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21. 发明申请

US20060028230A1 Method for testing pixels for LCD TFT displays 有权
标题翻译： LCD TFT显示器像素测试方法
公开(公告)号：US20060028230A1
公开(公告)日：2006-02-09
申请号：US10977510
申请日：2004-10-29
申请人： Axel Wenzel , Ralf Schmid , Matthias Brunner
发明人： Axel Wenzel , Ralf Schmid , Matthias Brunner
IPC分类号： G01R31/00
CPC分类号： G01N23/2251 , G02F2001/136254
摘要： The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.
摘要翻译：本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。根据本发明的方法，电子束的直径增加，使得光束在非均匀电极区域上聚焦较少，即扩大或“模糊”。光束的直径增加，使得光束从非均匀电极区域的导电部分产生二次电子。配置的测试光束可以是圆形，椭圆形或其他合适的形状。

22. 发明授权

US08222911B2 Light-assisted testing of an optoelectronic module 有权
标题翻译：光电子模块的光辅助测试
公开(公告)号：US08222911B2
公开(公告)日：2012-07-17
申请号：US12296055
申请日：2007-04-04
申请人： Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
发明人： Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
IPC分类号： G01R31/305
CPC分类号： G02F1/1309 , G02F2001/136254
摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译：本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。

23. 发明授权

US08009299B2 Method for beam calibration and usage of a calibration body 有权
标题翻译：用于光束校准和使用校准体的方法
公开(公告)号：US08009299B2
公开(公告)日：2011-08-30
申请号：US11813334
申请日：2006-01-05
申请人： Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
发明人： Matthias Brunner , Ralf Schmid , Bernhard Mueller , Axel Wenzel
IPC分类号： G01B11/14
CPC分类号： G09G3/006 , G01R31/305 , G01R31/308 , G01R35/005 , H01J2237/2826
摘要： The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the position L.
摘要翻译：本发明涉及一种校准红细胞束的束位置的方法。使用具有结构的校准体，其中结构在平坦部分中具有结构周期PS，并且在每个结构内具有用于测量的位置L. 对于校准，生成校准体的平坦部分中的结构处的至少一个检测信号，其中，粒子束在束目标位置L1上被偏转器偏转，其中光束目标周期P1大于结构周期PS，由此使用基准校准来控制偏转器，并且其中光束目标偏转在光束目标周期P1中与结构周期PS和/或从位置L的光束目标位置L1偏离。

24. 发明授权

US07256606B2 Method for testing pixels for LCD TFT displays 有权
标题翻译： LCD TFT显示器像素测试方法
公开(公告)号：US07256606B2
公开(公告)日：2007-08-14
申请号：US10977510
申请日：2004-10-29
申请人： Axel Wenzel , Ralf Schmid , Matthias Brunner
发明人： Axel Wenzel , Ralf Schmid , Matthias Brunner
IPC分类号： G01R31/00 , G01R31/307
CPC分类号： G01N23/2251 , G02F2001/136254
摘要： The present invention provides a method of electron beam testing of liquid crystal displays comprising non-uniform electrodes having a conductive portion and a dielectric portion. In accordance with methods of the present invention, the diameter of the electron beam is increased so that the beam is less focused, i.e., enlarged or “blurred,” over a non-uniform electrode area. The diameter of the beam is increased so that the beam generates secondary electrons from the conductive portion of the non-uniform electrode area. The configured test beam may be circular, elliptical, or other suitable shapes.
摘要翻译：本发明提供了包括具有导电部分和电介质部分的不均匀电极的液晶显示器的电子束测试方法。根据本发明的方法，电子束的直径增加，使得光束在非均匀电极区域上聚焦较少，即扩大或“模糊”。光束的直径增加，使得光束从非均匀电极区域的导电部分产生二次电子。配置的测试光束可以是圆形，椭圆形或其他合适的形状。

25. 发明授权

US07375505B2 Method and apparatus for testing function of active microstructural elements and method for producing microstructural elements using the test method 失效
标题翻译：用于测试活性微结构元件功能的方法和装置以及使用该测试方法生产微结构元件的方法
公开(公告)号：US07375505B2
公开(公告)日：2008-05-20
申请号：US10115685
申请日：2002-04-04
申请人： Matthias Brunner , Ralf Schmid
发明人： Matthias Brunner , Ralf Schmid
IPC分类号： G01R31/02
CPC分类号： G01R31/311 , G01R31/307
摘要： A method and an apparatus for testing the function of a plurality of microstructural elements by irradiation with particle radiation. All of the microstructural elements detected as malfunctioning are listed in a first error list in a first test sequence. The microstructural elements listed in the first error list are tested once more in at least one further test sequence and at least the result of the test sequence last carried out is evaluated to establish the overall test result. The first test sequence is designed so that, if possible, all of the microstructural elements which are actually malfunctioning are detected. The invention further relates to a method for producing microstructural elements which are constructed as a plurality on a substrate and are tested according to the above test method.
摘要翻译：一种用于通过用粒子辐射照射来测试多个微结构元件的功能的方法和装置。检测为故障的所有微结构元件都列在第一个测试序列的第一个错误列表中。在第一个错误列表中列出的微结构元素在至少一个进一步的测试序列中再次被测试，并且至少对上次执行的测试序列的结果进行评估以建立整体测试结果。第一测试序列被设计成使得如果可能的话，检测到所有实际故障的微结构元件。本发明还涉及一种用于制造在基板上多个构造并根据上述测试方法测试的显微结构元件的方法。

