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    • 24. 发明授权
    • Signal analysis receiver with acousto-optic delay lines
    • 具有声光延迟线的信号分析接收机
    • US4644267A
    • 1987-02-17
    • US742825
    • 1985-06-10
    • James B. Y. TsuiRobert L. Davis
    • James B. Y. TsuiRobert L. Davis
    • G01R23/17G01S3/48H01Q3/26G01R23/16
    • G01S3/48G01R23/17H01Q3/2676
    • The system makes use of an interferometric Bragg cell for the time delays needed by the multiple antenna inputs in an angle-of-arrival (AOA) measurement system, for accurate measurements over wide bandwidths. A signal Bragg cell is modulated with a selected band of the EW signal environment, using a separate transducer coupled to each quadrant antenna element. A reference Bragg cell is modulated with a chirp signal. Coherent light from a laser is split and directed to both the signal cell and the reference cell. The output light beams from the reference Bragg cell and signal Bragg cell are combined and focused onto photo detectors having a one-dimensional array for each quadrant antenna element. The reference and signals are heterodyned at the photo detectors, which results in a channelized spectral output with each channel at the same intermediate frequency (IF). The outputs of the photodetectors are used by a phase comparison unit, cued by a frequency measurement receiver to the correct detectors, to provide the AOA measurement.
    • 该系统利用干涉布拉格单元,用于在到达角度(AOA)测量系统中的多个天线输入所需的时间延迟,以便在宽带宽上精确测量。 使用耦合到每个象限天线元件的单独传感器,用EW信号环境的选定频带来调制信号布拉格单元。 参考布拉格单元用啁啾信号进行调制。 来自激光器的相干光被分离并且被引导到信号单元和参考单元两者。 来自参考布拉格单元和信号布拉格单元的输出光束被组合并聚焦到每个象限天线元件具有一维阵列的光电检测器上。 参考和信号在光电检测器被外差,这导致每个信道在相同中频(IF)下的信道化频谱输出。 光检测器的输出由相位比较单元使用,由频率测量接收器提供给正确的检测器,以提供AOA测量。
    • 28. 发明授权
    • Method of fabricating silicon structures including fixtures for supporting wafers
    • 制造硅结构的方法,包括用于支撑晶片的固定装置
    • US06455395B1
    • 2002-09-24
    • US09608291
    • 2000-06-30
    • James E. BoyleRobert L. DavisLaurence D. DelaneyRaanan Y. Zehavi
    • James E. BoyleRobert L. DavisLaurence D. DelaneyRaanan Y. Zehavi
    • H01L2130
    • H01L21/67303H01L21/67306H01L21/67316
    • A method of fabricating the parts and assembling them into a complex structure, such as a silicon tower or boat for removably supporting a plurality of silicon wafers during thermal processing. A preferred embodiment of the tower includes four legs secured on their ends to two bases. A plurality of slots are cut in the legs allowing slidable insertion of the wafers and support for them. The legs preferably have a rounded wedge shape with a curved front surface of small radius cut with the slots and a back surface that is either flat or curved with a substantially larger radius. Preferably, the legs are machined from virgin polysilicon formed by chemical vapor deposition from silane. The bases may be either virgin poly or monocrystalline silicon and be either integral or composed of multiple parts. Virgin polysilicon is preferably annealed to above 1025° C. before machining. Silicon parts may be joined by applying a spin-on glass between the parts and annealing the assembly. After assembly, the surface of a tower is subjected to sub-surface working.
    • 一种制造零件并将其组装成复杂结构的方法,例如用于在热处理期间可移除地支撑多个硅晶片的硅塔或船。 塔的优选实施例包括在其端部固定到两个基座的四个腿。 在腿中切割多个槽,允许可滑动地插入晶片并为它们提供支撑。 腿部优选具有圆形的楔形形状,其具有小的半径的弯曲的前表面,其具有狭槽,并且后表面具有基本上较大的半径的平坦或弯曲。 优选地,腿由通过来自硅烷的化学气相沉积形成的原始多晶硅加工而成。 碱可以是原始的多晶硅或单晶硅,并且是整体的或由多个部分组成。 维氏多晶硅优选在加工前退火至高于1025℃。 可以通过在部件之间施加旋涂玻璃并退火组件来连接硅部件。 组装后,塔的表面经受亚表面加工。