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21. 发明授权

EP2433094B1 SELBSTTEST FÜR DREHRATENSENSOREN 有权
标题翻译： SELF TEST旋转速率传感器
公开(公告)号：EP2433094B1
公开(公告)日：2015-03-04
申请号：EP10713897.6
申请日：2010-04-06
申请人： Robert Bosch GmbH
发明人： BAUER, Wolfram , CLASSEN, Johannes , WILLIG, Rainer , MEIER, Matthias , KUHLMANN, Burkhard , REIMANN, Mathias , ESCH, Ermin , SCHWARZ, Hans-Dieter , VEITH, Michael , LANG, Christoph , GOMEZ, Udo-Martin
IPC分类号： G01C19/56 , G01C19/5726
CPC分类号： G01C25/00 , G01C19/56 , G01C19/5726

22. 发明授权

EP1373831B1 DREHRATENSENSOR 有权
公开(公告)号：EP1373831B1
公开(公告)日：2013-12-11
申请号：EP02717947.2
申请日：2002-02-13
申请人： ROBERT BOSCH GMBH
发明人： WILLIG, Rainer , THOMAE, Andreas , KUHLMANN, Burhard , HAUER, Joerg , GOMEZ, Udo-Martin , GOETZ, Siegbert , DOERING, Christian , FEHRENBACH, Michael , BAUER, Wolfram , BISCHOF, Udo , NEUL, Reinhard , FUNK, Karsten , LUTZ, Markus , WUCHER, Gerhard , FRANZ, Jochen
IPC分类号： G01C19/56
CPC分类号： G01C19/5747

23. 发明授权

EP1364184B1 DREHRATENSENSOR 有权
标题翻译：旋转速率传感器
公开(公告)号：EP1364184B1
公开(公告)日：2011-10-05
申请号：EP01985792.9
申请日：2001-12-21
申请人： ROBERT BOSCH GMBH
发明人： WILLIG, Rainer , THOMAE, Andreas , KUHLMANN, Burkhard , HAUER, Joerg , GOMEZ, Udo-Martin , GOETZ, Siegbert , DOERING, Christian , FEHRENBACH, Michael , BAUER, Wolfram , BISCHOF, Udo , NEUL, Reinhard , FUNK, Karsten , LUTZ, Markus , WUCHER, Gerhard , FRANZ, Jochen
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5747
摘要： The invention relates to a rotational speed sensor comprising a Coriolis element (100) which is arranged on the surface (1) of a substrate. The Coriolis element (100) is excited in order to vibrate parallel to a first axis (X). The Coriolis element (100) is deflected on a second axis (Y) which is perpendicular to the first axis (X) by virtue of Coriolis force. A detection element (140) is provided for detecting said deflection.

24. 发明公开

EP2208020A1 DREHRATENSENSOR 有权
标题翻译：旋转速率传感器
公开(公告)号：EP2208020A1
公开(公告)日：2010-07-21
申请号：EP08805011.7
申请日：2008-10-02
申请人： Robert Bosch GmbH
发明人： NEUL, Reinhard , CLASSEN, Johannes , OHMS, Torsten , KUHLMANN, Burkhard , FRANKE, Axel , KOHN, Oliver , MEISEL, Daniel Christoph , HAUER, Joerg , GOMEZ, Udo-Martin , KEHR, Kersten
IPC分类号： G01C19/56
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： The invention relates to a yaw rate sensor having a substrate and a plurality of moveable partial structures, which are arranged across a surface of the substrate, wherein the moveable partial structures are coupled to a common, particularly a central spring element, wherein means are provided in order to excite the moveable partial structures to carry out a coupled oscillation in a plane parallel to the surface of the substrate, wherein the moveable partial structures comprise Coriolis elements, wherein means are provided to prove deflections of the Coriolis elements caused by a Coriolis force, wherein a first Coriolis element is provided for detecting a yaw rate about a first axis, wherein a second Coriolis element is provided for detecting a yaw rate about a second axis, the second axis being aligned perpendicular to the first axis.

