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21. 发明授权

US06903368B2 Thin-film transistor device, its manufacturing process, and image display using the device 失效
标题翻译：薄膜晶体管器件，其制造工艺和使用该器件的图像显示
公开(公告)号：US06903368B2
公开(公告)日：2005-06-07
申请号：US10190670
申请日：2002-07-09
申请人： Shinya Yamaguchi , Mutsuko Hatano , Takeo Shiba
发明人： Shinya Yamaguchi , Mutsuko Hatano , Takeo Shiba
IPC分类号： G02F1/1345 , G02F1/1368 , G09F9/30 , G09F9/35 , H01L21/20 , H01L21/268 , H01L21/336 , H01L21/77 , H01L27/02 , H01L27/12 , H01L29/04 , H01L29/786 , H01L31/20
CPC分类号： H01L21/02691 , H01L21/02527 , H01L21/02532 , H01L21/02535 , H01L21/02595 , H01L21/02609 , H01L21/2026 , H01L21/268 , H01L27/0207 , H01L27/1214 , H01L27/1285 , H01L27/1296 , H01L29/045 , H01L29/66757 , H01L29/78675 , H01L29/78696
摘要： A thin film made of silicon or another IV-group crystals (crystals and mixed crystals of C, Ge, Sn, and Pb) is twice scanned with a laser beam moving in two lateral directions in which crystal grains grow larger in order to form high-quality polycrystals in exact positions in the thin film, while defects uncontrollable by the prior arts are being reduced significantly, to realize a high-quality TFT device. The laser-scanning directions are defined by the crystallization face orientations.
摘要翻译：由硅或其他IV族晶体（C，Ge，Sn和Pb的晶体和混晶）制成的薄膜在两个横向移动的激光束被扫描两次，其中晶粒长大以形成高优质的多晶体在薄膜中的确切位置，而现有技术不可控制的缺陷被显着地减少，以实现高质量的TFT器件。激光扫描方向由结晶面取向定义。

22. 发明授权

US07262821B2 LCD with first and second circuit regions each with separately optimized transistor properties 有权
标题翻译： LCD具有第一和第二电路区域，每个具有单独优化的晶体管特性
公开(公告)号：US07262821B2
公开(公告)日：2007-08-28
申请号：US10772431
申请日：2004-02-06
申请人： Mitsuharu Tai , Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba , Hideo Sato
发明人： Mitsuharu Tai , Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba , Hideo Sato
IPC分类号： G02F1/136
CPC分类号： H01L27/1296 , G02F1/13624 , G02F1/136277 , H01L27/1285 , H01L29/04 , H01L29/78621 , H01L29/78627
摘要： A large number of pixels PXL are arranged in a matrix fashion in a display region DSP on an insulating substrate. Disposed around the display region DSP are a drain-side pixel-driving circuit including a drain shift register DSR, a digital-to-analog converter circuit DAC, a drain level shifter DLS, a buffer BF and sampling switches SSW; and a gate-side pixel-driving circuit including a gate shift register GSR and a gate level shifter GLS, and various kinds of circuits. Current mobility of thin film transistors constituting a circuit region SX requiring high-speed operation of these pixel-driving circuits is improved by optimizing a combination of plural layouts, arrangements and configurations for the respective circuits to meet the specifications special for the respective circuits.
摘要翻译：大量像素PXL以矩阵方式排列在绝缘基板上的显示区域DSP中。在显示区域DSP周围设置有漏极侧像素驱动电路，其包括漏极移位寄存器DSR，数模转换器电路DAC，漏极电平移位器DLS，缓冲器BF和采样开关SSW; 以及包括栅极移位寄存器GSR和栅极电平移位器GLS的栅极侧像素驱动电路以及各种电路。构成需要这些像素驱动电路的高速操作的电路区域SX的薄膜晶体管的电流迁移率通过优化各个电路的多个布局，配置和配置的组合来满足各个电路特有的规格而得到改善。

23. 发明授权

US07192852B2 Method for fabricating image display device 有权
公开(公告)号：US07192852B2
公开(公告)日：2007-03-20
申请号：US11172958
申请日：2005-07-05
申请人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba , Mitsuharu Tai , Hajime Akimoto
发明人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba , Mitsuharu Tai , Hajime Akimoto
IPC分类号： H01L21/20
CPC分类号： H01L21/02683 , G02F1/13454 , H01L21/02532 , H01L21/02609 , H01L21/2026 , H01L27/12 , H01L27/1285 , H01L29/04
摘要： There is provided a method for fabricating an image display device having an active matrix substrate including high-performance transistor circuits operating with high mobility as drive circuits for driving pixel portions which are arranged as a matrix. The portion of a polysilicon film formed in a drive circuit region DAR1 provided on the periphery of the pixel region PAR of the active matrix substrate SUB1 composing the image display device is irradiated and scanned with a pulse modulated laser beam or a pseudo CW laser beam to be reformed into a quasi-strip-like-crystal silicon film having a crystal boundary continuous in the scanning direction so that discrete reformed regions each composed of the quasi-strip-like-crystal silicon film are formed. In virtual tiles TL composed of the discrete reformed regions, drive circuits having active elements such as thin-film transistors or the like are formed such that the channel directions thereof coincide with the direction of crystal growth in the quasi-strip-like-crystal silicon film.

