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21. 发明授权

US08334087B2 Polymer, radiation-sensitive composition, monomer, and method of producing compound 有权
标题翻译：聚合物，辐射敏感组合物，单体和生产化合物的方法
公开(公告)号：US08334087B2
公开(公告)日：2012-12-18
申请号：US12834015
申请日：2010-07-12
申请人： Ken Maruyama , Toshiyuki Kai
发明人： Ken Maruyama , Toshiyuki Kai
IPC分类号： G03F7/004 , G03F7/028 , G03F7/039
CPC分类号： G03F7/0397 , C08F8/12 , C08F12/22 , C08F12/24 , C08F212/14 , C08F220/18 , C08F220/30 , C09D125/18 , G03F7/0045 , G03F7/0046 , C08F2220/1891
摘要： A radiation-sensitive composition includes (A) an acid-dissociable group-containing polymer, and (B) a radiation-sensitive acid generator. The acid-dissociable group-containing polymer (A) includes a polymer that includes a repeating unit shown by a general formula (1) in which R1 represents a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group, R2 represents a substituted or unsubstituted aryl group having 6 to 22 carbon atoms, Y represents a carbon atom, and X represents an atomic group that forms an alicyclic hydrocarbon group together with Y.
摘要翻译：辐射敏感性组合物包括（A）含酸解离基团的聚合物，和（B）辐射敏感性酸产生剂。含酸解离基的聚合物（A）包括含有通式（1）所示的重复单元的聚合物，其中R 1表示氢原子，甲基，氟原子或三氟甲基，R 2表示取代或未取代的碳原子数6〜22的芳基，Y表示碳原子，X表示与Y一起形成脂环式烃基的原子团。

22. 发明授权

US07323284B2 Negative type radiation sensitive resin composition 有权
标题翻译：负型辐射敏感树脂组合物
公开(公告)号：US07323284B2
公开(公告)日：2008-01-29
申请号：US10171583
申请日：2002-06-17
申请人： Toshiyuki Kai , Daigo Ichinohe
发明人： Toshiyuki Kai , Daigo Ichinohe
IPC分类号： G03F7/004
CPC分类号： G03F7/0045 , G03F7/038 , Y10S430/106
摘要： A negative type radiation sensitive resin composition comprising: (A) an alkali-soluble resin containing the polymerized unit of a polymerizable unsaturated compound having a phenolic hydroxyl group and having a weight average molecular weight of 4,100 to 20,000 and a weight average molecular weight/number average molecular weight ratio of more than 1.25 to not more than 2.00; (B) a radiation sensitive acid generating agent; and (C) an acid crosslinking agent. This composition can be used with an alkali developer having a normal concentration, can form a high-resolution rectangular line-and-space resist pattern, and provides a chemically amplified negative type resist which is free from a resist pattern defect (bridging or chip line) after development and has excellent sensitivity, developability and dimensional fidelity.
摘要翻译：一种负型辐射敏感性树脂组合物，其包含：（A）含有酚羟基的可聚合不饱和化合物的聚合单元的碱溶性树脂，其重均分子量为4100〜20,000，重均分子量/数平均分子量大于1.25至不大于2.00; （B）辐射敏感性酸产生剂; 和（C）酸交联剂。该组合物可以与具有正常浓度的碱性显影剂一起使用，可以形成高分辨率矩形线间距抗蚀剂图案，并提供无抗蚀剂图案缺陷的化学放大负型抗蚀剂（桥接或芯片线），具有优异的灵敏度，可开发性和尺寸保真度。

23. 发明授权

US4338286A Process for recovering uranium and/or thorium from a liquid containing uranium and/or thorium 失效
标题翻译：从含铀和/或钍的液体中回收铀和/或钍的工艺
公开(公告)号：US4338286A
公开(公告)日：1982-07-06
申请号：US143116
申请日：1980-04-23
申请人： Eiichiro Nakai , Hiroshi Kojima , Shoichi Tanaka , Toshiyuki Kai , Shinichi Hasegawa
发明人： Eiichiro Nakai , Hiroshi Kojima , Shoichi Tanaka , Toshiyuki Kai , Shinichi Hasegawa
IPC分类号： C01B15/047 , C01F15/00 , C01G43/00 , C01G43/01 , G21F9/06 , G21F9/10 , C01G56/00
CPC分类号： C01B15/0475 , C01F15/00 , C01G43/00 , C01G43/01 , G21F9/10 , C01P2006/80
摘要： A process for recovering uranium and/or thorium from a liquid containing uranium and/or thorium is disclosed, which comprises making a precipitate composed mainly of amorphous silica formed by adding water glass to the liquid containing uranium and/or thorium, capturing the uranium and/or thorium in the liquid by the precipitate, treating the precipitate with acid to elute the captured uranium and/or thorium, adding ammonia or hydrogen peroxide to an acidic solution containing the eluted uranium and/or thorium to form a precipitate composed of ammonium salt or peroxide of the uranium and/or thorium, and filtering out the ammonium salt or peroxide precipitate. Thus, high purity solid uranium and/or thorium reutilizable for manufacture of nuclear fuel material can be recovered in high yield.
摘要翻译：公开了一种从含有铀和/或钍的液体中回收铀和/或钍的方法，其中包括通过向含有铀和/或钍的液体中加入水玻璃而形成主要由无定形二氧化硅组成的沉淀物，捕获铀和 /或通过沉淀物处理液体中的钍，用酸处理沉淀物以洗脱捕获的铀和/或钍，向含有洗脱的铀和/或钍的酸性溶液中加入氨或过氧化氢以形成由铵盐或铀和/或钍的过氧化物，并过滤出铵盐或过氧化物沉淀物。因此，可以以高产率回收用于制造核燃料材料的高纯度固体铀和/或钍。

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