计信号处理。

27. 发明授权

US07501600B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权
标题翻译：具有介电真空容器的环形低场反应气体和等离子体源
公开(公告)号：US07501600B2
公开(公告)日：2009-03-10
申请号：US11058620
申请日：2005-02-15
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
IPC分类号： B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译：描述了等离子体点火和冷却装置和等离子体系统的方法。装置可以包括容器和与容器相邻的至少一个点火电极。所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。气体在通道中被点燃，而流量的剩余部分被引导离开通道。

28. 发明申请

US20120003748A1 Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry 失效
标题翻译：化学电离反应或质子转移反应质谱法
公开(公告)号：US20120003748A1
公开(公告)日：2012-01-05
申请号：US12026799
申请日：2008-02-06
申请人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： G01N33/00
CPC分类号： G01N27/62 , G01N33/497 , H01J49/105 , Y10T436/24
摘要： A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.
摘要翻译：描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。试剂离子进入诸如漂移室的室以与流体样品相互作用。电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子种类的质量和峰值强度值。

29. 发明申请

US20090095901A1 CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE MASS SPECTROMETER 失效
标题翻译：化学离子反应或原子转移反应用四倍子质谱仪的质谱
公开(公告)号：US20090095901A1
公开(公告)日：2009-04-16
申请号：US11869978
申请日：2007-10-10
申请人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/26
CPC分类号： H01J49/145
摘要： A system and methods are described for generating reagent ions and product ions for use in a quadrupole mass spectrometry system. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a quadrupole mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass values for ion species during spectrometry and faults within the system.
摘要翻译：描述了用于产生用于四极质谱系统的试剂离子和产物离子的系统和方法。微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。试剂离子进入诸如漂移室的室以与流体样品相互作用。电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。然后试剂离子和产物离子在电场的影响下离开室，由四极质谱仪模块进行检测。该系统包括各种控制模块，用于设置系统参数值和分析模块，用于在光谱测定和系统内故障时检测离子物质的质量值。

30. 发明授权

US07166816B1 Inductively-coupled torodial plasma source 有权
标题翻译：电感耦合等离子体源
公开(公告)号：US07166816B1
公开(公告)日：2007-01-23
申请号：US10837912
申请日：2004-05-03
申请人： Xing Chen , William M. Holber , Andrew Barnett Cowe , Eric Georgelis , Ilya M. Bystyak , Andrzej Bortkiewicz
发明人： Xing Chen , William M. Holber , Andrew Barnett Cowe , Eric Georgelis , Ilya M. Bystyak , Andrzej Bortkiewicz
IPC分类号： B23K10/00
CPC分类号： H05H1/46 , H05H2001/4667 , H05H2001/4682
摘要： Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.
摘要翻译：用于解离气体的装置包括包含气体的等离子体室。具有第一磁芯的第一变压器包围等离子体室的第一部分并且具有第一初级绕组。具有第二磁芯的第二变压器包围等离子体室的第二部分并且具有第二初级绕组。包括一个或多个切换半导体器件的第一固态AC开关电源耦合到第一电压源并且具有耦合到第一初级绕组的第一输出。包括一个或多个开关半导体器件的第二固态AC开关电源耦合到第二电压源，并且具有耦合到第二初级绕组的第二输出。第一固态交流开关电源驱动第一初级绕组中的第一交流电流。第二固态交流开关电源驱动第二初级绕组中的第二交流电流。第一AC电流和第二AC电流引起等离子体室内的组合AC电位，其直接形成环形等离子体，其完成变压器的次级电路并且解离气体。

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