25. 发明授权

EP1844552B1 DELTA-SIGMA-MODULATOR 有权
标题翻译： Δ-Σ调制器
公开(公告)号：EP1844552B1
公开(公告)日：2009-06-10
申请号：EP05819362.4
申请日：2005-12-13
申请人： ROBERT BOSCH GMBH
发明人： WILLIG, Rainer , KUHLMANN, Burkhard , GOMEZ, Udo-Martin , BAUER, Wolfram , NEUL, Reinhard , LANG, Christoph , VEITH, Michael
IPC分类号： H03M3/04
CPC分类号： H03M3/404 , H03M3/424 , H03M3/464
摘要： The invention relates to a delta sigma modulator comprising an oscillatable system which is provided with a characteristic frequency (f R ), an electronics unit and a regulation loop which acts the oscillatable system upon the electronics unit and vice versa. Said invention is characterised in that the regulation loop is embodied in such a way that an amplification in said regulation loop displays an amplification superelevation in a frequency range around the characteristic frequency (f R ) of the oscillable system.

26. 发明授权

EP2208020B1 DREHRATENSENSOR 有权
公开(公告)号：EP2208020B1
公开(公告)日：2013-08-21
申请号：EP08805011.7
申请日：2008-10-02
申请人： Robert Bosch GmbH
发明人： NEUL, Reinhard , CLASSEN, Johannes , OHMS, Torsten , KUHLMANN, Burkhard , FRANKE, Axel , KOHN, Oliver , MEISEL, Daniel Christoph , HAUER, Joerg , GOMEZ, Udo-Martin , KEHR, Kersten
IPC分类号： G01C19/574
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44

27. 发明公开

EP2433094A1 SELBSTTEST FÜR DREHRATENSENSOREN 有权
标题翻译： SELF TEST旋转速率传感器
公开(公告)号：EP2433094A1
公开(公告)日：2012-03-28
申请号：EP10713897.6
申请日：2010-04-06
申请人： Robert Bosch GmbH
发明人： BAUER, Wolfram , CLASSEN, Johannes , WILLIG, Rainer , MEIER, Matthias , KUHLMANN, Burkhard , REIMANN, Mathias , ESCH, Ermin , SCHWARZ, Hans-Dieter , VEITH, Michael , LANG, Christoph , GOMEZ, Udo-Martin
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C25/00 , G01C19/56 , G01C19/5726
摘要： A yaw rate sensor (10) comprises a movable mass structure (12) and a drive component (13) which is suitable to set the movable mass structure (12) in motion (14), and an evaluation component (15) which is suitable to register a reaction (40) of the movable mass structure (12) to a yaw rate (Ω). A method for the functional testing of a yaw rate sensor (10) comprises the following steps: driving a movable mass structure (12), feeding a test signal (42) into a quadrature control loop (44) at a feed location (48) of the quadrature control loop (44), feeding back a deflection (40) of the movable mass structure (12), registering an extent of the feedback of the movable mass structure (12), reading a response signal (47) from the quadrature control loop (44). In the yaw rate sensor (10) and also in the method, provision is made to read the response signal (47) in relation to a processing direction (45) of the test signal (42) between the feed location (48) for a test signal (42) and an actuating element (38) for feeding back a deflection (40) of the movable mass structure (12).

28. 发明公开

EP2049871A1 DREHRATENSENSOR 有权
公开(公告)号：EP2049871A1
公开(公告)日：2009-04-22
申请号：EP07729969.1
申请日：2007-06-06
申请人： Robert Bosch GmbH
发明人： HAUER, Joerg , GOMEZ, Udo-Martin , NEUL, Reinhard , KEHR, Kersten , CLASSEN, Johannes , FRANKE, Axel , QUANDER, Marco
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5762 , G01C19/5747
摘要： The present invention relates to a rotation-rate sensor having a drive mass element (13) which is arranged above a surface of a substrate and can be caused to oscillate by means of a drive device (18) along a first axis (y) which runs along the surface, having a detection mass element (14) which can be deflected under the influence of Coriolis force along a second axis (z) which runs at right angles to the surface, and having a detection device which can detect the deflection of the detection mass element (14) along the second axis (z). The arrangement of the second axis (z) at right angles to the surface allows the rotation-rate sensor to be integrated on a chip together with further rotation-rate sensors which are suitable for detection of rotations about rotation axes in other directions.
摘要翻译：本发明涉及一种具有驱动质量元件（13）的转速传感器，该驱动质量元件布置在基板的表面上方并且可以通过驱动装置（18）沿第一轴线（y）振动，该第一轴线沿着表面延伸，具有能够在科里奥利力的影响下沿着与表面成直角延伸的第二轴（z）偏转的检测质量元件（14），并且具有检测装置，该检测装置能够检测沿第二轴线（z）的检测质量元件（14）。与表面成直角的第二轴线（z）的布置允许旋转速率传感器与另外的旋转速率传感器一起集成在芯片上，所述另外的旋转速度传感器适于检测围绕其他方向的旋转轴线的旋转。