24. 发明授权

US07569439B2 Thin film semiconductor device, production process and information displays 有权
标题翻译：薄膜半导体器件，生产工艺和信息显示
公开(公告)号：US07569439B2
公开(公告)日：2009-08-04
申请号：US11047620
申请日：2005-02-02
申请人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba
发明人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba
IPC分类号： H01L21/00 , H01L21/84 , H01L21/36
CPC分类号： H01L21/02686 , H01L21/02609 , H01L21/2026 , H01L27/1285 , H01L27/1296 , H01L29/045 , H01L29/6675 , H01L29/66765 , H01L29/78648 , H01L29/78672 , H01L29/78678
摘要： A thin film semiconductor device has a semiconductor thin film with a film thickness of 200 nm or less. The semiconductor thin film is formed over a dielectric substrate with a warping point of 600° C. or lower. The semiconductor thin film has a region in which a first semiconductor thin film region with the defect density of 1×1017 cm−3 or less and a second semiconductor thin film region with the defect density of 1×1017 cm−3 or more are disposed alternately in the form of stripes. The width of the first semiconductor thin film region is larger than the width of the semiconductor thin film region. The grain boundaries, grain size and orientation of crystals over the dielectric substrate are controlled, so that a high quality thin film semiconductor device is obtained.
摘要翻译：薄膜半导体器件具有膜厚度为200nm以下的半导体薄膜。半导体薄膜形成在电介质基板上，其翘曲点为600℃以下。半导体薄膜具有以下形式交替地配置缺陷密度为1×10 17 cm -3以下的第一半导体薄膜区域和缺陷密度为1×10 17 cm -3以上的第二半导体薄膜区域，的条纹。第一半导体薄膜区域的宽度大于半导体薄膜区域的宽度。控制电介质基板上晶界的晶界，晶粒尺寸和取向，从而获得高品质的薄膜半导体器件。

25. 发明申请

US20090057676A1 THIN FILM SEMICONDUCTOR DEVICE 有权
标题翻译：薄膜半导体器件
公开(公告)号：US20090057676A1
公开(公告)日：2009-03-05
申请号：US12258738
申请日：2008-10-27
申请人： Shinya YAMAGUCHI , Mutsuko Hatano , Mitsuharu Tai , Sedng-Kee Park , Takeo Shiba
发明人： Shinya YAMAGUCHI , Mutsuko Hatano , Mitsuharu Tai , Sedng-Kee Park , Takeo Shiba
IPC分类号： H01L33/00
CPC分类号： H01L27/1285 , H01L21/02422 , H01L21/02532 , H01L21/02595 , H01L21/02609 , H01L21/02675 , H01L21/02691 , H01L27/1296 , H01L29/04 , H01L29/66757 , H01L29/78675
摘要： A thin film semiconductor device is provided which includes an insulating substrate, a Si thin film formed over the insulating substrate, and a transistor with the Si thin film as a channel thereof. The Si thin film includes a polycrystal where a plurality of narrow, rectangular crystal grains are arranged. A surface of the polycrystal is flat at grain boundaries thereof. Also, an average film thickness of the boundaries of crystals of the Si thin film ranges from 90 to 100% of an intra-grain average film thickness.
摘要翻译：提供一种薄膜半导体器件，其包括绝缘衬底，形成在绝缘衬底上的Si薄膜，以及具有Si薄膜作为其沟道的晶体管。 Si薄膜包括其中布置有多个窄的矩形晶粒的多晶体。多晶的表面在其晶界处是平坦的。此外，Si薄膜的晶体边界的平均膜厚度在晶粒内平均膜厚度的90〜100％的范围内。

