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21. 发明申请

US20060232639A1 Piezoelectric element, liquid-jet head and liquid-jet apparatus 有权
标题翻译：压电元件，喷液头和液体喷射装置
公开(公告)号：US20060232639A1
公开(公告)日：2006-10-19
申请号：US11390303
申请日：2006-03-28
申请人： Koji Sumi , Hironobu Kazama
发明人： Koji Sumi , Hironobu Kazama
IPC分类号： H01L41/00 , B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , H01L41/0973 , H01L41/1876 , H01L41/318
摘要： Disclosed are a piezoelectric element which can obtain a large strain with a low drive voltage, a liquid-jet head and a liquid-jet apparatus. The piezoelectric element includes: a lower electrode; an upper electrod; and a piezoelectric film which is made of lead zirconate titanate (PZT), and which has perovskite crystals having priority orientations of the (100) plane, the piezoelectric film being interposed between the lower electrode and the upper electrode. In the piezoelectric element, an X-ray diffraction peak position derived from the (100) planes of the piezoelectric film is within a range of 2θ=21.79 to 21.88.
摘要翻译：公开了一种可以获得具有低驱动电压的大应变的压电元件，液体喷射头和液体喷射装置。压电元件包括：下电极; 上层电极和由钛酸铅钛酸铅（PZT）制成的压电膜，其具有优先取向为（100）面的钙钛矿晶体，压电体膜介于下电极和上电极之间。在压电元件中，源自压电膜的（100）面的X射线衍射峰位置在2θ= 21.79〜21.88的范围内。

22. 发明申请

US20060230590A1 Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus 有权
标题翻译：电介质膜的制造方法，压电元件的制造方法，液体喷射头的制造方法，电介质膜，压电元件，液体喷射装置
公开(公告)号：US20060230590A1
公开(公告)日：2006-10-19
申请号：US11392757
申请日：2006-03-30
申请人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
发明人： Akira Kuriki , Koji Sumi , Hironobu Kazama , Motoki Takabe , Motohisa Noguchi
IPC分类号： H04R17/00
CPC分类号： H01L41/318 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , C23C18/1216 , C23C18/1283 , H01L41/0973 , H01L41/1876 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film containing at least a lead component to form a dielectric precursor film; a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a sintering step of sintering the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140° C. to 170° C., the degreasing step is performed at a degreasing temperature of 350° C. to 450° C. and at a heating-up rate of 15 [° C./sec] or higher, and the sintering step is performed at a heating-up rate of 100 [° C/sec] to 150 [° C./sec].
摘要翻译：一种电介质膜的制造方法，其特征在于，包括：涂布包含含有构成含有至少含有铅成分的电介质膜的金属的有机金属化合物的胶体溶液以形成电介质前体膜的涂布步骤; 干燥所述电介质前体膜的干燥步骤; 脱脂步骤，使所述电介质前体膜脱脂; 以及烧结所述电介质前体膜以形成电介质膜的烧结步骤，其中所述干燥步骤包括将所述电介质前体膜加热到低于作为主要溶剂的溶剂的沸点的温度的第一干燥步骤并将电介质前体膜在该温度下保持一定时间以干燥电介质前体膜;以及第二干燥步骤，在140℃至170℃的温度下干燥该电介质前体膜在脱脂温度为350℃〜450℃，升温速度为15℃/秒以上的条件下进行脱脂工序，烧结工序在加热升速率为100 [℃/秒]至150℃/秒。