29. 发明公开

EP1472506A1 MIKROMECHANISCHER DREHRATENSENSOR 有权
标题翻译：微机械旋转速率传感器
公开(公告)号：EP1472506A1
公开(公告)日：2004-11-03
申请号：EP02781106.6
申请日：2002-09-23
申请人： ROBERT BOSCH GMBH
发明人： WILLIG, Rainer , THOMAE, Andreas , KUHLMANN, Burkhard , HAUER, Joerg , GOMEZ, Udo-Martin , GOETZ, Siegbert , DOERING, Christian , FEHRENBACH, Michael , BAUER, Wolfram , BISCHOF, Udo , NEUL, Reinhard , FUNK, Karsten , LUTZ, Markus , WUCHER, Gerhard , FRANZ, Jochen
IPC分类号： G01C19/56 , G01P3/14
CPC分类号： G01C19/5747
摘要： The invention relates to a micromechanical rotation speed sensor, comprising a first Coriolois mass element (2a) and a second Coriolis mass element (2b), arranged above the surface of a substrate (100), a drive device by means of which the first Coriolis mass element (2a) and the second Coriolis mass element (2b) may be driven in oscillation along a first axis (x) and a recording device by means of which the displacements of the first Coriolis mass element (2a) and the second Coriolis mass element (2b) may be recorded along a second axis (y) which is perpendicular to the first axis (x) as a result of the correspondingly-acting Coriolis force. The first axis (x) and the second axis (y) run parallel to the surface of the substrate (100), the recording device comprises a first recording mass device (3a, 3a`) and a second recording mass device (3b, 3b`) and the centre of gravity of the first Coriolis mass element (2a), the second Coriolis mass element (2b), the first recording mass device (3a, 3a`) and the second recording mass device (3b, 3b`) coincide at a common centre of mass (SP) in the idle state.

30. 发明公开

EP1468248A1 DREHRATENSENSOR 审中-公开
公开(公告)号：EP1468248A1
公开(公告)日：2004-10-20
申请号：EP02774412.7
申请日：2002-09-25
申请人： ROBERT BOSCH GMBH
发明人： WILLIG, Rainer , FRANZ, Jochen , KUHLMANN, Burkhard , HAUER, Joerg , GOMEZ, Udo-Martin , MAURER, Dieter , DOERING, Christian , BAUER, Wolfram , BISCHOF, Udo , NEUL, Reinhard , CLASSEN, Johannes , LANG, Christoph , FREY, Jens
IPC分类号： G01C19/56 , G01P3/14
CPC分类号： G01C19/5747
摘要： The invention relates to a rotational rate sensor comprising a substrate and a Coriolis element (2a, 2b), said Coriolis element (2a, 2b) being arranged over a surface of a substrate. According to the invention, stimulation means (12a, 13a, 12b, 13b) are provided for stimulating the Coriolis element (2a, 2b) in such a way that it oscillates parallel to a first axis (X); detection means (15a, 16a, 15b, 16b, 17) are provided for detecting a deviation of the Coriolis element (2a, 2b), caused by a Coriolis force in a second axis (Y) which is perpendicular to the first axis; the first and second axes (X, Y) are parallel to the surface of the substrate; sensor elements (1a, 1b, 2a, 2b, 3a, 3b) are provided which are at least partially mobile in relation to the substrate; and force-mediating means (19, 20) are provided for mediating a static force between the substrate and at least one of the sensor elements (1a, 1b, 2a, 2b, 3a, 3b).
摘要翻译：本发明涉及一种旋转速率传感器，其包括衬底和科里奥利元件（2a，2b），所述科里奥利元件（2a，2b）布置在衬底的表面上。根据本发明，（12A，13A，12B，13B）被提供用于刺激科里奥利元件刺激装置（2a，2b）的，它平行于振荡的第一轴线（X）这样的方式; 提供了用于检测科里奥利元件的偏差检测装置（15A，16A，15B，16B，17）（2A，2B），所引起的第二轴（Y）垂直于所述第一轴线的科里奥利力; 第一和第二轴线（X，Y）平行于基板的表面; 提供传感器元件（1a，1b，2a，2b，3a，3b），所述传感器元件相对于所述衬底至少部分可移动; 和力介导装置（19,20），用于调节衬底和传感器元件（1a，1b，2a，2b，3a，3b）中的至少一个之间的静态力。

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