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    • 24. 发明公开
    • LENGTH MEASURING INSTRUMENT
    • 长度测量仪
    • EP1016849A4
    • 2000-10-04
    • EP97932993
    • 1997-07-23
    • MITSUBISHI ELECTRIC CORP
    • SAKUMA HIROKAZUOKAMURO TAKASHISATO YOSHIMITSUNAKASHIMA TOSHIRONAKAJIMA HAJIME
    • G01B9/02G01B11/00
    • G01B9/0207G01B9/02002G01B2290/45
    • A length measuring instrument is provided with a light emitting section which emits a laser beam having a frequency f, an interference system which generates and emits a reference beam having a frequency f+f1 in a straight line and a detection beam having a frequency f+f2 at a prescribed inclination angle upon receiving the laser beam, a movement detecting section which reflects the reference and detection beams toward the interference system, a light receiving section which converts a reference interference wave generated by the interference system into a first sine-wave electric signal and a detection interference wave produced by the difference in optical path length between the reflected reference and detection beams into a second sine-wave electric signal, a signal processing section which respectively generates first and second cosine-wave signals from the first and second sine-wave signals and A/D-converts the four signals, and an arithmetic section which finds the electrical angle of the reference interference wave, the electrical angle of the detection interference wave and the phase difference between the reference and detection interference waves from the two electrical angles, and determines the position of the moving detecting section based on the phase difference and the wavelength of the laser beam.
    • 25. 发明专利
    • DE112006002928T5
    • 2008-10-09
    • DE112006002928
    • 2006-11-09
    • MITSUBISHI ELECTRIC CORP
    • SUGIE HIROSHISAKUMA HIROKAZUOKAMURO TAKASHI
    • G01D5/244
    • A position detection error correcting method that corrects position detection errors using a limited storage capacity, by calculating position detection error correction values by four simple arithmetic operations at startup to reduce a startup time delay and consumption of a storage capacity even when a portion containing steep error variations exists. Detection error correction values of a position detector are expressed by a correction function using a periodic function, and correction parameters of the correction values are stored in advance in a non-volatile memory. At startup, these correction parameters are read out, and a position detection error correction value corresponding to each detected position is calculated and stored in a random access memory. The output position detection error correction value detector corresponding to each detected position is read out from the random access memory and a corrected detected position value corrected for the detected position value error is calculated.