23. 发明授权

US07055921B2 Method for driving liquid-jet head and liquid-jet apparatus 有权
标题翻译：驱动喷液头和喷液装置的方法
公开(公告)号：US07055921B2
公开(公告)日：2006-06-06
申请号：US10761416
申请日：2004-01-22
申请人： Koji Sumi
发明人： Koji Sumi
IPC分类号： B41J29/38
CPC分类号： B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2002/14241
摘要： Disclosed is a method for driving a liquid-jet head comprising a passage-forming substrate in which pressure generating chambers communicating with nozzle orifices are formed; and a piezoelectric element provided on one surface of the passage-forming substrate via a vibration plate, and consisting of a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer consists of a relaxor ferroelectric. A voltage between a potential V1, at which the capacitance of the piezoelectric element is maximal in a capacitance-potential curve of the piezoelectric element, and a potential V2, which has a larger absolute value than the absolute value of the potential V1 and at which an inflection point in the capacitance-potential curve is reached, is set as a drive start potential V0. The piezoelectric element is driven using a drive waveform having an ejection step for changing the potential from the drive start potential V0 to a potential V3, at which a driving electric field having an electric field strength of 100 to 500 kV/cm is generated in the piezoelectric layer, to contract the pressure generating chamber, thereby ejecting liquid droplets through the nozzle orifice.
摘要翻译：公开了一种驱动液体喷射头的方法，其包括通道形成基板，其中形成有与喷嘴孔连通的压力产生室; 以及压电元件，其经由振动板设置在通道形成基板的一个表面上，并且由下电极，压电层和上电极构成。压电层由弛豫铁电体组成。在压电元件的电容电位曲线中压电元件的电容最大的电势V SUB 1和电位V 2 2之间的电压，其中具有比电位V 1的绝对值更大的绝对值，并且达到电容 - 电位曲线中的拐点被设定为驱动开始电位V 0 < SUB>。压电元件使用具有用于将驱动开始电位V 0 <0>的电位改变为电位V 3 3的喷射步骤的驱动波形来驱动，在此处驱动电场在压电层中产生电场强度为100〜500kV / cm的电场强度，使压力发生室收缩，从而通过喷嘴孔喷射液滴。

24. 发明申请

US20050208208A1 Method of manufacturing dielectric layer and method of manufacturing liquid jet head 有权
标题翻译：制造介质层的方法和制造液体喷头的方法
公开(公告)号：US20050208208A1
公开(公告)日：2005-09-22
申请号：US10998195
申请日：2004-11-29
申请人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
发明人： Akira Kuriki , Hironobu Kazama , Toshinao Shinbo , Koji Sumi
IPC分类号： H01L21/316 , B05D5/12 , B41J2/14 , B41J2/16 , C23C18/12 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/318 , H01L41/39 , H01L41/43
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/164 , C23C18/1216 , C23C18/1225 , C23C18/1245 , C23C18/1254 , C23C18/1283 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.
摘要翻译：制造电介质膜的方法包括：涂覆由有机金属化合物制成的溶胶并形成电介质前体膜的涂覆步骤，干燥电介质前体膜的干燥步骤，使电介质前体膜脱脂的脱脂步骤和烘烤烘烤电介质前体膜以形成电介质膜的步骤。干燥步骤包括：第一干燥步骤，通过将电介质前体膜加热到低于作为溶胶的主要溶剂的溶剂的沸点的温度，然后将电介质前体膜保持在温度为以及第二干燥步骤，通过再次加热电介质前体膜，然后将电介质前体膜保持在该温度下进一步干燥电介质前体膜一段预定时间。

25. 发明授权

US06639340B1 Method for manufacturing piezoelectric element, and piezoelectric element, ink-jet recording head and printer 有权
标题翻译：制造压电元件的方法，压电元件，喷墨记录头和打印机
公开(公告)号：US06639340B1
公开(公告)日：2003-10-28
申请号：US09549209
申请日：2000-04-13
申请人： Hong Qiu , Koji Sumi , Souichi Moriya , Masato Shimada , Tsutomu Nishiwaki
发明人： Hong Qiu , Koji Sumi , Souichi Moriya , Masato Shimada , Tsutomu Nishiwaki
IPC分类号： H01L4108
CPC分类号： H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/318
摘要： Provided is a method for manufacturing a piezoelectric element that has excellent piezoelectric characteristics and can be made into a thicker film. A piezoelectric thin film is crystallized by a process in which piezoelectric precursor films 4021 through 4025 containing the metal elements of a piezoelectric ceramic are coated with a material, dried, pyrolyzed, and then heat-treated under prescribed conditions in a diffusion furnace. With this method, a piezoelectric thin film can be made into a thicker film without initiating cracking.
摘要翻译：提供一种压电元件的制造方法，该压电元件具有优异的压电特性，并且可以制成较厚的膜。压电薄膜通过将包含压电陶瓷的金属元素的压电前体膜4021至4025涂覆材料干燥，热解，然后在扩散炉中在规定条件下进行热处理的方法结晶化。利用该方法，可以将压电薄膜制成较厚的膜而不引起开裂。