26. 发明申请

US20070134893A1 Method for fabricating image display device 有权
标题翻译：图像显示装置的制造方法
公开(公告)号：US20070134893A1
公开(公告)日：2007-06-14
申请号：US11702576
申请日：2007-02-06
申请人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba , Mitsuharu Tai , Hajime Akimoto
发明人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba , Mitsuharu Tai , Hajime Akimoto
IPC分类号： H01L21/20
CPC分类号： H01L21/02683 , G02F1/13454 , H01L21/02532 , H01L21/02609 , H01L21/2026 , H01L27/12 , H01L27/1285 , H01L29/04
摘要： There is provided a method for fabricating an image display device having an active matrix substrate including high-performance transistor circuits operating with high mobility as drive circuits for driving pixel portions which are arranged as a matrix. The portion of a polysilicon film formed in a drive circuit region DAR1 provided on the periphery of the pixel region PAR of the active matrix substrate SUB1 composing the image display device is irradiated and scanned with a pulse modulated laser beam or a pseudo CW laser beam to be reformed into a quasi-strip-like-crystal silicon film having a crystal boundary continuous in the scanning direction so that discrete reformed regions each composed of the quasi-strip-like-crystal silicon film are formed. In virtual tiles TL composed of the discrete reformed regions, drive circuits having active elements such as thin-film transistors or the like are formed such that the channel directions thereof coincide with the direction of crystal growth in the quasi-strip-like-crystal silicon film.
摘要翻译：提供一种制造具有有源矩阵基板的图像显示装置的方法，所述有源矩阵基板包括以高迁移率运行的高性能晶体管电路作为用于驱动作为矩阵布置的像素部分的驱动电路。形成在构成图像显示装置的有源矩阵基板SUB1的像素区域PAR的周围的驱动电路区域DAR 1中的多晶硅膜的部分被照射并用脉冲调制激光束或伪CW激光光束被重新形成具有在扫描方向上连续的晶体边界的准带状晶体硅膜，从而形成各自由准带状晶体硅膜构成的分立的重整区域。在由分立重构区域构成的虚拟瓦片TL中，形成具有诸如薄膜晶体管等有源元件的驱动电路，使得其沟道方向与准带状晶体硅中的晶体生长方向一致电影。

27. 发明授权

US06969871B2 Thin film semiconductor device 有权
标题翻译：薄膜半导体器件
公开(公告)号：US06969871B2
公开(公告)日：2005-11-29
申请号：US10438843
申请日：2003-05-16
申请人： Shinya Yamaguchi , Mutsuko Hatano , Mitsuharu Tai , Sedng-Kee Park , Takeo Shiba
发明人： Shinya Yamaguchi , Mutsuko Hatano , Mitsuharu Tai , Sedng-Kee Park , Takeo Shiba
IPC分类号： G02F1/1345 , G02F1/1368 , H01L21/20 , H01L21/336 , H01L21/77 , H01L27/12 , H01L29/04 , H01L29/786 , H01L29/76
CPC分类号： H01L27/1285 , H01L21/02422 , H01L21/02532 , H01L21/02595 , H01L21/02609 , H01L21/02675 , H01L21/02691 , H01L27/1296 , H01L29/04 , H01L29/66757 , H01L29/78675
摘要： In a film semiconductor device according to the present invention, a continuous oscillating light beam from a solid laser or the like is modulated on time axis and spatially, thereby realizing crystal growth that is nearly optimum for a crystal structure and growth speed of crystals in a Si thin film. Crystal grains with a large diameter, flatness with no projections at their grain boundaries, and controlled surface orientations are thereby formed. By forming channels with these crystal grains, high mobility semiconductor devices and an image display device using these semiconductor devices are realized.
摘要翻译：在根据本发明的薄膜半导体器件中，在时间轴上和空间上调制来自固体激光器等的连续振荡光束，从而实现对晶体结构几乎最佳的晶体生长和晶体的生长速度 Si薄膜。从而形成具有大直径的晶粒，在其晶界处没有突起的平坦度和受控的表面取向。通过形成具有这些晶粒的通道，实现了高迁移率半导体器件和使用这些半导体器件的图像显示器件。

28. 发明申请

US20050255679A1 Thin film semiconductor device 有权
标题翻译：薄膜半导体器件
公开(公告)号：US20050255679A1
公开(公告)日：2005-11-17
申请号：US11186907
申请日：2005-07-22
申请人： Shinya Yamaguchi , Mutsuko Hatano , Mitsuharu Tai , Sedng-Kee Park , Takeo Shiba
发明人： Shinya Yamaguchi , Mutsuko Hatano , Mitsuharu Tai , Sedng-Kee Park , Takeo Shiba
IPC分类号： G02F1/1345 , G02F1/1368 , H01L21/20 , H01L21/336 , H01L21/77 , H01L27/12 , H01L29/04 , H01L29/786 , H01L21/00
CPC分类号： H01L27/1285 , H01L21/02422 , H01L21/02532 , H01L21/02595 , H01L21/02609 , H01L21/02675 , H01L21/02691 , H01L27/1296 , H01L29/04 , H01L29/66757 , H01L29/78675
摘要： In a thin film semiconductor device according to the present invention, a continuous oscillating light beam from a solid laser or the like is modulated on time axis and spatially, thereby realizing crystal growth that is nearly optimum for a crystal structure and a growth speed of crystals in a Si thin film. Crystal grains with a large diameter, flatness with no projections at their grain boundaries, and controlled surface orientations are thereby formed. By forming channels with these crystal grains, high-mobility semiconductor devices and an image display device using these semiconductor devices are realized.
摘要翻译：在根据本发明的薄膜半导体器件中，在时间轴上调制来自固体激光器等的连续振荡光束，从而实现对于晶体结构和晶体生长速度几乎最佳的晶体生长在Si薄膜中。从而形成具有大直径的晶粒，在其晶界处没有突起的平坦度和受控的表面取向。通过形成具有这些晶粒的沟道，实现了高迁移率半导体器件和使用这些半导体器件的图像显示器件。

