专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

21. 发明授权

US07499521B2 System and method for fuel cell material x-ray analysis 有权
标题翻译：燃料电池材料x射线分析的系统和方法
公开(公告)号：US07499521B2
公开(公告)日：2009-03-03
申请号：US11619705
申请日：2007-01-04
申请人： Yuxin Wang , Wenbing Yun
发明人： Yuxin Wang , Wenbing Yun
IPC分类号： G21K7/00
CPC分类号： G01N23/04
摘要： An imaging technology for fuel cells is based on x-ray microscopy. A metrology system images the electro-chemical interaction areas of solid-oxide fuel cells (SOFC) in-situ. This system takes advantage of both the penetrating power and elemental absorption contrast of hard x-ray radiation to image the internal interaction areas in a SOFC. The technology can further take advantage of the strong dependence of the x-ray absorption on material type and energy to distinguish the four major material types: cathode, electrolyte, air, and low-Z contaminants such as sulfur.
摘要翻译：燃料电池的成像技术基于x射线显微镜。计量系统原位形成固体氧化物燃料电池（SOFC）的电化学相互作用区域。该系统利用硬X射线辐射的穿透力和元素吸收对比度来对SOFC中的内部相互作用区域进行成像。该技术可以进一步利用x射线吸收对材料类型和能量的强烈依赖性，以区分四种主要材料类型：阴极，电解质，空气和低Z污染物如硫。

22. 发明授权

US07414787B2 Phase contrast microscope for short wavelength radiation and imaging method 失效
标题翻译：相位显微镜用于短波长辐射和成像方法
公开(公告)号：US07414787B2
公开(公告)日：2008-08-19
申请号：US11468986
申请日：2006-08-31
申请人： Wenbing Yun , Yuxin Wang
发明人： Wenbing Yun , Yuxin Wang
IPC分类号： G02B27/44
CPC分类号： A61B6/484 , A61B6/4092 , G21K7/00 , G21K2207/005 , Y10S359/90 , Y10S438/975
摘要： A phase contrast x-ray microscope has a phase plate that is placed in proximity of and attached rigidly to the objective to form a composite optic. This enables easier initial and long-term maintenance of alignment of the microscope. In one example, they are fabricated on the same high-transmissive substrate. The use of this composite optic allows for lithographic-based alignment that will not change over the lifetime of the instrument. Also, in one configuration, the phase plate is located between the test object and the objective.
摘要翻译：相位X射线显微镜具有相位板，其被放置在物镜附近并刚性地附接到物镜上以形成复合光学元件。这使得显微镜对准的初始和长期维护变得容易。在一个示例中，它们被制造在相同的高透射性基板上。使用这种复合光学器件允许在仪器寿命期内不会改变的基于光刻的对准。而且，在一种配置中，相位板位于测试对象和目标之间。

23. 发明授权

US07406151B1 X-ray microscope with microfocus source and Wolter condenser 有权
标题翻译：具有微焦源和Wolter冷凝器的X射线显微镜
公开(公告)号：US07406151B1
公开(公告)日：2008-07-29
申请号：US11533863
申请日：2006-09-21
申请人： Wenbing Yun , Yuxin Wang , Michael Feser , Frederick W. Duewer
发明人： Wenbing Yun , Yuxin Wang , Michael Feser , Frederick W. Duewer
IPC分类号： G21K7/00
CPC分类号： G21K7/00 , G21K1/06
摘要： An x-ray microscope uses a microfocus x-ray source with a focus spot of less than 10 micrometers and a Wolter condenser having a magnification of about four or more for concentrating x-rays from the source onto a sample. A detector is provided for detecting the x-rays after interaction with the sample, and an x-ray objective is used to form an image of the sample on the detector. The use of the Wolter optic addresses a problem with microfocus sources that arise when the size of the focal spot that must then be imaged onto the sample with the condenser is smaller than the field of view.
摘要翻译： x射线显微镜使用聚焦点小于10微米的微焦点X射线源和具有约四或更大的放大倍数的Wolter冷凝器，用于将来自源的x射线集中到样品上。提供检测器，用于在与样品相互作用之后检测x射线，并且使用x射线物镜在检测器上形成样品的图像。使用Wolter光学器件解决了当聚焦器必须成像到样品上的焦点的尺寸小于视场时产生的微焦点源的问题。

24. 发明申请

US20070108387A1 Tunable x-ray fluorescence imager for multi-element analysis 审中-公开
标题翻译：可调谐X射线荧光成像仪用于多元素分析
公开(公告)号：US20070108387A1
公开(公告)日：2007-05-17
申请号：US11273639
申请日：2005-11-14
申请人： Wenbing Yun , Yuxin Wang , Michael Feser , Srivatsan Seshadri
发明人： Wenbing Yun , Yuxin Wang , Michael Feser , Srivatsan Seshadri
IPC分类号： G01J5/02
CPC分类号： G01N23/223 , G01N2223/076
摘要： A full-field x-ray fluorescence imager capable of recording high resolution maps of elemental concentrations with high signal to background in one image is described. Furthermore the methodology to have the same instrument record maps of different elements in series and how to register and overlay these maps properly is discussed.
摘要翻译：描述了一种全场X射线荧光成像器，其能够在一个图像中记录高信号到背景的元素浓度的高分辨率图。此外，讨论了具有相同仪器记录不同元素序列映射的方法，以及如何正确注册和覆盖这些映射。

