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    • 2. 发明授权
    • Method for beam calibration and usage of a calibration body
    • 用于光束校准和使用校准体的方法
    • US08009299B2
    • 2011-08-30
    • US11813334
    • 2006-01-05
    • Matthias BrunnerRalf SchmidBernhard MuellerAxel Wenzel
    • Matthias BrunnerRalf SchmidBernhard MuellerAxel Wenzel
    • G01B11/14
    • G09G3/006G01R31/305G01R31/308G01R35/005H01J2237/2826
    • The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the position L.
    • 本发明涉及一种校准红细胞束的束位置的方法。 使用具有结构的校准体,其中结构在平坦部分中具有结构周期PS,并且在每个结构内具有用于测量的位置L. 对于校准,生成校准体的平坦部分中的结构处的至少一个检测信号,其中,粒子束在束目标位置L1上被偏转器偏转,其中光束目标周期P1大于 结构周期PS,由此使用基准校准来控制偏转器,并且其中光束目标偏转在光束目标周期P1中与结构周期PS和/或从位置L的光束目标位置L1偏离。