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    • 25. 发明授权
    • MEMS device with integrated memory cells
    • 具有集成存储单元的MEMS器件
    • US08536664B1
    • 2013-09-17
    • US11735803
    • 2007-04-16
    • Richard TsaiXiaolei Liu
    • Richard TsaiXiaolei Liu
    • G03B17/00
    • G03B3/10G03B2205/0084
    • A MEMS device can include an actuator, a base formed from a substrate, and a plurality of memory cells integrated with the base. At least a portion of the base can be configured to move in response to the actuator. A miniature camera can include a base comprising a frame, a stage, and a plurality of flexures configured to connect the stage with the frame. The flexures can be adapted to bend to permit the stage to move relative to the frame. The camera can include a plurality of memory cells integrated with the base, a lens mount secured to the stage, a lens barrel secured to the lens mount, an image sensor, and an actuator adapted to move the stage relative to the frame and the image sensor.
    • MEMS器件可以包括致动器,由衬底形成的基座以及与基座一体化的多个存储单元。 基座的至少一部分可以被构造成响应于致动器而移动。 微型照相机可以包括基座,其包括框架,台架以及被配置为将平台与框架连接的多个挠曲件。 挠曲件可以适于弯曲以允许平台相对于框架移动。 相机可以包括与基座一体化的多个存储器单元,固定到平台的透镜架,固定到透镜座的透镜筒,图像传感器和适于相对于框架移动平台的致动器和图像 传感器。