25. 发明授权

US07170969B1 X-ray microscope capillary condenser system 有权
标题翻译： X光显微镜毛细管冷凝器系统
公开(公告)号：US07170969B1
公开(公告)日：2007-01-30
申请号：US10704381
申请日：2003-11-07
申请人： Wenbing Yun , Frederick William Duewer , Yuxin Wang
发明人： Wenbing Yun , Frederick William Duewer , Yuxin Wang
IPC分类号： G21K7/00
CPC分类号： G21K7/00 , G21K1/06 , G21K2201/064
摘要： A radiation condenser system for an X-ray microscope allows for the efficient collection and relay of radiation from a source to the sample. It generates a converging hollow cone of radiation that can be used in the imaging of a sample or target using a zone plate lens. This system comprises a capillary tube for receiving and focusing radiation onto a sample. A center stop is provided for blocking radiation being transmitted along an axis of the capillary tube.
摘要翻译：用于X射线显微镜的辐射聚光器系统允许从源到样品的辐射的有效收集和中继。它产生会聚的中空辐射圆锥，可用于使用区域透镜对样品或靶的成像。该系统包括用于接收和聚焦辐射到样品上的毛细管。提供中心止动件用于阻止沿着毛细管的轴传递的辐射。

26. 发明申请

US20070002215A1 Phase Contrast Microscope for Short Wavelength Radiation and Imaging Method 失效
标题翻译：用于短波长辐射和成像方法的相位对比显微镜
公开(公告)号：US20070002215A1
公开(公告)日：2007-01-04
申请号：US11468986
申请日：2006-08-31
申请人： Wenbing Yun , Yuxin Wang
发明人： Wenbing Yun , Yuxin Wang
IPC分类号： G02F1/1335
CPC分类号： A61B6/484 , A61B6/4092 , G21K7/00 , G21K2207/005 , Y10S359/90 , Y10S438/975
摘要： A phase contrast x-ray microscope has a phase plate that is placed in proximity of and attached rigidly to the objective to form a composite optic. This enables easier initial and long-term maintenance of alignment of the microscope. In one example, they are fabricated on the same high-transmissive substrate. The use of this composite optic allows for lithographic-based alignment that will not change over the lifetime of the instrument. Also, in one configuration, the phase plate is located between the test object and the objective.
摘要翻译：相位X射线显微镜具有相位板，其被放置在物镜附近并刚性地附接到物镜上以形成复合光学元件。这使得显微镜对准的初始和长期维护变得容易。在一个示例中，它们被制造在相同的高透射性基板上。使用这种复合光学器件允许在仪器寿命期内不会改变的基于光刻的对准。而且，在一种配置中，相位板位于测试对象和目标之间。

27. 发明授权

US07800072B2 Low pass X-ray scintillator system 有权
标题翻译：低通X射线闪烁体系统
公开(公告)号：US07800072B2
公开(公告)日：2010-09-21
申请号：US11278836
申请日：2006-04-06
申请人： Wenbing Yun , Yuxin Wang , David R. Trapp
发明人： Wenbing Yun , Yuxin Wang , David R. Trapp
IPC分类号： G01T1/20
CPC分类号： G01T1/2002 , G01T1/20
摘要： A scintillated CCD detector system for imaging x rays uses x-rays having a photon energy in the range of 1 to 20 keV. The detector differs from existing systems in that it provides extremely high resolution of better than a micrometer, and high detection quantum efficiency of up to 95%. The design of this detector also allows it to function as an energy filter to remove high-energy x-rays. This detector is useful in a wide range of applications including x-ray imaging, spectroscopy, and diffraction. The scintillator optical system has scintillator material with a lens system for collecting the light that is generated in the scintillator material. A substrate is used for spacing the scintillator material from the lens system.
摘要翻译：用于对X射线成像的闪烁CCD检测器系统使用具有在1至20keV范围内的光子能量的X射线。检测器与现有系统不同之处在于它提供比千分尺更高的分辨率，高达95％的高检测量子效率。该检测器的设计也可以用作能量过滤器，以去除高能X射线。该检测器可用于广泛的应用，包括X射线成像，光谱和衍射。闪烁体光学系统具有闪烁体材料，其具有用于收集闪烁体材料中产生的光的透镜系统。衬底用于将闪烁体材料与透镜系统间隔开。