26. 发明申请

US20080061807A1 Configurable Prober for TFT LCD Array Test 有权
标题翻译：用于TFT LCD阵列测试的可配置探头
公开(公告)号：US20080061807A1
公开(公告)日：2008-03-13
申请号：US11940432
申请日：2007-11-15
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez (Frank) Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/02
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A method of testing electronic devices on substrates is described. The method includes placing a configurable prober over a first substrate, testing the first substrate, re-configuring the configurable prober, placing the configurable prober over a second substrate, and testing the second substrate.
摘要翻译：描述了一种在基板上测试电子器件的方法。该方法包括将可配置的探测器放置在第一衬底上，测试第一衬底，重新配置可配置的探测器，将可配置的探测器放置在第二衬底上，以及测试第二衬底。

27. 发明申请

US20050179452A1 Configurable prober for TFT LCD array test 有权
标题翻译：可配置探针用于TFT LCD阵列测试
公开(公告)号：US20050179452A1
公开(公告)日：2005-08-18
申请号：US10903216
申请日：2004-07-30
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/302 , G01R31/26 , G01R31/305 , G02F1/13 , G09G3/00 , H01L21/687
CPC分类号： G01R1/07364 , G01R31/2893 , G01R31/305 , G09G3/006
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.
摘要翻译：提供了一种用于电子设备测试系统的改进的探测器。探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。通常，玻璃基板是正方形的，框架也是正方形的。以这种方式，“x”和“y”轴由框架定义。电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

28. 发明授权

US07355418B2 Configurable prober for TFT LCD array test 有权
标题翻译：可配置探针用于TFT LCD阵列测试
公开(公告)号：US07355418B2
公开(公告)日：2008-04-08
申请号：US10903216
申请日：2004-07-30
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/305
CPC分类号： G01R1/07364 , G01R31/2893 , G01R31/305 , G09G3/006
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.
摘要翻译：提供了一种用于电子设备测试系统的改进的探测器。探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。通常，玻璃基板是正方形的，框架也是正方形的。以这种方式，“x”和“y”轴由框架定义。电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

29. 发明授权

US07105833B2 Deflection system for a particle beam device 有权
标题翻译：用于粒子束装置的偏转系统
公开(公告)号：US07105833B2
公开(公告)日：2006-09-12
申请号：US10477664
申请日：2002-03-04
申请人： Matthias Brunner , Ralf Schmid
发明人： Matthias Brunner , Ralf Schmid
IPC分类号： H01J3/14
CPC分类号： H01J37/153 , H01J37/147
摘要： A particle beam apparatus and a device for an energy corrected deflection by a predetermined deflection angle of a particle beam coming in along a beam axis are disclosed, whereby the particle beam consists of charged particles with energy values scattered around a predetermined energy value. The device comprises a corrector, whereby the corrector, by means of a first electric field and a superimposed first magnetic field, deflects the charged particles depending on their energies, and whereby the direction of the charged particles with the predetermined energy value is maintained during the passage through the corrector. The device further comprises a deflector applied after the corrector, whereby the deflector, by means of a second electric field or by means of a second magnetic field, deflects the charged particles with the predetermined energy vague by the predetermined deflection angle away from the beam axis, whereby the deflector focuses the charged particles. Further, the device comprises a controller to control the corrector and the deflector.
摘要翻译：公开了一种粒子束装置和用于通过沿着光束轴线进入的粒子束的预定偏转角的能量校正偏转的装置，由此粒子束由具有以预定能量值散射的能量值的带电粒子组成。该装置包括校正器，由此校正器借助于第一电场和叠加的第一磁场根据其能量使带电粒子偏转，并且由此在期间保持具有预定能量值的带电粒子的方向通过校正器。该装置还包括在校正器之后施加的偏转器，由此偏转器借助于第二电场或借助于第二磁场使预定能量的带电粒子偏转远离光束轴线的预定偏转角由此偏转器将带电粒子聚焦。此外，该装置包括用于控制校正器和偏转器的控制器。

30. 发明授权

US06730906B2 Method and apparatus for testing a substrate 失效
标题翻译：用于测试衬底的方法和装置
公开(公告)号：US06730906B2
公开(公告)日：2004-05-04
申请号：US09977549
申请日：2001-10-15
申请人： Matthias Brunner , Ralf Schmid
发明人： Matthias Brunner , Ralf Schmid
IPC分类号： H01J3728
CPC分类号： H01J37/244 , H01J37/28
摘要： A method and apparatus for testing a substrate, wherein a particle beam is directed onto the substrate and emitted secondary particles are detected with a detector and then evaluated. The location of the site at which the secondary particles are emitted on the substrate relative to the position of the detector is taken into consideration during testing.
摘要翻译：一种用于测试衬底的方法和装置，其中将粒子束引导到衬底上，并且用检测器检测发射的次级颗粒，然后进行评估。在测试期间考虑相对于检测器的位置在基底上发射次级粒子的位置的位置。

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