26. 发明授权

US06402304B1 Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head 失效
标题翻译：压电致动器，喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法
公开(公告)号：US06402304B1
公开(公告)日：2002-06-11
申请号：US09372990
申请日：1999-08-12
申请人： Hong Qiu , Koji Sumi , Masato Shimada , Tsutomu Nishiwaki , Masanori Okuyama , Zhi Quiang Wei
发明人： Hong Qiu , Koji Sumi , Masato Shimada , Tsutomu Nishiwaki , Masanori Okuyama , Zhi Quiang Wei
IPC分类号： B41J2045
CPC分类号： B41J2/1646 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1645 , B41J2002/14387 , H01L41/0805 , H01L41/0973 , H01L41/317
摘要： A piezoelectric actuator, made of a substrate and a piezoelectric film layer resistant to erosion is provided. The area of the piezoelectric actuator can be enlarged, and has a flat top surface. The present invention further provides an ink jet printing head, a printer, a method for manufacturing a piezoelectric actuator, and a method for manufacturing an ink jet printing head. The piezoelectric actuator includes a piezoelectric film disposed between a lower electrode and an upper electrode. Columnar crystal grains of piezoelectric ceramic which compose the piezoelectric actuator are random-oriented in a film thickness direction, and have a mean diameter in the range of 100 nm to 15,000 nm. The method for manufacturing the actuator includes the step of forming precursor films, which are composed of metal and oxygen, over a lower electrode, providing a hydrothermal treatment by dipping the precursor films in an alkaline solution, which as 2 M[mol/l] or less, more preferably 0.1 M[mol/l] or less, concentration of a given alkaline solute, and promoting the crystallization under certain conditions.
摘要翻译：提供了一种由基片制成的压电致动器和耐腐蚀的压电薄膜层。压电致动器的面积可以扩大，并且具有平坦的顶表面。本发明还提供一种喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法。压电致动器包括设置在下电极和上电极之间的压电膜。构成压电致动器的压电陶瓷的柱状晶粒在膜厚度方向上是随机取向的，并且具有在100nm至15,000nm范围内的平均直径。制造致动器的方法包括在下电极上形成由金属和氧构成的前体膜的步骤，通过将前体膜浸入碱溶液中进行水热处理，碱溶液为2M [mol / l] 或更低，更优选0.1M [mol / l]或更低，给定碱性溶质的浓度，并且在某些条件下促进结晶。

27. 发明授权

US08277031B2 Liquid-ejecting head, liquid-ejecting apparatus, and actuator 有权
标题翻译：液体喷射头，液体喷射装置和致动器
公开(公告)号：US08277031B2
公开(公告)日：2012-10-02
申请号：US12754675
申请日：2010-04-06
申请人： Koji Sumi
发明人： Koji Sumi
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , H01L41/0973 , H01L41/1871 , H01L41/1876
摘要： A liquid-ejecting head includes a flow-passage-forming substrate that includes a pressure-generating chamber, the pressure-generating chamber being in communication with a nozzle through which droplets are ejected, and a piezoelectric element disposed on the flow-passage-forming substrate, the piezoelectric element altering the internal pressure of the pressure-generating chamber. The piezoelectric element includes a piezoelectric layer containing titanium (Ti) and zirconium (Zr), a first electrode, and a second electrode. The first electrode and the second electrode are disposed on the opposite sides of the piezoelectric layer,. The component ratio Ti/(Zr+Ti) of the piezoelectric layer is 0.40 or more but less than 0.50. At least a portion of the piezoelectric layer formed on the first electrode contains tetragonal crystals formed by phase transition under stress caused by an underlying layer.
摘要翻译：液体喷射头包括流路形成基板，该流路形成基板包括压力产生室，所述压力发生室与喷射器连通，液滴喷射通过喷嘴，以及设置在流路形成部上的压电元件基板，压电元件改变压力发生室的内部压力。压电元件包括含有钛（Ti）和锆（Zr）的压电层，第一电极和第二电极。第一电极和第二电极设置在压电层的相对侧上。压电层的成分比Ti /（Zr + Ti）为0.40以上且小于0.50。形成在第一电极上的压电层的至少一部分包含由下层引起的应力下的相变形成的四方晶。