28. 发明申请

US20080273662A1 CD-GISAXS System and Method 有权
标题翻译： CD-GISAXS系统和方法
公开(公告)号：US20080273662A1
公开(公告)日：2008-11-06
申请号：US11774183
申请日：2007-07-06
申请人： Wenbing Yun , Yuxin Wang , Srivatsan Seshadri , Kenneth W. Nill
发明人： Wenbing Yun , Yuxin Wang , Srivatsan Seshadri , Kenneth W. Nill
IPC分类号： G01N23/201
CPC分类号： G01N23/201 , G03F7/70625
摘要： CD-GISAXS achieves reduced measurement times by increasing throughput using longer wavelength radiation (˜12×, for example) such as x-rays in reflective geometry to increase both the collimation acceptance angle of the incident beams and the scattering signal strength, resulting in a substantial combined throughput gain. This wavelength selection and geometry can result in a dramatic reduction in measurement time. Furthermore, the capabilities of the CD-GISAXS can be extended to meet many of the metrology needs of future generations of semiconductor manufacturing and nanostructure characterization, for example.
摘要翻译： CD-GISAXS通过增加使用较长波长辐射（例如约12x）（例如反射几何形状的x射线）的吞吐量来实现缩短的测量时间，以增加入射光束的准直接收角和散射信号强度，从而导致大量组合吞吐量增益。这种波长选择和几何结构可以大大减少测量时间。此外，CD-GISAXS的功能可以扩展，以满足未来几代半导体制造和纳米结构表征的许多计量需求。

29. 发明授权

US07394890B1 Optimized x-ray energy for high resolution imaging of integrated circuits structures 有权
标题翻译：优化的x射线能量用于集成电路结构的高分辨率成像
公开(公告)号：US07394890B1
公开(公告)日：2008-07-01
申请号：US10983415
申请日：2004-11-08
申请人： Yuxin Wang , Wenbing Yun , Frederick William Duewer
发明人： Yuxin Wang , Wenbing Yun , Frederick William Duewer
IPC分类号： G21K1/06
CPC分类号： G21K7/00 , G21K1/06 , G21K2201/067 , G21K2207/005
摘要： An x-ray imaging system uses particular emission lines that are optimized for imaging specific metallic structures in a semiconductor integrated circuit structures and optimized for the use with specific optical elements and scintillator materials. Such a system is distinguished from currently-existing x-ray imaging systems that primarily use the integral of all emission lines and the broad Bremstralung radiation. The disclosed system provides favorable imaging characteristics such as ability to enhance the contrast of certain materials in a sample, to use different contrast mechanisms in a single imaging system, and to increase the throughput of the system.
摘要翻译： X射线成像系统使用针对半导体集成电路结构中的特定金属结构进行成像而优化的特定发射线，并针对特定的光学元件和闪烁体材料进行优化。这种系统与目前存在的主要使用所有发射线和广泛的布氏体辐射的整体的X射线成像系统不同。所公开的系统提供有利的成像特征，例如增强样品中某些材料的对比度的能力，以在单个成像系统中使用不同的对比度机制，并且增加系统的吞吐量。

30. 发明申请

US20080094694A1 Fabrication Methods for Micro Compound Optics 审中-公开
标题翻译：微复合光学制造方法
公开(公告)号：US20080094694A1
公开(公告)日：2008-04-24
申请号：US11958544
申请日：2007-12-18
申请人： Wenbing Yun , Yuxin Wang , Michael Feser , Alan Lyon
发明人： Wenbing Yun , Yuxin Wang , Michael Feser , Alan Lyon
IPC分类号： G02B27/44
CPC分类号： G02B27/4211 , G02B3/08 , G02B27/4272 , G03F7/0005 , Y10S438/975
摘要： Methods for fabricating refractive element(s) and aligning the elements in a compound optic, typically to a zone plate element. The techniques are used for fabricating micro refractive, such as Fresnel, optics and compound optics including two or more optical elements for short wavelength radiation. One application is the fabrication of the Achromatic Fresnel Optic (AFO). Techniques for fabricating the refractive element generally include: 1) ultra-high precision mechanical machining, e.g,. diamond turning; 2) lithographic techniques including gray-scale lithography and multi-step lithographic processes; 3) high-energy beam machining, such as electron-beam, focused ion beam, laser, and plasma-beam machining; and 4) photo-induced chemical etching techniques. Also addressed are methods of aligning the two optical elements during fabrication and methods of maintaining the alignment during subsequent operation.
摘要翻译：用于制造折射元件并将复合光学元件中的元件对准的方法，通常与区域板元件对准。这些技术用于制造微折射，例如菲涅尔，光学和复合光学器件，包括用于短波长辐射的两个或更多个光学元件。一种应用是制造消色差菲涅耳光（AFO）。用于制造折射元件的技术通常包括：1）超高精度机械加工，例如钻石车削 2）光刻技术，包括灰阶光刻和多步光刻工艺; 3）高能束加工，如电子束，聚焦离子束，激光和等离子束加工; 和4）光诱导化学蚀刻技术。还涉及在制造期间对准两个光学元件的方法以及在随后的操作期间维持对准的方法。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式