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    • 22. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20090065862A1
    • 2009-03-12
    • US12264580
    • 2008-11-04
    • Tomoko MATSUDAINorio Yasuhara
    • Tomoko MATSUDAINorio Yasuhara
    • H01L29/78
    • H01L29/7816H01L29/063H01L29/0878H01L29/1045H01L29/1083H01L29/1095H01L29/66681H01L29/7835H01L2924/0002H01L2924/00
    • A semiconductor device comprising: a base layer of a first conductivity type selectively formed above a semiconductor substrate; a gate electrode formed on the base layer via the insulating film; a source layer of a second conductivity type selectively formed at a surface of the base layer at one side of the gate electrode; an channel implantation layer selectively formed at the surface of the base layer so as to be adjacent to the source layer below the gate electrode, the channel implantation layer having a higher concentration than the base layer; a RESURF layer of the second conductivity type selectively formed at the surface of the base layer at the other side of the gate electrode; and a drain layer of a second conductivity type being adjacent to the RESURF layer, a portion of the drain layer overlapping the base layer, and the drain layer having a higher concentration than the RESURF layer.
    • 一种半导体器件,包括:选择性地形成在半导体衬底之上的第一导电类型的基极层; 经由所述绝缘膜形成在所述基底层上的栅电极; 选择性地形成在所述基极层的所述栅电极的一侧的表面处的第二导电类型的源极层; 沟道注入层,其选择性地形成在所述基底层的表面处以与所述栅极电极下方的源极层相邻,所述沟道注入层具有比所述基底层更高的浓度; 所述第二导电类型的RESURF层选择性地形成在所述基极层的所述栅极电极的另一侧的表面处; 以及与RESURF层相邻的第二导电类型的漏极层,所述漏极层的一部分与所述基极层重叠,并且所述漏极层具有比所述RESURF层更高的浓度。