29. 发明申请

US20050127361A1 Thin film semiconductor device, production process and information displays 有权
标题翻译：薄膜半导体器件，生产工艺和信息显示
公开(公告)号：US20050127361A1
公开(公告)日：2005-06-16
申请号：US11047620
申请日：2005-02-02
申请人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba
发明人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba
IPC分类号： H01L21/20 , H01L21/336 , H01L21/77 , H01L21/84 , H01L27/12 , H01L29/04 , H01L29/786 , H01L31/113
CPC分类号： H01L21/02686 , H01L21/02609 , H01L21/2026 , H01L27/1285 , H01L27/1296 , H01L29/045 , H01L29/6675 , H01L29/66765 , H01L29/78648 , H01L29/78672 , H01L29/78678
摘要： A thin film semiconductor device has a semiconductor thin film with a film thickness of 200 nm or less. The semiconductor thin film is formed over a dielectric substrate with a warping point of 600° C. or lower. The semiconductor thin film has a region in which a first semiconductor thin film region with the defect density of 1×1017 cm−3 or less and a second semiconductor thin film region with the defect density of 1×1017 cm−3 or more are disposed alternately in the form of stripes. The width of the first semiconductor thin film region is larger than the width of the semiconductor thin film region. The grain boundaries, grain size and orientation of crystals over the dielectric substrate are controlled, so that a high quality thin film semiconductor device is obtained.
摘要翻译：薄膜半导体器件具有膜厚度为200nm以下的半导体薄膜。半导体薄膜形成在电介质基板上，其翘曲点为600℃以下。半导体薄膜具有其缺陷密度为1×10 -3 -3 -3以下的第一半导体薄膜区域和具有第一半导体薄膜区域的区域 1×10 3 -3 -3以上的缺陷密度以条纹的形式交替设置。第一半导体薄膜区域的宽度大于半导体薄膜区域的宽度。控制电介质基板上晶界的晶界，晶粒尺寸和取向，从而获得高品质的薄膜半导体器件。

30. 发明授权

US06872977B2 Thin film semiconductor device, production process and information displays 有权
标题翻译：薄膜半导体器件，生产工艺和信息显示
公开(公告)号：US06872977B2
公开(公告)日：2005-03-29
申请号：US10188817
申请日：2002-07-05
申请人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba
发明人： Mutsuko Hatano , Shinya Yamaguchi , Takeo Shiba
IPC分类号： H01L21/20 , H01L21/336 , H01L21/77 , H01L21/84 , H01L27/12 , H01L29/04 , H01L29/786 , H01L31/036
CPC分类号： H01L21/02686 , H01L21/02609 , H01L21/2026 , H01L27/1285 , H01L27/1296 , H01L29/045 , H01L29/6675 , H01L29/66765 , H01L29/78648 , H01L29/78672 , H01L29/78678
摘要： A thin film semiconductor device has a semiconductor thin film with a film thickness of 200 nm or less. The semiconductor thin film is formed over a dielectric substrate with a warping point of 600° C. or lower. The semiconductor thin film has a region in which a first semiconductor thin film region with the defect density of 1×1017 cm−3 or less and a second semiconductor thin film region with the defect density of 1×1017 cm−3 or more are disposed alternately in the form of stripes. The width of the first semiconductor thin film region is larger than the width of the semiconductor thin film region. The grain boundaries, grain size and orientation of crystals over the dielectric substrate are controlled, so that a high quality thin film semiconductor device is obtained.
摘要翻译：薄膜半导体器件具有膜厚度为200nm以下的半导体薄膜。半导体薄膜形成在电介质基板上，其翘曲点为600℃以下。半导体薄膜具有其缺陷密度为1×10 17 cm -3以下的第一半导体薄膜区域和缺陷密度为1×10 17 cm -3的第二半导体薄膜区域， 3>以上以条纹的形式交替配置。第一半导体薄膜区域的宽度大于半导体薄膜区域的宽度。控制电介质基板上晶界的晶界，晶粒尺寸和取向，从而获得高品质的薄膜半导体器件。

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