28. 发明授权

US07992972B2 Method of manufacturing liquid jet head, method of manufacturing piezoelectric element and liquid jet apparatus 有权
标题翻译：制造液体喷头的方法，制造压电元件的方法和液体喷射装置
公开(公告)号：US07992972B2
公开(公告)日：2011-08-09
申请号：US12405984
申请日：2009-03-17
申请人： Toshinao Shinbo , Kazushige Hakeda , Koji Sumi , Tsutomu Nishiwaki
发明人： Toshinao Shinbo , Kazushige Hakeda , Koji Sumi , Tsutomu Nishiwaki
IPC分类号： B41J2/045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1632 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.
摘要翻译：制造压电元件的方法包括：压电层形成工序，依次重复地进行热处理工序，在相对湿度为30〜50％Rh的范围内，将含有铅的压电材料涂布在下电极膜上，进行热处理以形成压电前体膜和烧结压电前体膜以在下电极膜上形成压电膜的结晶步骤，从而形成压电层。

29. 发明授权

US07896480B2 Liquid jet head and a piezoelectric element 有权
标题翻译：液体喷头和压电元件
公开(公告)号：US07896480B2
公开(公告)日：2011-03-01
申请号：US12433204
申请日：2009-04-30
申请人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
发明人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , B41J2202/03 , H01L41/0973
摘要： A liquid jet head includes a passage-forming substrate composed of a crystal substrate provided with pressure-generating chambers communicating with nozzle orifices and piezoelectric elements disposed on the passage-forming substrate and each composed of a lower electrode, a piezoelectric material layer, and an upper electrode to cause a change of pressure in the pressure-generating chamber. The piezoelectric material layer has a thickness of 5 μm or less and is made of a perovskite-type crystal and is configured such that the distance between an X-ray diffraction peak position derived from the (220) plane of the passage-forming substrate and an X-ray diffraction peak position derived from the (110) plane of the piezoelectric material layer is within a range of 2θ=16.262±0.1 degrees.
摘要翻译：液体喷射头包括通道形成基板，该通道形成基板由具有与喷嘴孔连通的压力产生室和设置在通道形成基板上的压电元件的晶体基板构成，并且每个由下电极，压电材料层和上部电极引起压力发生室中的压力变化。压电材料层的厚度为5μm以下，由钙钛矿型晶体构成，使得从通道形成基板的（220）面导出的X射线衍射峰值位置与衍生自压电材料层的（110）面的X射线衍射峰位置在2θ= 16.262±0.1度的范围内。

30. 发明授权

US07896479B2 Liquid jet head and a piezoelectric element 有权
标题翻译：液体喷头和压电元件
公开(公告)号：US07896479B2
公开(公告)日：2011-03-01
申请号：US12433177
申请日：2009-04-30
申请人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
发明人： Hironobu Kazama , Yuka Yonekura , Koji Sumi
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , B41J2202/03 , H01L41/0973
摘要： A liquid jet head has a channel-forming substrate composed of a crystal substrate having a pressure-generating chamber linked to a nozzle opening as well as a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode and formed on the channel-forming substrate so that the pressure in the pressure-generating chamber can be changed, with the piezoelectric layer having a thickness equal to or smaller than 5 μm, made of a perovskite-type crystal, and formed so that the interval between the X-ray diffraction peak position derived from the (220) plane of the channel-forming substrate and the X-ray diffraction peak position derived from the (111) plane of the piezoelectric layer falls within the range 2θ=9.059±0.1°.
摘要翻译：液体喷射头具有由具有连接到喷嘴开口的压力产生室的晶体基板以及由下电极，压电层和上电极构成的压电元件构成的沟道形成基板，使得压电层的厚度等于或小于5μm，由钙钛矿型晶体制成，使得压力发生室中的压力可以改变，使得X 衍生自沟道形成基板的（220）面的衍射峰值位置和从压电层的（111）面导出的X射线衍射峰值位于2＆amp; t = 9.059±0.1°的范围内。

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