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21. 发明授权

US5815366A Electrostatic chuck and the method of operating the same 失效
标题翻译：静电吸盘及其操作方法
公开(公告)号：US5815366A
公开(公告)日：1998-09-29
申请号：US575864
申请日：1995-12-20
申请人： Yoshihisa Morita , Nobuo Okumura , Toshio Nakanishi
发明人： Yoshihisa Morita , Nobuo Okumura , Toshio Nakanishi
IPC分类号： B23Q3/15 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , Y10T279/23
摘要： An electrostatic chuck, which includes a plurality of ejector pins, means of moving up and down the ejector pins and means of grounding the ejector pins, is provided with an ejector buffer mechanism disposed between the ejector pins and the ejector pin moving means for exerting a buffer action for the tip positions of individual ejector pins. The electrostatic chuck facilitates the positioning control of the ejector pins and enables the ejector pins to come in tight contact with the wafer rear surface, and consequently the wafer can be clamped and released quickly and reliably. At the plasma processing of wafer, the ejector pins are brought to tight contact with the wafer rear surface, or a clearance within a prescribed range is created for the ejector pins from the wafer rear surface, thereby suppressing the occurrence of discharge in the gap between an ejector pin and the wafer rear surface, and consequently problems associated with the discharge can be dissolved.
摘要翻译：包括多个顶出销的静电卡盘，设置在顶出销和上下推杆的装置的装置设有一个排出器缓冲机构，该弹出器缓冲机构设置在顶出销和顶针移动装置之间，用于施加针对各个顶针的尖端位置的缓冲作用。静电卡盘有利于顶针的定位控制，使顶针能够与晶片后表面紧密接触，从而可快速可靠地夹紧和释放晶片。在晶片的等离子体处理中，顶针与晶片后表面紧密接触，或者在晶片后表面上产生用于顶针的规定范围内的间隙，从而抑制在晶片后表面之间的间隙中的放电发生顶针和晶片后表面，因此可以解决与放电有关的问题。

22. 发明授权

US4825660A Cryogenic refrigerator 失效
标题翻译：低温冰箱
公开(公告)号：US4825660A
公开(公告)日：1989-05-02
申请号：US54781
申请日：1987-05-27
申请人： Nobuo Okumura
发明人： Nobuo Okumura
IPC分类号： F25B9/14 , F25B9/00
CPC分类号： F25B9/14
摘要： A cryogenic refrigerator has a working chamber defined between a cylinder and a piston received therein. The working chamber is alternately communicated with discharge and suction ports of a compressor to thereby cause a refrigerant to be repeatedly compressed and expanded. The refrigerator is provided with a sensor for detecting the pressure of the refrigerant discharged from the discharge port of the compressor. A microcomputer is connected to the sensor for making comparison between the detected pressure of the refrigerant, which is received in the form of an electric signal, and a reference value. The refrigerator is further provided with a driver circuit for controlling the drive of the motor in accordance with the result of the comparison. Accordingly, when the pressure of the refrigerant is high at the time of starting the cryogenic refrigerator, the microcomputer instructs the driver circuit to rotate a motor at high speed. Thus, the reciprocating cycle of the piston driven by the motor is quickened, so that it is possible to bring the refrigerator into a stable or stationary operation state in a relatively short period of time.
摘要翻译：低温冰箱具有限定在容纳在其中的气缸和活塞之间的工作室。工作室与压缩机的排出口和吸入口交替地连通，从而使制冷剂反复压缩膨胀。冰箱设置有用于检测从压缩机的排出口排出的制冷剂的压力的传感器。微型计算机连接到传感器，用于比较以电信号形式接收的制冷剂的检测压力与参考值之间的比较。冰箱还设置有用于根据比较结果控制电动机的驱动的驱动电路。因此，当启动低温冰箱时制冷剂的压力高时，微型计算机指示驱动电路高速旋转电动机。因此，由电动机驱动的活塞的往复循环加快，从而可以在相当短的时间内使冰箱进入稳定或静止的运行状态。

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